Practical Exam Report Template Gas Delivery
Tasks to Perform to Discover Gas Delivery Problems:
1)
2)
3)
4)
5)
6)
7)
Ensure there are no more problems with the vacuum system.
Flow 20sccm of Gas2 into process chamber. Observe MFC2 flow rate.
If you already see a problem, start trouble-shooting now. Otherwise continue.
Flow 20sccm of Gas4 into process chamber. Observe MFC4 flow rate.
If you already see a problem, start trouble-shooting now. Otherwise continue.
Perform ROR measurement while flowing 20sccm of Gas2 into process chamber.
Turn off Gas2 flow. Perform ROR measurement while flowing 20sccm of Gas4 into process
chamber.
8) Compare the two ROR values. The two should not be too different. Otherwise there is a problem.
Note: In gas delivery trouble-shooting, please use non-destructive tests (tests that do not require taking the
gas lines apart) to isolate the problem as much as possible before taking apart the gas lines. If there are
still more non-destructive tests possible before you take apart the lines, then your grade will not be as
high.
Problem statement:
1st round isolation: 1. Block diagram:
2. Record down a table that describes whether and how each subsystem can produce the problem.
Subsystems
Can
produce
the
problem?
If it can, describe how it can affect the problem; if it can not, describe why it
can not produce the problem.
3. Describe the tests you performed to isolate the problem from the whole system down to a specific
subsystem using the following format. Also record down the order in which you performed the test.
Step#
Test description
Test Result
Test conclusion
1
4. Conclusion:
Detailed test description table:
Description of test and interpretation of test table: For each test, describe the test, list all possible
outcomes of the test. Then describe what conclusion you should draw if the result of the test turns to
be each of the possible outcomes. (For example, I want to see if I can drive through an intersection or
not, my test maybe: look at the color of the traffic light. Possible outcomes of the test: 1. Red-conclusion stop. 2. Yellow: conclusion—stop 3. Green: drive through the intersection.
Write your answer in the following format:
Test
Outcome
Conclusion
Inspect the color of traffic
light
Red
Stop
Yellow
Stop
Green
Go
Test Prioritization Table: Pneumatic example
Subsystems
Probability of
the cause
Ease of
implementation
Dependency of the test
Priority
Hi
Easy
None
2
low
intermediate
None
4
intermediate
Easy
None
1
Hi
Easy
Negative result depends on
1 and 4
3