DELFT UNIVERSITY OF TECHNOLOGY
Department of Precision and Microsystems Engineering
07 February 2016
To:
the staff of PME
the students of PME
Subject:
PME-Final Presentation MSc Project
We are pleased to invite you to attend the PME- Final Presentation MSc Project at:
Thursday 28 November 2013
Lecture-room Daniel Bernoulli (C)
Mekelweg 2
2628 CD DELFT
12.45 hrs
W.S. Krul, specialisation: Mechatronic System Design
Title:
Towards an Auto-alignment Procedure for a Parabolic Mirror in a Combined
Electron/light Microscope
In the near future, optical communication is expected to play a major role within integrated circuits. To
attain this goal, however, much research is needed on the interaction of light and materials at the
nanoscale. To aid in this research, a new instrument was recently developed at the FOM institute for Atomic
and Molecular Physics (AMOLF) in the Netherlands. In this instrument, called the SPARC, a scanning
electron microscope’s electron beam is used to stationarily irradiate a cathodoluminescent specimen, which
in response emits photons. The local light emission is reflected by an off-axis parabolic mirror to a camera,
which allows the study of the light emission pattern and its spectra.
For the SPARC to work correctly, the mirror must be correctly aligned with respect to the electron beam and
the sample. Unfortunately, the mirror alignment process is very difficult and user-unfriendly. For instance, it
takes an experienced operator up to 1 hour to align the mirror properly in the 5 required degrees of
freedom. Thus, there is a clear need for an automatic procedure to align the mirror.
In this presentation the development of one such procedure, which employs image modeling and analysis
techniques, together with an optimization algorithm, is presented.
The presentation will be given in English.
13.10 hrs
Debate
13.30 hrs
End
Attending colloquia is an obligatory part of the curriculum of PME.
The presence of other people who are interested will be appreciated.