Übung 1
1. What is an excellent surface nano-patterning technique? What kind of techniques for surface
nano-patterning do you know? What are their advantages and disadvantages? Do you know any
technique that was not presented in class?
2. Lithography is a technique to fabricate highly ordered structures. It is widely used in the
fabrication process of electrical circuits on Si-wavers. Please describe the basic ideas and the
essential lithography steps. (Vortrag von einem Studenten)
3. What are AAO templates and how are they fabricated? You can find information in the following
papers [1,2].
4. We have discussed several surface and high aspect ratio techniques to fabricate different kind of
structures and materials. The image below shows a sketch of the fabrication process of a MIM
(metal-insulator-metal) capacitor on a glass substrate. Think about suitable materials for the
metal (red) and insulator (green) layer. What are the requirements for the materials? Which
fabrication technique is suitable to fabricate the structure and material shown in each step?
The formation of AAO (anodic aluminum membrane) pores is a self-ordering mechanism. Lecture
1 contains several images of AAOs. You can find more information in the following papers [1,2].
Other common names of AAO are UTAM (ultra thin alumina mask), PAM (porous alumina
membrane).
[1]
[2]
H. Masuda, K. Fukuda, Ordered Metal Nanohole Arrays Made By A 2-Step Replication Of
Honeycomb Structures Of Anodic Alumina., Science, 1995, 268, 1466-1468.
Y. Lei, W. P. Cai, G. Wilde, Highly ordered nanostructures with tunable size, shape and
properties: A new way to surface nano-patterning using ultra-thin alumina masks., Progress In
Materials Science, 2007, 52, 465-539.
5. What are the advantages and disadvantages of CVD technique?
6. Name two ways to grow Si nanowires using CVD and explain the differences.
7. There are quite a few different types of CVD. Can you give the examples of using some of these types
to synthesize nano-materials?
8. Which method is better to grow CdS nanowires, PVD or CVD? Why?
9. How to calculate the thickness measurement with an oscillating crystal?
If f0=6 MHz, pq=2.65 g cm-3, pAu=19.32 g cm-3, please calculate the frequency constant N according to the
below figure.
Frequency shift for different materials
10. What’s ALD? How does it work?
11. What factors can affect ALD growth? How do they affect the growth?