Standard Operating Procedures
Laboratory Specific
Chemical: Nitrogen trifluoride
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Laboratory Safety Manual and Chemical Hygiene Plan.
Refer to instructions for assistance.
_____________________________________________________________________________
Department:________________________
Date when SOP was written:_______
Date when SOP was approved by the lab supervisor: ___________________
Principal Investigator:___________________________________________________
Internal Laboratory Safety Coordinator/Lab Manager:___________________________________
Laboratory Phone:____________________ Office Phone:_____________________
Emergency Contact:____________________________________________________
(Name and Phone Number)
Location(s) covered by this SOP:__________________________________________
(Building/Room Number)
_____________________________________________________________________________
Type of SOP:
Process
Hazardous Chemical
Hazardous Class
Purpose
Material is highly volatile and may quickly form a concentrated atmosphere in confined or
unventilated areas. Vapor is heavier than air and may displace and replace air in breathing zone,
acting as a simple asphyxiant. It also works as an oxidizer for high-energy fuels and in chemical
synthesis. Nitrogen trifluoride is mainly employed in the cleaning of the PECVD chambers in the
high volume production of liquid crystal displays and silicon-based thin film solar cells. In these
applications NF3 is initially broken down in situ, by a plasma, and the resulting fluorine atoms are
used as the active cleaning agents that attack the polysilicon, silicon nitride and silicon oxide.
Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD.
Recently, elemental fluorine has been introduced as an environmentally friendly replacement for
nitrogen trifluoride in state-of-the-art high volume manufacturing of flat panel displays and solar
cell manufacturing.
Erroneously NF3 has been considered as an environmentally preferable substitute for
perfluorocarbons such as hexafluoroethane and sulfur hexafluoride. The process utilization of the
chemicals applied in plasma processes is typically below 20 %. Therefore, some of the PFCs and
also of the NF3 always escape into the atmosphere.
Physical & Chemical Properties/Definition of Chemical Group
CAS#:
7783-54-2
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Class:
Strong oxidizer, toxic, contact with combustible material may cause fire,
harmful by inhalation, irritating to eyes, risk of explosion if heated under
confinement
Molecular formula:
NF3
Appearance:
Colorless gas
Boiling Point:
-200°F
Melting Point:
-340°F
Odor:
Odorless
Vapor pressure:
>1 atm
Potential Hazards/Toxicity

Note: Nitrogen trifluoride has the potential to hydrolyze to nitrosyl fluoride and ultimately
hydrofluoric acid (HF). Please consult the hydrofluoric acid SOP for information regarding
the hazards of HF.

Ingestion: Not normally a hazard due to physical form of product. Considered an unlikely
route of entry in commercial/industrial environments. See above note regarding potential
for hydrofluoric acid production.

Eye: Not considered to be a risk because of the extreme volatility of the gas. This
material can cause eye irritation and damage in some persons but toxic effects from
inhalation of nitrogen trifluoride will occur before eye effects. See above note regarding
potential for hydrofluoric acid production.

Skin: There is some evidence to suggest that this material can cause inflammation of the
skin on contact in some persons. See above note regarding potential for hydrofluoric acid
production.

Inhalation: Inhalation of vapors may cause drowsiness and dizziness, accompanied by
narcosis, reduced alertness, loss of reflexes, lack of coordination and vertigo. There is
some evidence to suggest that the material can cause respiratory irritation in some
persons. The body's response to such irritation can cause further lung damage. The odor
of nitrogen trifluoride will not provide sufficient warning of exposure and potentially
dangerous amounts may be inhaled before an odor is detected. Material is highly volatile
and may quickly form a concentrated atmosphere in confined or unventilated areas.
Vapor is heavier than air and may displace and replace air in breathing zone, acting as a
simple asphyxiant which can cause headache, dizziness, shortness of breath, muscular
weakness, drowsiness and ringing in the ears. If the asphyxia is allowed to progress,
there may be nausea and vomiting, further physical weakness and unconsciousness and,
finally, convulsions, coma and death.
Acute effects of fluoride inhalation include irritation of nose and throat, coughing and
chest discomfort. A single acute over-exposure may even cause nose bleed. Acute
inhalation exposures to hydrogen fluoride (hydrofluoric acid) vapors produce severe eye,
nose, and throat irritation; delayed fever, cyanosis, and pulmonary edema; and may
cause death.
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See above note regarding potential for hydrofluoric acid production. Even fairly low
airborne concentrations of hydrogen fluoride produce rapid onset of eye, nose, and throat
irritation.

Chronic health effects: Repeated exposure to nitrogen trifluoride may adversely affect the
liver and kidneys. Irritation of airways to lung, with cough, and inflammation of lung tissue
often occurs. Extended exposure to inorganic fluorides causes fluorosis, which includes
signs of joint pain and stiffness, tooth discoloration, nausea and vomiting, loss of
appetite, diarrhea or constipation, weight loss, anemia, weakness and general
unwellness. There may also be frequent urination and thirst.
Personal Protective Equipment (PPE)

Respirator: Type ABEG-P Filter of sufficient capacity, if needed. (AS/NZS 1716 & 1715,
EN 143:2000 & 149:2001, ANSI Z88 or national equivalent)

Eye: Safety glasses with side shields or chemical goggles are recommended.

Hands: When handling sealed and suitably insulated cylinders wear cloth or leather
gloves.

Other: Lab coat. Plastic personal protective equipment (PPE) (e.g. gloves, aprons,
overshoes) are not recommended as they may produce static electricity. For large scale
or continuous use tight-weave non-static clothing (no metallic fasteners, cuffs or pockets)
and non-sparking safety footwear is recommended.
Engineering Controls

Areas where cylinders are stored require good ventilation and, if enclosed, need discrete/
controlled exhaust ventilation.

Secondary containment and exhaust gas treatment may be required by certain
jurisdictions.
First Aid Procedures

Ingestion: Not considered a normal route of entry.

Eye: If product comes in contact with eyes remove the patient from gas source or
contaminated area. Take the patient to the nearest eye wash, shower or other source of
clean water.

Skin: Immediately remove all contaminated clothing, including footwear. Flush skin and
hair with running water (and soap if available).

Inhalation: Following exposure to gas, remove the patient from the gas source or
contaminated area. NOTE: Personal Protective Equipment (PPE), including positive
pressure self-contained breathing apparatus may be required to assure the safety of the
rescuer.

Notes to physician: Establish a patent airway with suction where necessary. Watch for
signs of respiratory insufficiency and assist ventilation as necessary.
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Special Handling and Storage Requirements

Procedure for handling: Consider use in closed pressurized systems, fitted with
temperature, pressure and safety relief valves which are vented for safe dispersal. Check
regularly for spills or leaks. Keep valves tightly closed but do not apply extra leverage to
hand wheels or cylinder keys.DO NOT transfer gas from one cylinder to another.

Recommended storage methods: Most metals are satisfactory for handling nitrogen
trifluoride up to temperatures of approximately 70 ºC. Nickel and Monel are
recommended for higher temperatures. Wetted surfaces should be passivated with an
"active" fluorine compound to establish a metal fluoride coating as additional protection.
Teflon and Kel-F are preferred gasket materials. Keep equipment scrupulously dry. Many
of the metal fluorides are water soluble so that the passive film corrosion protection may
be destroyed if wetted with water. Ensure the use of equipment rated for cylinder
pressure.

Storage requirements: Cylinders should be stored in a purpose-built compound with good
ventilation, preferably in the open. Such compounds should be sited and built in
accordance with statutory requirements.
Spill and Accident Procedure
Chemical Leak Dial 911 and x59797
Spill – Help contaminated or injured persons. Evacuate the leak area. Avoid breathing vapors
utilizing a self-contained breathing apparatus. Eliminate sources of ignition if the chemical is
flammable. Provide ventilation. Prevent spreading of vapors through sewers, ventilation systems
and confined areas. Evacuate unnecessary personnel. Keep others from entering contaminated
area (e.g., use caution tape, barriers, etc.)
Small leak – Avoid breathing vapor and any contact with liquid or gas. Protective equipment
including respirator should be used to evacuate. DO NOT enter confined spaces were gas may
have accumulated.
Large leak – Dial 911 (or 310-825-1491 from cell phone) and EH&S at x59797 for assistance.
Chemical Spill on Body or Clothes – Unlikely to occur due to the nature of the chemical. If the
compound is allowed to hydrolyze hydrofluoric acid may be formed. If exposed to hydrofluoric
acid remove clothing and rinse body thoroughly in emergency shower for at least 15 minutes.
After shower apply/massage calcium gluconate gel to affected area every 15 minutes and seek
medical attention immediately. Seek medical attention. Notify supervisor and EH&S at x59797
immediately.
Chemical Splash Into Eyes – Immediately rinse eyeball and inner surface of eyelid with water
for 15 minutes by forcibly holding the eye open. Seek medical attention. Notify supervisor and
EH&S at x59797 immediately.
Medical Emergency Dial 911 or x52111
Life Threatening Emergency, After Hours, Weekends And Holidays – Dial 911 (or 310-8251491 from cell phone) or contact the Ronald Reagan UCLA Medical Center (emergency room)
directly at x52111 (located at 757 Westwood Plaza, enter from Gayley Avenue). Note: All serious
injuries must be reported to EH&S at x59797 within 8 hours.
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Non-Life Threatening Emergency– Go to the Occupational Health Facility (OHF), x56771,
CHS room 67-120 (This is on the 6th floor, 7th corridor, room 120. Enter through the School of
Dentistry on Tiverton Drive and proceed to the “O” elevator to the 6th floor.)Hours: M - F, 7:30
a.m. to 4:30 p.m. At all other times report to Ronald Regan UCLA Medical Center (emergency
room) at x52111. Note: All serious injuries must be reported to EH&S at x59797 within 8 hours.
Needle stick/puncture exposure (as applicable to chemical handling procedure)– Wash the
affected area with antiseptic soap and warm water for 15 minutes. For mucous membrane
exposure, flush the affected area for 15 minutes using an eyewash station. Page the needle stick
nurse by dialing 231 from a campus phone, enter 93333 when prompted and then enter your
extension. Hours: M – F, 8:00 a.m. to 4:00 p.m. At all other times report to Ronald Regan UCLA
Medical Center (emergency room) at x52111. Note: All needle stick/puncture exposures must be
reported to EH&S at x59797 within 8 hours.
Decontamination/Waste Disposal Procedure
All waste must be handled in accordance with local, state and federal regulations. Return empty
containers to supplier.
Material Safety Data Sheet (MSDS) Location
(State the location of MSDS)
Hardcopy or electronic copy must be available.
Online MSDS can be accessed at http://msds.ehs.ucla.edu.
Protocol/Procedure
(Add specific description of procedure.)
Note: Any deviation from this SOP requires written approval from PI.
Documentation of Training (signature of all users is required)
I have read and understand the content of this SOP:
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Signature
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Date