UCSF Lab Standard Operating Procedure
Chemical Process, Name or Hazard Class:
Nitrogen Trifluoride
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Hazardous Chemical
Hazardous Class
Purpose
Material is highly volatile and may quickly form a concentrated atmosphere in confined or unventilated areas.
Vapor is heavier than air and may displace and replace air in breathing zone, acting as a simple asphyxiant. It
also works as an oxidizer for high-energy fuels and in chemical synthesis. Nitrogen trifluoride is mainly
employed in the cleaning of the PECVD chambers in the high volume production of liquid crystal displays and
silicon-based thin film solar cells. In these applications NF 3 is initially broken down in situ, by a plasma, and
the resulting fluorine atoms are used as the active cleaning agents that attack the polysilicon, silicon nitride
and silicon oxide. Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by
CVD. Recently, elemental fluorine has been introduced as an environmentally friendly replacement for
nitrogen trifluoride in state-of-the-art high volume manufacturing of flat panel displays and solar cell
manufacturing.
Erroneously NF3 has been considered as an environmentally preferable substitute for perfluorocarbons such
as hexafluoroethane and sulfur hexafluoride. The process utilization of the chemicals applied in plasma
processes is typically below 20 %. Therefore, some of the PFCs and also of the NF 3 always escape into the
atmosphere.
Physical & Chemical Properties/Definition of Chemical Group
Nitrogen Trifluoride
1
Date: Click here to enter a date.
Modified from SOP templates developed by UCLA EH&S (http://www.sop.ehs.ucla.edu/)
CAS#:
7783-54-2
Class:
Strong oxidizer, toxic, contact with combustible material may cause fire, harmful by
inhalation, irritating to eyes, risk of explosion if heated under confinement
Molecular formula:
NF3
Appearance:
Colorless gas
Boiling Point:
-200°F
Melting Point:
-340°F
Odor:
Odorless
Vapor pressure:
>1 atm
Potential Hazards/Toxicity
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Note: Nitrogen trifluoride has the potential to hydrolyze to nitrosyl fluoride and ultimately
hydrofluoric acid (HF). Please consult the hydrofluoric acid SOP for information regarding the
hazards of HF.
Ingestion: Not normally a hazard due to physical form of product. Considered an unlikely route of
entry in commercial/industrial environments. See above note regarding potential for hydrofluoric
acid production.
Eye: Not considered to be a risk because of the extreme volatility of the gas. This material can cause
eye irritation and damage in some persons but toxic effects from inhalation of nitrogen trifluoride
will occur before eye effects. See above note regarding potential for hydrofluoric acid production.
Skin: There is some evidence to suggest that this material can cause inflammation of the skin on
contact in some persons. See above note regarding potential for hydrofluoric acid production.
Inhalation: Inhalation of vapors may cause drowsiness and dizziness, accompanied by narcosis,
reduced alertness, loss of reflexes, lack of coordination and vertigo. There is some evidence to
suggest that the material can cause respiratory irritation in some persons. The body's response to
such irritation can cause further lung damage. The odor of nitrogen trifluoride will not provide
sufficient warning of exposure and potentially dangerous amounts may be inhaled before an odor is
detected. Material is highly volatile and may quickly form a concentrated atmosphere in confined or
unventilated areas. Vapor is heavier than air and may displace and replace air in breathing zone,
acting as a simple asphyxiant which can cause headache, dizziness, shortness of breath, muscular
weakness, drowsiness and ringing in the ears. If the asphyxia is allowed to progress, there may be
nausea and vomiting, further physical weakness and unconsciousness and, finally, convulsions, coma
and death.
Acute effects of fluoride inhalation include irritation of nose and throat, coughing and chest
discomfort. A single acute over-exposure may even cause nose bleed. Acute inhalation exposures to
hydrogen fluoride (hydrofluoric acid) vapors produce severe eye, nose, and throat irritation; delayed
fever, cyanosis, and pulmonary edema; and may cause death.
Nitrogen Trifluoride
2
Date: Click here to enter a date.
Modified from SOP templates developed by UCLA EH&S (http://www.sop.ehs.ucla.edu/)
See above note regarding potential for hydrofluoric acid production. Even fairly low airborne
concentrations of hydrogen fluoride produce rapid onset of eye, nose, and throat irritation.
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Chronic health effects: Repeated exposure to nitrogen trifluoride may adversely affect the liver and
kidneys. Irritation of airways to lung, with cough, and inflammation of lung tissue often occurs.
Extended exposure to inorganic fluorides causes fluorosis, which includes signs of joint pain and
stiffness, tooth discoloration, nausea and vomiting, loss of appetite, diarrhea or constipation, weight
loss, anemia, weakness and general unwellness. There may also be frequent urination and thirst.
Engineering Controls
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Areas where cylinders are stored require good ventilation and, if enclosed, need discrete/ controlled
exhaust ventilation.
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Secondary containment and exhaust gas treatment may be required by certain jurisdictions.
Personal Protective Equipment (PPE)
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Respirator: If lab personnel would like to use respirator on a voluntary basis, they must be trained
and fit-tested by EH&S. This is a regulatory requirement. (http://or.ucsf.edu/ehs/8193DSY/version/default/part/4/data/)
Eye: Safety glasses with side shields or chemical goggles are recommended.
Hands: When handling sealed and suitably insulated cylinders wear cloth or leather gloves.
Other: Lab coat. Plastic personal protective equipment (PPE) (e.g. gloves, aprons, overshoes) are not
recommended as they may produce static electricity. For large scale or continuous use tight-weave
non-static clothing (no metallic fasteners, cuffs or pockets) and non-sparking safety footwear is
recommended.
First Aid Procedures
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Ingestion: Not considered a normal route of entry.
Eye: If product comes in contact with eyes remove the patient from gas source or contaminated area.
Take the patient to the nearest eye wash, shower or other source of clean water.
 Skin: Immediately remove all contaminated clothing, including footwear. Flush skin and hair with
running water (and soap if available).
 Inhalation: Following exposure to gas, remove the patient from the gas source or contaminated area.
NOTE: Personal Protective Equipment (PPE), including positive pressure self-contained breathing
apparatus may be required to assure the safety of the rescuer.
 Notes to physician: Establish a patent airway with suction where necessary. Watch for signs of
respiratory insufficiency and assist ventilation as necessary.
Special Handling and Storage Requirements
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Procedure for handling: Consider use in closed pressurized systems, fitted with temperature,
pressure and safety relief valves which are vented for safe dispersal. Check regularly for spills or
leaks. Keep valves tightly closed but do not apply extra leverage to hand wheels or cylinder keys.DO
NOT transfer gas from one cylinder to another.
Recommended storage methods: Most metals are satisfactory for handling nitrogen trifluoride up to
temperatures of approximately 70 ºC. Nickel and Monel are recommended for higher temperatures.
Nitrogen Trifluoride
3
Date: Click here to enter a date.
Modified from SOP templates developed by UCLA EH&S (http://www.sop.ehs.ucla.edu/)
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Wetted surfaces should be passivated with an "active" fluorine compound to establish a metal
fluoride coating as additional protection. Teflon and Kel-F are preferred gasket materials. Keep
equipment scrupulously dry. Many of the metal fluorides are water soluble so that the passive film
corrosion protection may be destroyed if wetted with water. Ensure the use of equipment rated for
cylinder pressure.
Storage requirements: Cylinders should be stored in a purpose-built compound with good ventilation,
preferably in the open. Such compounds should be sited and built in accordance with statutory
requirements.
Spill and Accident Procedure
Chemical Spill Dial 9-911 from campus phone or 415-476-1414 from cell phone or 415-2068522 (SFGH only)
Spill – Assess the extent of danger. Assist contaminated or injured persons. Evacuate the spill area.
Avoid breathing vapors. If possible, confine the spill to a small area using a spill kit or absorbent
material. Keep others from entering contaminated area (e.g., use caution tape, barriers, etc.).
Small (<1 L) – If you have training, you may assist in the clean-up effort. Use appropriate personal
protective equipment and clean-up material for chemical spilled. Double bag spill waste in clear
plastic bags, label and take to the next chemical waste pick-up.
Large (>1 L) – Dial 9-911 from campus phone or 415-476-1414 from cell phone or 415-2068522 (SFGH only) for assistance.
Chemical Spill on Body or Clothes – Remove clothing and rinse body thoroughly in emergency
shower for at least 15 minutes. If discomfort persists, proceed to the Emergency Department. If no
further discomfort is experienced, have the SDS ready and contact Poison Control Hotline at 1-800222-1222 for further exposure information. Notify your direct supervisor and EH&S at 415-4761300 during work hours, or 9-911 during non-working hours and weekends.
Chemical Splash Into Eyes – Immediately rinse eyeball and inner surface of eyelid with water for
15 minutes by forcibly holding the eye open. If discomfort persists, proceed to the Emergency
Department. If no further discomfort is experienced, have the SDS ready and contact Poison
Control Hotline at 1-800-222-1222 for further exposure information. Notify your direct
supervisor and EH&S at 415-476-1300 during work hours, or 9-911 during non-working
hours and weekends.
Medical Emergency Dial 9-911 (campus phone) or 476-6911 (cell phone)
Note: All serious injuries must be reported to EH&S at 415-476-1300 within 8 hours.
Non-Life Threatening Emergency– Go to Occupational Health Programs (OHP) Clinic, 415-8857580, 2330 Post Street, Suite 460 Hours of Operation for Appointments: Monday - Friday
7:30 a.m. - 4:00 p.m. (except Holidays).
Nitrogen Trifluoride
4
Date: Click here to enter a date.
Modified from SOP templates developed by UCLA EH&S (http://www.sop.ehs.ucla.edu/)
Note: All serious injuries must be reported to EH&S at 415-476-1300 within 8 hours.
Needle stick/puncture exposure (as applicable to chemical handling procedure) – Wash the
affected area with antiseptic soap and warm water for 15 minutes. For mucous membrane
exposure, flush the affected area for 15 minutes using an eyewash station. Page the needle stick
nurse by dialing 415-353-7842 (STIC).
Decontamination/Waste Disposal Procedure
Clean contaminated surfaces with soap and water and paper towels. Dispose of the paper towels as
hazardous waste.
Safety Data Sheet (SDS) Location
Online SDS can be accessed at http://or.ucsf.edu/ehs/7241-DSY/msds.html
Protocol/Procedure
Quantities covered by this SOP:
______ (g , ml) to _______ (g, ml)
Temperature range covered by this SOP:
__ °C – __ °C
General Overview and Purpose:
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Procedure:
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NOTE
Any deviation from this SOP requires approval from the Principal Investigator.
Nitrogen Trifluoride
5
Date: Click here to enter a date.
Modified from SOP templates developed by UCLA EH&S (http://www.sop.ehs.ucla.edu/)