Department of Atomic Physics, Budapest University of Technology and Economics The Department of Atomic Physics at the Budapest University of Technology and Economics (BUTE) is one of the leading laboratories in Hungary in surface and thin film research. It is equipped for laterally resolved and in-depth chemical analysis of surfaces, coatings and thin films in a complex analytical equipment. Changes in elemental composition can be followed by SIMS with a sensitivity better than 0.0001at% (on both conducting and insulating surfaces). Quantitative determination of the concentration of various compounds can be determined by XPS with a sensitivity of 0.1at% and lateral changes along the surface by SAM with a resolution of 5µm. XPS also gives information on the chemical bonding states. Depth profiling is possible via ion sputtering. The size of the samples to be studied has to be at least 1x1 cm for the SIMS and XPS methods. One of the major research effort is directed toward gas sensors - in the framework of an almost 20 years cooperation with Siemens and as a member EU projects consortium (SAGAS, Clear-Up) - with the aim of improving the stability, sensitivity and selectivity of semiconducting metal oxide based sensors, by on-line measurement of various electrical responses (resistance, work function) of the sensors at low and high temperatures. For this purpose we have a multichannel gas mixing system and high purity gases. Combined with surface analytical investigations after long term tests in corrosive gases, stability against corrosion could be established. Experience has been gained about diffusion profiles between substrate and sensor layers. Work has been done on the application of corrosion resistive protective and active catalytic overlayers on such sensors. The sensors were studied also by impedance spectroscopy and their work function changes were measured by Kelvin probe. Additional expertise covers the fields of hydrogen storage in metals and alloys together with the effect of surface impurities on the absorption process, thermodynamic description of segregation effects, as well as the development of hardware and software for mass spectrometric analyzer systems (RGA, GCMS, SIMS) and ion trap applications. The staff of the laboratory is composed of physicists, chemists and electrical engineers. This staff is very flexible, practice and technology orientated, they are specialised in solving interdisciplinary problems with large freedom and individual creativity. CONTACT: Dr. Ferenc Réti freti@eik.bme.hu 00 36 1 463 42 08