VI Int. Workshop on Microwave Discharges: Fundamentals and Applications
September 11-15, 2006, Zvenigorod, RUSSIA
EXPERIMENTAL CONSIDERATION ON HIGH-ENERGY ELECTRON
BEAM IN SURFACE WAVE DISCHARGES FROM MAGNETIC FIELD
MEASUREMENT
M. Siry, Y. Ohno*, J. Husarik and M. Kando
Graduate School of Electronic Science and Technology, Shizuoka University,
Hamamatsu, Japan
*
Graduate School of Science and Engineering, Shizuoka University, Hamamatsu,
Japan
In recent years, so-called large-area surface wave plasma sources operating without presence of
static magnetic field are attractive for industrial applications. At low gas pressure, where the
electron-neutral collision frequency is lower than the applied field frequency, the enhanced electric
field is produced near the resonant layer, where the local plasma density equals the applied field
frequency. The resonance electrons are accelerated by strong electric field, which results in
generation of hot-electrons. Production of high energy electrons has been proposed theoretically by
Aliev et al. [1]. The experimental measurements performed in our previous works [2], [3] suggest
high electron beam energy of 60 eV. The energy was estimated from difference in probe
characteristics obtained by one-side shielded Langmuir probe.
We studied the radial and axial structure of high electron beam generated in low-pressure argon
discharges sustained by the 2.45 GHz microwave. Using measured parameters such as high electron
current density, its radial and axial profile we calculated the magnetic field axial profile. The
current conservation law has been taken into account in our calculations. Comparison of measured
magnetic field axial profile with calculated one provides information about the high electron beam.
Coincidence of both axial profiles can be considered as independent verification of high electron
beam existence.
References
1. Y. M. Aliev, V. Y. Bychenkov, A. Maximov and H. Schlüter, Plasma Sources Sci. Technol.,
1992, 1, 126.
2. T. Terebessy et al. , Appl. Phys. Lett., 2003, 82, 694.
3. T. Terebessy, M. Kando, and J. Kudela, Appl. Phys. Lett., 2000, 77, 2825.