GE
Measurement & Control
Högupplöst Röntgen-tomografi för
materialforskning, felsökning och
metrologi (mätteknik)
William Gren
Sales Manager
GE Inspection Technologies
2009
GE: A company with global reach
• 130+ years
• > 300,000 employees
• 2011 $147B Rev
• 160 countries
• 4 Business Segments:
• Energy
• Healthcare
• Capital
• Technology Enterprises
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GE: Main business segments
Energy
Healthcare
•Oil & Gas
Measurement & Control
• Power & Water
•Inspection Technologies
• Energy
Management
• Bently Nevada
Capital
Technology Enterprises
• Radiography
(CR/DR, X-Ray, CT)
• Ultrasonic
• Control Solutions
• Eddy current
• Flow & Process Technologies
• Remote Visual
• Measuring & Sensing
• Software
• Wayne
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The Radiography Product Range
2010
Film & Equipment
• Complete range of
Agfa X-ray films
• State-of-the-art
processing equipment
• Film Scanning
3D CT
• 3D industrial failure
analysis with CT
• 3D CT systems for
materi-als research, bioand geosciences
Digital Radiography
X-ray Sources
• Computed Radiography
• Reusable Phosphor plates
• Digital Detector Arrays
• Image processing and
storage software
• Portable and mobile
X-ray systems
• Stationary systems
• Micro- and nanofocus
tubes and generators
3D Metrology
• Reproducible 3D
coordinate measurement
with X-ray CT
• Fully automated CT data
acquisition and volume
processing
Electronics Inspection
• 2D micro- and nano-
focus X-ray
• Software for high resolution electronics inspection
• CAD-based programming
2D Systems
• Stationary manual and
automated digital X-ray
inspection systems
• Fully automated defect
recognition software
X-ray Diffraction
• Quantitative and qualitative
phase analysis, structure
and tension measurement
• Single crystal materials
orientation analysis
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Product line phoenix|x-ray
• A leading manufacturer of high-resolution 2D X-ray
inspection and 3D computed tomography systems
for non-destructive testing and 3D metrology
• Founded 1999 in Wunstorf / Germany
• 2007 acquired by GE Sensing & Inspection Technologies
• More than 1800 installations
• Development and production
in Germany
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Högupplöst datortomografi
• Oförstörande defektanalys för
kvalitetssäkring och produktionskontroll i 3D
 Exakt kvantitativ analys av position,
storlek och frekvens av defekter
 Multi-positionella 2D tvärsnittsplan eller
3D-volym
• Brett utbud av nanoCT® för
materialvetenskapliga
applikationer
 180 kV hög effekt nanofocus
röntgenteknik
•
phoenix v|tome|x s / m / L
• phoenix nanotom s / m
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3D Metrologi med CT
• CT = precision jämförbar med
koordinatmätmaskiner (CMM)
– “Reverse Engineering”
– Nominell / verklig jämförelse
– Dimensionell mätning
(t.ex. invändig väggtjocklek, avstånd, hål,
fasningar, vinklar osv)
– Automatiserad processning av CT,
rekonstruktion, analys och generering av
inspektionsrapport inom en timme
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X-ray Electronics Inspection
• Leading edge 180 kV micro- and
nanofocus X-ray tube technology
• Live imaging with GE´s unique DXR
digital detector technology
• Efficient CAD programming with
minimized setup time
• Easy and fully automated X-ray
inspection of PCB assemblies
• Live 3D CAD data and inspection
result overlay in the X-ray live image
• Extremely high defect coverage with
high magnification and repeatability
•
phoenix inspector • phoenix x|aminer • phoenix microme|x • phoenix nanome|x
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GE Measurement & Control
CT basics
The X-ray shadow microscope
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X-ray tubes
Directional - Transmission
Transmission Target
higher magnification
Directional Target
higher power
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X-ray tubes
Microfocus vs. nanofocus ®
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Resolution
Focal Spot size influence:
Ø 2.5 µm
2 µm
bars
Ø 1.5 µm
2 µm
bars
Ø 0.8 µm
0.6 µm bars
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Principle of computed tomography
Acquisition: cone beam
of 2D projections under
step-by-step
rotation
steps< 1°
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Principle of computed tomography
Acquisition: fan beam
of line projections
under step-by-step
Rotation and shift
steps< 1°
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Principle of Operation: CT resolution
Three
contributions from
apparatus:
• voxel size V=P/M
• focal spot size F
• mechanics
M=FDD/FOD
The focal spot size F is the ultimate limit of resolution.
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500 nm voxel size in both scans.
nanoCT ®
microCT
20 µm
microfocus CT
20 µm
Vs.
nanofocus CT
Image resolution:
nanoCT: < 1 µm
microCT: ~ 4 µm
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High-resolution flatpanel detector
DXR250RT-E
• active area 20 cm x 20 cm (8“ x 8“)
• 1 MP (1024 x 1024 pixel)
• good resolution (200 µm pitch)
• up to 30 fps (full resolution!)
• temperature stabilised
• CsI scintillator, high DQE (85%)
• according to new USASTM E2597-07 standard
• v|tome|x s,m: 2 x detector shift (2000 pixel detector width)
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Detectors
Digital flat panel detector
Scintillator på GE: s detektorer är
tillverkad av Cesiumiodide (CsI)
som ​växer i nål-liknande struktur
på ”amorphous silicon plate”
(array). Dessa ”nålar” styr ljuset
och minskar spridningen.
Optical Reflector
Scintillator
a-Si Array
graphite cover
epoxy
seal
glass substrate
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GE Measurement & Control
CT system overview
X-ray CT systems phoenix|x-ray product line
v|tome|x s
nanome|x CT
nanotom m
nanotom s
v|tome|x m 300
v|tome|x L 300
v|tome|x L 450
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phoenix nanotom s
Ultra-high resolution nanoCT system
• 180 kV / 15 W high power
nanofocus tube
• voxel size down to 0.5 µm
• flat panel with 2300 x 2300 px,
50 µm pixel size
• three-fold detector shift
• max. sample size 120 x 150 mm
• sample weight up to 2kg
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phoenix nanotom m
Ultra-high resolution nanoCT system
• 180 kV / 15 W high power
nanofocus tube
• voxel size down to 0.3 µm
• DXR flat panel with 3000 x 2400 pixel,
100 µm pixel size
• 1.5-fold detector shift
• max. sample size 250 x 240 mm
• sample weight up to 3 kg
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phoenix v|tome|x s 240
Compact X-ray system for high resolution CT and 2D inspection
• 240 kV / 320 W microfocus tube
• opt. additional 180 kV nanofocus tube
• 5-axis manipulation system
• DXR250RT flat panel, 1024 x 1024 pixel,
200 µm pixel size, up to 30 fps
• two-fold detector shift
• max. sample size: 300 mm x 400 mm
• max. 3D scan size: 260 mm x 400 mm
• 10 kg max. sample weight
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phoenix v|tome|x m 300
Most compact 300 kV microfocus CT system
• 300 kV / 500 W microfocus tube
• opt. additional 180 kV nanofocus tube
• granite-based setup
• 5 (6)-axis manipulation system
• DXR250RT flat panel, 1 MP, 200 µm,30 fps
• two-fold detector shift
• max. sample size: 600 mm x 600 mm
• max. 3D scan size: 300 mm x 500 mm
• 50 kg max. sample weight
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phoenix v|tome|x L 300
300 kV CT system with walk-in cabinet
• 300 kV / 500 W microfocus tube
• opt. additional 180 kV nanofocus tube
• granite-based setup
• 6 (8)-axis manipulation system
• DXR250 flat panel, 4 MP, 200 µm px
• two-fold detector shift
• max. 3D scan size: 500 mm x 600 mm
• 75 kg max. sample weight
• optional LDA or MLD
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Additional features
• Collision protection (X-ray tubes, detector)
• Air conditioning, lighting
• Active anti-vibration system
• Automatic sliding door
• Video monitoring
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phoenix v|tome|x L 450
very large scale versatile CT system
• 300 kV / 500 W microfocus tube
• opt. additional 450 kV minifocus tube
• granite-based setup
• 6 (8)-axis manipulation system
• DXR250 flat panel, 4 MP, 200 µm px
• three-fold detector shift
• max. 3D scan size: 800 mm x 1000 mm
• 100 kg max. sample weight
• optional LDA or MLD
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Two X-ray tubes!
#1: Microfocus X-ray tube
•
•
•
•
•
Unipolar, open design
Up to 300 kV
Up to 500 W
Focal spot size 3 – 200 µm
Min. FOD < 5 mm
#2: Minifocus X-ray tube
•
•
•
•
•
Bipolar, closed design
Up to 450 kV
Up to 1500 W
Focus 1: 1 mm @ 1500 W
Focus 2: 0.4 mm @ 700 W
(other minifocus X-ray tubes available)
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GE Measurement & Control
CT for material science & failure
analysis
Glas fibre
reinforced
material
2D X-ray
image
Bild fehlt
noch
• 2D: Endast den genomsnittliga tätheten
är synlig
• 2D: Hålrum skulle vara synliga
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Glass fibres
with
particles
Bild fehlt
noch
nanoCT ®
• Orientering och fördelning av 10 µm
tunna fibrer
• Ansamlingar av fyllnadsmaterial
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Latex foam
nanoCT 3D view
Molybdenum
target
Courtesy of
Hutchinson
R&D Centre,
Chalette/F
• Different internal material phases are
visible
• The exterior tube shows fine porosities
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Stiched
CFRP
CT Volume
data
3 µm
voxelsize
RW TH Aachen
Institut für
Textiltechnik
• Diameter, orientation of fibres can be
•
analysed, fiber diameter: 7-14 µm
Orientation of the stitch yarn can be
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Carbon fibre
in polymer
matrix
3D Visualisation
0.5 µm
voxelsize
nanoCT with
Molybdenum
target
0.5 mm
• Carbon fibres and pores in polymer matrix
• Diameter of single fibres ca. 1-5 µm
• Texture of fibres clearly visible
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Carbon fibre
in polymer
matrix
Animated
Volume data
Molybdenum
target
nanoCT
• Carbon fibres and pores in polymer matrix
• Diameter of single fibres ca. 1-5 µm
• Texture of fibres clearly visible
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Hoverfly
35 kV
Molybdenum
target
• 3 µm voxelsize
• even eye facet structures are clearly
visible
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Slice through
the 3D volume
of a shell
limestone
with
microfossils
(Ø 0.7 mm)
Courtesy of
O. Rozenbaum,
ISTO France
Vx = 1.2 µm
1 mm
•
Zoom into a tomographic slice to measure the
wall thickness (~3µm) of a small ammonite
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Virtual flight
through the
3D volume
of a shell
limestone
with
microfossils
(Ø 1.8 mm)
Courtesy of
O. Rozenbaum,
ISTO France
Vx = 1.25 µm
•
Movie: Flying around the sample, slicing and fading out
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BGA/CSP
solder joints
3D movie
•
•
3D: wetting conditions and void positions are
visible, lead phases are visible
Solder joints with 400 µm diameter
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Aluminum
casting
2D X-ray
image
• Detektering av brister, såsom krympning,
sprickor, inneslutningar
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Aluminum
casting
CT volume
• Klassificering av hålrumsstorleken med
färger
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GE Measurement & Control
3D metrology with CT
Metrology
Process flow
1. CT Volume
data
2. Surface
3. CAD Data
4. Alignment
5. Comparison /
Measurements
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Metrology
Process flow
1. CT Volume
data
2. Surface
3. CAD Data
4. Alignment
5. Comparison /
Measurements
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Metrology
Process flow
1. CT Volume
data
2. Surface
3. CAD Data
4. Alignment
5. Comparison /
Measurements
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Metrology
Process flow
1. CT Volume
data
2. Surface
3. CAD Data
4. Alignment
5. Comparison /
Measurements
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Metrology
+300µm above CAD
Process flow
1. CT Volume
data
2. Surface
3. CAD Data
4. Alignment
5. Comparison,
Measurements
-300µm below CAD
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GE Measurement & Control
Snabb portalbaserad
”at-line” och ”in-line” CT
GE speed|scan: portalbaserade CT
för snabb 3D inspektion
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GE speed|scan atlineCT
Overview
Inspection volume: 400mm width x 300mm height
x 800mm length, up to 50kg sample weight
Scan and inspection times: 5-10mm/s
-> 10-90s for typical castings
Detail detectability:  300µm
-> min. detectable defect size: >0.5 mm
Penetration length: up to 300mm Al
-> allows inspection of large light metal castings
GE 3D automatic defect analysis and -classification
Designed for operation in harsh environments (foundries)
Belt conveying system
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Comparison to conventional CT technology
High Resolution CT:
Prototype Scan:
(1)
Cylinder head scan with
voids, several hours
(1)
“Standard” inline Scans:
helical, < 100 seconds
(2)
450kVp, cone beam CT
with digt . Flat panel in
Multiline Mode (8 Rows)
(2)
140kVp, 25mA
(3)
0,6mm voxel size
(3)
Orig. 150µm voxel size
(12GB) here 4x Binning
V|tome|x image data binned to 600µm
Prototype with 600µm voxel size
comparison of spatial resolution
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GE 3D Automatic Defect Detection
Result on a die casting, 5 s defect detection time
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System comparison overview
speed|scan atlineCT
speed|scan inlineCT
Hardware
High-speed gantry-based CT in
industrialised cabinet
High-speed gantry-based CT in
industrialized cabinet designed
for inline, 24/7, unmanned
operation
Software
GE 3D Defected Recognition
System for NDT for assisted defect
Recognition & part classification,
3D Metrology Software
GE 3D fully automated defect
recognition System for NDT, 3D
Metrology Software
Application
Semi-automated NDT and metrology
for statistical production process
control for immediate response and
feedback
Completely automated NDT and
metrology for up to 100%
production process control
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Outlook: GE speed|scan inlineCT setup
3D-ADR Image Processing
Automatic workflow for unmanned
operation
Gantry
X-ray cabinet
Dust protection cover
X-ray sliding gates
Roller conveyor
with lift
Roller conveyor
customer
Belt conveyor
Inspection part
Shock absorber
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