思衛科技
Jetek Technology Corp.
CIS Testing Technology
思衛科技 Jemmy
Mobil Phone:0917866007
E-mail:jemmy_chen@jetek.com.tw
思衛科技
Jetek Technology Corp.
Contents
•
•
•
•
•
Basic Introduction
CIS Function
CIS Test Item
CIS Test System
Production Issue
思衛科技
Jetek Technology Corp.
Basic Introduction
-What is CIS
-CIS Application
-CIS Market
思衛科技
Jetek Technology Corp.
What is CIS
CIS(CMOS Image Sensor)
Digital camera
CIS
CCD
CCD
思衛科技
Jetek Technology Corp.
CIS Application
Note PC
PDA
Mobile Phone
Wristwatch Camera
Digital Camera
In-vehicle Camera
CCD / CMOS Image Sensor
Video Camera
Security Camera
Fingerprint/Pupil
User Authentication
Facsimile/Scanner
Copy
Machine
思衛科技
Jetek Technology Corp.
CIS Market
思衛科技
Jetek Technology Corp.
CIS Market
思衛科技
Jetek Technology Corp.
CIS Function
-System Block
思衛科技
Jetek Technology Corp.
System Block
CMOS
Image Sensor
CDS
ADC
AGC
Video
Encoder
NTSC/PAL
Interface
DVP
(Digital Video Port)
DSP
Timing
Generator
Memory
MIPI
(Mobile Industry
Processor Interface)
思衛科技
Jetek Technology Corp.
Image Sensor Structure
思衛科技
Jetek Technology Corp.
Passive Sensor:
Advantage: Simple circuit(one transistor)
Large sensor area
Disadvantage: Loading is higher  Random noise is big
Active Sensor:
Advantage: Electron convert voltage directly in each pixel
Reduce radon noise
Disadvantage: Small sensor area
Amplifier character is different in each pixel
Fixed pattern noise
思衛科技
Jetek Technology Corp.
Digital Control Logic
•Timing generator
• I2C Interface
 Exposure control
 Frame Rate control
 Gain control
Image size control
 Multi port output
 --------
思衛科技
Jetek Technology Corp.
CDS
CDS(Correlated Double Sampling)

Vin
Delay
T
+
_
Vout
思衛科技
Jetek Technology Corp.
About Multi Port Output :
Clk limit solution for big area sensor
思衛科技
Jetek Technology Corp.
EnCoder
Monochrome:
Sync
1 Hsync
Color:
Chroma
Burst
1 Hsync
思衛科技
Jetek Technology Corp.
DVP Waveform Diagram
FEN: VSync
LEN: HSync
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Jetek Technology Corp.
MIPI Waveform Diagram
思衛科技
Jetek Technology Corp.
 Output Image:
思衛科技
Jetek Technology Corp.
 Output Signal(Internal ADC) :
Response
Pixels
思衛科技
Jetek Technology Corp.
CIS Test Item
•
•
•
•
DC/Function Test
ADC Test
Image Test(Dark,Standard Light,Saturation,Color)
Image Processor Library
思衛科技
Jetek Technology Corp.
CIS Test Item
DC
Test
ADC Test
• Continuity
• Leakage
• Power Consumption
Function
• I2C Write/Read
• DSP Pattern
Test
•
•
•
•
•
Offset
Gain
INL / DNL
THD
S/N
思衛科技
Jetek Technology Corp.
Dark Test
• Dark Mean/Std.
• Dark Row/Column Variation
• Dark uniformity
DSNU(Dark Signal non-uniformity)
• Dark Defect Pixel
• Dark Cluster
• Dark Current
思衛科技
Jetek Technology Corp.
Dark Current
(Dark_level1-dark_level2)/(0.255-0.02)
Dark_level1 : Exposure:255ms
Dark_level2 : Exposure:20ms
Response
20
255
Exposure Time(ms)
思衛科技
Jetek Technology Corp.
Defect Test
• Defect Pixel Test
• Adjacent Defect Pixel Test
Wound Pixel
Dead Pixel
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Jetek Technology Corp.
Adjacent Defect(Cluster)
Region Define
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Jetek Technology Corp.
Cluster Test Algorithm
• Build Convolution Filter
• Build Bed Pixel Map
• Cluster Judge Method
思衛科技
Jetek Technology Corp.
Cluster Judge Method :
CMOS
Imager
ΣXi
N Frames
Bad Pixel
Map
Convolution
Filter
Mean X
1/N
Count
Judge
思衛科技
Jetek Technology Corp.
 Build Bed Pixel Map :
R
Value
G
Value
R
Value
G
Value
G
Value
B
Value
G
Value
B
Value
R
Value
G
Value
R
Value
G
Value
_
R
Mean
G
Mean
R
Mean
G
Mean
G
Mean
B
Mean
G
Mean
B
Mean
R
Mean
G
Mean
R
Mean
G
Mean
0
0
0
0
0
1
1
1
0
1
0
1
思衛科技
Jetek Technology Corp.
Judge Method 1:
For 3 * 3:
0
0
0
0
0
0
1
1
1
0
0
1
0
1
0
0
0
0
0
0
0
0
0
0
0
*
1
16
2
416
460
352
64
256
128
274
211
273
8
32
4
16
3
16
You can judge the relation of bed pixels by value
Ex: 1 1
1
274
思衛科技
Jetek Technology Corp.
Judge Method 2:
For 3 * 3:
0
0
0
0
0
0
1
1
1
0
1
1
1
11
13
11
0
1
0
1
0
1
9
1
11
5
11
0
0
0
0
0
1
1
1
1
2
1
0
0
0
0
0
*
If the value >10 ,
There are 3 bad pixels in the 3*3 area
(don’t care relation of bad pixels)
思衛科技
Jetek Technology Corp.
Standard Light Test
• Mean Level ( Light, R, G, B )
• Std. ( Overall, R, G, B )
• S/N ( Overall, R, G, B )
-FPN(Fixed Pattern Noise)
-Random Noise
• Row/Column Variation (R, G, B )
• Uniformity (R, G, B )
PRNU(Photon Response non-uniformity)
• Defect Pixel (Overall):Defect judge by R, G, B independently
• Cluster
Ps1: G1, G2 maybe need to be separated
思衛科技
Jetek Technology Corp.
Saturation Test
• Saturation Mean Level (Overall, R, G, B )
• Dynamic range (R, G, B)
20 * log( V_sat / V_noise)
思衛科技
Jetek Technology Corp.
Color Frame Test
•
•
•
•
R (G, B)Mean Value in R(G, B) Light
R (G, B)Std. in R(G, B) Light
Prime Response in R(G, B) Light
Cross Response in R(G, B) Light
思衛科技
Jetek Technology Corp.
Prime Response in R Light
(Light R Mean – Dark R Mean) / (Light Overall Mean –
Dark Overall Mean)
Cross Response in R Light
((Light G(B) Mean – Dark G(B) Mean) / (Light R Mean –
Dark R Mean)
思衛科技
Jetek Technology Corp.
Micro Lens
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Jetek Technology Corp.
Micro-Lens
On-chip
Micro Lens
Color Filter
Photo
Shielding Film
Sensor Die
思衛科技
Jetek Technology Corp.
Normalize Micro Lens Shift
By low pass filter:
思衛科技
Jetek Technology Corp.
Solution1 for Micro Lens Shift
By HW(Pupil Lens)
思衛科技
Jetek Technology Corp.
Solution2 for Micro Lens Shift
By SW
Image Uniformize
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
10
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
2
1
1
10
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1
×
1
1
1
1
1
1
2
2
2
1
1
2
2
2
1
1
2
2
2
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
0.5
0.5
0.5
1
2
2
1
1
0.5
5
0.5
1
2
2
2
1
1
0.5
0.5
0.5
1
1
1
1
1
1
1
1
1
1
1/9
1/9
1/9
1/9
1/9
1/9
1/9
÷
1/9
÷1/9
思衛科技
Jetek Technology Corp.
CIS Test System
•
•
•
•
•
•
System Structure
IP Module
Illuminator(Light Source)
Main System
Analog Module(option)
Debug Tool
思衛科技
Jetek Technology Corp.
System Structure
Main System
Control
Signal
Sync
Control & Result
Sync
Data Bus
DUT
Light
Source
Prober / Handler
IP Module
(Frame Grabber
included)
Data
Analog
Waveform
Analog Module
Sync
思衛科技
Jetek Technology Corp.
Docking method:
Light source connect with testhead directly
思衛科技
Jetek Technology Corp.
Docking with Prober (Cable system)
Testhead
AC Power
Cable system
Top View
illuminator
PIB (Prober
Interface Board)
Prober
思衛科技
Jetek Technology Corp.
Docking with Handler (Cable system)
Side View
Handler
DIB (Device
Interface Board
Cable system
Testhead
illuminator
思衛科技
Jetek Technology Corp.
IP Module
Test Head
IP Module
Digital
Image
5pins:
Timing
Control
& Setup
IP Cabinet
IP Data I/F
32 pins
max.
Frame
Grabber
Board
CRT &
Keyboard
IP Controller
Tester Cabinet
Digital Pins
DUT
DC Test Functions
DC Pins
Master
Clocks
CRT &
Keyboard
Digital Test Functions
LF/HF/VHF Pins
Analog Test Functions
TC
Time Measurement
Light Source
Controller
UIP
思衛科技
Jetek Technology Corp.
Illuminator
Light Source Structure
AGC
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Jetek Technology Corp.
Lamp AGC
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Jetek Technology Corp.
Illuminator Specification
•Multi Sites (CP: Depend on Illuminator Area Size
FT: Depend on Illuminator multi sites Design)
•Area: Area Sensor >25*25 mm
Line Sensor > 100*100 mm
•LUX: W > 1000 LUX
For Blue Light
•Uniformity: < 3%
思衛科技
Jetek Technology Corp.
•R/G/B/W Light (option)
•Pattern Turret (option)
•Shutter Turret
•F-number
•Calibration Table
•External / Internal Type
思衛科技
Jetek Technology Corp.
Light Source Uniformity Measure Method :
Uniformity (+/- %) =
(Lx max - Lx min)
((Lx max + Lx min)/2)
*100 / 2
思衛科技
Jetek Technology Corp.
Light Source F-number :
F-Number=Focal Length / Iris Diameter
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Jetek Technology Corp.
Select Illuminator:
Uniformity
Halogen
>
LED
Spectrum
Halogen
>
LED
Intensity
Halogen
>
LED
Lamp Life Time
Halogen
<
LED
Cost
Halogen
>
LED
Color Temperature
Halogen
=
LED
思衛科技
Jetek Technology Corp.
思衛科技
Jetek Technology Corp.
Compare External type Illuminator and Internal type Illuminator
•External type Illuminator(Cable Mount)
Advantage:
Mount handler/prober Easily
Disadvantage:
-Long cable effect test speed limitation
-Need special handler/prober design
•Internal type Illuminator(Direct Mount)
Advantage:
-Signal performance is better
-Use Standard handler/prober
思衛科技
Jetek Technology Corp.
Main System / Analog Module
Dual
Master
Clocks
Digital
Master
Sequencer
Test
Vector
Generator
Pin
Electronics
Digital
Synchro-Pipe
Capture
Digital
Memory
AWG
Sequencer
Wavefor
m
Source
Memory
Digitizer
Sequencer
Wavefor
m
Capture
Memory
DC
Sequencer
Data
DC
Memory
TI
Data
A
Memory
Time
Measurement
Unit
AW
G
Digitizer
Waveform
Source
Waveform
Digitizer
DC
Time Interval
Analyzer
Time
Measure
思衛科技
Jetek Technology Corp.
Main System Specification
•DPS
•Digital I/O (Image data out not included)
pin count : > 64 pins
data rate : > 30MHz
pattern depth : >2M
•Image Data Differential Transfer
•System Noise Floor : < -90dB
•Prober/Handler Control
•Illuminator (Light source) Control
思衛科技
Jetek Technology Corp.
Analog Module
• Digitizer
sample rate: > 40MHz
resolution: >12Bits
• AWG
sample rate: >40MHz
resolution >12Bits
思衛科技
Jetek Technology Corp.
Debug Tool
IP Image Viewer
• Display Image
• View Pixel Value and Color
• Change Display Scale of image
• Displaying Line Profile
• Histogram
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Jetek Technology Corp.
思衛科技
Jetek Technology Corp.
Production Issue
• Socket
• Light Source
• Multi Sites
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Jetek Technology Corp.
Socket
Pogo Pin
Socket Cover
Socket PCB
DUT
Tester Load Board
Socket
Sensor Glass
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Jetek Technology Corp.
Light Source
Light Source Correction(Use same type light Source)
• Adjust the light source focus
• Calibration Light Source
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Jetek Technology Corp.
Adjust Light Source Focus
• Support a small hole light source
• Let’s the hole imagine put on the center of
frame
• Adjust the light source focus
• Convert iris
思衛科技
Jetek Technology Corp.
If the Slope is Sharp,
The focus adjustment
is good.
思衛科技
Jetek Technology Corp.
Use different Light Source
Spectrum is the most important concern
- light Source: Halogen or LED
- Color Temperature
(Color Temperature ,Blue Response
- Filter
)
思衛科技
Jetek Technology Corp.
F-number is the other concern
思衛科技
Jetek Technology Corp.
Multi Sites
For wafer: Assign needle location