LaserMicroFab
1st Year
Marina Makrygianni, Ioanna Zergioti
National Technical University of Athens
Collaboration of NTUA, CNRS/LP3, OL
Teleconference, 02 December 2013
Technical objectives
Laser micro printing/curing of
metallic NP inks for 2D
interconnects and laser
printing of biomaterials
Selective laser
micro and
nano‐patterning
Precise ablation
of a predefined
area
Maskless,
Non-contact,
Dry process
High Printing
resolution
Teleconference, 02 December 2013
Direct
biomaterials
immobilization
Secondments (1/2)
NTUA
CNRS/LP3
OL
I. Zergioti
P. Delaporte
D. Karnakis
2 months during
2013
2 months during
2013
2 months during
2013
M. Makrygianni
6 months during
2013
OL
NTUA
Teleconference, 02 December 2013
Secondments (2/2)
M. Makrygianni
at OL
P. Delaporte at
OL
• Design/calculation of the
beam path from laser to
target in projection
imaging setup
• Development of
experimental Setup:
attenuation system,
zoom telescope, mirrors,
objective lens.
• First LIFT experiments of
semiconducting polymer
P3HT in solid phase
• Fabrication of Imaging
and Shadow masks
• Writing a book
chapter
• Experiments in
beam shaping
I. Zergioti at OL
• LIFT Experimental
Setup
• Experiments in
beam shaping
• First experiments
in laser sintering
Teleconference, 02 December 2013
D. Karnakis at
NTUA
• LIFT experiments
of semiconducting
polymer P3HT in
ns regime.
• LIFT experiments
of semiconducting
polymer P3HT in
ps regime.
Recruitments
3 post-doctoral positions for a duration of 18 months
CNRS/LP3 Post-doctoral position
• The main activities of this post-doctoral position will be focused on ‘selective
micro and nano-structuring of thin films’ and ‘laser micro-printing’.
• The LP3 Post-doctoral position application period is closed. Daniel Puerto
Garcia has been selected, and he will start from January for 18 months
NTUA Post-doctoral position
• The main activities of this post-doctoral position will be focused on ‘laser
micro-printing’, ‘laser micro-curing” and “laser development of biosensors”.
• The NTUA Post-doctoral position application deadline has been extended to
31/12/2013
OL Post-doctoral position
• The OL Post-doctoral position application is not open yet. The position is
planned to open on 01 Sept 2014 for 18 months. This will be formally
advertised well in advance around April/May 2014.
Teleconference, 02 December 2013
Technical progress
At CNRS/LP3
•
•
•
•
Beam shaping with SLM (Hamamatsu) and microlens arrays.
LIFT of silver NPs inks at high velocity.
LIFT printing of conductive structures and electrodes.
Selective scribing of Transparent Conductive Oxide on Semiconductor (PV).
At NTUA
•
•
•
•
New LIFT setup in ps regime.
New Two-point probe measurement system.
LIFT experiments in ps and ns regime of semiconducting polymer P3HT.
LIFT experiments in ns regime of copper ink in liquid phase.
At OL
•
•
•
•
New experimental setup for LIFT experiments and laser micromachining.
First experiments in ns regime of semiconducting polymer P3HT.
Gaussian to Top Hat beam shaping experiments.
First experiments in laser sintering of Ag-NPs.
Teleconference, 02 December 2013
Dissemination Activities during seconded period (1st Year)
Transfer of knowledge between Academia and Industrial partners
– Oral presentations to OL staff:
P. Delaporte
(LP3)
P. Delaporte
(LP3)
M. Makrygianni
(NTUA)
I. Zergioti
(NTUA)
I. Zergioti
(NTUA)
M. Makrygianni
(NTUA)
Overview of LP3's activities in advanced laser microprocessing
Potential and limitations of the laser transfer printing technique LIFT
Fabrication of hybrid (Organic/Inorganic) transistors by means of laser technologies
Laser Technologies in organic electronics and sensors (part 1)
Laser Technologies in organic electronics and sensors (part 2)
Summary of activities at OL the last 6 months
– Oral presentation to students and staff of NTUA
D. Karnakis
(OL)
Industrial Laser Micromachinning
• Present project to other Universities:
I. Zergioti
(NTUA)
Laser Technologies in organic electronics and sensors
Teleconference, 02 December 2013
Swansea, Wales, UK
Participation in conferences (1/2)

Oral presentations:
 M. Makrygianni, I. Theodorakos, C. Boutopoulos, I. Zergioti, Laser-Induced Forward
Transfer of Metallic Nanoparticle Inks, 5th Pan Hellenic Conference on Metallic
Materials 2013.
 S. Papazoglou, M. Makrygianni, S. Chatzandroulis, I. Raptis, I. Zergioti, Laser Induced
Forward Transfer as a Tool for the Fabrication of Graphene-Based Organic Electronic
Devices, XXIX PCSSP 2013
 S. Papazoglou, M. Makrygianni, I. Zergioti, Laser Induced Forward Transfer of hybrid
Graphene/PQT for organic electronics applications, EMRS 2013
 J. Ailuno, L. Rapp, A.-P. Alloncle, M. Sentis, Ph. Delaporte, ‘Laser printing of conductive
materials for passive microelectronic components’, 6th International Symposium on
Flexible Organic Electronics (ISFOE13), Thessaloniki, Greece, 8-11 July 2013
 E. Biver, L. Rapp, A.-P. Alloncle, M. Sentis, Ph. Delaporte, ‘Laser printing of conductive
inks at high velocity’, 6th International Symposium on Flexible Organic Electronics
(ISFOE13), Thessaloniki, Greece, 8-11 July 2013
 Ph. Delaporte, ‘Laser printing for micro and nanomanufacturing’, International
Congress on Applications of Lasers & Electro–Optics (ICALEO 2013), Plenary
conference, Miami, USA, October 6-10, 2013
Teleconference, 02 December 2013
Participation in conferences (2/2)

Oral presentations:
 Ph. Delaporte, J. Ailuno, E. Biver, L. Rapp, A.-P. Alloncle, ‘Potential of Laser Transfer for
Printed Electronics’, Swiss e-Print conference, Basel, Switzerland, November 21-22, 2013
 Ph. Delaporte, ‘Laser printing for micro and nanomanufacturing’, International
Congress on Applications of Lasers & Electro–Optics (ICALEO 2013), Plenary conference,
Miami, USA, October 6-10, 2013
 Ph. Delaporte, ‘Laser fabrication of nano/micro-structured materials: printing and
ablation’, Invited Seminar, Workshop on ‘Planar Optronic Systems’, PlanOS,
Friedrichsdorf, Germany, November 13th, 2013
 Ph. Delaporte, J. Ailuno, E. Biver, L. Rapp, A.-P. Alloncle, ‘Potential of Laser Transfer for
Printed Electronics’, Swiss e-Print conference, Basel, Switzerland, November 21-22, 2013

Poster presentation:
 M. Makrygianni, S. Papazoglou, I. Raptis, S. Chatzandroulis, I. Zergioti, LASER PRINTED
POLYMERIC SEMICODUCTOR/ GRAPHENE COMPOSITE FOR ELECTRONIC DEVICES, 12th
International Conference on Laser Ablation (COLA 2013).
 M. Chatzipetrou, E. Touloupakis, A. Gkouzou, I. Zergioti, An enzyme biosensor for food
quality monitoring fabricated by Laser Induced Forward Transfer, 12th International
Conference on Laser Ablation (COLA 2013).
Teleconference, 02 December 2013
Peer-review publications
1.
S. Papazoglou, Y.S. Raptis, S. Chatzandroulis, I. Zergioti, A study on the
pulsed laser printing of liquid phase, submitted to Applied Physics A
2.
S. Papazoglou, V. Tsouti, Y.S. Raptis, I. Zergioti, S. Chatzandroulis,
Partially Reduced Graphene Oxide Chemical Sensor Employing Laser
Induced Forward Transfer – Fabrication and Evaluation, submitted to
Sensors and Actuators: B. Chemical
3.
Eleftherios Touloupakis, Marianneza Chatzipetrou, Christos
Boutopoulos, Alkisti Gkouzou, Ioanna Zergioti, A polyphenol biosensor
realized by laser printing technology, submitted to Sensors and
Actuators: B. Chemical
4.
Delaporte Ph., Zergioti I., Karnakis D., Chapter Laser Processing in
Flexible Organic Electronics in the Handbook of flexible organic
electronics, materials, manufacturing and applications, Woodhead
Publishing, to be published, 2014
Teleconference, 02 December 2013
Deliverables 1st Year
List of deliverables
Del.
no.
D1.1
Deliverable name
WP no.
Nature
Report on materials selection
WP1
Report
D2.1
Report on the materials and substrates selected
for sensor applications
WP2
Report
Prepared and ready for internal review
Teleconference, 02 December 2013
Delivery
date/Leader
6
(CNRS)
6
(NTUA)
1st Workshop organization
Workshop on Laser Technologies at ISFOE13
Teleconference, 02 December 2013
1st Workshop organization
Workshop on Laser Technologies at ISFOE13
Type of activities
Title
Invited Talk
I. Zergioti
Laser Induced Forward Transfer as an advanced
tool for direct immobilization of enzymes
Oral Talk
P. Delaporte
Laser printing of conductive inks at high velocity
Oral Talk
M. Makrygianni
Oral Talk
P. Delaporte
Oral Talk
Oral Talk
Oral
S. Papazoglou
I. Zergioti
D. Karnakis
Laser Induced Forward Transfer of single and
multilayer organic materials
Laser printing of conductive materials for
passive microelectronic components
Pulsed ‐ laser printing of Graphene/Polymer
materials for organic electronic devices
Laser Digital Micro ‐ Nano fabrication for
Organic Electronics and Sensor applications
Large Area High Resolution Digital Printing for
Organic Thin Film Transistor Fabrication
Teleconference, 02 December 2013
Outreach Activities
ONE OUTREACH/RESEARCHER/YEAR
– Oral presentations:
I. Zergioti
(NTUA)
“Use of Laser for the Realization of flexible electronics and Biosensors” at The
Hellenic Physical Society (Ε.Ε.F.)
I. Zergioti
(NTUA)
“Use of Laser for the Realization of Biosensors” at The Hellenic Physical Society
(Ε.Ε.F.)
M. Sentis
(CNRS-LP3)
« Laser : Between Dream and reality since more than half-century »
Conference given to general public in the frame of Marseille European Capital of
Culture (MP2013) – Marseille December 5th, 2013
G. Coustillier
(CNRS-LP3)
« Fêtes de La Science »
Open days at CNRS-LP3 Laboratory with exhibitions and conferences, including
LaserMicroFab project, Marseille, 9-13 octobre 2013
A.Kearsley
(Oxf.Lasers)
“Oxford Lasers: a laser micromachining system integrator” NanoKTN, Workshop on
Graphene supply chain, Institute of Physics, London, 28 November 2013
– Advertisement:
Video to be uploaded on the Internet
Teleconference, 02 December 2013
Technical Achievements and Results
Teleconference, 02 December 2013
Activities during seconded period (1st Year)
Technical achievements at OL
Design of laser beam path for LIFT experiments and laser micromachining
Setup:
 DPSS ns Nd:YAG laser
 X-Y-Z motorized stages
Zoom lens system:
 Beam expansion design
with OSLO software
 2 converging lenses of (L1
and L3) and 1 diverging
lens (L2)
Solid Phase LIFT experiments:
Printing of P3HT pixels through a
Cimita Software
Laser micromachining:
Realization of imaging and shadow
masks
Teleconference, 02 December
2013
Technical results at OL
LIFT of Polymer: P3HT
Donor: without Ti DRL
Receiver:
450 nm P3HT spin-coated on quartz
Glass Substrate
LIFT with circular
mask
Laser spot diameter:
80 μm
395 mJ/cm2
Energy Study:
Threshold transfer
fluence ≈ 300 mJ/cm2
Many debris around the
deposits > 450 mJ/cm2
× Adhesion problem on
glass substrate.
Teleconference, 02 December 2013
Technical results at NTUA
LIFT of Polymer: P3HT
Donor: with Ti DRL
250
Fluence (mJ/cm2)
290
320
365
400
From Donor: P3HT on Ti/Quartz
90
Donor: P3HT spin-coated on Ti/quartz
380
80
Threshold transfer fluence ≈ 180
mJ/cm2
70
Roughness (nm)
Energy Study:
60
50
40
30
More roughness with increasing
fluence.
20
10
100
150
200
250
300
Fluence (mJ/cm2)
Teleconference, 02 December 2013
350
400
450
Laser sintering: Nanoparticle ink curing
Silver Ink on PEN
 CW laser at 1064 nm, at 20W
550
center
120 μm
190 μm
500
450
o
Temperature ( C)
400
350
PEN
Tg=120 oC
Tmelt=270 oC
300
250
200
150
100
50
0
0
20
40
60
80
100
Depth (μm)
Teleconference, 02 December 2013
120
140
Laser sintering: Nanoparticle ink curing
Simulation results using SENTAURUS
Irradiation with the use of Shorter pulses
Silver Ink on PEN
550
wavelength:1064nm
500
o
Temperature ( C)
450
400
0.44 msec, CW-laser (40 W), 42112 W/cm
350
300
8 ns, pulse laser, 1300 mJ/cm
2
8 ps, pulse laser, 1000 mJ/cm
2
 Reduced heat affected
zone
 Makes it possible to use
plastic substrates
2
250
200
150
100
PEN
50
0
0,0
0,2
0,4
0,6
0,8
1,0
1,2
1,4
1,6
1,8
2,0
Depth (μm)
Teleconference, 02 December 2013
Technical Results
Technical results at NTUA
Electrical characterization of selectively laser cured Ag-NP lines
Sample: Ag-NP layer on PEN
Sample: Ag-NP layer on glass
2,0x10-3
-4
1,0x10
1,5x10-3
1,0x10-3
5,0x10-5
I (A)
I (A)
5,0x10-4
0,0
0,0
-5,0x10-4
-5,0x10-5
-1,0x10-3
-1,5x10-3
-4
-1,0x10
-2,0x10-3
-5
-4
-3
-2
-1
0
1
2
3
4
5
-0,5 -0,4 -0,3 -0,2 -0,1 0,0 0,1 0,2 0,3 0,4 0,5
V (Volt)
V (Volt)
7,72 x 10-2 Ω cm when sintered at 40 W
7,41 x 10-4 Ω cm when sintered at 20 W
Reference with LIFT and cured at 150 oC for 60 min: 1,8 x 10-5 Ω cm
Silver bulk: 1.59×10-6 Ω·cm
Teleconference, 02 December 2013
Future work
- Fabrication of interdigitated electrodes for the development of
chemical sensors, in collaboration of all partners.
To be submitted at LPM 2014
- Completion of the laser sintering experimental and simulations and
publication asap, (NTUA-OL)SPI response
- LIFT of Cu ink (NTUA)
- Laser beam homogenisation from Gaussian to tophat for projection
mask imaging beam delivery (OL)
Teleconference, 02 December 2013