Microsensors & Microactuators
Lecture 1: Introduction
Presenter: Prof. David Garmire
Agenda
Minutes
Goals of the course
2. Overview of material
3. Grading
4. Time change
15
20
10
5
1.
Microsensors and Microactuators ?
Microsensors and Microactuators ?
Sandia National Labs
Microsensors and Microactuators ?
Texas Instruments DLP Technology
Microsensors and Microactuators ?
biomechanics.ecs.umass.edu
Microsensors and Microactuators ?
Microsensors and Microactuators ?
Courtesy Clark T.-C. Nguyen
Why go micro/nano ?
Courtesy Clark T.-C. Nguyen
Goals of the Course
 Understand advantages/challenges of scaling down
 Design your own Microsensors and Microactuators
 Microelectromechanical Systems (MEMS)
 Model and simulate various domains of interest
 Mechanical, Electrical, Magnetic, Fluidic, Thermal, Optical
 Interactions between domains
 Understand methodologies to test devices
 Sources and distributions of noise
 Measurement circuits and methodologies
 Iterate upon and optimize designs
Overview of Course Material
 Knowledge Areas
Biology
Application
Knowledge
Gaming
Cell phones
Displays
Printers
Navigation
Medicine
Surgery
Safety
Energy
Textiles
Chemistry
Physics
Electrical
Engineering
Material
Science
Bioengineering
Computer
Science
Mechanical
Engineering
Chemical
Engineering
Mathematics
Overview of Course Material
 Design Process
1. Problem
Description
2. Choose Domains
and Materials
4a. Develop Simplified
Model of Design Space
5. Layout Design with
Parameterization for Testing
6. Fabricate Devices
7. Test Devices
3. Examine Initial
Design Space
4b. Create Finite Element
Simulation of Specific Designs
Grading
 Homework Assignments
 Take-home Exam
 Final-Project Writeup
 Final Presentation
25%
30%
30%
15%
Rescheduling Class
 Monday, Wednesday 11:00 – 12:30 ?
 Tuesday, Thursday ?
 Wednesday, Friday 11:00 – 12:30 ?
Reading Assignment for Next Class
 Chapter 1 in Micromachined Transducers
Sourcebook by G. T. Kovacs
First Homework Assignment
 Bridge Building
 Use a single 11 by 8.5 inch sheet of paper


Use not more than 1 foot of standard Scotch tape


You may cut and fold the paper
 Suggestion: Print a pattern from the computer
Double-sided or single-sided OK
Optimize for one of the following
Longest suspension that can hold a single penny in the center
 Strongest suspension spanning 1 foot
 Holds the most pennies placed at least 1 inch from the sides
 Most earthquake resistant suspension spanning 2 feet
 Holds the most pennies placed at the center when shaken

 Due in approximately 3 weeks.