Facilitating access to high end MNT
Micro and NanoManufacture Networking Workshop
Industrial Technologies
19 June 2012
Karlsruhe Institute of Technology
Susan Anson
Discussion questions
Are MNT‘s still relevant?
How can emerging technologies be brought out of the Lab and
into application?
How can these technologies be encouraged to „emerge“ and
develop so that they are relevant to the needs of Europe‘s end
users?
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Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
Fact sheet of EUMINAfab
12 partners from 8 different countries
EC funded;
Grant Agreement no.: FP7-226460
March 2009 – February 2013
Total budget: 7.8 M€
Multimaterial micro and nano fabrication and
characterisation
Integrates a Capital investment > 200 M€
> 70 technological experts
By June 2012 80 users,

1200 units of acess- value over 1,200,000€
Access is free of cost for public research
Call 6 closes 30th June
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limited funds are still available
Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
At the start  a MNT toolbox
µ and nanostructuring
Thin film deposition
Replication
Characterisation
Electron beam
PVD technologies
µ injection
HRTEM
(e.g. noble metals,
moulding (e.g.
E-beam & SCIL
XPEEM
DLC,
nanocomposipolymers,
metals,
Ion beam (FocusX-ray tomography
Come with your
request and use the
technology
availabletes, metals,
ceramics;
small
sed cross beam)
Auger Nanoprobe
nitrides)
series)
expected
time
of
User
project
2-3
days
DPN
In situ synchrotron
Sole Gel: spin and
µ hot embossing
Direct X-ray litho
X-ray diffractodip coating
(small series)
metry (> 2010)
Laser technologies
Org. PVD (e.g.
Thermal imprinting
(e.g. ps, fs, surface
AFM, conductive
organic liquids &
& UV-NIL
texturation)
AFM
powders,oxides)
NIL process chain
Mechanical µmaSpectrophotometry
CVD (metals,
(UV photolitho, dry
chining (freeform)
/-radiometry
polymers, ceramics)
& wet etching)
Photopolymeristn.
Profilometry (e.g.
Self Assembly (e.g.
low force contact
Mastermaking
semiconductors,
mode & white light
process chain
organic)
mode)
DRIE (Si, glass,
Screen printing
µCMM
SiO2)
(e.g. metals,
Low force balance,
dielectrics)
ellipsometry
Optical Coating
Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
Technology solution provider
MNT fast developing
new since 2012 – Laser Lithography, improved photonics and clean
room facilities have been added to the portfolio by the partners
Mini-collaborative projects
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Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
EUMINAfab- Benefitting Users
• Trinean nv Host partner
KIT
• Start up at TCD Host partner
Philips
• SAUERESSIG GmbH +
Co. KG Host partner
TEKNIKER
• Molecular Sense Ltd
Host partner Philips
• Soleil Host partner KIT
• Polaric Host partner
Philips
• The Morgan project
Host partner Cardiff
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Solution
provision for
SME’s
Experience for
young
researchers
Technology
platform for
EU and
national
projects and
infrastructures
New ideas for
mature
researchers
• Institute for
Bioengineering of
Catalonia (IBEC) Host
partner KIT
• Bath University Host
partner KIT
• University of Durham,
Host partner TEKNIKER
•Uni. Bulgaria, Host partner
Cardiff
•National Institute for Laser,
Plasma and Radiation
Physics, Romania. Host
partner TEKNIKER
•CENIMAT Host partner CRF
Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
Micro-nano technology platform – to application
User projects are application focussed
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Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
Summary of achievements from EUMINAfab
Created a common identity

„One for all and all for one approach“ among partners
Opened transnational access so as to enable a „real world“ test
bed for emerging technolgies
Established niche of functional solution provider specializing in the
design and creation of nano and micro structured components


Cross fertilisation of ideas
avoids divergent evolution of technologies at local sites
Common platform for marketing and the exchange of knowledge


Enables in-roads into new user communities
Broader base of contacts for reaching users
Increased mobility of researchers across Europe
Developed an application approach for functional solutions using
MNT

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a step further than the technology tool box planned in the GA
Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
EUMINAfab – Proposed continued development
Hub for knowledge based MNT functional solution provision
Provide essential links in the innovation value chain
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Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012
Thank you for your attention
Discussion is welcome

Document avaialble for download www.euminafab.eu
susan.anson@kit.edu
+49 721 608 28103
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Karlsruhe Institute of Technology| Susan Anson: Industrial Technologies: Aarhus 19-21 June 2012