Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
Inspection - LF - Manufacturing
Inspections
202306- Workplace safety (HVM System Delivery)
Report for: Linkou ASML factory - - LF
Inspector: Meg Ho (666088)
Inspection Type: Manufacturing Inspections
Inspection Checklist: Manufacturing Safety Checklist
Inspection Completed Date: Monday, July 17, 2023
Frequency:
Action Owner:
Contractor:
Equipment:
Project Code:
Project Manager:
Type of Work:
Quality Cluster Manager:
Work Center:
Work Permit:
NEN 3140 / IEC 60204-1 (ASML guidelines) compliant:
Next Inspection before:
Confidential
Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
Executive Summary
At Monday, July 17, 2023 an inspection has been performed at ASML Linkou ASML
factory - LF. The inspection was performed by Meg Ho (666088). Detailed results
have been included in MyEHS as well in this document.
Summary of the inspection:
-
-
Type of inspection:
Manufacturing Inspections
All findings and actions have been included in MyEHS; this report contains the
detailed findings and actions
The findings are sorted by:
- Deviations
- Observations
- Best Practices
During the inspection a site tour has been made at sector: LF
This inspection resulted in the following findings:
- 2 Deviations have been found
- 0 Observations have been found
- 0 Best Practices have been found
Confidential
Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
Contents
1 Introduction ......................................................................................................................................... 4
1.1 Background and objectives ........................................................................................................... 4
1.2 Methodology................................................................................................................................. 4
2 Inspection Findings .............................................................................................................................. 5
3 Inspection Actions ................................................................................................................................ 6
4 Checklist + Answers.............................................................................................................................. 7
5 Private Document Attachments......................................................................................................... 12
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
1 Introduction
1.1 Background and objectives
An inspection has been performed based on the Manufacturing Safety Checklist
checklist. The goal of this inspection was to evaluate the compliance to the
requirements based on this checklist.
1.2 Methodology
A site tour including interviews has been conducted in order to check compliance
with the Manufacturing Safety Checklist checklist. The results are documented in
the Inspection Management module of MyEHS.
Findings are categorized as followed:
1. Deviations
2. Observations
3. Best Practices
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
2 Inspection Findings
In the table underneath, an overview of all inspections findings is shown.
Finding
Category
Deviation
Safety
Risk
Low
Description
Missing evacuation route map in front of cabin
YS WIP2.
Team/Supplier
Status
Picture
Closed
S__ 18087944.j pg
Deviation
Low
No ground label for two fire extinguishers in
Cabin YSWIP2.
Closed
S__ 18087945.j pg
S__ 18087946.j pg
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
3 Inspection Actions
In the table underneath, an overview of all action plans is shown.
Action
No.
Related Finding
Action Type
Action Required
Person
Responsible
Due Date
Status
57391
No ground label
for two fire
extinguishers in
Cabin YSWIP2.
Containment
Need to stick the
ground red line
for two fire
extinguishers in
Cabin YSWIP2
based on the
evacuation map.
Jimmy
Chang
(636002)
Sunday,
July 30,
2023
Completed
Missing
evacuation route
map in front of
cabin YS WIP2.
Containment
Need to post the
evacuation route
map for cabin YS
WIP2.
Mack Tsai
(649666)
Picture
MicrosoftT eams-i mage (72).png
MicrosoftT eams-i mage (73).png
57392
Monday,
July 31,
2023
Completed
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
[date]
4 Checklist + Answers
Question
Code
Question
MSC.1
Locks/Tags available, correct use (Apply
and Remove), certified operator,
according to procedure, overhead
crane
Enough space around electrical panels?
(36 inch / ~1m)
MSC.10
MSC.11
MSC.12
MSC.13
MSC.14
Answer
Comments
Picture
Cords and Cables
good condition, insulated/guarded,
approved kind, right location,
no strain/pull, no taps/splice, located
away from walking areas to prevent
tripping hazards?
Powerstrip and extension cords
approved, single use, grounded, not
attached to structures, not used
permanent
No open wiring / electrical tooling /
clean and good state
Flammables & Combustables
stored in cabinets (marked, labeled,
organized, no waste,
trash, paper, cardboard) within reach
sprinkler
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MSC.15
Fire Extinguishers
available, unblocked, inspected,
charged, good condition & clearly
marked, serviced/tagged annually,
Unblocked
NOK
YS WIP2 area
Fire
Extinguishers
and evacuation
route
inspection
Doors
All Fire Doors Self-closing - Tested, All
Cabinet doors working properly
MSC.16
MSC.17
EXIT
all EXIT signs illuminated, all EXIT paths
free
Equipment, Tools and PPE
available, used and stored correctly
(Scaffold, Harness,lanyard, fence,
guardrail, Anchor Points, Ladders*)
- 3-points of contact while ascending or
descending ladders, pre-checked
(frequently & before use)
all in good and clean condition
working zone is controlled access zone,
all trained/certified / radiation badge
visible
MSC.18
Path and steps
in good shape, clearly marked, free of
tripping hazard
MSC.19
Adequate Light / no noise / PPE Signs
MSC.2
Other Safety Hazard
MSC.20
Other Physical Hazard
MSC.21
Physical Ergonomics (body)
Lifting Tools / reaching / kneeling /
bending / sitting position
overstretching / lying / manual lifting
above shoulder height
too many repetitions / heavy items
stored on lower shelves
carts available (Mach. Covers) /
cushions available
OK
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
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MSC.22
MSC.23
MSC.24
MSC.25
MSC.26
Workplace Ergonomics (surroundings)
Extreme Temperature / Magnetics /
Tripping hazards
falling objects / obstructions
Other Ergonomic Hazard
(Power)Tools
blades sharp, good shape, no
alterations, secured, guarded, clean,
no missing parts, no visible defects,
handles/grips are ok, wiring in good
shape,
grounded, insulated, Right tooling for
job, calibrated, certificate, Trained for
use tool?
Correct approved transport tooling
available, (pre)checked and used (e.g.
Forklift, Pallet Truck, Powered
Industrial Trucks)
Route is free from obstruction (power
cords, SISO plates, metal/plastic plates,
machine covers, loose parts)
Load secured and stabilized (e.g.
Forklift fixed with lashing belt)
Apply PtW to excute the work without
AWI or Coach Procedure?
Other Tooling & Equipment
MSC.27
Aware of all Safety Alarms, Escape
routes and Emergency number
MSC.28
Trained, qualified and competent wrt.
Tooling
IEQ / QEW / Confined Space / Internal
Course
Special Operation / Local Requirements
/ completed legal re-qualification
Other Competence & Training
MSC.29
MSC.3
Tooling used (Gas Monitors) / visibility
cabin clear / PtW filled in / H2 status
machine correct
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Report Linkou ASML factory - - LF
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MSC.30
MSC.31
MSC.32
MSC.33
PPE
available and correctly used (Clean Eye
WashShower,
Head, Eye, Ears, Respiratory, Arms,
Hands, Legs, Feet,
Arc Flash Gear, 1st Aid Supply available
)
Procedures / Work instructions are
Available, Clear, Accessible, Adhered to
All signs visible and clear in (sub)Fab
(Warning, exit, Remote Access Devices,
PPE advise)
(e.g. which way a door opens, Storage
Rack labels, platform load limit weight,
Exit)
When working alone, communicated
before start, no high risk
MSC.34
Certified operator / tooling, controlled
access zone, PPE
MSC.35
When manually lifting heavy objects
sufficient help (2 or more employees)
MSC.36
Other Safety WoW
MSC.37
Other Biological Hazard
MSC.38
Other Psychological Hazard
MSC.4
WF specific: Compressed Gas Cylinders
| secured, capped, upright, separated,
labelled
MSC.5
Do you smell, taste, hear of feel
anything that would point out a gas
issue or leak?
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MSC.6
Safety Data Sheet (SDS) meets local
legal requirement / Employee knows
where to find SDS
MSC.7
Hazardous Waste Containers/Cabinets
Location, Closed, Labeled correct
(GHS), no leaks
MSC.8
Chemicals stored correct (in chemicalflam cabinet) / PPE used / Satellite
areas labelled / inspected frequently
MSC.9
Other Chemical Hazard
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
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5 Private Document Attachments
Pictures
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Inspection - LF - Manufacturing Inspections
Report Linkou ASML factory - - LF
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