BT SERIES PLASMA SYSTEM
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TABLE OF CONTENTS
SECTION I
INTRODUCTION
1. Manual Organization
2. SAFETY
3. Contact Information
SECTION II
SYSTEM SPECIFICATIONS / INSTALLATION
1.
2.
3.
4.
5.
SECTION III
SPECIFICATIONS
FOOTPRINT
SYSTEM LAYOUT
FACILITIES REQUIREMENTS
SYSTEM INSTALLATION
SYSTEM OPERATING INSTRUCTIONS
1. GENERAL
2. CONTROL OPTION
3. OPERATOR INTERFACE
4. OPERATING SCREENS
5. SYSTEM OPTIONS
6. SYSTEM REPORTS
7. SYSTEM STARTUP
8. PLASMA PROCESSING
9. STANDBY MODE
10. SHUTDOWN MODE
SECTION IV
METHODS & PROCEDURES
1. GENERAL
2. PLASMA PROCESSING PARAMETERS
SECTION V
PREVENTIVE MAINTENANCE
1.
2.
3.
4.
SECTION VI
VACUUM SYSTEM
VACUUM CHAMBER
TEMPERATURE CONTROL OIL RESEVOIR
CABINET FANS AND FILTERS
CALIBRATION
1. GENERAL
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TABLE OF CONTENTS
2.
3.
4.
5.
6.
7.
SECTION VII
CALIBRATION EQUIPMENT REQUIRED
SPECIAL PRECAUTIONS
POWER SUPPLY CALIBRATION
VACUUM CALIBRATION
MASS FLOW CONTROLLER CALIBRATION
RF GENERATOR CALIBRATION
TROUBLESHOOTING
1. TROUBLESHOOTING CHART
2. SYSTEM COMPONENT DESIGNATIONS
SECTION VIII
BILL OF MATERIALS
SECTION IX
SPARE PARTS LIST
SECTION X
SCHEMATICS
SECTION XI
VENDOR MATERIALS
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SECTION I - INTRODUCTION
1. MANUAL ORGANIZATION
The system manual is separated in various sections. Review the table of contents for
information.
Please familiarize yourself with the system manual before operating the system.
Please observe all warnings or important notes throughout the manual. The following
are examples of how important information will be displayed:
NOTE:
This box indicates important
information supporting the
subject.
WARNING:
This box indicates a possible
hazard to personnel or
machinery.
DANGER:
This box indicates a hazard to
personnel.
2. SAFETY
Observe all warning labels on the system. Labels throughout the system indicate a
High Voltage danger.
3. CONTACT INFORMATION
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SECTION I - INTRODUCTION
Plasma Etch, Inc.
3522 Arrowhead Drive
Carson City, NV 89706
Phone: (775) 883-1336
Fax: (775) 883-2559
Email: service@plasmaetch.com
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SECTION II – SYSTEM SPECIFICATIONS/INSTALLATION
1. SPECIFICATIONS
MODEL: BT-1
VACUUM CHAMBER
CHAMBER DIMENSION:
ELECTRODE CONFIGURATION:
26.5" W X 23.75"D X 21"H
20” W X 21” D, 5 Level, 3” Spacing
VACUUM SYSTEM
MAIN PUMP
VACUUM GAUGE
FILTRATION
56 CFM Main
0-1 TORR
N/A
PROCESS COMPONENTS
RF POWER
GAS FLOW
TEMPERATURE CONTROL
0-600 WATTS @ 13.56MHZ
0-500CC per min. (O2)
0°F to 150°C ± 0.5°C
FACILITIES
AC SERVICE
COMPRESSED AIR
PROCESS GAS
SYSTEM ENVIRONMENT
120/208 VAC, 50/60HZ, 3 PHASE, 30A
80 to 125PSIG
15 to 30PSIG
95°F Max
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SECTION II – SYSTEM SPECIFICATIONS/INSTALLATION
2. FOOTPRINT
MAIN CABINET
MISCELLANEOUS COMPONENTS
Refer to the vendor supplied manual for specifications on chiller, scrubbers, dryers etc.
3. SYSTEM LAYOUT
Final locations for the major system assemblies are somewhat dictated by the
length of system interconnections. System interconnections (cables, vacuum
hose, etc.) are ten feet in length. Constant Temperature Bath/Re-circulator oil
hoses are six feet in length. Please take these lengths into account when
determining final location for system facilities and the major system assemblies
(Plasma Console, Vacuum Pump & Constant Temperature Bath/Re-circulator).
(Refer to Figure II for System Footprint)
4. FACILITIES REQUIREMENTS (Reference System Specification Table for
Specifications)
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AC Service
At the Plasma Console rear, locate the large cable clamp on the connector panel,
located at the lower rear of the Plasma Console. Connect the AC Power source to
the main disconnect. (Refer to Figure I) Do not apply power at this time.
Compressed Air Source
The compressed air line to be ¼" OD X .040" wall thickness black
(UV inhibited) polyethylene tubing (user supplied). The compressed
air connection at the vacuum pump is supplied with the system.
Route and connect the ¼" tubing from the compressed air source to
the vacuum valve, located on top of the vacuum pump.
NOTE:
The system vacuum valve receives lubrication from oil in the compressed air
source. Use of an oil-free compressed air source may cause premature failure of the
vacuum valve seals. If the use of oil-free compressed air cannot be avoided, install
an automatic oiler at the output of the air pressure regulator.
Gas Sources (Refer to Figure I)
All gas sources should be equipped with two stage brass regulators (user
supplied), with a low pressure range of 0-30 PSIG (15 PSIG midrange).
Single stage regulators are not acceptable for this application.
A correct fitting (CGA number) must be specified with each regulator. Fitting
numbers are dictated by the gas type (i.e.; oxygen, nitrogen, argon, etc.) being
ordered. Contact the gas supplier for correct CGA fitting numbers.
All gas lines to be ¼" OD X .040" wall thickness, black (UV
inhibited) polyethylene tubing (user supplied).
Systems equipped with the vacuum chamber nitrogen purge option
are plumbed with 3/8" OD X .062" wall thickness, black (UV
inhibited) polyethylene tubing (user supplied).
Route and connect the ¼" tubing from the gas sources to the appropriate gas
connections at the rear of the plasma console. The gas connection hardware at
the plasma console rear is supplied with the system.
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SECTION II – SYSTEM SPECIFICATIONS/INSTALLATION
Vacuum Pump Exhaust Plumbing
Vacuum pump exhaust plumbing should be 1½" ID (minimum). Restricting
exhaust plumbing ID will inhibit proper vacuum pump operation.
Vacuum pump exhaust runs should be as short as possible, having
no horizontal runs and no low points.
Route and connect the 1½" vacuum hose (user supplied) from the vacuum
pump exhaust to the building exhaust. Connecting hardware is supplied for
connection at the vacuum pump exhaust.
2. SYSTEM INSTALLATION
Position the Plasma Console in its final location and screw down the stabilization jacks
(4 each).
Unbolt the Vacuum Pump from the shipping pallet and attach the rubber pads supplied
with the system to the Vacuum Pump base. Position the Vacuum Pump in its final
location.
System Control Cables (Refer to Figure I)
Route the numbered gray flex conduits to their respective components,
located at the lower rear of the Plasma Console.
Connect the labeled wire terminations from the above referenced conduits
as follows:
Constant Temperature Bath/Re-circulator (Optional)
Uncrate the Constant Temperature Bath/Re-circulator and mount in
its final location.
Locate the black AC Cord and the cable terminated with the DB9
connector at the connector panel, located at the lower rear of the Plasma
Console. Extend both cable assemblies through the cable clamp and
connect at the rear of the Constant Temperature Bath/Re-circulator.
Locate the two metal braided hoses, shipped in the Constant
Temperature Bath/Re-circulator shipping container. Route and connect
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the two metal braided hoses from the Constant Temperature
Bath/Re-circulator rear, to the hose connections located on the rear
of the Plasma Console. The hoses do not have to be connected in any
particular order.
Fill the Constant Temperature Bath/Re-circulator reservoir as noted
below (fill to a level between the two horizontal slits located at the
upper rear of the reservoir):
Gas Connections
Nitrogen purge lines to the vacuum pump must be connected
as follows:
a) Purge source (P1) must be connected to the vacuum pump ballast
input.
b) Purge source (P2) must be connected the vacuum pump oil
reservoir ballast (check valve input).
System Environment
The system and in particular the R.F. generator, requires sufficient heat
dissipation to ensure maximum service life. To ensure maximum service life
from the system, it is recommended that the plasma room temperature not be
allowed to exceed 95°F
System Power Phasing Check
WARNING:
System power phasing must be checked prior to attempting operation of this equipment.
Operation of this equipment with improper power phasing will permanently damage the
vacuum pump.
Do not apply system power, except as noted below.
Connect the system power cable to the facility AC source.
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SECTION II – SYSTEM SPECIFICATIONS/INSTALLATION
Review the vacuum pump manual for proper pump rotation. The most
reliable method we have found is to insert just the tip of a small plastic tie
wrap into the fan opening and verify rotation by making contact with the
fan blade.
The vacuum pump must be jogged only momentarily to check phase rotation.
Power must be applied to the vacuum pump only for short periods, while
checking for proper rotation.
If phase rotation is incorrect, disconnect the system power at the facility
AC power source and reverse any two phases (A, B or C) at the vacuum
pump. Momentarily apply system power and recheck the vacuum pump for
correct rotation.
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FIGURE I
BT-1 FACILITIES INPUT
TEMP POWER
MAIN POWER
GAS 1 - 3
TEMP FLUID
TEMP DATA
Air
MAIN POWER CB
VACUUM POWER
VACUUM SYSTEM IN
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SECTION III – SYSTEM OPERATING INSTRUCTIONS
1. GENERAL
1.1. This document provides an overview of the Computer Control and Operator
Interface System for the BT-1 Series Plasma Surface Treatment System.
1.2. The goals of this document are:
1) Provide a reference to the different areas of the Operator Interface.
2) Provide a reference to the sequence and part number databases and
their functions.
3) Provide an introduction to the Control System.
2. CONTROL OPTIONS
2.1. There are several methods for inputting instructions into the computer
control system, which include both standard and optional features. These
methods include:
1) Using the keyboard cursor keys (right, left, up & down) to scroll through
the commands and enter the appropriate instructions via the keyboard.
2) Using the keyboards speed-keys (indicated by an underlined letter as seen in
the example below) to navigate through commands.
3) Touch screen control without a keyboard can use the onscreen keyboard
by pressing the keyboard icon (shown above) on the lower left corner of
the main screen. The icon is also available where keyboard input is
necessary. Refer to figure 3-1 for the main screen.
4) Using the touch screen or mouse to scroll through the commands and
enter the appropriate instructions.
3. OPERATOR INTERFACE
This section provides an overview of the Operator Interface (menus and
graphic displays).
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3.1. Main Screen
The system will start in the main operation screen. Refer to figure 3-1.
All commands and sub-menus are accessed from this screen.
The Main Screen graphic displays the following process control functions:
3.2. Process Sequence
The Process Sequence section of the Main Screen graphic displays the current
process sequence and the following programmed process parameters:
1) Part Number
2) Temperature (
F or
C) (see note 1)
3) Plasma Time (Min.) (See note 2)
4) R.F. Power (Watts)
5) Vacuum (Torr) (If applicable)
6) Gas 1 Selection & Flow (CC/Min.) (See note 3)
7) Gas 2 Selection & Flow (CC/Min.) (See note 3)
FIGURE 3-1
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8) Gas 3 Selection & Flow (CC/Min.) (See note 3) (If applicable)
Note:
1. Reference the Configuration section for temperature scale
programming instructions.
2. Plasma time is the only process sequence set point that can be
edited from the Main Screen.
3. Reference the Configuration section for gas configuration (up to five
independent gas sources are allowable depending on system options).
3.3. Miscellaneous Messages:
The Miscellaneous Messages section of the Main Screen graphic displays
the following system status messages:
1) Last Alarm:
Displays last alarm condition, if any, in the current process run.
Potential system alarm conditions are discussed in section 4.1.6 (Alarms).
2) Alarm Silence
The status of the audible alarm silence function is displayed. To silence the
alarm, reference the Commands menu section.
3) Print Reports
The status of the system printer function is displayed. To enable/disable
the system printer, reference the Configuration section.
3.4. Step & Wait
The Step section of the Main Screen graphic displays the current step the
process sequence is in. The Wait section of the Main Screen graphic displays the
next step to be executed by the process sequence. These two displays afford the
operator a better understanding of the function of the system.
The following is a list of the process steps in order of execution:
1) STEP: Home
WAIT: Temperature Control Power
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SECTION III – SYSTEM OPERATING INSTRUCTIONS
All power off. Activate the Power Menu then Temperature Control
to proceed.
2) STEP: Warm
WAIT: Temperature + Vacuum +Door
Temperature control is on. Activate RF Generator and Vacuum Pump
Power to proceed.
3) STEP: Vacuum
WAIT: Delay for Vacuum Time - Timer
Vacuum pump on (after five seconds delay the blank-off valve opens).
4) STEP: Standby
WAIT: Plasma or Cycle Off Command
Chamber is under vacuum waiting for next command. Activate the
Plasma Command.
5) STEP: Vacuum
WAIT: Wait for Vacuum Switch Timer – Timer
(If vacuum switch option is selected)
Fist stage vacuum pump on, system pumps down to vacuum switch setpoint
(approx. 15.0 TORR).
6) STEP: Plasma: Vacuum
WAIT: Wait For Vacuum Monitor < Config Vacuum Setpoint
Second stage blower vacuum pump on, system pumps down to vacuum
meter set point (typically 0.20 TORR)
7) STEP: Plasma: Stabilize Gases
WAIT: Delay for Gas Stabilization Timer - Timer
Process Step One gas flow turns on (waits for chamber to stabilize).
8) STEP: Plasma 1
WAIT: Wait for Cycle 1 - Timer
R.F. Plasma ignites and Process One sequence starts. Process continues for the
duration of the Plasma timer.
9) STEP: Close Valves After Process One
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WAIT: Delay for Transition Timer - Timer
Process Step One gas flow turns off and R.F. power turns off.
10) STEP: Open Valves for Process Two
WAIT: Delay Between Steps - Timer
Process Step Two process gas flow turns on.
11) STEP: Plasma: Stabilize Gases
WAIT: Gas Stabilization Timer - Timer
Wait for chamber to stabilize.
12) STEP: Plasma 2
WAIT: Wait for Cycle 2 - Timer
R.F. Plasma ignites, and Process Step Two sequence starts. Process
continues for the duration of the Plasma timer.
13) STEP: Plasma: Close Blank Off Valve
WAIT: Delay for Vent Timer - Timer
Process two gas flows shut off, and R.F. power shuts off, then blankoff valve closes.
14) STEP: Plasma: Vent Chamber
WAIT: Purge Vent Timer
Chamber vents to near atmospheric pressure.
15) STEP: Vacuum
WAIT: Wait for Vacuum Switch Timer – Timer
(If vacuum switch option is selected)
Blank-off valve opens, first stage pump on, system pumps down to
vacuum switch setpoint (approx. 15.0 TORR).
16) STEP: Purge: Vacuum
WAIT: Vacuum Meter Setpoint
Second stage blower vacuum pump on, system pumps down to vacuum
meter setpoint (0.20 TORR)
17) STEP: Plasma & Purge Complete
WAIT: Cycle Off Command
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Plasma sequence complete, second stage vacuum turns off, alarm
sounds (Duration of the Config: Alarm Timer).
18) STEP: Cycle Off: Close Blank Off Valve
WAIT: Delay for Vent Timer - Timer
Blank-off valve closes
19) STEP: Cycle Off: Vent Chamber”
WAIT: Delay for Atmospheric Vent Timer - Timer
Chamber vents to atmosphere. Open the chamber door.
20) STEP: Cycle Off: Complete
WAIT: Plasma or Standby
The Plasma cycle is complete.
21) STEP: Shutdown
WAIT: Delay for Shutdown Time – Timer
This starts the automatic shutdown of temperature control, vacuum pump
and R.F. generator.
3.5. Date and Time
The Date and Time section of the Main Screen graphic displays the current
date and time.
3.6. Plasma System Graphic
The Main Screen graphic portrays key elements of the plasma system and
indicates the current status of these elements. Shape is used to indicate whether
a control device is “On” or “Off”, “Open” or “Closed”. For example, a valve or
pump displays a solid connection extending through it when it is on and the
absence of line when it is off. This graphic in conjunction with the current Step
data provides the operator with a better understanding of the status of the plasma
sequence.
System operation status is indicated by status lamps graphic located on the top
of the plasma system vacuum chamber door graphic. The following system
status conditions are displayed:
1) Green (continuous) – Plasma sequence in progress.
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2) Green (blinking) – Plasma sequence complete.
3) Amber (continuous) – System in standby ready for process.
4) Red (blinking) – Alarm condition exists.
3.7. Monitored Sequence Variables
The following process sequence variables are monitored and displayed on
the Main Screen graphic display:
1) Gas Flow 1 : (CC/Min.)
2) Gas Flow 2 : (CC/Min.)
3) Gas Flow 3 : (CC/Min.) (if applicable)
4) Plasma Time : (Hrs./Min./Sec.) (elapsed plasma time is displayed)
5) Elapsed Time : (Hrs./Min./Sec.) (elapsed sequence time is displayed)
6) Vacuum : (MM HG)
7) R.F. Power : (Watts) (High or Low frequency)
8) Temperature : (
F or
C)
3.8. Vacuum Chamber Door
The Door section of the Main Screen graphic indicates the status of the
vacuum chamber door (Open or Closed).
4. OPERATING SCREENS
This section defines the basic operating screens for the system.
The following system control commands are displayed at the top of the Main Screen
graphic.
4.1. Technician
Accessing the technician menu allow access to various configuration data and
Part Number information. Refer to figure 4-1.
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FIGURE 4-1
4.1.1. Sequences
The Sequence menu contains all the process sequences which can be run
on the system. Refer to figure 4-2.
FIGURE 4-2
1) Enter the parameters in the appropriate field and select the “Save
Part Number” button to write to disk.
2) Select the “Load Part Number” button to recall parameters for editing.
3) Select the “Clear Part Number” button to empty the data fields.
4) Select the “Main Screen” button to exit.
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4.1.2. Configuration
WARNING
ONLY QUALIFIED PERSONEL FAMILIAR WITH THE SYSTEM
SHOULD CHANGE ANY CONFIGUIRATION SETTINGS.
INCORRECT SETTINGS CAN CAUSE MACHINE FAILURE.
There are a number of parameters which are configured on a per system
basis by editing the system configuration function. Only pertinent
settings are covered in this section. Refer to figure 4-3.
FIGURE 4-3
4.1.2.1.
Gas Configuration
These entries should only be changed if the system gas selection
is to be changed. Refer to figure 4-4.
1) Enter the chemical symbol for the new gas.
2) Enter the gas correction factor for the new gas. Gas
correction factors can be found in the Flow Controller section
of the System Manual.
NOTE
The proper gas correction factors must be entered to maintain
mass flow controller calibration.
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FIGURE 4-4
4.1.2.2.
Timers
The Timers configuration sets all timers and delays for necessary
system operation. Refer to figure 4-5.
FIGURE 4-5
1) Vacuum Switch: Delay after vacuum switch closure for
vacuum pump (Optional).
2) Gas Stabilization: Delay for process gases to stabilize at the
start of the plasma process.
3) Purge Vent: Delay for purging of the vacuum chamber at the
completion of the plasma cycle.
4) Atmospheric Vent: Delay for venting the vacuum chamber.
5) Vent Delay: Delay before vacuum chamber venting is started.
6) Alarm: Length of time for end of plasma cycle
alarm annunciation.
7) Shutdown: Delay before the system shuts down in shutdown
mode.
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SECTION III – SYSTEM OPERATING INSTRUCTIONS
8) Step 1 to Step 2 Delay: Delay prior to starting step 2 in the
plasma cycle.
9) RF Alarm Delay: Delay before RF alarms are checked at the
start of the plasma process.
4.1.2.3.
I/O
The I/O section of the configuration section sets up Mass Flow
Controller information. Refer to figure 4-6.
FIGURE 4-6
4.1.2.4.
Temperature Configuration
The temperature section of the configuration section sets
up temperature control information. Refer to figure 4-7.
FIGURE 4-7
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1) Units in DEG F or C:
Editing temperature scales ( F or C) requires that all existing
process sequences be manually converted to the new
temperature scale.
2) Maximum Setpoint
The system has a maximum safe operating temperature of 325
4.1.2.5.
F.
Emergency Off
The Emergency Off section of the configuration section sets up the
static state of the Emergency Off switch. Refer to figure 4-8.
FIGURE 4-8
4.1.2.6.
Miscellaneous Configuration
The Miscellaneous Configuration Section contains various
miscellaneous settings. Refer to figure 4-9.
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FIGURE 4-9
1) Company Name: The Company Name will be printed on
the header of the process data sheet.
2) RF Generator (KW): Size of RF generator for non-linear type
generators.
3) RF Alarm (%): Percentage of set point error before
reporting an alarm.
4) Display RF Reflected: Displays the RF Reflected reading on
the main screen.
5) Vacuum Setpoint: The vacuum reading in TORR before
the plasma process will start.
6) Vacuum Alarm Timer: Amount of time for vacuum set point to
be achieved before receiving an error.
7) Skip Cycle Off Cue: Proceeds directly to the Cycle Off mode
at the completion of the plasma cycle.
8) Skip Chamber Purge: Skips the end of cycle chamber purge
step.
9) Auto Print Reports: Enables the end of cycle report to be
printed at the completion of the cycle.
10) Plasma Run Time Alarm: Amount of time in hours the system
has been in a plasma cycle. When the time is elapsed a system
alarm will occur. This is used to set maintenance milestones.
4.1.2.7.
Default Sequence
The default sequence is the sequence that will be loaded when
the system is first started. Refer to figure 4-10.
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FIGURE 4-10
4.1.2.8.
Shift Times
Shift times are used in production reports to track how often a part
number was ran per shift. Shift time must be entered in 24 hour
format. Refer to section 6 “System Reports”. Refer to figure 4-11.
FIGURE 4-11
4.1.3. Passwords
Multiple passwords with various levels may be set. Each level can be
configured with access to different functions within the program. The
“None Req’d” box disables password checking. Refer to figure 4-13.
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FIGURE 4-12
User names and passwords can be setup by selecting the “Show Users”
button. Users will be assigned password levels here. Refer to figure 4-12.
FIGURE 4-13
4.1.4. Simulate I/O
The Simulate I/O function is a way to run the program in simulation mode.
The I/O is disabled requiring user input to simulate.
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4.2. Power
The following system primary power functions are accessed through the
Power Menu:
1) Temperature (if applicable)
2) R.F. Power
3) Vacuum Pump
Power is applied by activating the Power command button, selecting the
appropriate function and selecting on. Refer to figure 4-14. The power on
sequence shall be done in the order displayed (left to right).
FIGURE 4-14
4.3. Commands
The following system control options are accessed through the Command
Menu. Refer to figure 4-15.
FIGURE 4-15
4.3.1. Plasma
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Plasma sequencing is started by activating the Plasma command.
Initially the Report Information graphic will be displayed. The operator
may input additional information which will be automatically added to
the printed process data sheet.
The plasma sequence will proceed automatically to completion. When the
plasma sequence has been completed the system will alarm for five
seconds, notifying the operator that the sequence has been completed. The
green system status lamp will blink continuously to indicate completion of
the sequence.
4.3.2. Plasma Time 1 & Plasma Time 2
Plasma times may be edited as required. The current programmed plasma
times are displayed in the Process Sequence section of the Main Screen
graphic display. If a different plasma time is required, it may be changed
by activating the appropriate Plasma Time command (1 and/or 2) and
entering the new plasma time. Plasma time is the only process parameter
which can be edited while the plasma sequence is in progress.
4.3.3. Cycle Off
The Cycle Off command vents the vacuum chamber to atmospheric
pressure, to prepare the system for loading/unloading. Cycle Off is entered
by activating the Cycle Off command.
4.3.4. Standby
If the system is not currently being used for plasma processing, it
should be placed in the Standby mode. In this mode the system is
maintained ready for immediate return to plasma processing. The
Standby mode is entered by activating the Standby command.
4.3.5. Shutdown
When the system is turned off it must be done so using the shutdown
mode. This mode turns off the system in a prescribed sequence, allowing
adequate cool-down of critical system components. The shutdown mode is
entered by activating the Shutdown command.
4.3.6. Quick Stop
A quicker way of ending the plasma cycle by setting all plasma cycle
times to zero.
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4.3.7. Rotation Speed
The turntable/tumbler speed is adjusted here.
4.3.8. Enable/Disable Ionizer
Enables or disables the ionizer function.
4.3.9. Silence Alarm
The system audible alarm may be turned off by activating the Silence
Alarm command. This procedure will inhibit the alarm for the period of
the current process sequence. Starting a new process sequence will
automatically re-enable the system alarm.
The system alarm has a sound level damping feature, which may
be adjusted by manually rotating the front baffle on the alarm.
4.4. Sequence
4.5. Sequence information is entered by activating the Sequence command
and selecting the desired part number. Refer to figure 4-16.
FIGURE 4-16
Part numbers may be selected by clicking on the desired part number.
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Reference the Part Numbers Entry section for procedures on adding or editing
a part number.
4.6. Screens
The following functions are accessed through the Screen
Menu: Refer to figure 4-17.
FIGURE 4-17
4.6.1. Trends
The trend screen provides a plot of current processing parameters. Each
process parameter is color coded for easy identification. Process values are
displayed in the vertical axis and process time is displayed in the
horizontal axis. Refer to figure 4-18.
Historic trends can be loaded for viewing by selecting the “Historic
Trends” button. Every plasma cycle’s trend data is stored on the computer
hard drive in the directory “C:\WinPlasma\Trends\Month”. The file is a
CSV type file with the same name as the Sort ID of the run. The Sort ID is
in the format MMDDXXX where M is the month number (1-12), DD is
the day number (1-31) and XXX is the run number for the day.
The current trend page can be printed to the system printer or exported
as a picture file.
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FIGURE 4-18
The following process parameters are displayed:
a) Temperature
b) Gas Flow 1
c) Gas Flow 2
d) Gas Flow 3 (if applicable)
e) Vacuum
f) R.F. Power
4.6.2. Events
The Events screen displays current Log File information for reference.
Refer to figure 4-19.
Events can be exported to CSV type file for viewing in a spread sheet
program. This is done by pressing the “Export to CSV” button. The files
are stored on the hard drive in the directory “C:\WinPlasma\Events”.
The files are named in the format EVENTDDMMYYYY where DD is the
day, MM is the month and YYYY is the year.
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The “Show Calendar” button displays a calendar control at the bottom
of the screen to select events for a specific date. Refer to figure 4-20.
FIGURE 4-19
FIGURE 4-20
4.6.3. I/O
The I/O screen displays the current status of all system input and output
devices (both digital and analog). This feature is provided primarily for
system maintenance. Refer to figure 4-21.
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The status of digital inputs and outputs are indicated by highlighting the
entries when on. Analog inputs and outputs will be displayed in
engineering units (CC/Min., Watts or
F/
C) or in digital format.
FIGURE 4-21
4.6.4. Maintenance
The Maintenance screen shows all runtime meters for the system. The
Alarm Setpoint setting sets a time in hours when elapsed creates an
alarm. This alarm can be used as a warning of upcoming maintenance or
service milestones. Refer to figure 4-22.
4.6.5. Screensaver
The screensaver command actuates the screensaver.
FIGURE 4-22
4.6.6. About
The About” command displays system information.
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4.7. Alarms
The Alarms screen displays all the possible events and alarms that can be
triggered. It also displays the current status of the alarm. Refer to figure 4-23.
FIGURE 4-23
When an alarm occurs the system will display an alarm message as shown
below: Refer to figure 4-24.
FIGURE 4-24
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When an alarm occurs an event will be logged with the alarm description and text
displaying “In Alarm” or “Out of Alarm” showing it’s active or cleared. Common
system alarms are listed in the table below. Refer to the table below.
Alarm Text
Coolant Flow
Emergency Stop: Optomux Comm
Failure
Emergency Stop: Input State
Gas Channel 1-3 Flow Control –
Actual: (Setpoint: )
Gas 1-3 Low Pressure
Description
Water coolant less than ¼
GPM at flow sensor
Loss of communication to
Optomux controller
Emergency Stop button pressed
Process gas flows out of range.
RF HIGH – Actual: (Setpoint: )
Process gas pressures less than
10PSI
Vacuum purge nitrogen
pressure less than 10PSI
RF Power out of range
RF LOW – Actual: (Setpoint: )
RF Power out of range
Temperature Control – Actual:
(Setpoint: )
Temperature Control - OVERTEMP
Temperature reading out of
range
Overtemp sensor tripped :
greater than 300°F (Optional)
Vacuum pump thermal sensor
warning (Dry Pump Option)
Vacuum pump over
temperature thermal switch or
motor thermistor indicates over
temperature (Dry Pump
Option)
Coolant Flow switch failure
check for water cooled pumps
(Dry Pump Option)
temperature
Vacuum sensor failure or
disconnected.
N2 Gas Channel LOW Pressure
Vacuum Pump Temperature
Warning
Vacuum Pump Shutdown: Over
Temp / Over Load
Vacuum Pump Shutdown: Coolant
Flow Alarm
Vacuum Invalid Input Value
Action
Plasma Cycle aborted
Emergency stop
Emergency stop
Plasma Cycle continues,
acknowledgement required
Plasma Cycle continues,
acknowledgement required
Plasma Cycle continues,
acknowledgement required
Plasma Cycle continues,
acknowledgement required
Plasma Cycle continues,
acknowledgement required
Plasma Cycle continues,
acknowledgement required
Plasma Cycle aborted
Plasma Cycle continues,
acknowledgement required
Plasma Cycle aborted, Vacuum pump
power shut off and system goes to Cycle
Off mode
Plasma Cycle aborted, Vacuum pump
power shut off and system goes to Cycle
Off mode
Plasma Cycle aborted and system goes
into Cycle Off mode.
5. SYSTEM OPTIONS
WARNING
ONLY QUALIFIED PERSONEL FAMILIAR WITH THE SYSTEM
SHOULD CHANGE ANY OPTIONS SETTINGS. INCORRECT
SETTINGS CAN CAUSE MACHINE FAILURE.
To enter the options screens you must first pull down the technician menu. With the
technician menu pulled down enter the keys <Ctrl> and <F5> simultaneously. The
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Options Code entry screen will appear. Enter the password “ghost”. Refer to figure 51.
Technician Menu
Options Code
Entry
FIGURE 5-1
5.1. Gases (Refer to figure 5-2)
1.) Number of Gas Channels: The number of process gas mass flow controller’s
installed.
2.) Number of Gases: The number of process gases to be used.
FIGURE 5-2
5.2. RF (Refer to figure 5-3)
1.) Maximum RF Power (Watts): Maximum RF power allowed in process
sequence.
2.) RF Forward Monitor (Watts): Full scale forward monitor of RF generator.
3.) RF Reflected Monitor (Watts): Full scale reflected monitor of RF generator.
4.) RF Forward Control (Watts): Full scale control of RF generator.
5.) Linear RF signals: Selects linear or nonlinear monitoring of RF generator.
6.) Ramp RF Output: Selects RF generator ramping to set point.
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7.) RF Ramp Time (sec): Time in seconds for the RF power to ramp up to full
set point.
FIGURE 5-3
5.3. Temperature (Refer to figure 5-4)
1.) Temperature Controller: Selects the temperature control option.
2.) Internal PID Control: Selects computer controlled PID mode.
3.) External Serial Control: Selects external Temperature control through a serial
port.
4.) Coolant Flow Switch: Selects the water flow switch option.
5.) Part Temp Monitors: An optional part temperature sensor.
FIGURE 5-4
5.4. Vacuum (Refer to figure 5-5)
1.) Vacuum Blower: Selects the vacuum blower option.
2.) Vacuum Switch: Selects the vacuum blower cut in switch option. 3.)
Vacuum Alarm Function: Enables vacuum set point alarm checking. 4.)
Vacuum Controller: Enable the vacuum control throttle valve option. 5.)
Dry Pump: Selects the dry vacuum pump option.
6.) Dry Pump Coolant Flow Shut Off: Enable water flow checking for the dry
pump.
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FIGURE 5-5
5.5. Miscellaneous (Refer to figure 5-6)
1.) Automatic Door: Selects the automatic door option.
2.) Number of cycles: selects the number of plasma process steps.
3.) Ionizer: Selects the chamber ionizer option.
4.) Speed Control: Selects the Turntable/Tumbler motor option.
5.) Reverse Rotation: Enables motor direction change in the middle of the
plasma cycle.
6.) Clear Plasma Run Time Totalizer: Clears the fixed plasma run time meter.
FIGURE 5-6
5.6. Production Fields (Refer to figure 5-7)
1.) Company/Machine ID: Miscellaneous information.
2.) Process/Part Number Title: Changes the name of the Process selection button
on the main screen.
3.) Number of Production Fields: Selects the number of production fields to be
displayed. Up to 6 fields can be displayed.
4.) Production Field Names: Selects the title or field name for the production
report.
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SECTION III – SYSTEM OPERATING INSTRUCTIONS
FIGURE 5-7
5.7. Custom Fields (Refer to figure 5-8)
1.) Number of Custom Fields: Selects the number of custom fields to be
displayed. Up to 5 fields can be displayed.
2.) Data Field Name: Selects the title or field name for the data.
FIGURE 5-8
5.8. I/O (Refer to figure 5-9)
1.) I/O Layout: Displays the I/O arrangement used.
FIGURE 5-9
6. SYSTEM REPORTS
6.1. Report Configuration
6.1.1 Run Reports
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Custom fields can be displayed on each run report. These custom
display fields are configured in the system options screens. Refer to
section 5.7 “Custom Fields”.
6.1.2
Production Reports
Production fields can be displayed on each production and run
report. These production display fields are configured in the system
options screens. Refer to section 5.6 “Production Fields”.
6.1.3
Field Data Entry
At the start of the “Plasma” command is executed a pop up screen with
the configured data fields will appear. The entered data will be used in
the production and/or run reports. Refer to figure 6-1.
Part Number to Run
Sort ID for run
Entered Data
Configured Fields
FIGURE 6-1
6.2. Reports Menu
Several system reports can be accessed through the Events screen. The
“View/Print Event Reports” button is used to access these reports. Refer to figure
6-2.
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FIGURE 6-2
6.3. Run Report
Run reports are a list of events pertaining to one particular run. They are
indexed by a run number (Sort ID) in the format MMDDXXX where M is the
month number (1-12), DD is the day number (1-31) and XXX is the run number
for the day. Refer to figure 6-3 and 6-4.
Run reports are also automatically printed at the end of each plasma process
if “Auto Print Reports” is enabled in the configuration. See section 4.1.2.6.
FIGURE 6-3
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FIGURE 6-4
6.4. Production Report
The production report gives details on the part numbers that were ran such as
start time, stop time, shift, and various user defined fields. Refer to figure 6-5.
FIGURE 6-5
The production summary page can be accessed within the production detail screen by
pushing the “Production Summary” button. The production summary page breaks
down how many times a particular part number was ran during a shift. Refer to
figure 6-6.
Production reports can be printed and/or exported to a CSV file format. Files are
stored on the hard drive in the directory “C:\WinPlasma\Events”.
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SECTION III – SYSTEM OPERATING INSTRUCTIONS
FIGURE 6-6
6.5. I/O Report
The “I/O report” prints the current I/O available.
7. SYSTEM STARTUP
7.1. At the gas sources slowly open the gas cylinder valves (fully CCW). Sudden
opening of the valves may damage the gas regulators. Maintain all gas
pressures at approximately 15 PSIG.
7.2. At the AC Circuit Breaker Panel, set the circuit breaker to the On (Up) position.
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7.3. The computer will automatically boot up to the Logo Screen display graphic.
See figure below.
7.4. Apply temperature control power by activating the Power Menu.
7.5. Apply Temperature Power (if applicable).
7.5.1. The temperature control system will activate and electrode temperature
will start to rise toward the preset process temperature referenced in the
Process Sequence section of the Main Screen display graphic.
7.5.2. Do not proceed with the system startup procedure until system
temperature is within approximately fifteen degrees of the preset valve.
7.6. If applicable, on the R.F. Generator Circuit Breaker Panel set the circuit breaker
to the On (Up) position (this circuit breaker may be left in the On position
permanently).
7.7. Apply R.F. generator power.
7.8. If applicable, on the R.F. Circuit Breaker Panel the AC Mains lamp will
illuminate
7.9. If applicable, on the R.F. Generator Panel the Standby switch will illuminate.
7.10. If applicable, on the R.F. Generator Panel momentarily depress the Power
switch (illuminates). The Standby switch will extinguish.
7.11. While holding the vacuum chamber door closed, apply vacuum pump.
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7.11.1. The vacuum pump will turn on and after a five second delay the vacuum
chamber starts to pump down.
8. PLASMA PROCESSING
Note: On initial system startup it is recommended that a dummy plasma sequence be
run with the vacuum chamber empty, to stabilize the system. Skip paragraphs
3.1 through 3.3, and at paragraph 3.4 set the Default Sequence plasma time
for 15 minutes minimum (30 minutes preferred).
8.1. Enter the sequence to be process by activating the sequence command and
entering the sequence.
8.2. While holding the vacuum chamber door closed, enter the plasma mode by
activating the Commands and Plasma buttons in the order shown.
The Report Information graphic will be displayed. The operator may enter optional
information which will be added to the printed process data sheet.
8.3. Plasma time may be edited by activating the Commands and Plasma Time
buttons in the order shown.
8.4. Upon completion of the plasma process the alarm will sound for five seconds and
the green system status lamp will blink continuously to signal that the sequence
is complete.
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8.5. Enter the cycle off mode by activating the Commands and Cycle Off buttons in
the order shown.
8.6. The chamber will vent to atmosphere. Once fully vented the door may be opened.
8.7. Vacuum chamber unloading and loading may be performed at this time.
8.8. For further plasma processing, repeat paragraphs 3.1 through 3.8.
9. STANDBY MODE
9.1. If the system is not currently being used for plasma process, it should be placed
in the standby mode. In this mode the system is maintained ready for immediate
return to plasma processing.
9.2. While holding the vacuum chamber door closed, enter the standby mode by
activating the Commands and Standby buttons in the order shown.
9.3. To return to active processing repeat paragraphs 2.6 through 2.11, then proceed
to paragraph 3.1.
10. SHUTDOWN MODE
CAUTION: When the system is turned off, it is recommended to be done so using the
shutdown mode. This mode turns off the system in a prescribed
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sequence, allowing adequate cooling of critical system components. The
shutdown mode can only be initiated while in the standby mode.
10.1. Enter the shutdown mode by activating the Commands and Shutdown buttons in
the order shown.
Note: After ten minutes the system will automatically power down.
10.2. At the AC Circuit Breaker Panel set the circuit breaker to the Off (Down)
position.
10.3. At the gas sources turn the gas cylinder valves fully CW.
Note: The gas cylinders must not be shut off until the automatic
shutdown sequence is complete.
10.4. System shutdown is complete.
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SECTION IV – METHODS & PROCEDURES
1. GENERAL
1.1. This document defines general plasma processing methods and procedures.
2. PLASMA PROCESSING PARAMETERS
2.1. Specific plasma processing parameters are uniquely define by the application
and should be determined experimentally.
2.2. RF Power
2.2.1. The maximum RF power capability of the Model BT I with a 1000 watt
generator is 1000 watts. It is recommended that the maximum RF power
levels be limited to approximately 800 watts.
2.2.2. Higher RF power levels cause process temperatures to rise. Care must be
taken that the RF power level does not cause excessive temperature rise in
the materials being processed.
2.2.3. Excessive RF power levels do not contribute measurably to processing
rates and should be avoided.
2.3. Gas Flow
2.3.1. Optimum processing results are obtained when gas flow rates are selected
to maintain the vacuum level in the range of 0.10-0.20 torr. Higher vacuum
levels (higher pressures) will result in process non-uniformity.
2.3.2. Excessively high levels of gas flow do not contribute measurably
to processing rates and should be avoided.
2.4. Gas Correction Factors
2.4.1. The system can be factory configured with as many as three gas control
channels. All gas controllers are factory calibrated for oxygen (O2).
2.4.2. Other gases may be used but gas flow corrections must be entered in the
configuration screen.
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SECTION IV – METHODS & PROCEDURES
NOTE:
Correction factors for many gases are listed in the mass
flow controller manual.
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SECTION V – PREVENTATIVE MAINTENANCE
1. VACUUM SYSTEM (OXYGEN SERVICE)
1.1. General
1.1.1. Proper maintenance of the vacuum system is critical to system reliability.
Adherence to recommended preventive maintenance procedures will
greatly extend the life of the equipment.
1.2. Vacuum Pump Lubrication
WARNING:
This vacuum pump is configured for oxygen plasma service. Oxygen
service plasma requires that only the specified vacuum pump oil be used.
Substitution of other than the specified vacuum pump oil could result in
an explosion.
Do not substitute or mix oil types.
Refer to Vacuum Pump Manual for proper oil.
1.2.1. The vacuum pump oil level should be checked daily while the vacuum
pump is at operating temperature and the plasma system is under full
vacuum (standby mode).
1.2.2. The sight glass must be maintained at ¼ to ½ full.
1.2.3. While checking the oil level, also observe the oil color and clarity. The
oil color must be colorless to amber and the oil clarity must be clear.
1.2.4. Reference the system manual, Section X, “Recommended Spare
Parts List”, for replacement oil type and refill capacity. The specified
oil is stocked by Plasma Etch.
1.3. Vacuum Pump Nitrogen Purging (System Option )
1.3.1. The nitrogen purge option is provided to extend vacuum pump life.
Nitrogen is metered into the vacuum pump oil system to expel chemical
contaminants from the oil.
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SECTION V – PREVENTATIVE MAINTENANCE
1.3.2. If flourine based process gases (CF4, SF6, etc.) are utilized, it is
imperative that regular nitrogen purging takes place. Nitrogen purging
prevents the formation of hydroflouric acid in the vacuum pump oil.
1.3.3. For other process gases, nitrogen purging is not a critical requirement, but
is recommended.
1.3.4. The vacuum system has two levels of nitrogen purging.
1.3.4.1.Nitrogen is automatically and continuously purged the vacuum pump
oil reservoir.
1.3.4.2.Nitrogen is purged through the vacuum pump ballast port, but only
when the system is in the Standby mode.
1.3.5. When using flourine based gases, it is required that after each processing
period, the system be nitrogen purged for an extended period in the Standby
mode. A good rule of thumb is that for every period of four hours or less of
plasma time, the system be purged for one hour.
1.3.6. For all other process gases, the automatic nitrogen purge (reference
paragraph 1.3.4.1) is sufficient and no operator actions required.
1.3.7. Weekly verify and adjust as required the nitrogen flow rates, as monitored
and adjusted at the flow meters, located on the rear of the system cabinet:
FM1 2.0 L/Min.
FM2 2.0 L/Min.
1.4. Oil filter replacement
1.4.1. Replace the vacuum pump oil filter every two hundred fifty (250) hours
of plasma time.
1.4.2. Reference the System Manual, Section X, “Recommended Spare Parts
List”, for replacement oil filter part number. The specified oil filter is
stocked by Plasma Etch.
1.5. Vacuum Pump Oil Replacement
1.5.1. Because the system can be used for a variety of applications, it is
recommended the oil be monitored periodically for clarity and color. If
any significant changes are observed, it is recommended that he vacuum
pump oil be drained and replaced.
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SECTION V – PREVENTATIVE MAINTENANCE
1.5.2. Contaminated vacuum pump oil may be reclaimed for reuse.
Contact Plasma Etch for information for oil reclamation.
1.6. Scheduled Vacuum Pump Maintenance
1.1.1
Reference the Vacuum System manual for recommended vacuum
pump maintenance requirements.
2. VACUUM CHAMBER
2.1. Vacuum Chamber Seals
2.1.1. Monthly clean the vacuum chamber door O-ring gasket and mating flange
surface. To clean, lightly wipe the O- ring and the flange surface with
alcohol.
2.1.2. Inspect the O-ring for cuts, abrasions or normal wear. Replace as required.
2.1.3. No lubrication (vacuum grease, et.) of the O-ring is required or
recommended.
2.1.4. Inspect the mating flange area for scratches. Minor scratches can cause
significant vacuum leaks. Scratched areas can be resurfaced using an orbital
sander and No. 320 grit or finer sand paper.
2.1.5. Reference the System Manual, Section X, “Recommended Spare Parts
List”, for replacement O-ring part number. The specified O-ring is stocked
by Plasma Etch.
2.2. Vacuum Chamber Cleaning
2.2.1. Every three months inspect the vacuum chamber internal surfaces for
debris.
2.2.2. If cleaning is required, carefully blow out the vacuum chamber with
compressed air.
3. TEMPERATURE BATH (Optional Feature)
3.1. The reservoir is filled with silicon heat transfer oil. The level should be checked
monthly and maintained between the two horizontal slits located at the upper
rear of the reservoir.
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SECTION V – PREVENTATIVE MAINTENANCE
4. CABINET FANS AND FILTERS
NOTE:
Frequency of inspection is dependent on the system
environment.
4.1. For systems with external filters, inspect filters daily for obstructions and
clean as necessary.
4.2. Inspect all cabinet fans for obstructions and excess dirt buildup. Clean as
necessary.
DANGER:
LETHAL VOLTAGES PRESENT. OBSERVE
ALL WARNINGS.
Only qualified personnel should access any components within
equipment enclosures.
4.3. Open access cover to RF generator section to insure all air intakes are clear
of obstructions.
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SECTION VI - CALIBRATION
1. GENERAL
1.1. This procedure defines the general calibration requirements for the BT-1
Plasma Etching & Surface Treatment System. This document is intended only
as a guide to calibration. The specifics of actual calibration should be defined
by the customer.
1.2. Referenced calibration instruments or equivalent, of the stated accuracy
or better, should be utilized.
1.3. It is assumed that calibration personnel have thoroughly familiarized
themselves with the operation of the plasma system and the
appropriate operating documents, prior to commencing calibration.
2. CALIBRATION EQUIPMENT REQUIRED
NOTE: The listed equipment is for recommendation. Use equipment of equivalent
specifications.
2.1 Power Supply
MFG.
FLUKE
MODEL
8060A
DESCRIPTION
NOTE
Multi-meter, Digital (±0.1 % accuracy)
2.2 Vacuum
MFG.
MODEL
DESCRIPTION
HPS
315
Vacuum Gauge (±1.0 % accuracy)
HPS
103150011
Part of Vacuum Gauge
NOTE
2.3 Gas Flow
MFG.
Unit Instruments
Unit Instruments
MODEL
DESCRIPTION
Calibrated mass flow meter, 0-500 CC CC/Min.
UTM 1100
(±0.5% accuracy).
URS-20
NOTE
(O2, AR, or CF4
gas)
Calibrated mass flow meter display
2.4 RF Power
MFG.
MODEL
DESCRIPTION
NOTE
Bird
43
Calibrated Wattmeter
13.56Mhz
Bird
1000H
Power sensing element 1000Watt
13.56Mhz
Bird
4421
Calibrated Wattmeter
100Khz
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SECTION VI - CALIBRATION
Bird
4025
Power sensing element 100-2500Khz
100Khz
2.5 Temperature (if applicable)
MFG.
Omega
MODEL
CL-23
DESCRIPTION
Temperature Calibrator
NOTE
Temp. Bath
3. SPECIAL PRECAUTIONS
WARNING:
When performing the R.F. generator calibration, all personnel who work with
or are exposed to this equipment must take precautions to protect themselves
against shock hazard, which can cause serious and/or fatal bodily injury. Do
not be careless around this equipment!
3.1. Initiation of the system shutdown sequence, as detailed in Section IV,
"System Operating Instructions", starts an automatic cool-down of the
system. It is recommended this procedure be followed prior to shutting off
AC power to allow system components to properly cool.
4. POWER SUPPLY CALIBRATION
4.1. Using the referenced calibration multi-meter, monitor the following DC
voltages applicable to the system (access to these voltages is at the power
supply located inside the plasma console):
4.1.1. +24 VDC ± 0.1 VDC (measured from 240TB1-1 to 240TB1-6)
4.1.2. +15 VDC ± 0.1 VDC (measured from 240TB1-2 to 240TB1-6)
4.1.3. -15 VDC ± 0.1 VDC (measured from 240TB1-3 to 240TB1-6)
4.1.4. +5 VDC ± 0.1 VDC (measured from 240TB1-4 to 240TB1-5)
4.2. Adjustment of these power supplies should not normally be required. If
adjustment is required, the power supplies are located in the left side of the
plasma console.
5. VACUUM MANOMETER CALIBRATION
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SECTION VI - CALIBRATION
5.1.Insert the referenced calibration vacuum gauge, into the port located adjacent
to the system vacuum sensor.
Note: The vacuum chamber must be vented to atmosphere while installing or
removing the calibration vacuum gauge.
5.2.Before a calibration check is performed, a thirty minute instrument warm-up
period is required.
5.3.Using the calibration vacuum gauge, verify the following system vacuum
level, when compared with the system vacuum level as viewed on the graphic
display.
SYSTEM VACUUM
Blank Off Vacuum (See Note)
TOLERANCE
< 50 Microns
Note: To calibrate for blank off vacuum, select a process sequence that inhibits
process gas flow and R.F. power. Activate normal plasma sequencing
and allow 15 minutes for the system to achieve maximum vacuum
before performing the referenced vacuum measurement.
5.4.Calibration of the system vacuum manometer can be made by adjusting the
potentiometer, accessible on the wiring side of the manometer.
6. MASS FLOW CONTROLLER CALIBRATION
6.1. Insert the referenced calibration mass flow meter in series with the
appropriate gas source. Use appropriate correction factors if using a mass
flow meter calibrated for a different gas than the gas used for test.
WARNING:
Use a sequence with the RF inhibited for calibration points running in the
extreme range. The RF power can be unstable in these ranges.
6.2. Zero the calibration flow meter as required (a one-hour warm-up is required).
6.3.Select a process part
"CAL FLOW 1"
"CAL FLOW 2"
"CAL FLOW 3"
O2 (CC/MIN.)
Zero
Mid - Scale
High- Scale
6.4.Repeat the above calibration for each system mass flow controller.
6.5.There are no field adjustments on the mass flow controllers. If calibration is
necessary the mass flow controllers must be returned to the manufacturer
for calibration.
7. R.F. GENERATOR CALIBRATION
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SECTION VI - CALIBRATION
WARNING:
When performing the R.F. generator calibration, all personnel who
work with or are exposed to this equipment must take precautions to
protect themselves against shock hazard, which can cause serious
and/or fatal bodily injury. Do not be careless around High Voltage.
8.1.Initiation of the system shutdown sequence, as detailed in Section II,
"System Operating Instructions", starts an automatic cool-down of the
system. Do not turn off the system out of sequence. Aborting the cool-down
procedure can result in permanent damage to the system.
8.2.Shut off all power to the system, observing the referenced shutdown sequence
(¶ 8.1).
8.3.Disconnect the R.F. cable at the output of the R.F. generator (rear of the
R.F. generator). Insert the referenced calibration R.F. power meter in series
with the R.F. generator and the matching network.
8.4.Select the referenced process part number, activate normal plasma processing
and verify system R.F. power levels track ±5%:
WARNING:
Use a sequence with the RF power for calibration points running in the
appropriate range. The RF power can be unstable at high settings.
PART NUMBER
"CAL RF 1"
"CAL RF 2"
POWER (WATTS)
Mid - Scale
High - Scale
8.5.There are no field adjustments that can be made on the R. F. generator. If
calibration is necessary, contact the manufacturer for instructions.
8.6.Shut off all power to the system, observing the referenced shutdown sequence
(¶ 8.1).
8.7.Remove the calibration R.F. power meter and reconnect the R.F. cable to the
R.F. generator.
8. TEMPERATURE CALIBRATION (if applicable)
7.1.Insert the referenced calibration thermocouple into the temperature
controlled bath (rubber grommet).
BTC-MAN-ID1716 5/2/2018
- 58 -
SECTION VI - CALIBRATION
7.2.The monitored calibration temperature should track the system temperature
± 1°C.
7.3.There are no field adjustments that can be made on the temperature controlled
bath. If calibration is necessary, contact the manufacturer for instructions.
9. CALIBRATION COMPLETE
BTC-MAN-ID1716 5/2/2018
- 59 -
SECTION VII - TROUBLESHOOTING
1. TROUBLESHOOTING CHART
Symptoms
Gas pressure alarm
RF power alarm
Gas flow alarm
Vacuum level increasing
or not achieving set point
System process results
degraded
Possible Cause
Gas valve malfunction
Remedy
Verify power to valve, replace valve
Improper gas pressure
Verify >10psi gas pressure
Excessive reflected power
Readjust matching network capacitor
positions, Check for shorted
electrodes or loose connection
Generator malfunction
Refer to RF generator manual, verify
proper inputs to generator
Improper gas pressure
Verify >10psi gas pressure
Gas valve malfunction
Verify power to valve, replace valve
Mass Flow Controller
malfunction
Chamber door seal faulty
Verify proper inputs to Mass flow
Controller, refer to Mass Flow
Controller manual
Inspect and replace as necessary
View port O-ring faulty
Inspect and replace as necessary
Chamber vent valve faulty
Verify proper power input and
replace as necessary
Vacuum pump system
faulty
Blank off Vacuum system to verify
vacuum level (< 20mtorr), refer to
Vacuum system manual
System out of calibration
Verify system calibration
Chamber and/or electrodes
contaminated
Inspect chamber and electrodes,
clean as necessary
BTC-MAN-ID1716 5/2/2018
- 60 -
SECTION VII - TROUBLESHOOTING
2. SYSTEM COMPONENT DESIGNATIONS
The system is organized in various subassemblies. Bill of Materials and spare parts list
will be organized using the subassembly numbers. Below is an example of a
component designation.
Component Designation: 250MS1
250
Subassembly
Designator
MS1
Component
Designator
Wiring diagrams will also follow the same component designation convention. (Refer to
Figure I)
FIGURE I
WIRING DIAGRAM
Title: Description of Subassembly
Document Number: Subassembly
designation
The table below describes the various subassemblies. (Refer to Figures II)
Figure Number
1
2
3
4
5
6
7
8
Assembly Designation
220
230
240
250
260
270
280
330
Assembly Description
Control Panel Assembly
Gas Control Assembly
I/O Assembly
AC Power Control and Vacuum Pump Assembly
Vacuum Chamber Assembly
RF Generator Assembly
Cabinet Assembly
Plumbing Distribution
BTC-MAN-ID1716 5/2/2018
- 61 -
SECTION VII - TROUBLESHOOTING
FIGURE II
FRONT VIEW
1
7
5
4
2
3
6
BTC-MAN-ID1716 5/2/2018
- 62 -
Bill of Materials
Model #
BT-1C
Order ID
1716
REF_SYMBOL
020
PE STOCK #
DESCRIPTION
QTY
Control Panel Assembly
Alarm
A01
PE- 140
Peizo Alarm, Medium Chime Rate
1
PE- 1176
Pushbutton, 22mm Metal illuminated, Green, 1 NO Contact
1
PE- 1219
Contact Block, 1 NC
1
PE- 1718
PE- 1719
Button, emergency stop, red button
Button gaurd, yellow for PE-01718
1
1
Switch
S01
S02
May 2, 2018
Page 1 of 12
REF_SYMBOL
030
PE STOCK #
DESCRIPTION
QTY
Gas Control Assembly
Mass Flow Controller
MFC01
PE- 2996
MASS FLOW CONTROLLER 0-500CCM of O2, (± 15 VDC @ +60mA/-185 m
1
PE- 2996
MASS FLOW CONTROLLER 0-500CCM of O2, (± 15 VDC @ +60mA/-185 m
1
PE- 75
Pressure Switch, 0.5 to 15 PSIG
1
PE- 75
Pressure Switch, 0.5 to 15 PSIG
1
PE- 75
Pressure Switch, 0.5 to 15 PSIG
1
PE- 75
Pressure Switch, 0.5 to 15 PSIG
1
PE- 265
PE- 269
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 263
PE- 267
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 263
PE- 267
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 263
PE- 267
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 266
PE- 270
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 66
PE- 1234
Solenoid Valve, N/C, 1/8", Brass
Check Valve, 1/8"NPT, Female In, Male Out
1
1
PE- 66
PE- 1234
Solenoid Valve, N/C, 1/8", Brass
Check Valve, 1/8"NPT, Female In, Male Out
1
1
PE- 66
PE- 1234
Solenoid Valve, N/C, 1/8", Brass
Check Valve, 1/8"NPT, Female In, Male Out
1
1
PE- 66
Solenoid Valve, N/C, 1/8", Brass
1
MFC02
Switch
S01
S02
S03
S04
Terminal Block
TB01
TB02
TB03
TB04
TB05
Valve
V01
V07
V13
V16
May 2, 2018
Page 2 of 12
REF_SYMBOL
040
PE STOCK #
DESCRIPTION
QTY
PLC Assembly
Controllers
PC01
PE- 2194
PE- 2195
8 DC Input Module Plus (Sink/Source)
8 DC Output Module Plus
1
1
PE- 2196
PE- 2197
PE- 2211
8 AC Output Module Plus
4 Analog IN/4 Analog Output Plus (voltage)
EZPLCP Screw-dwn 8 slot base
2
2
1
PE- 80
PE- 257
Fuseholder, 12 Position
Fuse, Fast-Acting, 3AG, 1.0A, 250V
1
1
PE- 80
PE- 1611
Fuseholder, 12 Position
Fuse, .75 A, 3 AG, fast-acting, 250 v
1
1
PE- 80
PE- 258
Fuseholder, 12 Position
Fuse, Fast-Acting, 3AG, 2.0A, 250V
1
1
PE- 80
PE- 1256
Fuseholder, 12 Position
Fuse, Slow Blow, 1.5A
1
1
PE- 80
PE- 1256
Fuseholder, 12 Position
Fuse, Slow Blow, 1.5A
1
1
PE- 80
PE- 1256
Fuseholder, 12 Position
Fuse, Slow Blow, 1.5A
1
1
PE- 80
Fuseholder, 12 Position
1
PE- 1256
Fuse, Slow Blow, 1.5A
1
PE- 80
Fuseholder, 12 Position
1
PE- 257
Fuse, Fast-Acting, 3AG, 1.0A, 250V
1
PE- 1249
Signal Conditioner, Isolated
1
PE- 879
Power Supply, +/- 15VDC @ 0.8 A
1
PE- 103
Power Supply, +24VDC @ 1.2A (PE-100 & PE-200)
1
Fuse
F01
F02
F03
F04
F05
F06
F07
F12
Miscellaneous
MISC
Power Supply
PS01
PS02
May 2, 2018
Page 3 of 12
REF_SYMBOL
040
PE STOCK #
DESCRIPTION
QTY
PLC Assembly
Relay
K01
PE- 401
PE- 538
Diode, 400PIV, 1A
Socket, Relay
1
1
PE- 539
PE- 541
Mounting Strip, Relay
Relay, 4PDT, 24VDC Coil
1
1
PE- 540
Relay, 4PDT, 120VAC Coil
1
PE- 1221
Safety Relay
1
PE- 263
PE- 267
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 264
PE- 268
Terminal Block
Marker Strip, Terminal Block
1
1
PE- 888
PE- 889
Terminal Block, 30 Pos.
Marker Strip, Terminal Block
1
1
PE- 265
PE- 269
Terminal Block
Marker Strip, Terminal Block
1
1
SR01
Terminal Block
TB01
TB02
TB03
TB04
May 2, 2018
Page 4 of 12
REF_SYMBOL
050
PE STOCK #
DESCRIPTION
QTY
AC Power & PLC Assembly
Chiller
MISC
PE- 1129
POWER STRIP 10', 125V/15A, 6 Outlet, Nema 5-15
1
PE- 2094
PE- 2896
PE- 2898
Bracket, Circuit Breaker 3 pole
Circuit Breaker, 25A, 3 Pole, 240V, C-Curve, UL489, C60
Circuit breaker Lock out Kit, C60, Left Side
1
1
1
PE- 2788
Circuit Breaker, 15A, 277/480Y VAC, 1-pole
1
PE- 2277
Contactor, 120/230VAC, 3 phase, 120VAC coil, 5 HP/9A (PE-956)
1
PE- 1633
Fuse, 5A, 600VAC, Current Limiting Time delay
1
PE- 1634
Fuse, 5A, 250VAC, Current Limiting Time delay
1
PE- 2277
PE- 2286
Contactor, 120/230VAC, 3 phase, 120VAC coil, 5 HP/9A (PE-956)
Overload Relay, 7.0-10.0A (PE-969)
1
1
PE- 2282
PE- 2287
Contactor, 120/230VAC, 3 Phase, 120VAC Coil, 10 HP/18A (PE-958)
Overload Relay, 10.0-16.0A (PE-968)
1
1
PE- 1165
PE- 1166
Power Distribution Block, 3 Pole (BT-I)
Power Distribution Block, Single, Adder (62163) (BT-I)
1
1
PE- 1167
Safety Cover, 62000 Series Power Distribution Block
4
PE- 1632
PE- 1733
PE- 2351
Fuse Clips Kit, 4 clips with screws
Cover, control transformer, for all 350VA to 750VA
TRANSFORMER CONTROL 500VA 480x240VAC TO 240x120VAC
1
2
1
PE- 2993
XDS46i 100-120/200-230V 1 ph 50/60Hz set to 230V
1
Circiut Breaker
CB01
CB02
Contactor
K01
Fuse
F11
F12
Motor Starters
MS01
MS02
Terminal Block
TB01
Transformer
T01
Vacuum Pump
VP01
May 2, 2018
Page 5 of 12
REF_SYMBOL
060
PE STOCK #
DESCRIPTION
QTY
Vacuum Chamber Assembly
Chamber
CHAMB01
PE- 277
PE- 299
Hinge (Chamber Door) (MK II-0, -1, 1.5 & -2)
Viewport, Pyrex, 5" Dia. X 3/8" Thk. (MK II-0, -1, -1.5 & -2)(BT-1)
2
1
PE- 575
Draw Latch, Chrome Plated (Small)
1
PE- 1994
Pirani gauge, 0-10vdc, 1-2000 mTorr, 4-20ma,1/8" NPT male, 12 -35VDC 100
1
PE- 159
Switch, Momentary, SPST (Door Open)
1
PE- 64
PE- 373
Solenoid Valve, N/C, 3/8", Brass,(BT-1)
Vacuum Muffler, 3/8" NPT
1
1
PE- 2853
Blank off valve, KF40, 120V(for PE-200)
1
Meter
M01
Switch
S01
Valve
V01
V02
May 2, 2018
Page 6 of 12
REF_SYMBOL
PE STOCK #
070
DESCRIPTION
QTY
RF Generator Assembly
Generator
PS01
PE- 810
600 Watt Generator, 7A @ 220V
1
PE- 901
600 W Matching Network w/ Controller (N female) 130VA - 0.5A @220V
1
PE- 401
Diode, 400PIV, 1A
1
PE- 538
PE- 539
PE- 541
Socket, Relay
Mounting Strip, Relay
Relay, 4PDT, 24VDC Coil
1
1
1
PE- 401
PE- 538
PE- 539
Diode, 400PIV, 1A
Socket, Relay
Mounting Strip, Relay
1
1
1
PE- 541
Relay, 4PDT, 24VDC Coil
1
PE- 234
PE- 240
Terminal Block
Marker Strip, Terminal Block
1
1
Matching Network
MN01
Relay
K04
K05
Terminal Block
TB01
May 2, 2018
Page 7 of 12
REF_SYMBOL
080
PE STOCK #
DESCRIPTION
QTY
Cabinet Assembly
Fan
B01
PE- 561
PE- 562
Finger Guard, 10" Dia.
Fan ,500 CFM, 10" Dia., 0.88A @115V/1.6A locked
1
1
PE- 80
PE- 257
Fuseholder, 12 Position
Fuse, Fast-Acting, 3AG, 1.0A, 250V
1
1
PE- 1107
Receptacle, single, 15A-125V, NEMA 5-15
1
PE- 401
PE- 538
PE- 539
Diode, 400PIV, 1A
Socket, Relay
Mounting Strip, Relay
1
1
1
PE- 541
Relay, 4PDT, 24VDC Coil
1
PE- 401
PE- 538
Diode, 400PIV, 1A
Socket, Relay
1
1
PE- 539
PE- 541
Mounting Strip, Relay
Relay, 4PDT, 24VDC Coil
1
1
Fuse
F02
Plugs/Connectors
RC-03
Relay
K04
K05
May 2, 2018
Page 8 of 12
REF_SYMBOL PE STOCK #
090
Temp. Bath
DESCRIPTION
QTY
Temp Control Assembly
N/A
TBATH01
PE- 35
PE- 2405
May 2, 2018
Connector, Female
REFRIGERATED BATH, 15L BATH., 120V/60Hz, 13A, (RTE-7)
1
1
Page 9 of 12
REF_SYMBOL PE STOCK #
320
DESCRIPTION
QTY
Computer System
Computer
COMP
May 2, 2018
PE- 1085
Intel Pentium 4, 2.53Ghz, 512MB, 80GB Hard drive, 48X CD-RW
1
PE- 1396
PE- 2809
Touch screen monitor, Computer
2 port rs 232/422/485 isolated pci express
1
1
Page 10 of 12
REF_SYMBOL PE STOCK #
330
DESCRIPTION
QTY
Plumbing System
Temp. Bath
(300)TBATH01
PE- 200
May 2, 2018
Hose Assy, Tef. (W/850FS10-08 & 846FS10-06) (BT-1)
2
Page 11 of 12
REF_SYMBOL
500
PE STOCK #
DESCRIPTION
QTY
Consumables
Miscellaneous
MISC
PE- 458
May 2, 2018
O-Ring, Chamber Door (12 Slot)
1
Page 12 of 12
Recommended Spare Parts List
Model #
BT-1C
Order ID
1716
PE STOCK #
030
DESCRIPTION
USAGE
Gas Control Assembly
PE- 66
Solenoid Valve, N/C, 1/8", Brass
4
PE- 75
Pressure Switch, 0.5 to 15 PSIG
4
040
PLC Assembly
PE- 103
Power Supply, +24VDC @ 1.2A (PE-100 & PE-200)
1
PE- 257
PE- 258
PE- 540
PE- 541
Fuse, Fast-Acting, 3AG, 1.0A, 250V
Fuse, Fast-Acting, 3AG, 2.0A, 250V
Relay, 4PDT, 120VAC Coil
Relay, 4PDT, 24VDC Coil
2
1
1
1
PE- 879
Power Supply, +/- 15VDC @ 0.8 A
1
PE- 1256
Fuse, Slow Blow, 1.5A
4
PE- 2277
Contactor, 120/230VAC, 3 phase, 120VAC coil, 5 HP/9A (PE-956)
2
PE- 2282
PE- 2286
PE- 2287
Contactor, 120/230VAC, 3 Phase, 120VAC Coil, 10 HP/18A (PE-958)
Overload Relay, 7.0-10.0A (PE-969)
Overload Relay, 10.0-16.0A (PE-968)
1
1
1
PE- 64
PE- 159
Solenoid Valve, N/C, 3/8", Brass,(BT-1)
Switch, Momentary, SPST (Door Open)
1
1
PE- 299
PE- 1994
Viewport, Pyrex, 5" Dia. X 3/8" Thk. (MK II-0, -1, -1.5 & -2)(BT-1)
Pirani gauge, 0-10vdc, 1-2000 mTorr, 4-20ma,1/8" NPT male, 12 -35VDC 100ma
1
1
050
AC Power & PLC Assembly
060
Vacuum Chamber Assembly
070
RF Generator Assembly
PE- 541
080
Relay, 4PDT, 24VDC Coil
2
Cabinet Assembly
PE- 257
Fuse, Fast-Acting, 3AG, 1.0A, 250V
1
PE- 541
PE- 562
Relay, 4PDT, 24VDC Coil
Fan ,500 CFM, 10" Dia., 0.88A @115V/1.6A locked
2
1
PE- 458
O-Ring, Chamber Door (12 Slot)
500
Consumables
1