DISCO Corporation DISCO Mission Bringing faraway science to comfortable living through advanced Kiru, Kezuru, Migaku technologies Universal Technologies Kiru Kezuru Migaku Cutting Grinding Polishing One strand of hair cut into 35 sections www.dicing-grinding.com DISCO CORPORATION All rights reserved Mother company DISCO Corporation : Headquarters and main factory in Japan 2 DISCO Headquarters in Tokyo with >800 R&D and application engineers Kuwabata Building A+B Size 200 x 100 m², 8 stories 120.000 m² assembly floor; 1.500 employees; >400 machines per month www.dicing-grinding.com DISCO CORPORATION All rights reserved Company – Who we are, context, history 3 DISCO Hi-Tec Europe GmbH in Munich, Germany Established 1998 - 85 employees - New cleanroom opened 2014 New cleanroom www.dicing-grinding.com DISCO CORPORATION All rights reserved Strength - New Cleanroom for production services 4 Highly experienced KKM-engineers carry out tests to find the best solution and process combination for production runs, wafer handling and prototype development. Floor Size: 400 m² Total Machines: >35 www.dicing-grinding.com DISCO CORPORATION All rights reserved DISCO Europe Applications Overview 1/2 Standard dicing, grinding and polishing from 2“ – 12“ Special solutions 5 Dicing Before Grinding (DBG) for 20 µm thin dies Plasma etching for high die strength TAIKO grinding for power devices of down to 40 µm and solutions for 3D-TSV Surface planarization for bumps and tapes (3D, W2W-bonding, TTV down) Stealth dicing for Silicon, SiC, Glass with expansion on flat frames or grip rings Ultrasonic dicing and grinding of SiC and brittle materials www.dicing-grinding.com DISCO CORPORATION All rights reserved DISCO Europe Applications Overview 2/2 6 Edge Trimming and circle cut dicing Mold grinding Sapphire wafer supply Solutions to avoid particles adhering to wafer front sides during grinding and laser dicing Tape development with new tape partner DENKA from Japan Recent achievements: New laser based solutions in the medical device market (e. g. implants, blood analysis) New solutions and production for thin smart card devices New production for 50 µm thin glass dies www.dicing-grinding.com DISCO CORPORATION All rights reserved Fully Automatic Optical Inspection 7 Camtek optical inspection tool to examine wafers of various thicknesses and material, including glass and MEMS. This fully automated system scans and analyzes wafers for bump height deviations, structural irregularities and other surface defects. www.dicing-grinding.com DISCO CORPORATION All rights reserved Quantity of processed wafers www.dicing-grinding.com 8 DISCO CORPORATION All rights reserved 9 Let‘s bring more cool, very thin, very small and very powerful applications and products from Europe to the global market! Thank you for your attention! Gerald Klug DISCO Hi-Tec Europe GmbH 18.06.2015 www.dicing-grinding.com DISCO CORPORATION All rights reserved