IEEE CPMT Meeting, San Jose, CA Wafer Level Packaging L. Nguyen National Semiconductor Corp. Santa Clara, CA Acknowledgments: N. Kelkar, V. Patwardhan, C. Quentin, H. Nguyen, A. Negasi, E. Warner Feb-02 1 What is a WLP? • Significant confusion in the industry over the term “wafer-level packaging” • Simple definition: “All packaging and interconnection must be fabricated on the wafer prior to dicing” → Bumped chips are WLP? • Differentiation: Are the devices packaged further prior to assembly? • High I/O µPs and ASICs: chips are mounted on chip carriers before surface mount attachment → Not WLPs • Small die and/or die with low I/O can be mounted directly on the final substrate → WLPs Feb-02 2 1 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 3 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 4 2 Package Forecast 308+ 212-304 1998 2003 I/O RANGE 148-208 104-144 72-100 36-68 20-32 4-18 100 10 5 UNITS (M) Source: Electronic Trend Publications 1999 Feb-02 10 4 1000 5 Flip Chip Packages Definitions 1000 UNITS (M) 800 FCOB FCOO BGA FC CSP FC MCM FC Direct Attach FCOB - Flip Chip on Board FCOO - Flip Chip on Other 600 400 200 0 1997 1998 1999 2000 YEAR Feb-02 2001 2002 In Package BGA FC - FC in BGA CSP FC - FC in CSP (includes WL-CSP) MCM FC - FC in MCM Source: Electronic Trend Publications 1999 6 3 WLP Growth Projections 8-in WAFER EQUIVALENT 6 2 10 High Low 6 1.5 10 Source: Electronic Trend Publications 1999 6 1 10 Total Packages 5 5 10 0 2001 2002 2003 2004 2005 YEAR Feb-02 Source: TechSearch 2001 7 Form Factor Migration STANDARD < 208 lead ⇒ TO PDIP ⇒ PLCC ⇒ > 208 lead PGA ⇒ SOP SOIC ⇒ MSOP TSSOP ⇒ ⇒ QFP ⇒ TQFP ⇒ CSP BGA ⇒ BGA ⇒ FP-BGA (1.27 mm) (1.0 mm) ⇒ SOT CSP ⇒ ⇒ (Leaded/Laminate) SC70 CSP (Wafer) (0.8 mm) POWER DPAK, D2PAK, TO263 TO220 ⇒ PACKAGE ENHANCEMENTS THERMAL ELECTRICAL OPTICAL Feb-02 Embedded heat slug ⇒ Drop-in HS Shorted leads MQFP Aluminum nitride EMC Shorter leads Shorter wire bond ⇒ Exposed DAP Multiple wires LCC ⇒ Pre-molded Custom Custom ⇒ Exposed DAP ⇒ Solder bumps ⇒ CSP Custom 8 4 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 9 CSP Migration toward Wafer Level Packaging • CSP applications are rapidly expanding with drivers in … – Flash memory – RAMBUS DRAM – Analog • Evolution of CSP technology toward Wafer Level Packaging due to the following factors: – Batch fabrication of ICs in arrays – Test and burn-in in strip and array format; strip format has continuously increased in manufacturing for higher throughput – Adaptability of some configurations to wafer level processing more than others (e.g., possibility for die shrink) – Emergence of 0.5 mm pitch as the standard for CSPs in memory, µPs, DSPs, ASICs, and most consumer products Feb-02 10 5 CSP for Portable Application …1 Other applications: Game Gear, Play Station, Portable Computers, etc.. Feb-02 11 CSP for Portable Application …2 Casio Color Wristwatch/Camera (CPU in RealCSP by IEP Technologies) Handspring Visor Edge (Integrated passive devices in Ultra CSP) Feb-02 12 6 Benefits of WL-CSP Wafer Level-CSP can provide the following benefits: – Batch processing to lower costs – Handling and shipping logistics can be streamlined • Final test is done at the wafer level. Savings in test and logistics can be equally, or more important, than the manufacturing cost of the package • ICs can be packaged in the fab and shipped directly to customers for surface mounting with conventional SMT; shortens TAT; lower assembly capital costs • Ability to minimize inventory Feb-02 – No need for Known Good Die - tested like other ICs – Functionality can be packed into a form factor as small as the die – Wider pitch allows for wider UBM, taller bumps, and better joint reliability 13 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 14 7 Barriers and Challenges Like any other new technologies, WL-CSP still faces a number of hurdles ... • • • • • Infrastructure is not quite established Wafer bumping is still too costly High cost for poor yield wafers High cost for low wafer bumping yields Who should manufacture the WL-CSP (IC or bumping house) • Die shrink strategy • Solder joint reliability is more critical (since underfill may not be used in the application) Feb-02 15 Users of WL-CSPs • USA – FCD, Unitive, MCNC, Dallas Semi (1wire), Xicor (Shell BGA, Ultra CSP), National Semi (micro SMD), Atmel, CMD (Ultra CSP), Alpine Micro Systems (WALEP), TI (NanoStar) • Europe – TU Berlin, IMEC, CS2 • Taiwan – Apack, Unitive Taiwan, ASE, SPIL, Chipbond, ShellCase (Xintec) • Korea – Amkor, Hyundai • Japan – IEP/Oki/Casio (Real CSP) – Fujitsu/Shinko (Super CSP) – Hitachi (WPP2) Feb-02 16 8 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 17 Micro SMD • Micro SMD is a Wafer Level-Chip Scale Package • No interposer - the die is the package • Micro SMD has the following advantages: – No need for underfill (although some OEMs use underfills for certain applications such as portable consumer products) – Smallest footprint per I/O - savings in PCB estate – Leverage standard surface mount assembly technology – Cost-effective manufacturing and assembly – Matrix interconnect layout designed at 0.5 mm pitch – 0.9 mm maximum package height – Epoxy backcoating provides conventional black marking surfaces Feb-02 18 9 Package Construction 8 5 mm 7 6 5 mm 1.5 mm 5 4 MSOP-8 1.5 mm 3 2 3 mm 1 0 TSSOP-14 MSOP-8 SOT23-5 SC70-5 microSMD-8 SMT PACKAGE TYPE Micro SMD: 4, 5, 8, and 14 I/O Comparison between various SMT 0.5 mm pitch; JEDEC Standard MO-211 packages and the micro SMD Feb-02 19 Package Construction Cross-section of an 8 I/O micro SMD bonded to an organic substrate Feb-02 Cross-section of a solder ball 20 10 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 21 Process Flow Incoming wafer 2nd passivation Laser mark Bumping Test (Wafer sort) Back side coating Saw Tape and reel Feb-02 22 11 Assembly Flows micro SMD Conventional Package PQFP & TSSOP CSP Wafer Fab Wafer Fab Wafer Fab Solder Bumping Wafer Sort Wafer Sort Backside Coating Marking Saw Saw Die Attach Die Attach Final Test Wire Bond Plasma Clean Saw Mold Wire Bond Tape & Reel Lead Plating Mold Trim & Form Laser Mark Final Test Mark Tray / Tape & Reel Feb-02 5 process steps 1 test step 7 process steps 2 test steps Saw Final Singulated Test Tape & Reel 7 process steps 2 test steps 23 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 24 12 Package Selection • WL-CSPs will replace traditional perimeter leaded packages: – Initially targets low pin count memory and analog devices; growth highest in wireless portable applications where small form factor and weight are crucial factors – Growth relies on the existing assembly infrastructure • Criteria for choosing from the many CSP versions? – From IC supplier: Reduced TAT, inventory size, cost reduction from transportation and logistics simplification, manufacturability, and scaleability – From user: Cost, electrical performance, thermal performance, manufacturability (assembly), and reliability Feb-02 25 Package Selection 120 Laminate CSP Pin Count 100 80 60 TSSOPs L/F based CSP (.5/.65 mm) 40 20 0 MSOPs SOTs 98 Feb-02 micro SMD 99 Year 00 01 26 13 (Thermal) 300 200 50 MSOP SOT LLP 2-layer board @ 0.7 W 100 2-layer board @ 0.5 W 150 1-layer board @ 1.0 W with 50x50 mm Cu enhancement 250 2-layer board @ 0.5 W Junction Temperature (oC/W) Package Selection micro SMD Thermal performance comparison of 8-lead MSOP, Feb-02 SOT, LLP, and micro-SMD 27 Micro SMD 8 bump package footprint Package Selection 350 160 (Manufacturability - PCB Layout) Feb-02 500 • Both non-solder mask defined (NSMD) and solder mask defined (SMD) layouts possible • Prefer NSMD for (1) tighter control on copper etch process, (2) minimal stress concentration, and (3) ease of trace routing • Recommend 0.5 oz (12 to 15 µm) top layer copper thickness • Internal reliability data collected with NSMD design, 0.5 oz copper and OSP lead finish • For Au finish recommend to limit Au flash thickness < 0.5 µm Copper pad 500 All dimensions are in microns PCB Solder mask Solder Mask Copper Pad NSMD Substrate SMD 28 14 Package Selection Micro SMD 8 bump stencil layout 525 525 (Manufacturability - Solder Paste Printing) Stencil aperture R 50 • Recommend laser cut process followed by electro-polish to ensure tapering aperture walls to facilitate paste release. • Recommend aperture 0.300 mm X 0.300 mm square on a 0.125 mm thick laser cut + electro-polished stencil • Type 3 or finer solder paste is recommended • With recommended stencil parameters a vertical standoff of ≥ 0.140 mm in the final assembly can be achieved 300 225 300 All dimensions are in microns 225 Stencil Feb-02 29 Package Selection (Manufacturability - Pick & Place) • Micro SMD can be placed using standard SMT placement m/c Offset • Part silhouette or bump recognition can be used to position micro SMD • Micro SMD aligns with land pattern by self-aligning of flip chip solder joints • Component placement height for the micro SMD should be compensated for its thickness such that minimal force (< 50 gm/bump) is exerted on it when comes in contact with the PCB Platforms used: • Micro SMD can be assembled without Fuji CP60, CP3; Amistar solder paste (flux only) in case of PlacePro 5800; ESEC Micron 2; rework procedure Feb-02 Siemens; Universal GSM 30 250 O - Self Aligned X - Not Aligned SMT Process Envelope Flip-Chip Process Envelope Y-Offset (um) 200 150 100 50 0 0 50 100 150 200 250 300 X-Offset (um) 15 Package Selection (Manufacturability - Solder Reflow) • Micro SMD is assembled using standard reflow process • Thermal profile at specific board locations is determined • Recommend Nitrogen purge during solder reflow operation • The micro SMD is qualified for up to three reflow operations (JSTD-020) • Rated max peak temperature = 260°C for < 30 sec • Depending on the type of flux used assembly may be cleaned Reflow Furnace: Heller 1700 N2 Capable Feb-02 31 Package Selection (Manufacturability - Rework) • Rework process similar to a standard BGA or CSP part • Rework process duplicates the original reflow profile • Automated re-work developed using OK International’s BGA3000 Rework System (includes localized convection heating with profiling capability, bottom-side pre-heater, and part placer with image overlay alignment) • Manual rework is possible using soft tip high temperature pick-up tool (e.g. tweezers, vacuum wand) Feb-02 and hot vacuum / air gun “A Successful Rework Process for Chip-Scale Pack-ages”, Paul Wood, OK International, Chip Scale Review, Vol. 2, No. 4, 1998. 32 16 WL-CSP Failure Modes Al Pad Passivation PI UBM High Lead Eutetic Solder Mask Die NPEU PIHL NPHL Failure Locations PIEU Cu Pad PCB • Eutectic bump w/o PI showed Al pad peeled off from die and cratering • PI showed no significant effect on high lead • PIEU with 3 mil stand-off showed 50% cumulative failure rate at 550X • High lead deformed much greater than eutectic solder Feb-02 33 Failure Locations No PI + Eutectic (Al Pad Peel Off) No PI + High Lead (Failed at Intermetallic) Feb-02 PI + Eutectic (Joint Failed at PCB) PI + High Lead (Failed at High Lead) 34 17 Failure Mechanisms Material Device Substrate CTE Effect of Manufacturing Variables Process Bumping Solder mask Passivation High Pb Solder CTE/E Encapsulation Voids Underfill Eutectic Adhesion Time Dependent Creep Deformation Temperature Cycle Wetting Time Independent Plastic Deformation Height Cap Dia Size Thermal Shock Loading Solder Joint Fatigue Life Underfill DNP Substrate Feb-02 Voids Solder Joint Silicon Thickness Geometry Cause and Effect for Solder Joint Fatigue 35 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 36 18 Development of Pb-Free Solders (Ternary Systems) SYSTEM KNOWN COMPOSITIONS Tm (o C) Sn-Ag-Bi 91.8Sn/3.4Ag/4.8Bi (E) 92Sn/3.3Ag/4.7Bi 43Sn1Ag/56Bi (E) 83.5Sn/2.5Ag/14Bi 94Sn/2Ag/4Bi 92.5Sn/1.5Ag/6Bi 211 213-215 136.5 142-218 223-231 188-229 88.0Sn/3.2Ag/8.8In 83.9Sn/4.1Ag/12In 77.2Sn/2.8Ag/20In 200-207 190-200 178-189 93.6Sn/4.7Ag/1.7Cu (E) 96.75Sn/1.25Ag/2Cu 96.5Sn/0.5Ag/3Cu 95.65Sn/0.35Ag/4Cu 94.75Sn/1.25 Ag/4Cu 216 224-260 225-296 227-332 224-260 Sn-Ag-In Sn-Ag-Cu SYSTEM KNOWN COMPOSITIONS Tm (o C) Sn-Ag-Zn 95.5Sn/3.5Ag/1Zn 217 Sn-Bi-In 70Sn/20Bi/10In 80Sn/10Bi/10In 143-193 163-209 Sn-Bi-Sb 75Sn/19Bi/6Sb 140-220 Sn-Bi-Zn 78Sn/16Bi/6Zn 41.7Sn/57Bi/1.3In 134-196 127 Sn-Cu-In 75Sn/0.01-9.5Cu/0.01-6In/addition 209-214 Feb-02 37 Consortia Recommendations • NCMS: 96.5Sn/3.5Ag; 91.7Sn/3.5Ag/4.8Bi; 42Sn/58Bi • NEMI: Sn/Ag/Cu without Bi is best in reliability (217-221oC) • Brite Euram: 95.5Sn/3.8Ag/0.7Cu (for general purpose soldering); 99.3Sn/0.7Cu; 96.5Sn/3.5Ag; Sn/Ag/Bi • Germany: 96.5Sn/3.5Ag; 99Sn/1Cu • UK (Department of Trade & Industry): options depend on the applications: – automotive/military – industrial/telecoms – consumer Sn/Ag/Cu(Sb) Sn/Ag/Cu, Sn/Ag Sn/Ag/Cu(Sb), Sn/Ag, Sn/Cu, Sn/Ag/Bi • Japan Electronics Industry Development Association: – Sn/Ag/Cu (before Pb-free components available) – Sn/Ag/Bi (after Pb-free components available) Feb-02 38 19 Micro SMD Adoption Path Sn/Ag/Cu Sn/Pb • Best solder joint performance results with homogeneous combination of lead-free solder. B: Sn/Ag/Cu • Standard Sn/Pb P: Sn/Pb packages can be mounted with lead-free paste. B: Sn/Pb • Worst solder joint P: Sn/Ag/Cu performance results with lead-free packages with B: Sn/Pb Sn/Pb paste and Sn/Pb P: Sn/Pb reflow. Bump Paste Sn/Pb Sn/Ag/Cu B: Sn/Ag/Cu P: Sn/Pb B: Sn/Ag/Cu P: Sn/Ag/Cu B: Sn/Pb P: Sn/Ag/Cu 220oC 260oC 260oC 220oC 260oC 220oC Feb-02 39 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 40 20 Wafer Level Underfill Bottom View - Micro SMD 8 I/O with Wafer Level Underfill Side View - Micro SMD 8 I/O with Wafer Level Underfill Top View - Micro SMD 8 I/O with Wafer Level Underfill is assembled on PCB Over View - Micro SMD 8 I/O with Wafer Level Underfill Feb-02 41 Wafer Level Underfill State of the Art - Conventional Underfill Process DEVICE Align and Place SUBSTRATE Solder Bump Reflow Underfill Dispense Underfill Cure Process Flow 1. Align bumped device with substrate pads 2. Reflow assembly to create solder joint 3. Dispense underfill and flow under device 4. Cure underfill Feb-02 42 21 Wafer Level Underfill State of the Art - Conventional Underfill Process Process Disadvantages 1. Slow - 4-5 minutes (for 6 mm die w/ 3mil gap) 2. Performed at device level - can be bottleneck 3. Lengthy cure (1-4 hours) - separate process 4. Sensitive to air entrapment (voids) Material Disadvantages Feb-02 1. Thermoset materials - not reworkable 2. Material properties - often at odds w/ process requirements a. High filler loading - slows flow under die b. Low filler loading - susceptible to popcorning 3. Cure sensitive properties - short floor life 4. Solvent use can cause voiding or bubbling 43 Wafer Level Underfill State of the Art - Fast Flow Underfill Process Process Disadvantages Sensitive to material/device wetting characteristics Feb-02 Underfill of Test Chip Q Underfill of Test Chip Q with mixed array with full array (13 mm die, (13 mm die, 25 µm gap, 200 µm & 400 µm 25 µm gap, 250 µm pitch) pitches) 44 Material - Dexter FP4511 Material - Dexter FP4511 22 Wafer Level Underfill State of the Art - Fast Flow Underfill Process Process Disadvantages Sensitive to air entrapment Feb-02 Small void formed during underfill of Test Chip Q (perimeter array) with Namics U8433 Large void formed during underfill of Test Chip Q (full array) with Dexter FP4511 45 Wafer Level Underfill State of the Art - No Flow Underfill Process Process 1. Dispense underfill over entire bond area 2. Align and place die 3. Cure underfill DEVICE SUBSTRATE Underfill Dispense Feb-02 SUBSTRATE Align and Place Underfill Cure 46 23 Wafer Level Underfill State of the Art - No Flow Underfill Process Process Disadvantages 1. Alignment difficult - bond pads covered 2. Underfill can be retained between solder ball and pad causing mechanical or electrical joint failure 3. Process still performed at package level 4. Susceptible to voiding 5. Potential to “float” die w/o accurate dispensing Material Disadvantages 1. 2. 3. 4. Feb-02 High reliability materials still in R&D Extremely high CTE (up to 80 ppm/K) Potential for moisture absorption Non-reworkable 47 Processing Issues Current Process Flow Proposed Process Flow a) Bumped and Coated wafer a) Saw Wafer into Die Underfill Wafer Wafer b) Assemble Die and Substrate b) Gel Underfill Apply heat Die Wafer Substrate c) Reflow Solder c) Saw Wafer into Die Apply heat Die Substrate d) Apply Underfill Wafer Dispensing Needle e) Cure Underfill Apply heat Feb-02 d) Assemble Die and Substrate Die Die flow Substrate Screen Printing Underfill Substrate e) Simultaneously Reflow Solder and Cure Underfill • High viscosity - material does not flow through the screen ahead of the squeegee and ruin the print resolution • Pseudoplastic - material flows through the screen under high pressures exerted by the squeegee • High solids - more efficient material transfer; thicker films; reduced waste Apply heat Die Die Substrate Substrate 48 24 Processing Issues a)No stress at gel temperature Coating - Large CTE Wafer - Small CTE Stress-Induced Warpage b)Shrinkage at ambient temperature Coating Large Shrinkage Wafer • Wafer curvature - planarity is critical to the dicing process. Small Shrinkage c)Stress at ambient temperature Coating Wafer Stress on Wafer No contact between solder ball and pad Die – Caused by CTE mismatch between “soft cured” underfill and the silicon wafer. – Primary factors: wafer thickness, film thickness, modulus of wafer, modulus of film, type of coating (e.g., blanket vs. patterned). Substrate Feb-02 49 Processing Issues 3 - Wafer: 200 mm (8”) - Nominal thickness: 0.77 mm - Underfill coating: 0.11 mm (4 mils) - Two underfills: 1 and 10 GPa Curvature can reach 0.2x (E=1 GPa) to 2.6X (E=10 GPa) of a 200 mm wafer nominal thickness NORMALIZED CURVATURE Wafer Warpage 2 1 0 0 1 2 3 4 5 6 COATING PATTERN Feb-02 50 25 Processing Issues Underfill Hub Blade Wafer Kerf Tape Dicing-Induced Damage Negligible impact • Potential problems encountered during dicing @ Chipping @ die edges 30-40 kRPM – Chipping: minimal on coated side; potentially high on back side. Irregular kerf width/blade – Blade loading: accelerated blade loading wear / life; irregular cut widths; heat generated caused melting of Reflow of material into kerf the material into the kerf. – Film delamination: poor adhesion accentuated by the shearing of the wafer. Film delamination Feb-02 51 Processing Issues Silicon die Underfill Solder Wetting Under Constrained Conditions Substrate Initial State At Temperature T Final State Feb-02 • Wetting of solder pad potentially poor / incomplete pad wetting due to the presence of the underfill surrounding the solder balls. • Primary factors: surface tension of underfill / solder, weight of die, external force, coating thickness. 52 26 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 53 Conclusions • WL-CSP is driven by imperatives such as: – – – – Packaging cost Production, handling, and testing logistics Functionality, performance, size, and weight Integration and interconnect density • WL-CSP such as the micro SMD is highly suitable for low pin count analog applications (cellular phones, cameras, flash minicards, portable products, etc.) • Criteria for selection of a particular form factor and pin count will depend on both IC suppliers and end customers readiness • Next advances in lead-free and wafer level underfill Feb-02 54 27 Outline • • • • • • • CSP packaging trends CSP migration toward wafer level processing WL-CSP barriers and challenges micro SMD package construction Process / assembly flows Package selection criteria Future developments – Lead-free – Wafer level underfill • Conclusions • References Feb-02 55 References • General WLP books/articles: – – – – – – – – TechSearch CSP/BGA Update Service Prismark (market research, trends) Electronic Trend Publications (market research, trends) IEEE Transactions on Advanced Packaging, Vol. 23, No. 2, May 2000 issue. “Wafer Level Packaging Has Arrived,” P. Garrou, Semiconductor International, pp. 119-128, October 2000. Chip Scale Packaging, J. Lau and S. W. R. Lee, Eds., McGraw Hill (1999). “Wafer Pre-Applied Encapsulant Materials and Processes,” Q. Tong, S-H Hong, L. Nguyen, H. Nguyen, and A. Negasi, 52nd Electron. Comp. & Tech. Conf., May 28-31, San Diego, CA (2002). “Lead-free WL-CSP: Assembly and Reliability,” V. Patwardhan, N. Kelkar, and L. Nguyen, 52nd Electron. Comp. & Tech. Conf., May 28-31, San Diego, CA (2002). • TC-18: Wafer Level Packaging Feb-02 – http://cpmt.org/tc/tc18.html 56 28