Semiconductor nanowires for solar cells

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Semiconductor nanowires for solar cells:
Single junction and heterojunction photovoltaics
Presented by
Ted Kamins
Consulting Professor
Department of Electrical Engineering
Stanford University
Stanford CA 94305
Ge/Si core-shell nanowires and nanotubes
N. J. Quitoriano, et al.,
Nano Letters 9, 1511-1516 (2009).
Courtesy of Prof. N. J. Quitoriano,
McGill University
20 nm
For efficient solar cells
1) Increase absorption of solar spectrum
Material selection
Thickness of absorbing material
Shape
2) Increase
I
collection
ll ti off photogenerated
h t
t d carriers
i
Material quality
Geometry
How can semiconductor nanowires help increase efficiency?
For efficient solar cells
1) Increase absorption of solar spectrum
Material selection
Thickness of absorbing material
Shape
2) Increase
I
collection
ll ti off photogenerated
h t
t d carriers
i
Material quality
Geometry
How can semiconductor nanowires help increase efficiency?
What is a nanowire?
Structure with one dimension (e.g., length) much greater than others
“nano” implies other dimensions (e.g., diameter) < 100 nm
Usuallyy single
Usua
s g e crystal
c ysta for
o good e
electrical
ect ca p
properties
ope t es
Semiconductor nanowires for photovoltaics
Limitations of planar solar cells
Tradeoff: Photon absorption – carrier collection
Limited heterostructures: different lattice parameters
How nanowires can help overcome these limitations
Nanowire growth
F
Focus
on Vapor-Liquid-Solid
V
Li id S lid (VLS) growth
th b
by CVD
Other techniques: MBE, solution growth, etching, anodization
Catalyst
Solar cells
Single junction
Axial: Bulk impurities and surface states can limit performance
Core-shell structure
Heterostructures
Resonance effects
Reusable substrates
Focus on nanostructure growth and properties and their relation
to solar cell efficiency
Two-dimensional, planar solar cell
Carriers generated within depletion regions are efficiently collected
Carriers generated outside of depletion region diffuse (or drift)
t depletion
to
d l ti region
i tto b
be collected
ll t d
Carrier collection
Carrier recombination
p+
p+
p+
n
n+
n
n+
n
n+
Absorption and collection are coupled in planar solar cell
Tradeoff for thicker absorbing
g layer
y
More light absorption and carrier generation
Less collection of photogenerated carriers
More recombination
Higher cost for thicker and higher
higher-quality
quality material
5
Light absorption in silicon
100
1
1 nm
1 µm
10-2
1 mm
10-4
10-6
1 cm
10-8
1m
10-100
200
Absorptio
on Length
Abssorption Co
oefficient (µm-1)
Absorption in Silicon
600
1000
Wavelength (nm)
1400
Reference: Wikipedia
Reference: http://pvcdrom.pveducation.org/APPEND/OPTICAL.HTM
Many carriers generated deep within silicon solar cell
Not efficientlyy collected if diffusion length
g limited by
y material q
quality
y
LD = 2(D) ( = minority-carrier recombination lifetime)
Metal-catalyzed (VLS) nanowire growth
“Bottom-up” nanowire fabrication
SiH4
H2
Gas transport
Si H
SiH4
Si
Metal catalyst
particle (eg, TiSi2 )
y
surface reaction
Catalyzed
Diffusion (bulk or surface)
Precipitation
Metal nanoparticle
Si nanowire
Si substrate
Metal-catalyzed Si and Ge nanowires
2 µm
1 m
5µm
Au NanoP+Bake
+ NW (363-3)
500 nm
1.5 µm
Diameter: 5 nm to >1 µm
Random or epitaxial alignment
Aspect ratio for straight nanowires > 1000:1
Nanowire diameter depends on
Catalyst nanoparticle size
Nanowire growth conditions
Nanowire properties can depend on catalyst material
Temperature
e (C)
Material for catalytic nanoparticles
Au: Liquid eutectic: ~360C
360 C for Si and Ge
Growth temperature 400 – 1000C
Nanoparticle in liquid state during growth
Vapor-liquid-solid (VLS) growth
Ti: Liquid eutectic: 1330C
Growth temperature: ~600C
Nanoparticle in solid state
Vapor-solid-solid (VSS) growth
Temp
perature (C))
During nanowire growth
catalyst nanoparticle can be in
liquid state (VLS) or solid state (VSS)
1500
1414
Au-Si
1300
L
1100 1064
900
700
500
363C
300
1000 20 40 60 80 100
Au Atomic Percent Silicon Si
2200
2000 Ti-Si
L
1800 1670
1600
1414
1400
1330
1330C
1200
1000
800
600
0
20
40
60
80 100
Ti
Atomic Percent Silicon Si
Catalyst
Desired characteristics:
Au
Small nanoparticles; narrow size distribution
Deposition temperature above or
below liquid eutectic temperature
(VLS vs. vapor-solid growth)
360 C
((Small size lowers eutectic temperature)
p
)
Low solid solubility in Si
1014-1016
Not a deep energy level in Si bandgap Et-Ei 0.01eV
Ti
1330 C
1012 cm-3
0.34 eV
Methods of forming catalyst on substrate:
Random locations
Deposit thin metal layer (~nm) and anneal
Surface tension causes agglomeration into nanoparticles
Disperse pre-formed catalyst nanoparticles
Pre-determined locations – with low-cost techniques
Imprint lithography
Bl k co-polymer
Block
l
Anodic aluminum oxide
Nanoimprint lithography
+ electroless deposition
Si(111) + NIL + electroless Au
Si nanowires (~top view)
OMIT: 60%
60% vertical
vertical
OMIT:
Nanowires often grow in (111) directions
Position catalyst using self-assembly
Block co-polymers
Use as mask for metal (electro)deposition or include metal in polymer
Suitable for small
small-diameter,
diameter closely spaced nanowires
Short-range order in array
100 nm
Alternatively
Porous anodic aluminum oxide
Forms array with short-range order
200 nm
Nanowire growth
Materials
Si nanowires: Precursors: Si2H6, SiH4, SiH2Cl2, SiCl4
Growth temperature 400 - 1000 C
Ge nanowires: Precursor: Usually GeH4
Growth temperature: ~300 C
Oth semiconductors:
Other
i
d t
e.g., GaP,
G P GaAs,
G A InP,
I P InN
I N
Alignment
Nanowires often grow in (111) directions
U Si(111) substrate
Use
b t t ffor vertical
ti l alignment
li
t
Somewhat expensive
Repositioning nanowires after growth
C d
Can
detach
t h nanowires
i
f
from
growth
th substrate
b t t
Place on another substrate
Benefits
Decouple
p high-temperature
g
p
g
growth from substrate
Allows use of low-temperature substrates
eg, Low-temperature (low cost) glasses
Possible advantages of nanowire solar cells
Decrease reflectance (light trapping)
Increase junction area; i.e., increase surface area / unit volume
Decrease distance between carrier generation and collection
Wider range of materials and heterostructures
Resonance effects
Less material used
Vertically aligned nanowire solar cell
1) Grow vertically aligned nanowires 2) Fill with transparent insulator
3) Chemical-mechanical polish
4) Dope top of nanowires (optional)
5) Add top transparent conductive electrode
Nanowires often g
grow in ((111)) directions
Use Si(111) substrate for vertical alignment
Decrease reflectance: “Light trapping”
Multiple reflections reduce overall reflectance, increase absorption
Sensitive to angle of incident light
Increase light scattering between nanowires
Light incident parallel to nanowires
Low absorption
Introduce scattering centers
between nanowires
M. D. Kelzenberg, et al, Nature Materials 9, 239-244 (March 2010)
Random alignment of nanowires
Less dependent on angle of incidence of light
Can grow on non-single-crystal substrate
Limited connection and packing density
1) Grow randomly aligned nanowires 2) Fill with transparent insulator
3) Chemical-mechanical polish
4) Dope top of nanowires (optional)
5) Add top transparent conductive electrode
Deep energy levels within nanowire
pn  ni
U
Et-Ei
2

 Et  E i 
 p  n  2ni cosh kT  0



1
0 =
LD =  (D)
 vth Nt
0 55
0.55
Ti
Au
0.34 0.01A
0.26D
Concern: Catalyst metal incorporation into growing nanowire
For Au, solid solubility (Nt) ~1014 cm-3 at 500C
0 ~ 100 ns; LD ~ 10 m
Serious concern: High-temperature NW growth
For Au, solid solubility (Nt) ~1016 cm-3 at 1000C
0 ~ 1 ns; LD ~ 1 m
Also, worse if extra catalyst remains on NW surface
Solutions:
Use catalyst that does not introduce deep levels
Build structure so photo-generated carriers
are created within ~ LD of collecting region.
Carrier recombination at surface states
n+
n+
Surface
states
p+
p+
IIncrease carrier
i absorption
b
i b
by lilight
h trapping,
i
b
but ….
Carriers recombine at surfaces before reaching collecting junction
Carriers not collected  reduced efficiency
Improve by
Passivating surface states
For Si: With native oxide on surface: Ns = 2.3  1012 cm-2
After growing thermal oxide: Ns = 5 – 10  1011 cm-2
(Ns probably can be markedly reduced)
Decreasing distance to collecting junction
Ec
Ei
Ev
Core-shell structure
i
p i n
p
n
Decouple minority-carrier diffusion length from absorption depth
Design so diameter <~ minority carrier diffusion length
Maximize absorption length
Minimize loss of photogenerated carriers by recombination
Core-shell structure: VLS + uncatalyzed growth
VLS growth
p-type
Uncatalyzed growth
undoped (optional)
Uncatalyzed growth
n-type
Grow p-type
G
t
nanowire
i by
b catalyzed
t l
d VLS growth
th
Possibly remove catalyst NP
Change growth conditions to favor uncatalyzed epitaxial growth
Higher temperature
temperature, more reactive precursor
precursor,
Grow undoped shell (optional)
Grow n-type shell
Core-shell nanowire solar cell
p-n
n
p-i-n
n
p
i
p
heterojunction
Group IV, III-V, II-VI
n
i
p
Transparent
electrode
Transparent
i
insulator
l t
Insulator – eg, SiO2
Substrate - eg, Si(111)
How to form core-shell structures
1) Grow nanowires (VLS), deposit epitaxial shell (non-catalyzed growth)
Homojunction or heterojunction
2) Grow nanowires (VLS),
(VLS) deposit amorphous Si
Si, crystallize (optional)
3) Etch Si wafer to form nanowires, deposit amorphous Si, crystallize
Grown Si nanowire +
deposited amorphous Si shell
Metal-foil substrate
p-type
p
yp Si NW
n-type amorphous Si (larger bandgap)
Compared to planar structure
Shorter collection distance
Reduced optical reflectance
L. Tsakalakos, et al, Appl. Phys. Lett. 91, 233117 (2007)
Etched core + poly Si shell
n-type single-crystal core
l
lli shell
h ll
p-type polycrystalline
n-type Si wires formed by etching Si wafer
p-type polysilicon shell by depositing amorphous Si + crystallization
E. C. Garnett and P. Yang, J. Am. Chem. Soc. 130, 9224 (2008).
Other materials:
InP nanowire/polymer hybrid structure
ITO/glass substrate
Grow n-type InP nanowires
Coat with high hole mobility conjugated polymer (poly(3
(poly(3-hyxylthiophene)
hyxylthiophene)
Low contact resistance to ITO
Forward current increases by 106
compared to ITO alone
Id lit ffactor
Ideality
t n ~1.33
1 33
Passivate InP NW surface states with sulfur
Ammonium sulfide dip after NW growth
Reduces surface recombination
500 nm
C. J. Novotny, et al, Nano Lett. 8, 775-779 (2008)
Resonance effects
Tune wavelength of maximum absorption
Absorption depends on diameter
M lti l iinternal
Multiple
t
l reflections
fl ti
Tapered nanowires
Broader absorption?
p
D1
D2
Absorrption
D2
Wavelength
A
Absorption
n
D1
Wavelength
Resonance effects
Single nanowires
Increased absorption
Weaker dependence on angle of incident light
Multiple nanowires
Control spacing
p
g between nanowires
Increase absorption and Jsc
L. Y. Cao, et al, Nano Lett. 10, 439-445 (2010)
28
28
Vertically stacked multi-junction solar cell
Eg1
Eg2
Absorptio
on
Eg1 > Eg2 > Eg3
Eg3
Wavelength
Different wavelengths absorbed in
different materials in vertical stack of materials with
different bandgaps
g p
Bandga
ap
Vertically stacked multi-junction solar cell:
Lattice matched
Lattice parameter
Courtesy of C-Z Ning, Arizona State University
Multi-junction solar cell
Planar structure:
Lattice mismatch limits materials that can be used
Nanowires: Small diameter allows growth of lattice mismatched materials
Heterojunction between nanowire and substrate
Heterojunction within nanowire
Nanowire growth on lattice mismatched substrate
Grow high-quality direct bandgap materials on Si
(Less expensive substrate)
Small cross section
Accommodates
Lattice mismatch strain
(8% for InP/Si)
Thermal expansion mismatch
Allows single domain
Materials grown on Si substrate
(partial list)
GaP, GaAs, InP, InN
S. S. Yi, et al, Appl. Phys. Lett. 89, 133121 (2006)
10s nm
III-V
V material
Epitaxial growth of compound
semiconductor nanowires on Si
~µm
Si (111) substrate
6 µm
Lattice mismatched nanowire growth
Ge on Si: 4% lattice mismatch
Radial: Ge Core – Si shell
A i l
Axial
Ge
HJ
Si
Courtesy of S. Sharma
N JJ. Quitoriano,
N.
Quitoriano et al,
al Nano Lett.
Lett 9,
9 1511 (2009)
Lateral composition variation along substrate
Binary compound AxB1-x
x= f(PA, PB, PT, exp(-Ea/kT), ….)
Vary parameters over deposition zone  varying composition
Can extend to ternary and quaternary compounds
CdS
(~500nm)
CdSe
(~700nm)
CdSxSe
S 1-x
Position along substrate
General strategy:
Combination of
temperature gradient and
source material
t i l profiling
fili
Pan, Zhou, Sun, Leong, Chin, Liu, Zou, and
Ning, Nano Lett. 9, 784 (2009)
34
Full-spectrum lateral multijunction solar cell
Ning, Liu, and Pan, PVSC-34 Proceedings, June 7-12, 2009, Philadelphia, PA
Possibly extend to composition variation along length of one nanowire
Reuse substrate to reduce cost:
Vertical nanowires
Form oxide on Si(111) wafer
Pattern oxide
Electrodeposit catalyst (eg, Au or Cu)
Grow VLS wires
Fill with polymer (PDMS)
(
S)
Detach wires + polymer from substrate
Etch residual Si nanowire from substrate
(Anisotropic etch; slow Si(111) etch)
Electrodeposit new catalyst
Grow VLS wires
J. M. Spurgeon, et al., Appl. Phys. Lett. 93, 032112 (2008)
40 µm
Semiconductor nanowires for solar cells:
Summary
Limitations of planar solar cells
Tradeoff: Photon absorption – carrier collection
Li it d heterostructures:
Limited
h t
t t
diff
different
t llattice
tti parameters
t
How nanowires can help overcome these limitations
Nanowire growth
Mainly Vapor-Liquid-Solid (VLS) growth by CVD
Catalyst
Solar cells
Single
g jjunction
Axial: Bulk impurities of surface states can limit performance
Core-shell structure
Si, Ge and other semiconductor materials
Heterostructures
Resonance effects
Reusable substrates
F
Focus
on nanostructure
t
t
growth
th and
d properties
ti and
d their
th i relation
l ti
to solar cell efficiency
Conclusion:
Possible advantages of nanowire solar cell
Decrease reflectance (light trapping)
I
Increase
junction
j
ti area; i.e.,
i
i
increase
surface
f
area / unit
it volume
l
Decrease distance between carrier generation and collection
Wider range of materials and heterostructures
Resonance effects
Less material used
BACKUP
Semiconductor nanowires for solar cells:
Topics discussed
Limitations of planar solar cells
Tradeoff: Photon absorption – carrier collection
Li it d heterostructures:
Limited
h t
t t
diff
different
t llattice
tti parameters
t
Nanowire growth
Focused on Vapor-Liquid-Solid (VLS) growth by CVD
Other techniques: MBE,
MBE solution growth
growth, etching
etching, anodization
Catalyst
Solar cells
Decrease reflectance (light trapping)
Single
g jjunction
Increase junction area; i.e., increase surface area / un
Axial: Surface states, bulk impurities
Decrease distance between carrier generation and co
Core-shell structure
Wider
range of materials and heterostructures
Si, Ge and other semiconductor
materials
R
Resonance
effects
ff
Heterostructures
Less material used
Resonance effects
Reusable substrates
F
Focus
on nanostructure
t
t
growth
th and
d properties
ti
Surface / interface charge
Surface (+) charges ( Ns [cm-2] )
Determine Ns from dependence of
resistance on nanowire diameter
Depleted (-) charges
( Na [cm-3] )
Dopant concentration
Na = 1.9  1018 cm-3
r
Φ
ro
Surface/interface charge density
with native oxide on surface
L
Effective
conducting
area (Aeff)
Ns = 2.3  1012 cm-2
Depleted region
by surface charge
-8
8
after
ft thermal
th
l oxide
id grown
Ns = 5 – 10  1011 cm-2
Ns probably can be markedly reduced
K.-II Seo,
K
Seo S.
S Sharma,
Sharma A.
A Yasseri,
Yasseri D
D. Stewart
Stewart, T
T. II. Kamins
Electrochemical and Solid-State Letters 9, G69 (2006)
Conductance-L
L ( S-cm)
3x10
-8
2x10
(b)
with thermal
SiO2
-8
1x10
with native
SiOx
0
0
-10
2x10
-10
4x10
Aeff ( cm )
TiO2 nanotubes for dye-sensitized solar cells
ZnO NWs
500 nm
5 µm
TiO2 NTs
5 µm
5 µm
Jsc,  increase with ends of tubes open (more surface area)
Hi h efficiency
Higher
ffi i
compared
d tto sintered
i t d TiO2 nanoparticles:
ti l
Surface more accessible than disordered pores between nanoparticles
Easier to fill with sensitizer
(C use ZnO
(Can
Z O nanowires,
i
b t TiO2 more efficient)
but
ffi i t)
C. K. Xu, et al., Chemistry of Materials, 22, 143 (2010)
-10
6x10
2
Wire array detached from substrate
SEM images of polymer-embedded Si wire array
Al2O3 particles in polymer to scatter light
M. D. Kelzenberg,
g et al, Nature Materials 9, 239-244 ((March 2010))
Using nanowires
Grow nanowires in location where they will be used
(100) substrate
(111) substrate
Nanowires
1 500
m nm
1 m
Si
electrode
Si
electrode
337C (416-1)
500 nm
5 µm
SiO2
Grow nanowires on separate substrate and then reposition them
Manipulating nanowires after growth
Horizontal arrangement
Possible benefit:
Efficiency only weak function of angle  of incident light
No tracking needed during day
Possibly extend to multilayers

Drawbacks
Hard to make ohmic contacts
Don’t know where ends of nanowires are located
Unpatterned substrate
Random
Patterned substrate
Semi random
Semi-random
One-dimensional fluidic alignment
Possibly directed by channels or patterns on substrate
Possibly use statistical assembly and/or post
post-assembly
assembly configuration
Transfer printing
Place nanowires on rubber (eg PDMS) stamp
“P i t” onto
“Print”
t substrate
b t t
Roll (and slide) roller with nanowires on substrate (A. Javey, Berkeley)
Manipulating nanowires after growth
Horizontal arrangement
Langmuir-Blodgett assembly
Grow nanowires and
detach from growth substrate
Float on liquid phase
C
Compress
llaterally
t ll tto fform d
dense array
(“raft”)
Transfer to substrate
Possible advantages of nanowire solar cell
Decrease reflectance (light trapping)
I
Increase
junction
j
ti area; i.e.,
i
i
increase
surface
f
area / unit
it volume
l
Decrease distance between carrier generation and collection
Wider range of materials and heterostructures
Resonance effects
Less material used
Two-dimensional, planar solar cell
Carriers generated within depletion regions are efficiently collected
Carriers generated outside of depletion region diffuse (or drift)
t depletion
to
d l ti region
i tto b
be collected
ll t d
p+
p+
i
n
n+
n+
p+
n
n+
Two-dimensional, planar solar cell
Carrier collection
Carrier recombination
p+
p+
n
n
n+
n+
Absorption and collection coupled in planar solar cell
Tradeoff for thicker absorbing layer
More light absorption and carrier generation
Less collection of photogenerated carriers
More recombination
Higher cost when use expensive material
Other materials:
TiO2 nanotubes for dye-sensitized solar cells
Catalyzed solution growth of ZnO nanowires
Chemical conversion to TiO2 nanotubes:
Simultaneous deposition of TiO2 and dissolution of ZnO
Chemically open ends of TiO2 nanotubes
Etch residual ZnO core  nanocrystalline TiO2 nanotubes
All wet processing; low cost, low temperature, scalable
C. K. Xu, et al., Chemistry of Materials, 22, 143 (2010)
TiO2 nanotubes for dye-sensitized solar cells
TiO2 nanotubes formed by anodization of Ti
Large surface area (1800X flat surface)
Low recombination losses
Charge transport along nanotube axis
Increased optical absorption by light trapping
K. Shankar, et al, Nano Lett. 8, 1654-1659 (2008)
Resonance effects
L. Y. Cao, et al,, Nano Lett. 10, 439-445 ((2010))
Resonance effects
Single nanowires
Take advantage of effects in individual nanowires
Increased absorption
Weaker dependence on angle of incident light
Multiple nanowires
Control spacing between nanowires
Increase absorption and Jsc
L. Y. Cao, et al, Nano Lett. 10, 439-445 (2010)
Bandgap
Multi-junction solar cell
Lattice parameter
Lattice mismatch limits materials that can be used
Limits number of junctions in 2D structure
Small diameter of nanowires allows growth of lattice mismatched materials
Heterojunction between nanowire and substrate
Heterojunction within nanowire
Semiconductor nanowires for solar cells:
Topics discussed
Limitations of planar solar cells
Tradeoff: Photon absorption – carrier collection
Li it d heterostructures:
Limited
h t
t t
diff
different
t llattice
tti parameters
t
How nanowires can help overcome these limitations
Nanowire growth
VLS growth by CVD
Other techniques: MBE, solution growth, etching, anodization
Catalyst
Solar cells
Initially focus on Si and Ge
Nano to micro-scale diameters; aligned or random
Surface states, bulk impurities
Core-shell structure
Resonance effects
Other semiconductor materials
H t
Heterostructures
t t
Reusable substrates
Focus on nanostructure growth and properties
Can nanowires improve solar cell efficiency?
What is a nanowire?
Structure with one dimension much greater than others
“nano” implies other dimensions (e.g., diameter) < 100 nm
Usually single crystal for good electrical properties
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