PRELIMINARY TECHNICAL DATA a Preliminary Technical Data FEATURES Complete Rate Gyroscope on a Single Chip Z Axis (Yaw rate) response High Vibration rejection over wide frequency 0.05 °/s/ √Hz Noise 1000g Powered Shock Operation Self-Test on Digital Command Temperature Sensor Output Precision Voltage Reference Output Absolute Rate Output for Precision Applications +5V Single Supply Operation Ultra small and light (<150mm2, <1 gram) APPLICATIONS • GPS Navigation Systems • Vehicle Stability Control • Inertial Measurement Units • Guidance and Control • Platform Stabilization GENERAL DESCRIPTION ±150deg/s Single Chip Yaw Rate Gyro with Signal Conditioning ADXRS150* micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics all on the same chip. The manufacturing technique for this device is the same high-volume BIMOS process used to for high reliability automotive airbag accelerometers. The output signal, RATEOUT(1B,2A), is a voltage proportional to angular rate about the axis normal to the top surface of the package (see Figure 1). A single external resistor can be used to lower the scale factor. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation (see Figure 2). A precision reference and a temperature output are also provided for compensation techniques. Two digital self-test inputs electro-mechanically excite the sensor to test proper operation of both sensors and the signal conditioning circuits. The ADXRS150 is available in a 7mm x 7mm x 3mm BGA surface-mount package. The ADXRS150 is a complete angular rate sensor, (gyroscope) which uses Analog Devices’ surface- Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties which may result from its use. 9/30/02 No license is granted by implications or otherwise under any patent or patent rights of Analog Devices One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 617-329-4700 Fax 617-326-8703 PRELIMINARY TECHNICAL DATA ADXRS150-SPECIFICATIONS @TA =+25°C, Vs=+5V; Bandwidth = 80Hz (Cout = 0.01µF), Angular Rate = 0 °/s, unless otherwise noted. ADXRS150ABC Parameter Conditions Min Typ Max SENSITIVITY Dynamic Range1 Initial Over Temperature2 Nonlinearity Voltage Sensitivity NULL Initial Null Null Drift Over Temperature Temperature Hysteresis of Null3 Turn On Time Stability (after turn on time) Linear acceleration effect Voltage Sensitivity NOISE PERFORMANCE Rate Noise Density Clockwise rotation is positive output Full scale range over spec. range @25 °C +/- 150 11.25 11.25 Best fit straight line 0.1 °/s mV/°/s mV/°/s % of FS Vcc=4.75 to 5.25V 0.7 %/V 13.75 13.75 @25°C ST1 pin from Logic '0' to '1', -40° to 85°C ST2 pin from Logic '0' to '1', -40° to 85°C Standard high logic level definition Standard low logic level definition To Common TEMPERATURE SENSOR V out at 298 °K Max current load on pin Scale factor Sink to common Proportional to absolute temperature tbd 35 0.05 0.2 V mV mV ms °/sec °/sec/g 1 °/sec/V 0.05 °/s/ √Hz 500 14 Hz kHz +/- 300 Vcc=4.75 to 5.25V SELF TEST ST1 RATEOUT Response ST2 RATEOUT Response Logic '1' Input Voltage Logic '0' Input Voltage Input Impedance 2.5 VOLT REFERENCE Voltage value Load Drive to ground Load Regulation Power Supply Rejection Temperature Drift 12.5 2.50 Delta from 25°C Return after temp excursion Power on to ± ½ °/sec of final 0. 5 sec to 3 minutes from power-on Any axis FREQUENCY RESPONSE Maximum Bandwidth (user selectable) Determined by Cout Sensor Resonant Frequency OUTPUT DRIVE CAPABILITY Output Voltage Swing Capacitive Load Drive Units -400 400 3.3 -660 660 -1000 1000 1.7 50 kΩ 2.50 Iout = ±100uA 50 8.4 0.25 1000 V uA mV/°K Vs-0.25 V pF 2.450 2.5 200 5.0 1.0 5.0 2.550 Volts uA mV/mA mV/V mV 4.75 5.00 6.0 5.25 8.0 V mA Source 0 < Iout < 200uA 4.75 to 5.25 Vs Delta from 25°C POWER SUPPLY Operating Voltage Range Quiescent Supply Current mV mV V V TEMPERATURE RANGE 85 °C Specified Performance A grade −40 Notes: 1. Dynamic range is the maximum full scale measurement range possible including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5V supplies. 2. Specification refers to the maximum extent of this parameter as a worst case value at Tmin or Tmax. 3. Repeatability of the null offset reading with returning to the same temperature after worst case operating temperature swing. All min and max specifications are guaranteed. Typical specifications are not tested or guaranteed REV. PrA 9/30/02 2 PRELIMINARY TECHNICAL DATA CP1 5 ST2 CP2 4 AVCC 3 TEMP 2 AGND 1 F SUMJ G CMID Package Option BGA-32 3 CP3 ST1 PIN CONFIGURATION REV. PrA 9/30/02 CP5 ADXRS150AB G ORDERING GUIDE Temperatur Package e Range Description -40° to 32 pad BGA +85°C 7 6 Drops onto hard surfaces can cause shocks of greater than 2000g and exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage Model CP4 PGND V2.5 Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only. Functional operation of the device at these, or any other conditions above those indicated in the operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. PDD ABSOLUTE MAXIMUM RATING: Acceleration (any axis, unpowered, 0.5ms)………….….2000g Acceleration (any axis, powered for 0.5ms)…………….1000g +Vs……………………………….……………-0.3V to +6.0V Output Short Circuit Duration (any pin to Common)..Indefinite Operating Temperature……………..……..…-55°C to +125°C Storage Temperature……………….…….…..-65°C to +150°C E D C Bottom View RATEOUT B A PRELIMINARY TECHNICAL DATA RATE SENSITIVE AXIS This is a Z-axis rate-sensing device, also called yaw-rate sensing. It produces a positive going output voltage for clockwise rotation about the axis normal to the package top, i.e., clockwise when looking down at the package lid. Rate Axis Longitudinal Axis RATEOUT Vcc=5V 4.75V + 2.5V 7 A1 ABCDEFG Lateral Axis Rate In 1 0.25V GND Figure 1:RATEOUT signal increases with clockwise rotation. REV. PrA 9/30/02 4 Pin # 6D, 7D 6A, 7B 6C, 7C 5A, 5B 4A, 4B 3A, 3B 1B, 2A 1C, 2C 1D, 2D 1E, 2E 2G, 1F 3F, 3G 4F, 4G 5F, 5G 6G, 7F 6E, 7E Name CP5 CP4 CP3 CP1 CP2 AVCC RATEOUT SUMJ CMID V2.5 AGND TEMP ST2 ST1 PGND PDD Description HV Filter Capacitor – 47nF Charge Pump Capacitor – 22nf Charge Pump Capacitor – 22nf + Analog Supply Rate Signal Output Output Amp Summing Junction HF Filter Capacitor – 100nf 2.5 Volt Precision Reference Analog Supply Return Temperature Voltage Output Self-Test for Sensor 2 Self-Test for Sensor 1 Charge Pump Supply Return + Charge Pump Supply PRELIMINARY TECHNICAL DATA THEORY OF OPERATION The ADXRS150 operates on the principle of a resonator gyro. Two polysilicon sensing structures each contain a dither frame, which is electrostatically driven to resonance. This produces the necessary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, orthogonal to the dither motion, are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure which senses Coriolis motion. The resulting signal is fed to a series of gain and demodulation stages that produce the electrical rate signal output. The dual sensor design rejects external g-forces and vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments. The electrostatic resonator requires 14V to 16V for operation. Since only 5V is typically available in most applications, a charge pump is included on chip. If an external 14V to 16V supply is available, the two capacitors on CP1-CP4 can be omitted and this supply connected to CP5 (pin 7D) with a 100nF decoupling capacitor in place of the 47nF. After the demodulation stage there is a single pole low pass filter consisting of an internal 7k resistor (Rsen1) and an external user supplied capacitor (Cmid). A Cmid capacitor of 100 nF sets a 400 Hz low pass pole ±35% and is used to limit high frequency artifacts before final amplification. Bandwidth limit capacitor Cout sets the pass bandwidth. (See figure 3 below and Setting Bandwidth section following) 100nF 22nF CP4 CP5 CP3 PDD 7B 7C 7E 7D PGND 7F 47nF 6A 22nF +5V 6G CP1 5A 5G ST1 CP2 4A 4G ST2 AVCC 3A 3G 100nF 2A TEMP 2G 1F Cout = 22nF 100nF AGND RateOut V2.5 1D CMID 1E 1C SUMJ 1B (Top View) FIGURE 2: EXAMPLE APPLICATION CIRCUIT. REV. PrA 9/30/02 5 SUPPLY AND COMMON CONSIDERATIONS Only power supplies used for supplying analog circuits are recommended for powering the ADXRS150. High frequency noise and transients associated with digital circuit supplies may have adverse affects on device operation. Figure 2 shows the recommended connections for the ADXR150 where both AVCC and PDD have a separate decoupling capacitor. These should be placed as close to the their respective pins as possible before routing to the system analog supply. This will minimize the noise injected by the charge pump that uses the PDD supply. Also recommended is to place the three charge pump capacitors connected to the CP1-CP5 pins as close to the part as possible. These capacitors are used to produce the on chip high-voltage supply switched at the dither frequency at approximately 15kHz. Care should be taken that there is no more than 50pF of stray capacitance between CP1 – CP5 and ground. Surfacemount chip capacitors are suitable as long as they are rated for over 15V. PRELIMINARY TECHNICAL DATA + 5V Cout 100nF AVCC ST1 5G 100nF 3A 2G SELF TEST ST2 4G 1F AGND CMID SUMJ 1D Rout CORIOLIS SIGNAL CHANNEL π RATE SENSOR 1C Rsen1 Rsen2 180k ± 1% DEMOD ≈7k ±35% ≈7k ±35% 1B 2A RATEOUT RESONATOR LOOP 2.5V REF 1E V2.5 PTAT CHARGE PUMP/ REG. 3G TEMP +12V ADXRS150 CP2 4A 5A CP1 7E PDD 6G 7F PGND 100nF 22nF 6A 7B CP4 7C CP3 7D CP5 47nF 22nF Figure 3 – ADXRS150 Block Diagram with External Components SETTING BANDWIDTH INCREASING MEASUREMENT RANGE Refer to Figure 3. External capacitors Cmid and Cout are used in combination with on-chip resistors to create two low pass filters to limit the bandwidth of the ADXRS150’s rate response. The –3dB frequency set by Rout and Cout is: The full-scale measurement range of the ADXRS150 can be increased by placing an external resistor between the RATEOUT(1B, 2A) and SUMJ(1C, 2C) pins which would parallel the internal Rout resistor that is factory-trimmed to 180KΩ. For example, a 330KΩ external resistor will give approximately 8.1 mV/deg/sec sensitivity and a commensurate ~ 50% increase in the full-scale range. This is effective for up to a 4X increase in the full-scale range (minimum value of the parallel resistor allowed is 45KΩ). Beyond this amount of external sensitivity reduction, the internal circuitry headroom requirements prevent further increase in linear full-scale output range. The drawbacks of modifying the full-scale range are the additional output null drift (as much as 2 °/sec over temperature) and the re-adjustment of the initial null bias (See section on Null Adjust). ƒout=1 / (2 *π *Rout *Cout) and can be well controlled since Rout has been trimmed during manufacture to be 180kΩ +/-1%. Any external resistor applied between RATEOUT(1B, 2A) and SUMJ(1C, 2C) pins, will result in Rout = (180KΩ * Rext) / (180KΩ + Rext) The –3dB frequency set by Rsen (the parallel combination of Rsen1 and Rsen2) at about 4.5KΩ nominal and Cmid is less well controlled since Rsen1 and Rsen2have been used to trim the rate sensitivity during manufacture and have a ±35% tolerance. Its primary purpose is to limit the high frequency demodulation artifacts from saturating the final amplifier stage. Thus, this pole of nominally 400 Hz @ 0.1 uF, need not be precise. Lower frequency is preferable but its variability usually requires it to be at least higher than the well-controlled output pole. In general both –3dB filter frequencies should be set as low as possible to reduce the amplitude of these high frequency artifacts as well as to reduce overall system noise. REV. PrA 9/30/02 6 TEMPERATURE OUTPUT AND CALIBRATION It is common practice to temperature-calibrate gyros to improve their overall accuracy. The ADXRS150 has a temperature-proportional voltage output to provide input to such a calibration method. The voltage at TEMP(3F, 3G) is nominally 2.5v at 27°C and has a PTAT (proportional to absolute temperature) characteristic, i.e., 8.4 mV / °C. Note that the TEMP output circuitry is limited to 100µa/50µa source/sink currents respectively. PRELIMINARY TECHNICAL DATA If an external resistor is used across RATEOUT and SUMJ then the parallel equivalent value is substituted into the above equation. Note that the resistor value is an estimate as it assumes Vcc=5.0 volts and VSUMJ= 2.5 Volts. 5 4 3 Null Drift (°/s) 2 SELF TEST FUNCTION 1 0 -1 -2 -3 -4 -5 1.8 2.0 2.2 2.4 2.6 2.8 3.0 Vtemp (V) Figure 4: Null drift vs Vtemp output for several devices. Using a 3-point calibration technique, it is possible to calibrate the ADXRS150's null drift and sensitivity drift to an overall accuracy of nearly 300 deg/hour. An overall accuracy of 70 degrees an hour or better is possible using more points. Limiting the bandwidth of the device reduces the flat-band noise during the calibration process improving the measurement accuracy at each calibration point. USING THE ADXRS150 WITH A SUPPLYRATOMETRIC ADC The ADXRS150's RATEOUT signal is non- ratiometric; i.e., neither the null voltage nor the rate sensitivity is proportional to supply. Rather, they are nominally constant for D.C. supply changes within the 4.75 to 5.25v operating range. If the ADXRS150 is to be used with a supply-ratiometric ADC, the ADXRS150’s V2.5 output can be converted and used to make corrections in software for the supply variations. NULL ADJUST Null adjustment is made possible by injecting a suitable current to SUMJ(1C, 2C). Adding a suitable resistor to either ground or the positive supply is a simple way of achieving this. The nominal 2.5 V null is for symmetrical swing range at RATEOUT(1B, 2A). However, a non-symmetric output swing may be suitable in some applications. Note that if a resistor is connected to the positive supply, then supply disturbances may reflect some null instabilities. Digital supply noise is to be particularly avoided in this case. (See Supply and Common Considerations). The value of the resistor to use is approximately: Rnull = (2.5 * 180,000) / (Vnull0 –Vnull1) Vnull0 is the un-adjusted zero rate output; Vnull1 is the target null value. If the initial value is below the desired value the resistor should terminate on common, or ground. If it is above the desired value, the resistor should terminate on the 5V supply. Values typically are in the 1-5 MΩ range REV. PrA 9/30/02 7 The ADXRS150 includes a self-test feature that actuates each of the sensing structures and associated electronics in the same identical manner as if subjected to angular rate. It is activated by standard logic high levels applied to inputs ST1 (5F, 5G) or ST2 (4F, 4G), or both. ST1 will cause the voltage at RATEOUT to change about –0.7V and ST2 will cause an opposite +0.7V. The self-test response follows the viscosity temperature dependence of the package atmosphere, approximately 0.25 %/°C. Activating both ST1 and ST2 simultaneously is not damaging. As ST1 and ST2 are not necessarily closely matched, actuating both simultaneously may result in an apparent null bias shift. CONTINUOUS SELF-TEST The one-chip integration of the ADXRS150 gives it higher reliability than is obtainable with any other high volume manufacturing method. Also, it is manufactured under a mature BIMOS process which has field-proven reliability. As an additional failure-detection measure, power-on self-test can be performed. However, some applications may warrant continuous self-test while sensing rate. Application notes outlining continuous self test techniques are available. PRELIMINARY TECHNICAL DATA There are two effects of concern, shifts in the static null and induced null noise. Scale factor is not significantly affected until the acceleration reaches several hundred meters per second squared. Static acceleration in the lateral axis gives a null shift defined by first and second order coefficients both of which are random variables in the population of parts. The first order coefficient has zero mean and a standard deviation of 0.02(°/s)/(m/s2). The second order coefficient has a distribution with mean 0.00005(°/s)/(m/s2) 2 and a standard deviation of 0.000015(°/s)/(m/s2) 2. These values were obtained by centrifuge testing at ±100 m/s2. Vibration rectification for frequencies up to 20kHz is of the order of 0.00002(°/s)/(m/s2) 2, is not significantly dependent on frequency and has been verified up to 400 m/s2 rms. Linear vibration spectral density near the 14kHz sensor resonance translates into output noise. In order to have a significant effect the vibration must be within the angular rate bandwidth (typically ±40Hz of the resonance), so it takes considerable high frequency vibration to have any effect. Away from the 14kHz resonance the effect is not discernible, except for vibration frequencies within the angular rate passband. This can be seen from figures 15 through 17 for the various sensor axes. The in-band effect can be seen in Figure 7. This is the result of the static g-sensitivity. The specimen used for Figure 7 had a g-sensitivity of 0.15 °/s/g and its total in-band noise degraded from 3 mVrms to 5 mVrms for the specified vibration. The effect of broadband vibration up to 20kHz is shown in Figure 7. - 70 - 80 - 90 - 100 - 110 - 120 - 130 1 100 0 10000 100000 2.60 2.58 2.56 2.54 2.52 2.50 0 2 4 6 8 10 Time (s ec ) Figure 6: Random Vibration (Lateral) 2Hz to 40 Hz 3.2grms s haking 2.4 mV rms s tatic 0.8 mV rms 2.60 2.60 2.58 2.58 2.54 100 Figure 5: Noise Spectral Density at RATEOUT – BW=40Hz s haking 10.6 mV rms 2.56 10 Fr equenc y ( Hz ) RA TEOUT (V ) RA TEOUT (V ) s tatic 3.1 mV rms - 60 RA TEOUT (dBV /rt Hz ) The most sensitive orthogonal axis for acceleration effects is the lateral axis as defined in Figure 1. The sign convention used is that lateral acceleration is positive in the direction from pin column A to pin column G of the package. That is, a device has positive sensitivity if its voltage output increases when the row of pins 2A-6A are tipped under the row 2G-6G in the Earth’s gravity. The output noise of the part falls away in accordance with the output low-pass filter and does not contain any 'spikes' more than 1% of the low-frequency noise. A typical noise spectrum is shown in figure 6 below. RA TEOUT (V ) ACCELERATION SENSITIVITY 2.56 2.54 2.52 2.52 2.50 2.50 0 2 4 6 8 10 0 2 4 6 8 time (s ec ) time (s ec ) Figure 7 :Random Vibration (Lateral) 10kHz to 20kHz at 0.01g/rt.Hz with 60 Hz sampling and 0.5 sec averaging. REV. PrA 9/30/02 8 10 PRELIMINARY TECHNICAL DATA ADXRS150 - TYPICAL PERFORMANCE CURVES No Prior Warmup, 0.6Hz Sampling Pre-applied rate=100 °/s , Pow er-on @ t=0 2.570 4.5 4.0 2.565 3.5 2.560 RA TEOUT (V ) 3.0 2.5 2.555 2.0 2.550 1.5 1.0 2.545 0.5 0.0 2.540 -0.05 0.00 0.05 0.10 0.15 Time (s ec ) 0.20 0.25 0 60 90 120 Time (s ec ) 150 180 Figure 9: Null Settling Time 2.570 0.07 2.565 0.06 0.05 2.560 0.04 2.555 °/s RA TEOUT (V ) Figure 8: Rate Sensing Startup Time 30 0.03 2.550 0.02 2.545 0.01 2.540 0 0 600 1200 1800 2400 3000 3600 1 10 100 Sec onds Time (s ec ) Figure 10: Null Stability for 1hr Figure 11: Root Allan Variance vs. Avg. Time 3.4 2.5040 3.2 2.5035 3.0 V2.5 (V) V temp (V ) 2.5030 2.8 2.6 2.4 2.5025 2.5020 2.2 2.5015 2.0 2.5010 1.8 -40 -30 -20 -10 -55 -30 -5 20 45 70 95 Temperature (°C) Figure 12: Temperature Sensor Output REV. PrA 9/30/02 0 10 20 30 40 50 60 70 80 Temperature (°C) Figure 13: V2.5 Voltage Reference vs Temperature 9 PRELIMINARY TECHNICAL DATA ADXRS150 at BW = 40Hz, Typical Vibration Characteristics, 10g Flat Band, 20Hz to 2kHz Pac kage Lateral A x is (0.5 s A v e) 2.500 2.500 2.490 2.490 2.480 0g 2.470 10g RA TEOUT (V ) R ATEOU T (V) Pac kage Lateral A x is (1/60 s ec s ample rate) 2.460 2.480 0g 2.470 10g 2.460 2.450 2.450 0 5 10 0.0 Time (s ec ) 5.0 10.0 Time (s ec ) Figure 14: 10g Random Vibration in package-lateral axis orientation Pac kage Longitudinal A x is (0.5 s A v e) 2.500 2.500 2.490 2.490 2.480 0g 2.470 10g RA TEOUT (V ) RA TEOUT (V ) Pac kage Longitudinal A x is (1/60 s ec s ample rate) 2.480 0g 2.470 2.460 2.460 2.450 2.450 0 5 10g 0.0 10 Time (s ec ) 5.0 10.0 Time (s ec ) Figure 15: 10g Random Vibration in package-longitudinal axis orientation Rate ax is (0.5 s A v e) Rate ax is (1/60 s ec s ample rate) 2.500 2.500 2.490 2.480 0g 2.470 10g 2.460 RA TEOUT (V ) RA TEOUT (V ) 2.490 2.480 0g 2.470 10g 2.460 2.450 2.450 0 5 0.0 10 Tim e (s ec) Time (s ec ) Figure 16: 10g Random Vibration in rate axis orientation REV. PrA 9/30/02 5.0 10 10.0 PRELIMINARY TECHNICAL DATA BEHAVIOR UNDER VARIOUS SHOCK TEST CONDITIONS Figure 17: Shock Test 100g 5ms in Lateral Axis (40 Hz) Figure 18: Shock Test 100g 5ms in Longitudinal Axis (40Hz) Figure 19: Hi-g shock test in Lateral Axis (40Hz) Figure 20: Hi-g shock test, lateral axis, 10X time base (40Hz) Figure 21: Hi-g shock in Rate Axis (40 Hz) Figure 22: Hi-g shock, Rate Axis, BW reduced to 8Hz REV. PrA 9/30/02 11 PRELIMINARY TECHNICAL DATA STATISTICAL DISTRIBUTIONS X = 0.066 σ = 0.007 N = 498 0.04 0.05 0.07 0.06 0.08 0.09 Noise at +85 °.C (°/√s) 0.10 0.11 X = 0.036 σ = 0.005 N = 498 150 150 100 100 50 50 0.12 0.02 0.03 0.04 Noise at -25 °.C (°/√s) 0.05 0.06 Figure 23: ADXRS150 Gyro Noise at +85 and -25 deg. C 125 X = 0.0007 σ = 0.0055 N = 242 X = 0.16 σ = 0.13 N = 242 100 75 75 50 50 25 25 -0.03 -0.02 -0.01 0.00 0.01 Peak error in Null Bias Fit (V) 0.02 0.03 -0.4 -0.1 0.8 0.2 0.5 Peak error in S.F. fit (mV/°/s) Figure 24: ADXRS150 Temperature coefficient Fit error Distributions 150 X = -0.04 σ = 0.10 N =544 X = 0.02 σ = 0.08 N = 544 200 100 150 100 50 50 -0.4 -0.2 0.0 0.2 First Order Null Coefficient ‘a’ (V/V) 0.4 -0.4 -0.2 0.0 0.2 2 Second Order Null Coefficient ‘b’ (V/V ) 0.4 Figure 25: ADXRS150 Null Coefficient Distributions 150 X = 0.13 σ = 0.26 N = 393 X = -0.62 σ = 0.24 N = 393 125 100 100 75 50 50 25 -0.5 -0.2 0.1 0.4 0.7 1.0 First Order S. F. Coef. ‘a’ (mV/°/sec/V) 1.3 1.6 -1.5 -1.2 -0.9 -0.6 -0.3 0.0 0.3 2 Second Order S. F. Coef. ‘b’ (mV/°/sec/V ) Figure 26: ADXRS150 Scale Factor Coefficient Distributions REV. PrA 9/30/02 12 0.6 PRELIMINARY TECHNICAL DATA SURFACE-MOUNT BALL GRID ARRAY (BOTTOM VIEW) 0.276” sq. max 0.12”± 0.015 CP3 CP5 PDD PGND CP4 ST1 CP1 ST2 CP2 TEMP AVCC AGND RATEOUT SUMJ CMID V2.5 0.020” 0.0315” typ NOTE: Metal lid is internally connected to AGND. REV. PrA 9/30/02 13