VACUUM PROCESSING
VACUUM PROCESSING SOLUTIONS
FOR HIGH-TECH PRODUCTION
key technologies for multiple industrial applications
MANZ AG /// vacuum processing solutions /// 2
VACUUM processing solutions
Manz VCS 1200 for PECVD coating.
Very short cycle times with high
density plasma and optimal gas
utilization
Vacuum technologies are an inherent
The product portfolio includes vertical
part of many high-tech markets these
and horizontal inline systems as
days. In many cases, the vacuum
well as tools for batch production.
technology has been the key technology
The modular concepts allow flexible
to achieve innovative breakthroughs in
configurations according to customer
the manufacturing of unique products.
requirements. Taking into account the
Therefore, Manz has established a
low OPEX and the minimal footprint,
team of 50 vacuum specialists, many
the tools facilitate lowest possible cost
with more than 20 years of experience
of ownership.
in this market. The core competence
Our technological expertise –
the entire know-how from a single
source
of the Manz vacuum team is the
Furthermore, Manz AG has a leading
development of new vacuum tools for
position and long-term experience in
pilot and mass production, focussed
the following fields of technology:
on the development of new system
Laser,
and source designs.
Automation
Wet
Chemistry,
and
Printing,
Metrology.
This
combination of technological expertise
Manz
offers
innovative
vacuum
delivers a worldwide unique oppor-
tools for PECVD, Sputtering, and
tunity
Evaporation processes.
integrated production solutions.
to
any
customer
for
fully-
DISPLAY/TOUCH PANEL
ito, BARRIER LAYER, ANTI-REFLEX
for
r&
d
,p
thin-film pv
absorber
evaporation
io n
other industries
vacuum
process
technologies
ct
tHIN-FILM PV
Front/Back Contact, Absorber
d
u
SPUTTERING
ustomized
so
&c
ns
tio
lu
ito, BARRIER LAYER, other
stan
da
r
oled
ilo
od
t & mass p r
other industries
Consumer Electronics
PECVD
crystalline PV
Front/back Side Passivation and Anti-reflex
other industries
MANZ AG /// vacuum technologies /// 3
VACUUM technologies
pecvd Coating
The unique Manz PECVD technology (Plasma Enhanced Chemical Vapor Deposition)
with high-power plasma source (HPP) (patent pending) makes entirely new coating
processes possible through its innovative concept. In combination with the vertical
substrate configuration, layer qualities can be produced that go well beyond the
capabilities of common PECVD technologies. The proprietary Manz HPP PECVD
technology allows a high level of control of layer properties, enabling them to be
tailored to customer requirements.
The technology is available for both inline and batch systems. Thanks to separate
design of the machine platform and source technology, the production systems can
be adapted to any type of customer requirements.
Vertical Coating System VCS 1200
Manz PECVD coating – lowest cost of
ownership, high reproducibility and
uniformity
• Perfect for all kinds of industries that require thin layers and very short cycle times
• Allows depositing film stacks with gradient characteristics as well as layer stacks
composed of different materials
• Significant savings in production costs and remarkable increase of solar cell
efficiency
• No pinmarks or flakes on the substrates
Vertical Coating System VCS 9000 IS
• Perfect for thicker layers or various layer materials
• Allows depositing film stacks with gradient characteristics as well as layer stacks
composed of different materials
• Modular concept, easily adaptable to customer needs regarding cycle times
and layer thickness
SPUTTERING
All Manz sputtering products are based on the same production-proven technology
concept. The modular design of the Inline Sputter System allows flexible
customizations for different application areas like the solar, display, electronics, and
other ambitious industries. Due to its modular concept, the Inline Sputter System is
scalable for customer requirements and future developments.
Manz Inline Sputter System (ISS),
rotary magnetrons: the particle-free
transportation system allows excellent
layer uniformity at maximum yield
MANZ AG /// vacuum technologies /// 4
Inline Sputter System ISS 300 to 1800
• Equipped with the latest deposition technology
(DC, pDC, MF Rotary Cathodes and DC, pDC, MF, RF Planar Cathodes)
• Unique particle-free transportation system
• Designed to deposit metal films, TCO films as well as fully reactive films
• Excellent layer uniformity and top yield performance at a low OPEX
• Highest throughput on minimal footprint: lowest possible cost of ownership
Evaporation
The Manz evaporation process is based on a novel source technology (patent
pending) for inline deposition systems. The unique line source offers a market leading
deposition rate and uniformity. The source technology is able to deposit metal films as
Manz vacuum technology - excellent
layer characteristics, safe and reliable
process performance
well as compound films by co-evaporation.
Inline Evaporation System
• Designed for the needs of novel production technologies especially for the
thin-film solar market
• Production-proven modular concept allows flexible configuration for numerous
processes, such as compound layers by co-evaporation as well as metal layers
• Excellent system and source design approved by multiple world record efficiencies
of CIGS modules
customized solutions
With many years of experience in vacuum process development as well as in
designing and building vacuum equipment, Manz offers an outstanding service for
customized solutions according to particular customer requirements. With our wellestablished product development procedure, the customer needs are analyzed and
transferred into production-proven reliable system designs.
Manz has already successfully equipped multiple industries such as the OLED,
Super Conductors, Consumer Electronics or Li-Ion Battery industry with customized
product solutions. Our clients include market leading companies such as Aixtron SE
or Bruker HTS.
Manz has years of experience and
excellent references in developing,
designing and building customized
vacuum equipment
MANZ AG /// high-tech for a green future
2014
Acquisition of the mechanical
engineering division of Kemet
Electronics Italy (formerly
Arcotronics) for enlargement of
technology portfolio in Battery
division
2013
Establishment as leading equipment supplier for the touch panel
production
2012
Acquisition of CIGS modules
innovation line from Würth Solar
Foundation of Manz CIGS
Technology GmbH
Inauguration of new facilities in
Suzhou (China) with 20,000 sqm
production capacity
2010
Foundation of Vacuum Process
Technologies
2008
/// 5
manz ag
German-based Manz AG is one of the world’s leading technology providers for
the production of electronic components and devices, solar cells and modules,
and li-ion batteries. The presence of the Manz Group with production facilities
in Germany, Slovakia, Hungary, Italy, China, and Taiwan, as well as worldwide
service centers, guarantees short response and delivery times.
The Manz Group‘s core competences are in automation, metrology, laser processing, vacuum coating, wet chemistry, printing & coating, and roll-to-roll.
With its slogan “passion for efficiency”, Manz is making a promise to offer its
customers – all companies active in important future markets – increasingly
efficient production equipment. Like this, the company contributes significantly
to reduce the production costs of end products and thereby making them
available for a broad range of buyers worldwide. Therefore, Manz is continuously
optimizing its product portfolio.
Additional technology know-how
and production capacity through
acquisition of Manz Automation
Slovakia and Intech (Taiwan)
The aim is to achieve highly reliable production processes on the customer side
2006
helping to achieve breakthroughs in key technologies of our times, such as
IPO on Entry Standard market of
the Frankfurt stock exchange
2005
Entry into the thin-film market
with equipment for the mechanical scribing of solar modules
2000
Delivery of the first automation
system for fully automated
crystalline solar cell manufacturing
lines
Development of the first fully
automated quality testing and
sorting system for crystalline
solar cells
1994
Delivery of the first automation
solution for the FPD industry to
Asia
1990
Development of the first automation system for processing
crystalline solar cells in a pilot
manufacturing project
1987
Foundation of Manz Automatisierungstechnik GmbH in Filderstadt,
Germany
while steadily improving performance parameters for products manufactured on
Manz equipment. This makes the Manz Group an important driver of innovation,
sustainable power generation, displays and devices for global communication
needs and energy storage.
02/2015
MANZ AG
Manz AG
Steigaeckerstrasse 5
72768 Reutlingen
Germany
Phone +49-7121-9000-0
Fax +49-7121-9000-99
www.manz.com
info@manz.com
Manz AG Karlstein
Seligenstaedter Straße 100
63791 Karlstein
Germany
Phone+49-6188-95431-00
Fax +49-6188-95431-01
www.manz.com
info@manz.com