Lecture 6: III-V FET DC I - MESFETs Metal-Semiconductor Junction Basic MESFET Operation 2014-01-28 Lecture 6, High Speed Devices 2014 1 Field Effect Transistors Vg Lg W Gate Source Drain y VDS N+ N+ x • The gate electrode controls the carrier concentration in the channel • Source/Drain set the potential at the source/drain side • Electrons flow from source to drain IDS and n(x,y) depend on geometry and transport properties. • 2D problem (in x and y) 2014-01-28 Lecture 6, High Speed Devices 2014 2 Field Effect Transistors Bulk MOSFET Metal Vg=1V SOI, Quantum Well MOSFET VD=1V Metal Oxide Oxide n+ n+ p-type n- n+ n+ Oxide or wide bandgap Semicondudctor p-type, S.I. Insulating MESFET Metal n+ Vg=-1V Depletion region n n+ p-type, S.I. Insulating 2014-01-28 Metal HEMT Wide band semiconductor n+ n- n+ Wide band semiconductor p-type, S.I. Insulating Lecture 6, High Speed Devices 2014 3 Si vs. III-V Field Effect Transistors (FETs) • III-V MOSFETs are difficult to fabricate • Alternative: Semiconductor to isolate the gate from the channel • Simple: MESFETs • Better: HEMTs or III-V MOSFETs Si: µn≤ 1300 Vs/cm2. vsat ≈ 8×106 cm/s InGaAs µn ≈ 14000 cm2/Vs! vsat ≈ 2×107 cm/s SiO2-Si excellent interface InGaAs- GaOxInOxAsOx – poor interface SiO2/HfSiO2 Schottky Barrier n+ n+ n+ Si p-type GaAs n n+ GaAs Semi-Insulating An Si MOSFET uses an oxide (SiO2, SiHfO2) to isolate the gate 2014-01-28 A III-V Metal-Semiconductor FET (MESFET) Lecture 6, High Speed Devices 2014 4 Metal-Semiconductor Junction Similar to a p+N junction! qcs qfm Fb qfb qfm qc s Fn fbi fb q qfn Fb fbi Schottky barrier height Build in potential Too simplistic! However, now we ignored that we terminated the crystal and created a lot of surface states.... 2014-01-28 Lecture 6, High Speed Devices 2014 5 Metal-Semiconductor Junction II Experiments show only a very weak dependence of fb as a function of metal work function fb qfb fm Surface reconstruction and surface defects create a large number of states in the bandgap, which “pins” the Fermienergy The energy position of these surface states sets the Schottky barrier height. For GaAs, fb≈0.7-0.8V InP fb ≈ 0.3V, InAs fb ≈ -0.1V, In0.53Ga0.47As fb ≈ 0.1V 2014-01-28 Lecture 6, High Speed Devices 2014 Fn fbi fb q fb is a material parameter! 6 MESFET Structure – simplest FET transistor Vgs (negative) Source Gate Drain x Depletion Region: n≈0 Nd a b y Semi-insulating •Schottky depletion under gate modulates channel thickness b •VDS causes current to flow from source to drain, which can be modulated by Vgs 2014-01-28 Lecture 6, High Speed Devices 2014 7 Metal-Semiconductor Junction III d q Nd dy s y q r s N d X dep y y2 fs y N d X dep y s 2 q dfs ( X dep ) ( X dep ) 0 dy fs (0) 0 Xdep a Ref. potential y X dep 2 s fbi Va qN d qN d 2 f00 a 2 s 2014-01-28 Depletion thickness, maximum Xdep=a Potential needed to fully deplete down to a Lecture 6, High Speed Devices 2014 8 2 minute exercise – part 1 Depletion Edge Vgs=0 Vgs=-1V A B C D Black – Vg = 0V Which green plot corresponds to Vgs=-1 V? Remember: negative bias increases the potential energy of an electron!! 2014-01-28 Lecture 6, High Speed Devices 2014 9 2 minute exercise – part 2 Vsub=1V Vgs Vgs=-1V Vsub + - Depletion egdes Black plot – Vg and Vsub = 0V Which red plot corresponds to Vgs=-1 V and Vsub = 1V? 2014-01-28 Lecture 6, High Speed Devices 2014 10 MESFET Operation VDS + - Vgs Id Id Vcs=0 Vcs(x) Vcs=Vds Resistive voltage drop along channel DVgs DVgs DVgs VDS The potential under the gate is set by the channel-gate potential Vcs(x) 2014-01-28 Lecture 6, High Speed Devices 2014 11 Calculation of the current VDS + - Vgs fs(x,0)=0 Id 𝐽𝑛 = 𝑞𝜇𝑛 𝑛𝛻𝑉 𝛻 ∙ 𝐽𝑛 = 0 𝜕2𝜙 𝜕2𝜙 −𝑞 + = ∆𝑉 = 𝑁𝑑 − 𝑛 𝜕𝑥 2 𝜕𝑦 2 𝜀𝑠 Complicated 2D problem! y x GCA – Gradual Channel approximation: d2f/dx2<<d2f/dy2 𝜕 2 𝜙 −𝑞 = 𝑁𝑑 𝜕𝑦 2 𝜀𝑠 𝜕𝜙(𝑥, 𝑏) 𝐽𝑛 = 𝑞𝜇𝑛 𝑛 𝜕𝑥 𝑑𝐽𝑛 (𝑥)/𝑑𝑥 = 0 2014-01-28 Xdep(x) varies slowly with x Electric field in x-direction is ‘small’ Lecture 6, High Speed Devices 2014 12 Drift Current ich x qWN d n x bx Drift current ich 0 ich x I D x Continuity fs x X dep a f00 bx a X dep fs x fbi Vgs Vcs (x) fs x a 1 f00 fs x x x Gradual channel approximation b(x) varies slowly with x b(x) is determined by solving fs(y) Depletion E-field f L fs x fs x fs x I D dx qWN d n a x 1 f00 x dx qWN d n a f x 1 f00 dfs L L 2014-01-28 Lecture 6, High Speed Devices 2014 13 Saturation Voltage, Pinch-off Vds=0V Vds>0>VDS,sat Vds=VDS,sat Vds>VDS,sat At pinch-off, the depletion region reaches the S.I region Our 1D-decoupled model breaks down: (d2f/dx2>>0) we need to solve 2D possion equation, Dfs(x,y) (numerical solutions needed) Result: Channel of finite thickness forms at channel edge. Increased Vds drops inside this region, or between channel-drain. Current remains independent of Vds after Vds,sat 2014-01-28 VDS ,sat f00 fbi Vgs Lecture 6, High Speed Devices 2014 14 Current-Voltage Characteristics fs x fs 0 fs L u ( x) s d f00 f00 f00 ID s fbi Vgs f 00 qWN d n af00 2 3/ 2 2 3/ 2 d s d s d fbi Vgs VDS V V DS DS , sat L 3 3 f 00 d 0.16 Vgs=0 0.14 qN d 2 f00 a 2 s VDS , sat f00 fbi Vgs Ids - arb units 0.12 0.1 0.08 Vgs<0 0.06 0.04 VT fbi f00 0.02 0 0 2014-01-28 fbi Vgs VDS , sat 1 VDS VDS , sat f 00 0.5 1 1.5 Vds 2 2.5 Pinch-off voltage Threshold Voltage 3 Vgs=-|VT| Lecture 6 High Speed Devices 2014 15 MESFET limitations I D , sat gm qWN d n af00 1 2 3/ 2 s s L 3 3 dI D , sat dVgs fbi Vgs qWN d n a 1 L f00 • We want a high gm – but: • Positive gate-voltage – very high gate leakage! • From electrostatics: a<L/3 • Increase ND – but this lowers µn due to impurity scattering and increases gate leakage! • Increase µn by material choice: Need to have a high Schottky barrier! (InGaAs, InAs can’t be used!) • We can do better using heterostructures or MOSFETs! 2014-01-28 Lecture 6, High Speed Devices 2014 16