Introduction(1) • AlGaN-based UV LED remain considerably less efficient than their InGaN-based LED counterparts. • One of the primary barriers is the low doping efficiency and carrier mobility of high-Al content AlGaN, particularly in the p-type material. • Magnesium, the only successful p-type dopant for AlGaN used to date, has a very high activation energy at the desired AlGaN compositions, resulting in resistive films. 1 Introduction(2) • Most devices use p-GaN as a contact layer, due to the high work function that would be required to make an ohmic contact to p-AlGaN with sufficient aluminum content to be transparent to the emission wavelength of the LED. • Because of the large lattice mismatch between the GaN and high-Al content AlGaN, many LEDs either the GaN directly on the blocking layer or insert intermediate p-layers with decreasing Al content. 2