Applied Physics A DOI: 10.1007/s00339-005-3407-x Materials Science & Processing c.e. allmond v.p. oleshko j.m. howe j.m. fitz-gerald,u Non-aggregated Pd nanoparticles deposited onto catalytic supports Department of Material Science and Engineering, University of Virginia, 116 Engineers Way, Charlottesville, VA 22904, USA Received: 4 June 2005/Accepted: 23 August 2005 Published online: 7 December 2005 • © Springer-Verlag 2005 ABSTRACT Nanostructured powders have shown great promise for a variety of applications including chemical gas sensors, high surface area supports for catalysis, tribology, chemical mechanical polishing, and optoelectronics. In this report, highly dispersed Pd nanoparticles with a narrow size distribution, and mean diameter of 2 ± 0.2 nm, were deposited at room temperature onto amorphous carbon and oxide supports (TiO2 , Al2 O3 ) by pulsed-laser ablation of a Pd sputtering target. Depositions were performed in Ar at a back-fill pressure of 3 mTorr after reaching a base pressure of 10−7 Torr. Populations of uniformly dispersed particles with an interparticle spacing of 3 to 10 nm were observed by high-resolution transmission electron microscopy with little evidence of nanoparticle aggregation. The chemical compositions of individual nanoparticles were confirmed by high spatial resolution energy-dispersive X-ray spectroscopy. PACS 81.15.Fg; 1 68.35.Dv; 68.37.Lp; 81.07.Wx; 81.16.Mk Introduction Current research in several areas of application such as catalysis shows that it is critical to control particle size, particle size distribution, ionic state, and support interactions [1–4]. It is well established that controlling the size of metal particles governs the number of related active sites on structuresensitive supported metallic catalysts. For example, in the Pd–mica system the rate of catalytic CO decomposition was enhanced five fold by reducing the Pd particle size from 5 nm to 2 nm [5]. When developing nanoparticle coatings, two main challenges exist in terms of synthesizing nanoparticles with controlled properties (size, distribution) that attach to the support substrate without secondary effects (agglomeration, surface contamination). There are a number of methods presently utilized in the synthesis of both oxide and non-oxide raw nanoparticles, including spray pyrolysis [6, 7], plasma synthesis [8, 9], precipitation out of either metal–organic or aqueous salt solutions [10, 11], plasma arc synthesis [12], laser vaporization, and gas-phase condensation [13]. While some of these processes are capable of yielding true nanoparticles (< 10 nm), others, such as spray pyrolysis, produce particles in the 20- to 50-nm size range. Furthermore, maintaining a narrow particle size distribution, an important factor for specific applications such as catalysis, is not possible with a majority of these techniques. With respect to catalysis, most metal-particle oxidesupported heterogeneous nanocatalysts are prepared by chemical methods on support matrices. These include the sol–gel process, cross linking, ultraviolet reaction, bacterial superstructures, and template-directed and reduction methods [14, 15]. u Fax: +1 434 982-5660, E-mail: jfitz@virginia.edu As an alternative to chemical techniques, laser synthesis has emerged as a viable method for the production of nanoparticles and bulk powders [16– 20]. In addition, several classes of engineered particulate coatings have been developed using laser ablation in combination with fluidized beds [21–24]. The growth of noble nanoparticles including Pd and Pt by laser techniques has been performed via laser ablation at high pressures into background carrier gases [25] and through photolysis [26, 27]. Recent work by Arrii et al. [1] and Li et al. [13] has illustrated the use of laser ablation in a high-pressure gas in combination with ion beam selection processes to deposit Au nanoparticles on catalytic supports. Here we present results from direct pulsed-laser deposition (PLD) of Pd nanoparticles onto dissimilar oxide and carbon supports, comparing their respective particle sizes, compositions, and spatial distributions as revealed by high-resolution transmission electron microscopy (HRTEM) and field-emission analytical electron microscopy (FE-AEM) employing high spatial resolution energy-dispersive X-ray spectroscopy (EDXS) for compositional analysis of individual nanoparticles. 2 Experimental The experimental process of laser ablation has been described previously [28]. A polished Pd sputtering target (Lesker, Inc., 99.95% pure) was ablated with a KrF excimer laser (λ = 248 nm; focused to a fluence of 2.5 J/cm2 , 25-ns pulse duration, 100 consecutive pulses at 5 Hz) inside a stainless steel high-vacuum chamber (base Rapid communication Appl. Phys. A 82, 675–678 (2006) 676 Applied Physics A – Materials Science & Processing pressure of 3 × 10−7 Torr) maintained at a static pressure of 3 mTorr of 99.995% Ar. Pd nanoparticles were deposited onto 15- to 20-nm-thick TEM grids (lacey carbon, 300 Cu mesh, Ted Pella), 50- to 75-nm oxide supports of TiO2 (rutile and anatase polymorphs, Degussa P-25), and Al2 O3 (α and γ phases, Mager Scientific AP-312) positioned on the TEM grids at a stand-off distance of 12 cm. Phase compositions of the supports were confirmed by highangle X-ray diffraction analyses. The Pd nanoparticles were examined using bright-field (BF) and dark-field (DF) TEM, in selected-area electron diffraction (SAED) and HRTEM modes. Imaging was performed with a JEOL 4000EX TEM having a spherical aberration coefficient Cs = 1.0 mm and 0.18-nm point resolution at 400 kV with a LaB6 filament, and in a JEOL 2010F AEM equipped with a Schottky field-emission gun operating at 200 kV, with Cs = 1.0 mm and 0.23-nm point resolution. EDXS analyses were performed in the JEOL 2010F FE-AEM, which had an Oxford Instruments Pentafet ultra-thinwindow EDX detector, having 136-eV resolution (FWHM) at Mn K α 5.898 keV and nanoprobe capabilities with probe diameter ranging from 2.4 nm down to 0.5 nm. 3 Results Figures 1 to 3 show HRTEM images of Pd nanoparticles deposited FIGURE 1 Pd nanoparticles deposited onto a continuous carbon film in 3 mTorr of Ar. The inset displays the SAED pattern of the Pd nanoparticles FIGURE 2 Pd nanoparticles deposited onto 50-nm Al2 O3 supports in 3 mTorr of Ar. The inset displays the SAED pattern associated with the nanocrystalline α and γ phases of Al2 O3 FIGURE 3 Pd nanoparticles deposited onto 50-nm TiO2 supports in 3 mTorr Ar. The SAED pattern shown in the inset displays point Bragg reflections and discrete rings corresponding to anatase and rutile phases of TiO2 onto continuous amorphous carbon films and Al2 O3 and TiO2 supports, respectively. Some of the metal particles shown in Fig. 1 revealed (111) lattice fringes barely visible against the amorphous support. For the Pd particles deposited onto nanocrystalline oxide supports, the dominant fringe contrast from the supports could interfere with the particle contrast, resulting in significant variations of particle visibility with the defocus of the electron beam. Although small Pd particles are difficult to observe, some of them were clearly identified both in the plan-view and profile-view images shown by arrows in Figs. 2 and 3. The inset in Fig. 1 shows a SAED pattern of the Pd nanoparticles, exhibiting a broadened diffuse ring corresponding to the most probable interatomic spacing of 0.23 nm. Only this diffuse ring is observed due to the small size of the crystallites (below 5 nm) that leads to significant broadening of the diffraction rings. Similar insets in Figs. 2 and 3 display many discrete diffraction rings and spots, mainly corresponding to the crystalline supports rather than the Pd nanoparticles. Figure 4 shows the size distributions of Pd nanoparticles deposited onto the amorphous carbon film and Al2 03 and Ti02 supports. The Pd nanoparticles displayed a mean diameter of approximately 2 ± 0.2 nm with standard deviations of 0.23 to 0.56 nm, which appeared to be independent of the support system. All of the distributions FIGURE 4 Size distributions taken from Pd nanoparticles deposited onto (a) lacey carbon films and (b) Al2 O3 and (c) TiO2 carrier supports in 3 mTorr of Ar with mean diameters of 2.1 nm, 2.0 nm, and 2.3 nm, respectively ALLMOND et al. Non-aggregated Pd nanoparticles deposited onto catalytic supports EDX spectra of a 5-nm Pd nanoparticle corresponding to 2.0 × 10−20 g or one atomic column for a 0.5-nm probe and 1.6 × 10−19 g or 17 atomic columns for a 1.6-nm probe, respectively. Au and Ag represent impurities in the starting Pd sputtering target FIGURE 5 appear roughly log-normal and multimodal, comparable to thermally evaporated metal particles [13]. Elemental analysis of individual Pd nanoparticles on an amorphous carbon film was performed by EDXS, as shown in Fig. 5. Two probe sizes were utilized to determine the compositions of the particles: 0.5-nm and 1.6-nm diameter. The former corresponds to one atomic column, while the latter represents 17 atomic columns. The EDXS spectra revealed an admixture of both Au and Ag impurities in the individual particles. There are known impurities in the target material, although their relatively high levels in some particles indicate that segregation or some other effect may be present. 4 Discussion While it is known that nanoparticles can form at all pressures during laser ablation, extensive studies have focused on the formation and growth of nanoparticles at pressures > 100 mTorr at both room and elevated temperatures. The formation of nanoparticles from the laser-generated plume arises due to interactions both within the dense plasma at near vacuum and with a controlled back-fill gas environment at higher pressures [16, 17, 20, 21, 25, 29–32]. The effects have been shown to produce particles ranging from 1 nm to several microns in size with broad distributions for pressures ranging from 175 mTorr to 100 Torr [17, 25]. It has also been shown that temperature significantly affects the growth of nanoparticles in the presence of a heated substrate by controlling the movement of the ablated plume via a temperature gradient [17]. This effectively serves to limit the time available for nanoparticle formation and deposition on the substrate. In this set of experiments where no thermal source is present, the enhanced nanoparticle formation and transfer at this lower pressure is expected, enabling deposition onto the particulate supports at large distances. This effect is shown at a stand-off distance of 12 cm, which is not unreasonable considering effects of forward plume penetration into background gases as a function of the combined system molecular weight and pressure [16]. In this case, we suggest that during consecutive pulses, nanoparticles first form at the initial plume expansion front, freely expanding through the Ar, and uniformly depositing on the support materials, rather than formation via nucleation and cluster growth on the supports. The measured interparticle spacing was on the order of 3 to 10 nm, with no detectable Pd in the gap regions shown by EDXS. It can be argued that cluster-atom mobility is sufficient to allow nucleation and growth on this scale, but because nearly identical sizes and distributions were observed on three support surfaces with markedly differ- 677 ent diffusion coefficients and surface characteristics may lend further evidence to nanoparticle formation within the vapor. In terms of the scale properties, the Pd nanoparticles produced by direct ablation (i.e. without mass selection or gas carrier) onto the three supports displayed sizes and surface morphologies comparable to those observed when chemical processing methods are utilized [15, 27, 33, 34]. The statistical results, displayed in Fig. 4, exhibit no significant size deviations between the Pd nanoparticles deposited onto the amorphous carbon grids or Al2 O3 or TiO2 supports. This implies that the surface chemistry and morphology of the support does not significantly affect the Pd particle size or surface densities under the selected ablation conditions. In addition, the particles were uniformly distributed over the support surfaces, regardless of the support material. TEM observation did reveal, however, local areas on the supports where the Pd particles did not cover the entire surface. This is most likely due to the geometry of the target relative to the support and/or shadowing from other supports. Observations of Pd nanoparticles on the Al2 O3 and TiO2 supports (examples can be observed by arrows in Fig. 2) show that the Pd nanoparticles wet the substrate, i.e. the contact angle θ between the Pd–oxide interface and the Pd nanoparticle surface is in the range of 50◦ to 75◦ . According to the Young–Dupre relation [35], this corresponds to high values of the thermodynamic work of adhesion, Wad = γm (1 + cos θ) ≥ 2.0 J m−2 , where γm is the surface energy of the metal, and is typical for high-melting-point metals such as Pt and Pd. Since the Pd nanoparticles presumably are spherical and vary in size from 1 to 4 nm in diameter, the fact that they wet the Al2 O3 and TiO2 surfaces indicates strong attraction between the Pd nanoparticle and the support. This further suggests that the particles have sufficient mobility to rearrange when landing on the support. The contact angles for 10 different particles were similar, but with substantial variations depending on the exact surface morphology, e.g. faceted or rough, with similar observations observed for Pd particles on TiO2 supports. 678 5 Applied Physics A – Materials Science & Processing Summary We have reported Pd nanoparticles synthesized onto three dissimilar supports in a low-pressure Ar atmosphere. The mean size of the nanoparticles was 2 nm, regardless of the support material. TEM was used in brightand dark-field modes to quantify size distributions and EDXS confirmed the elemental composition of individual Pd nanoparticles. The growth of this system on markedly different supports suggests that nanoparticles may have formed during flight, adhering to the supports on impact, likely due to Van Der Waals and stronger metal-support interactions in this size regime. ACKNOWLEDGEMENTS This research was partly funded by Philip Morris USA, under contract No. 119 105. 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