Microelectronic Systems
Microelectronic Systems
Department of Informatics,
University of Oslo
Professor Oddvar Søråsen
October, 2006
2006
at the
University of Oslo
M iFaculty
c r o e l e c t rof
onic Systems
Education
Faculty of
Social Sciences
Faculty of
Dentistry
Faculty of
Theology
Faculty of
Medicine
Faculty of Mathematics
and Natural Science
Faculty
of Arts
Faculty
of Law
2006
Institute of
Theoretical
Astrophysics
UoO: 30 000 students, 4600 employees
Department of
Geography
Department of
Informatics
School of
Pharmacy
Department of
Chemistry
Department
of Physics
Department of
Mathematics
Department of
Geophysics
Department of
Biology
Department of
Biochemistry
Microelectronic Systems
www.ifi.uio.no
The CS department at UoO
2006
Department of Informatics
Microelectronic Systems
Key figures
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6 study programs (3+2)
5 years structured Master
program directed towards a
profession
International Master
Participator in “cross disipline”
informatics education (faculties
of art, soc.sciences, education,
law)
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200 employees (incl PhDstudents)
13 research groups
>50 partners in industry and
government
Projects funded by the
Norwegian Research Council
Increasing number of EU
projects
Innovation through UoO centre
(Birkeland Innovation)
2006
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800 Bachelor students
550 Master students
135 PhD students
1800-2000 course students
110 courses + seminars
Microelectronic Systems
Main research directions
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Software Technology
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Distributed Systems
Information Systems
Microelectronic Systems
Computational Science
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Splines
Splines for geometri
and radiance rendering
2006
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Object orientation: SIMULA
Professors O.J.Dahl and
Kristen Nygaard:
von Neumann medal, Turing award
Commanders of St.Olaf Order
Microelectronic Systems
40% of activities towards medicine/health
Health Information System Program
(developing countries)
Self-adapting systems
(interactive arm prosthesis)
2006
Texture analysis in cancer research
Participating in the Norwegian Centre of Excellence:
Mathematics for Applications
Microelectronic Systems
2006
Takk for oppmerksomheten
Microelectronic Systems
Æ One of the main research
directions at the department
2006
Microelectronic Systems (MES)
Microelectronic Systems
Strategic location of the research field
Signal
processing
Programming
2006
Mikroelektronic
Systems
MEMS
Physics
Microelectronic Systems
MES research groups
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6 faculty
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i Shaomeng Li
i Johannes Lomsdalen
i Rene Jensen
i Henning Gundersen
i Omid Mirmotahari
i Kyrre Glette
i Jens Petter Abrahamsen
i Håkon A. Hjortland
i Jørgen A. Michaelsen
2 engineers
i Håvard Kolle Riis
i Hans K. Otnes Berge
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5 part time faculty
i Sigbjørn Næss (Nera)
i Alf Olsen (Mikron)
i Tor Fjeldly (UNIK)
i Joar M. Østby (SINTEF)
i Jørgen Norendal (FINT)
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3 Researchers
i Philipp Häfliger
i Snorre Aunet
i Lena Mariann Garder
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EU project: Caviar
NFR project: Biol
2006
i Dag T. Wisland
i Yngvar Berg
i Oddvar Søråsen
i Bassen Lande
i Mats Høvin
i Jim Tørresen
9 PhD students
Microelectronic Systems
The National Organ for Quality in Education
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The prize winner 2006:
Microelectronic Systems
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Close follow-up of students
Extensive use of laboratory work
Compulsory tasks/ problems to
be solved
Tutors
Students participate in the
development of the education
Streamlined curriculum
2006
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Microelectronic Systems
Microelectronic Systems
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Developing systems based on integrated electronics
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Æ From embedded systems to transistor modeling
Two main directions
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A. Robotics and Intelligent Systems
B. Nanoelectronics
2006
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VLSI, ASIC
Microelectronic Systems
A. Robotics and Intelligent Systems
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Æ Design of digital systems at a high level of
abstraction
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Interface towards software and algorithms
Embedded systems
Reconfigurable hardware and self-adapting systems
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Implementation in FPGAs – Field Programmable Gate Arrays
Evolutionary algorithms for designing hardware
Machine learning
2006
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Microelectronic Systems
B. Nanoelectronics
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Æ Full-custom design of analog, digital and
mixed-mode circuits
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Requiring a thorough insight in the technology!
Micro effect circuits
Data conversion circuits
Bio-inspired microelectronics
Ultra Wideband Radio
RF MEMS – co-integration of MEMS and CMOS
2006
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Microelectronic Systems
Micro effect circuits
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Investigating methods for reducing power consumption
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2006
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Varios transistor structures
Decreased supply voltage
Multiple Valued Logic
Threshold logic
Integrated redundancy
Microelectronic Systems
Data conversion circuits
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Effective methods and circuits for data
conversion
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DAC, ADC
Delta-Sigma methods
Interface to MEMS sensors
Integrated pressure sensor
2006
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Microelectronic Systems
Bio-inspired microelectronics
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”Neuromorph engineering”
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Coclea implant
New ways of coding signal for transmission (pulse coding)
2006
Microelectronic Systems
Ultra Wideband radio
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Wireless shorthold communication
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Impuls radio
Radar for medical detection
2006
Microelectronic Systems
RF MEMS Æ
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Co-integration of MEMS and CMOS
3D model of H-filter, O.P Arhaug
2006
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Integrated filters and resonators with high Q-factors
Microelectronic Systems
MEMS a new activity at MES
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National initiative to establish micro and nano
technology in Norway
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MEMS a new degree of freedom to implement
integrated systems
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on sabattical leave 03/04
microelectronics can use micromechanical components
MEMS structures would need an electronic framework
Suitable competence at MES
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modeling, analysis, implementation of VLSI from transistors to
complex systems
2006
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Norwegian Research Counsel
MiNaLab in neighbouring building (SINTEF and UiO)
Microelectronic Systems
Selecting a focus
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MEMS is a broad field
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1a) The components operate by micromechanics
and/or
1b) The components are fabricated by micromachining
2) The components are used in RF systems
A new course established, 2005: INF5490 RF MEMS
2006
”RF MEMS refers to the design and fabrication of
dedicated MEMS for RF (integrated) circuits”
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Æ focusing om RF MEMS
Microelectronic Systems
Why RF MEMS?
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An increasing number of applications of MEMS in RF
Large market: wireless communication
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telecommunication, mobile phones
distributed intelligence (observation, activation)
environmental surveillance
IFI/MES strategic activity Æ Wireless Sensor Nets
2006
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Challenging, promising and exciting field!
Close connection to circuit technique
Microelectronic Systems
Appealing advantages given by RF MEMS
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Circuit and system miniaturization
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Lower cost
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batch processing
Lower power dissipation
Higher performance
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increased selectivity
higher Q-factor
reduced loss
better isolation
low distortion
increased bandwidth
2006
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monolithic integration with IC or by packaging!
Microelectronic Systems
Basic RF MEMS components
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Resonators
Micromechanical filters
2006
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Switches
Variable capacitors
Inductors
Phase shifters
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Æ focusing on real
vibrating structures
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Can be used to implement
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oscillators
filters
mixer with filter
Æ
Microelectronic Systems
Master project (finished)
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Micromechanical filter by resonating beams
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Master student Ole-Petter Arhaug
Modeling
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Simulations with CoventorWare, Cadence
Design according to a specific process: QinetiQ
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analytical, FEM
QinetiQ INTEGRAM processes, a part of Europractice
O.-P. Arhaug and O. Søråsen, "Designing H-shaped Micromechanical
Filters", International MEMS Conference 2006, iMEMS2006, Singapore, 9 12 May, 2006. Journal of Physics: Conference Series, Institute of Physics
(IOP), (http://www.iop.org/EJ/journal/conf).
2006
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H structures
Microelectronic Systems
Meshed 3D model for FEM analysis
2006
O-P Arhaug
Microelectronic Systems
Filter operation: 2 identical resonators
2006
In phase
Out of phase
Microelectronic Systems
2006
CoventorWare simulations for 6 resonating modes (O-P Arhaug)
Microelectronic Systems
Harmonic response for given dampings
2006
O-P Arhaug
Microelectronic Systems
On-going project
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Integrated MEMS/CMOS oscillator
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Master student Jan Erik Ramstad (Bachelor HiVe)
MEMS resonator with CMOS feedback amplifier
To be used as a ”resonant detector”
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a mechanical resonating structure where physical
measurement parameters modify the resonant frequency
e.g. sensing acceleration
Investigate possibilities for monolithic integration
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post CMOS micromachining Æ
2006
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based on a resonating cantilever beam
Microelectronic Systems
2006
Microelectronic Systems
Using RF MEMS
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Todays RF systems need off-chip components to
obtain required performance
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matching networks, filters, resonators etc.
2006
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RF MEMS components can be used as
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A) Replacement for discrete passive components
B) New integrated functionality
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new system architectures
Æ reconfigurable RF ICs by using switches
Microelectronic Systems
On-going project
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RF transceiver for a Wireless Sensor Node
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Medical application
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Built-in intelligence
Robust
Low-power
Design and demonstration of critical RF MEMS parts
Interfacing and implementation issues
2006
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Brain pressure sensor
Microelectronic Systems
Personal research goals
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2) Investigating effective methods for integration of the
MEMS with microelectronic subsystems, preferably as a
monolithic Si chip (SoC)
Æ Critical technology and realistic implementations of
Wireless Sensor Nodes
2006
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1) Designing RF MEMS and investigating how to use
high performance micromechanical replacement parts in
RF systems instead of todays bulky and power
consuming off-chip components