个人简历
• 美国大学工程学学士、硕士、博士
• 美国德州电子仪器公司芯片测试工程师，
芯片生产工程师，开发部经理。
• 美国阿肯色大学电子工程学教授。
• 发表论文170多篇。
• 完成多项研究项目，价值超过美金1500万。
个人简历
• 博士生导师，指导过65位博士和硕士生。
• 获得伦敦城市行业教育学会的“CGIA”文
凭。
• 写了关于开关电源技术方面的书一本，书
名为“Power Switching Converters”
• 美国电解化学协会委员。
• 微电子封装研究所主任。
University of Arkansas
Micro-Electro-Mechanical
Devices
Simon S. Ang
Professor of Electrical Engineering
University of Arkansas
USA
What is Micro-Electromechanical
Device or MEMs?
• Imagine machines so small they are
imperceptible to the human eye.
• Imagine working machines with gears
no bigger than a grain of pollen.
What is MEMS?
• Micro-Electro-Mechanical Systems
(MEMS) is the integration of mechanical
elements, sensors, actuators, and
electronics on a common substrate
using micro-fabrication technology.
MEMS Applications
• Air Bag Sensor - crash-bag
deployment in automobile
(accelerometer)
• Ink Jet Printer
• Bio-MEMS – Polymerase Chain Reactor
(PCR) for DNA amplification and
identification
MEMS Accelerometer
Automotive -- Testing, Suspension, Air Bags
Agricultural -- Harvesting shock & vibration, Production line monitoring
Manufacturing -- Testing, Production line monitoring, Shipping monitoring
Transportation -- Rail-car sensing, Shipping monitoring, Testing
Down Hole Drilling -- Tilt/Attitude sensing, Machinery health
NASA -- Vibration Monitoring, Testing
(From Silicon Design Inc.,)
A Portable PCR Device
Biological Detection Technology for Counter –
Terrorism
(Lawrence Livermore Laboratory)
Sandia’s Micro-Mirror
Spider Mite on a Sandia’s MicroMirror
Spider Mite Approaching a
Sandia’s Micro-Gear Assembly
Micro Spacecrafts
Microthruster
Microthruster
Microcombustion testing
Microthruster
Thrust (N)
0.45
0.40
Wt=280 micron
0.35
Wt=260 micron
0.30
Wt=200 micron
0.25
0.20
0.15
0.10
0.05
0.00
0.00 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80
Tim e (m s)
Microthruster firing sequence
Basic Surface Micromachining Process
Sequence
I. Deposit Sacrificial Layer
IV. Pattern Mechanical Layer
II. Pattern Sacrificial Layer
V. Release Mechanical Layer
+V
III. Deposit Mechanical Layer
VI. Test Device
Microelectronic Fabrication
Photomask
Fabricated Devices
Processing Equipment
Processing Equipment
Processing Equipment
Processing Equipment
Processing Equipment
Processing Equipment
Processing Equipment
Aluminum Wire Bonder
Gold Wire Bonder
Wire Bond Pull Tester
Measurement Equipment
Microelectronic Cleanroom
Operation
Microelectronic Cleanroom
Operation
Microelectronic Cleanroom
Operation
Microelectronic Cleanroom
Operation
Microelectronic Cleanroom
Operation
Microelectronic Cleanroom
Operation
Wire Bonding
Microfluidic Devices
• Microfluidic devices are MEMS devices with
micro-scale (10-6m) or nano-scale (10-9m)
flow channels
• They come with valves, electrodes, heaters,
and other features
• These microfluidic devices can be used as
tiny chemical processing or reaction system,
consuming only tiny amount of chemical –
micro-TAS (micro total analysis system)
Post-type Filter
Comb-Type Filter
Weir-type Filter
Glass cover
50µm
Silicon plate
Inlet
Outlet
Weir-type Filter
50µm
In Chip Immunofluorescent Cell
Detection
Glass
cover
Labeling
Detection
Fluorescent
Microscope
Silicon
Plate
Cell
Fluorescent labeled antibody Labeled cell
Beads in the Microchannels
Deep channel
(before filter chamber)
Shallow channel
(After filter chamber)
Confocal Images of Microchannel
Shallow channel
Deep Channel
Fluent Simulations of Microfilter Chip
1μm weir gap
3μm weir gap
Flow rate=2 mm/s
Flow rate=2mm/s
6μm weir gap
Flow rate=2mm/s
9μm weir gap
Flow rate=2mm/s
Fluent Simulations of Microfilter Chip
1μm weir gap
Depth=10μm
Depth=30μm
50µm
Depth=50μm
Flow rate=1mm/s
Flow rate=0.5mm/s
Labeling efficiency along the weir
50
Depth of Weir
40
30
20
10
0
0
20
40
60
Normalized S/N ratio
80
100
120
Trapping Efficiency
Comparison with the conventional
detection on slides
• On slides
• Within filter chip
– 9 steps
– 3 steps
– Takes more than 1
– Takes less than
h
0.5h
– Consumes 20µl
– Consumes 2 µl
cells solution and
cells solution and
25 µl labeling
labeling reagent
reagent
Pillar-Type Microfludic Filter
Chip
Future work
• Next generation chip:
– Comb-type chip
– Multiplex
• Application in DNA array
• Application in ELISA
• Incorporate QD
Other Related Work
•
•
•
•
•
Quantum dot labeling
Bacteria sensors
Brain probes
Recording integrated circuitries
Microelectronics Packaging
Quantum Dots Detection System
Quantum Dots Labeling of C. parvum (red) and
G. Lamblia (Green)
“Quantum Dots as a Novel Immunofluorescent Detection System for
Cryptosporidium parvum and Giardia lamblia,” L. Zhu, S. Ang, & WenTso Liu, in Applied and Environmental Microbiology.
Interdigitated Electrode Sensor
What is a Bio-Sensor?
• Biologically
sensitive Material
Direct
– Antibodies
– Enzymes
– DNA Probes
• Transducing
Element/System
– Electrochemical
– Optical
– mass
• Interfacing
Indirect
– Fluorescent
– Chemiluminescent
– Enzymatic substrate
E-coli Sensing Principle
Fe[(CN)6]3-/4-
E. coli O157:H7
Charge
transfer is
blocked
cells
Streptavidin
Self Assembled
Monolayer
Au Electrode
Scanning Electron Micrograph of E-Coli on Bio-Sensor
E-coli cells on the surface of bio-sensor before washing
away non-specific binding - 65 x 100 μm window size
1000 X Magnification
Surface of Electrode (AFM)
Brain Sensors
• Multi-site potential and chronoamperometry brain probes
Neural Signal Recording Electrodes
Potential Electrode
Nano Interdigitated Array Electrochemical Recording Electrode
Brain Sensors
• A brain probe mounted and wire bonded on a circuit
board carrier
Brain Sensors
• SEM Photo of a multi-site potential and chronoamperometry brain probe
Brain Sensors
• SEM Photo of a multi-site potential and chronoamperometry brain probe
Silicon Microprobe Process Flow
Silicon Microprobe Process Flow
Brain Probe Recording in Rat’s Brain
Extracellular Field Potentials in Olfactory
Bulb of A Male Rat
Stainless steel microwires - 100µm
diameter, enamel-insulated
16-site brain microprobe
A) Match in evoked potential amplitude and waveform across the four
recording sites when occupying the same position in the olfactory bulb
B) Sharp reversal of polarity as each recording site across the mitral cell later,
indicating that crosstalk between channels is minimal.
Recording Integrated Circuit
Microelectronic Packaging
Test & Burn-In
(Wafer Level Test Active Probe Card)
Microelectronic Packaging
Interposer
Power
& USB
TSP
PCB
Wafer
Wafer Chuck
uBGA
Silicon or LTCC
or PCB-like
Compliant
Thin Film
Redistribution Capture/Alignment
Structure
Microelectronic Packaging
Microelectronic Packaging
Microelectronic Packaging
Thank You
Questions ?