Data Sheet MEUPSPDRENb
Ultipleat® SP DR Filters
Ultipleat® SP DR KC Assemblies
Description
The Pall Ultipleat SP DR filter is designed specifically for high
flow and improved particle removal in critical surface
preparation chemical baths such as HF and BOE. The SP
DR filter features a highly asymmetrical membrane
construction, developed using Pall’s proprietary membrane
modeling technology (MMT) .
The pore size distribution of the membrane uniformly
transitions from microporous to nanoporous throughout its
depth. The result is a new, application-specific membrane
morphology designed for deep submicron retention of
particles down to 5 nanometers. This retention is achieved
without the flow restriction limitations of conventional
membrane pore structures.
The 5 nanometer and 10 nanometer Ultipleat SP DR filters
utilize a native polyarylsulfone membrane with over 40%
higher surface energy than typical surface modified nondewet PTFE membranes.
The Ultipleat SP DR SWD capsules are space-saving and
low pressure drop disposable filter units. They are ideally
suited for installing into single wafer cleaning systems.
Specifications
Materials of Construction
Features
•
•
•
•
•
MMT-enhanced dual retention of particles
Superior HF filtration
Higher flow rates and longer life
Hyperfine microporous membrane matrix
High surface energy membrane for minimized
microbubble formation
• Faster tool qualification for reduced cost of ownership
• Compact space-saver small capsules
Product Name
Components
Materials
Filter Medium
Polyarylsulfone
Support and drainage
Polyethylene
Core,cage and end caps
Polyethylene
Sealing method
Melt seal
Housing
Polyethylene
O-ring options
FEP encapsulated fluoroelastomer
Ultipleat SP DR KC Assemblies
Ultipleat SP DR SWD Capsules
Removal Ratings
30 nm
10 nm
10 nm
5 nm
Media Wettability
Hydrophilic
Hydrophobic
Hydrophobic
Configurations
Inline
Inline
U-flow
Filter Areas
1.2 m2 / 12.9 ft2
0.8 m2 / 8.6 ft2
0.25 m2 / 2.7 ft2
Maximum Operating
Temperature
50 ˚C / 122 ˚F
60 ˚C / 140 ˚F
Maximum Operating
Pressure
0.39 MPaG / 57 psig < 25 ˚C / 77 ˚F
0.15 MPaG / 21 psig < 50 ˚C / 122 ˚F
0.35 MPaG / 51 psig < 38 ˚C / 100 ˚F
0.17 MPaG / 25 psig < 60 ˚C / 140 ˚F
Maximum Forward
Differential Pressure
0.1 MPa / 15 psid @ 50 ˚C / 122 ˚F
0.1 MPa / 15 psid @ 60 ˚C / 140 ˚F
Product Name
Ultipleat SP DR Filters
Removal Ratings
30 nm
10 nm
Media Wettability
Hydrophilic
Hydrophobic
Configurations
254 mm / 10 in
229 mm / 9 in
254 mm / 10 in
229 mm / 9 in
Filter Areas
1.5 m2 / 16.1 ft2
1.3 m2 / 14.0 ft2
1.0 m2 / 10.8 ft2
0.98 m2 / 10.6 ft2
Maximum Operating
Temperature
70 ˚C / 158 ˚F
Maximum Forward
Differential Pressure
0.1 MPa / 15 psid @ 70 ˚C / 158 ˚F
Pressure Drop vs. Liquid flow Rate1 (Water, 20 ℃)
Ultipleat SP DR KC assemblies
Inline, Inlet: 3/4 inch
4
F Flow rate (g/min)
0
2
80
6
8
10 nm
50
6
40
30
4
30 nm
20
2
10
0
0
0
10
Flow rate (L/min)
20
Flow
F rate (g/min)
0
0.1 0
0.2
0.3
0.4
0.5
4
30 nm
20
2
10
0
0
8
50
5 nm
6
40
30
10 nm
4
20
2
10
1.5
0
2.0
Flow rate (g/min)
0
2
103 mm
4.0 in
356 mm
14.0 in
4
6
10
8
50
6
40
10 nm
30
4
20
0
2
30 nm
10
0
0
10
Flow rate (L/min)
20
30
Typical flow rates. For liquids with viscosity differing from water,
multiply the pressure drop by the viscosity in centipoise.
Ultipleat SP DR KC assemblies
Inline, Inlet: 3/4 inch
106 mm
4.2 in
434 mm
17.1 in
30
60
1
Dimensions (Nominal)
Ultipleat SP DR KC assemblies
Inline, Inlet: 1 inch
20
70
Clean pressure drop (psi)
Clean pressure drop (kPa)
30
80
10
1.0
6
40
0
10
Flow rate (L/min)
60
0
0.5
Flow rate (L/min)
8
10 nm
50
Ultipleat SP DR filters
70
0
10
60
30
Ultipleat SP DR SWD Capsules
80
Clean pressure drop (kPa)
60
6
70
10
Clean pressure drop (kPa)
Clean pressure drop (kPa)
70
4
Clean pressure drop (psi)
Flow rate (g/min)
0
2
Clean pressure drop (psi)
80
Clean pressure drop (psi)
Ultipleat SP DR KC assemblies
Inline, Inlet: 1 inch
Part Numbers / Ordering Information3
Ultipleat SP DR KC Assemblies
LDDN09 1
2 E51 3
Table 1
Table 2
Code
Removal
Ratings
Code
Inlet / Outlet
Vent / Drain
Flow
HSVH
10 nm
12
¾ in male flare style
½ in male flare style
Inline
UHSQ
30 nm
164
1 in male flare style
¼ in male flare style
Inline
Table 3
Code
Prewet Option
Scope
None
Dry
30 nm only
-K3
Prewet filter (packaged in DI water)
10 nm only
-K6
Dry, Low metal extractables2
30 nm only
-K13C
Prewet filter (packaged in DI water),
Low metal extractables2
10 nm only
Ultipleat SP DR SWD Capsules
SWD03 1 4E71-K13C
Table 1
Code
Removal Ratings
HSSH
5 nm
HSVH
10 nm
Connections (Inlet/Outlet, Vent: ¼ in , Super Pillar 4 300 P series (Nippon Pillar)
Ultipleat SP DR Filters
ABD 1
2 3EH1 3
Table 1
Table 2
Code
Cartidge Length
(Nominal)
Code
Removal Ratings
04
102 mm / 4 in
HSVH
10 nm
09
229 mm / 9 in
UHSQ
30 nm
1
254 mm / 10 in
2
508 mm / 20 in
3
762 mm / 30 in
Table 3
Code
Prewet Option
Scope
None
Dry
30 nm only
-K3
Prewet filter (packaged in DI water)
2
-K6
Dry, Low metal extractables
-K13C
Prewet filter (packaged in DI water),
Low metal extractables2
2
3
Please contact Pall for the extractable conditions.
Part numbers in combination with all codes are not always available.
Please contact Pall for the part number availability.
4
Pillar is a trademark of Nippon Pillar Packing Co.
10 nm only
30 nm only
10 nm only
Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
+1 800 360 7255
toll free US
+1 516 484 3600
telephone
+1 516 801 9711
fax
microelectronics@pall.com
Nihon Pall Ltd.
6-5-1, Nishishinjuku,
Shinjuku-ku
Tokyo 163-1325 Japan
+81 3 6901 5700
telephone
+81 3 5322 2109
fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.asp.
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please consult your Pall representative or visit www.pall.com to verify that this information remains valid.
Products in this document may be covered by one or more
of the following patent numbers: EP 667,800; EP 982,061; EP 1,380,331; US 5,543,047; US
5,690,765; US 5,725,784; US 6,113,784; US 7,083,564; US 7,318,800.
© Copyright 2016, Pall Corporation. Pall,
® Indicates a trademark registered in the USA.
MEUPSPDRENb
, and Ultipleat are trademarks of Pall Corporation.
is a service mark of Pall Corporation.
March 2016