Data Sheet MEUPG2SPDRENb
Ultipleat® G2 SP DR Filters
Ultipleat® G2 SP DR KC Assemblies
Description
The Pall Ultipleat G2 SP DR filter is designed specifically for
high flow and improved particle removal in critical surface
preparation chemical baths such as HF and BOE. The SP DR
filter features a highly asymmetrical membrane construction,
developed using Pall’s proprietary membrane modeling
technology (MMT) .
The pore size distribution of the membrane uniformly
transitions from microporous to nanoporous throughout its
depth. The result is a new, application-specific membrane
morphology designed for deep submicron retention of
particles down to 5 nanometers. This retention is achieved
without the flow restriction limitations of conventional
membrane pore structures.
The 5 nanometer and 10 nanometer Ultipleat G2 SP DR
filters utilize a native polyarylsulfone membrane with over
40% higher surface energy than typical surface modified
non-dewet PTFE membranes.
The Ultipleat G2 SP DR KC assemblies are completely
disposable filter units. They are ideally suited for the filtration of
etchant, low temperature stripping chemicals, and DI water.
Specifications
Materials of Construction
Features
• MMT-enhanced dual retention of particles
Components
Materials
• Superior HF filtration
Filter Medium
Polyarylsulfone
• Higher flow rates and longer life
Support and drainage
Polyethylene
Core,cage and end caps
Polyethylene
Sealing method
Melt seal
Housing
PFA*
O-ring options
FEP encapsulated
fluoroelastomer
• Hyperfine microporous membrane matrix
• High surface energy membrane for minimized
microbubble formation
• Faster tool qualification for reduced cost of ownership
• Prevent process contamination by using KC
disposable assemblies
* PFOA free Fluoropolymer
Product Name
Ultipleat G2 SP DR KC Assemblies
Removal Ratings
30 nm
Media Wettability
Hydrophilic
2
10 nm
5 nm
Hydrophobic
2
2
Ultipleat G2 SP DR Filters
30 nm
10 nm
Hydrophilic
2
Filter Areas
1.9 m / 20.6 ft
1.4 m / 15.0 ft
Maximum Operating
Temperature
70 ˚C / 158 ˚F
Maximum Operating
Pressure
0.49 MPaG / 71 psig < 25 ˚C / 77 ˚F
0.34 MPaG / 49 psig < 70 ˚C / 158 ˚F
Maximum Forward
Differential Pressure
0.1 MPa / 15 psid @ 70 ˚C / 158 ˚F
2
Hydrophobic
2
1.9 m / 20.6 ft
1.4 m2 / 15.0 ft2
5 nm
Pressure Drop vs. Liquid flow Rate1 (Water, 20˚C)
Ultipleat G2 SP DR filters
6
8
10
80
Flow rate (g/min)
0
2
4
6
8
10
6
40
10 nm
4
20
2
30 nm
0
0
0
10
Flow rate (L/min)
20
30
Clean pressure drop (kPa)
8
5 nm
10
Clean pressure drop (psi)
Clean pressure drop (kPa)
10
60
5 nm
60
8
40
10 nm
6
30 nm
4
20
2
0
40
0
0
10
Flow rate (L/min)
20
30
Clean pressure drop (psi)
80
Flow rate (g/min)
0
2
4
Ultipleat G2 SP DR KC assemblies
T-flow, L-flow, Inlet: 3/4 inch
40
Ultipleat G2 SP DR KC assemblies
T-flow, Inline, Inlet: 1 inch
1
80
Typical flow rates. For liquids with a viscosity differing from water,
Flow rate (g/min)
0
2
4
6
8
10
multiply the pressure drop by the viscosity in centipoise.
6
40
10 nm
4
20
0
30 nm
128E2
LDFDT1
128E71
0
0
LDFDT1
10
20
30
168E71
LDFGN1
40
439 ｍｍ
17.3 in
353 ｍｍ
13.9 in
350 ｍｍ
13.8 in
164E51
135 ｍｍ
5.3 in
243 ｍｍ
9.6 in
221 ｍｍ
8.7 in
202 ｍｍ
8.0 in
356 ｍｍ
14.0 in
2
Flow rate (L/min)
Dimensions (nominal)
LDFDT1
8
5 nm
Clean pressure drop (psi)
Clean pressure drop (kPa)
10
60
Part Numbers / Ordering Information 4
Ultipleat G2 SP DR KC Assemblies
LDF
1
1 2
3 E
4
5
Table 1
Table 2
Table 3
Code Flow
Code
DT
T-flow
HSSH
5 nm
DL
L-flow
HSVH
GN
Inline
HSQ
Removal Ratings
Inlet/Outlet
10 nm
128
¾ in male
½ in male
½ in male
T-flow / L-flow
30 nm
164
1 in male
¼ in male
¼ in male
Inline
168
1 in male
½ in male
½ in male
T-flow
Table 4
Head end Bowl end
Memo
Table 5
Code Connections
Code
Prewet Option
None
Dry
Scope
2
2
Super Pillar Type (Nippon Pillar)
51
Flare style
71
Vent/Drain
Code
Super Pillar 300 P series (Nippon Pillar)
30 nm only
3
-K6
Dry, Low metal extractables
30 nm only
-K13C
Prewet filter (packaged in DI water),
Low metal extractables3
5 nm, 10 nm
2
Pillar is a trademark of Nippon Pillar Packing Co.
3
Please contact Pall for the extractable conditions.
4
Not all code combinations have part numbers available.
Please contact Pall for part number availability.
Ultipleat G2 SP DR Filters
ABDG1 1
3EH1
2
Table 1
Code
Table 2
Removal Ratings
HSSH
5 nm
HSVH
10 nm
HSQ
30 nm
Code
Prewet Option
Scope
None
Dry
5 nm, 10 nm, 30 nm
-K3
Prewet filter (packaged in DI water)
5 nm, 10 nm only
-K6
Dry, Low metal extractables3
30 nm only
-K13C
Prewet filter (packaged in DI water),
Low metal extractables3
5 nm, 10 nm only
Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
+1 800 360 7255
toll free US
+1 516 484 3600
telephone
+1 516 801 9700
fax
Microelectronics@pall.com
Nihon Pall Ltd.
6-5-1, Nishishinjuku,
Shinjuku-ku
Tokyo 163-1325 Japan
+81 3 6901 5700
telephone
+81 3 5322 2109
fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.asp.
Because of technological developments related to the products, systems, and/or
services described herein, the data and procedures are subject to change without
notice. Please consult your Pall representative or visit www.pall.com to verify that this
information remains valid.
Products in this document may be covered by one or more
of the following patent numbers: EP 667,800; EP 982,061; EP 1,380,331; US
5,543,047; US 5,690,765; US 5,725,784; US 6,113,784; US 7,083,564; US 7,318,800.
© Copyright 2016, Pall Corporation. Pall,
, and Ultipleat are trademarks of Pall Corporation.
® indicates a trademark registered in the USA. Filtration. Separation. Solution.
is a service mark of Pall Corporation.
MEUPG2SPDRENb
March 2016