Data Sheet MEPEKLNENc
PE-Kleen Filter
Description
The PE-Kleen filter combines the latest advances in
polyethylene membrane technology with Pall’s unique
crescent-shaped Ultipleat ® filter technology. The result is a
cartridge with the outstanding particle retention
characteristics required by the semiconductor industry.
The PE-Kleen filter is specifically designed for the filtration
of ultra-high-purity chemicals. It is recommended for
applications involving antireflective coatings and bulk
filtration of 248 nm and 193 nm photoresist.
The XP option is available for advanced lithography
processes.
Features
• Excellent gel-retention characteristics
• High flow rates
• Low extractables
• 100% integrity tested
• Manufactured in a cleanroom
• Minimized organic extractables by XP option
• XP option guarantees low organic, metal and particle
cleanliness for the most advanced processes.
Specifications
Materials of Construction
Components
Materials
Filter medium
HDPE 1
Support and drainage
HDPE
Core, cage and end caps
HDPE
O-ring options
EPR, FEP Encapsulated fluoroelastomer, Kalrez 2, Chemraz 3
1
High Density Polyethylene.
2
Kalrez is a trademark of DuPont Performance Elastomers.
3
Chemraz is a trademark of Greene, Tweed & Co.
ABD Filters
Removal Ratings
2 nm
5 nm
2
1.3 m
2
10 nm
30 nm
2
2
Filter Areas
1.3 m
1.3 m
Maximum Operating
Temperature
50 ˚C / 122 ˚F
Maximum Forward
Differential Pressure
340 kPa @ 40 ˚C / 49 psid @ 104 ˚F
1.1 m
0.05 μm
1.4 m
2
1.0 μm
1.1 m2
Pressure Drop vs. Liquid Flow Rate (Water, 20 ˚C)4
Liquid Flow Rate (gpm)
0
0.1
Liquid Flow Rate (gpm)
0.2
0.3
0.4
0.5
0
3
4
5
3
20
2
10
1
UG 001
0
1
0.5
1.5
2
0
Clean pressure drop (kPa)
4
UG 5
10
UG 003
Clean pressure drop (psid)
Clean pressure drop (kPa)
4
2
5
UG 2
30
0
1
80
60
8
UG 005
6
40
4
20
2
UG 100
0
0
0
5
10
15
Liquid Flow Rate for ABD1 Cartridge (L/min)
Liquid Flow Rate for ABD1 Cartridge (L/min)
(Water / 1 mPa･s fluid)
(Water / 1 mPa･s fluid)
Clean pressure drop (psid)
40
20
For liquids other than water, multiply the differential pressure by fluid viscosity in centipoise.
Part Numbers / Ordering Information5, 6
ABD 1 UG 2
3 E 4
Table 1
Code
Nominal length
(mm / in)
1
254 / 10
2
508 / 20
3
762 / 30
Table 2
Table 3
Table 4
Code
Removal Ratings
Code
Configurations
Code
O-ring Materials
2
2 nm
3
J
EPR
5
5 nm
222 O-ring open end
flat closed end
226 O-ring open end
fin on closed end
H1
7
FEP Encapsulated
fluoroelastomer
222 O-ring open end
fin on closed end
H11
Kalrez
8
H12
Chemraz
001
10 nm
003
30 nm
005
0.05 μm
100
1.0 μm
5
Filter elements may not be available in all configurations. Contact your local Pall representative for availability.
6
For XP option, add –XP to end of part number for 2 - 10nm removal ratings and 10 - 20 inches.
Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
+1 800 360 7255
toll free US
+1 516 484 3600
telephone
+1 516 801 9700
fax
Microelectronics@pall.com
Nihon Pall Ltd.
6-5-1, Nishishinjuku,
Shinjuku-ku
Tokyo 163-1325 Japan
+81 3 6901 5700
telephone
+81 3 5322 2109
fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.
Because of technological developments related to the products, systems, and/or
services described herein, the data and procedures are subject to change without
notice. Please consult your Pall representative or visit www.pall.com to verify that this
information remains valid. Products in this document may be covered by one or more
of the following patent numbers: US5543047; US5690765; US6113784; US7083564;
US7318800; EP0982061; EP0667800; EP1380331.
© Copyright 2014, Pall Corporation. Pall,
, and Ultipleat are trademarks of Pall Corporation.
® indicates a trademark registered in the USA. Filtration. Separation. Solution.
is a service mark of Pall Corporation.
MEPEKLNENc
October 2014