Data Sheet MEPNEXEN
P-Nylon EX Filter
Description
The P-Nylon EX filter is specifically designed to target
defects in the next generation lithography process. The
Nylon Effect, which has proven to significantly reduce microbridge and cone defect in 193 nm resist and BARC chemicals, can now be applied to all lithography applications. The
increased adsorption functionality and improved flow performance enhance the removal of hardly soluble polymer components. (almost 4 times increased gel capture capacity
compared to the conventional Ultipleat® P-Nylon filter)
This enhanced adsorption will contribute to further defect
reduction.
Features and Benefits
• Naturally hydrophilic (no surface modifications)
• Low extractables
• Enhanced adsorption capabilities
• Reduces defects by optimizeding filter “Contact Time”
• Wide range of available configurations
Disposable filter capsule: PHD, DDF
Filter cartridge: ABD
Specifications
Materials
Components
Materials
Medium
Hydrophilic Asymmetric Nylon6,6
Support and Drainage
High Density Polyethylene (HDPE)
Core, Cage, and End Caps
High Density Polyethylene (HDPE)
Housing
1
O-ring options 2
High Density Polyethylene (HDPE)
PHD12 : Kalrez 3
ABD1 : FEP encapsulated fluoroelastomer
Specifications
1
2
3
4
Filter Areas
PHD12 : 1,100 cm2
DDF1 : 1,600 cm2, DDF2 : 3,300 cm2, ABD1 : 9,400 cm2
Maximum Operating Temperature
PHD12, DDF1, DDF2 : 30 ˚C / 86 ˚F
ABD1
: 50 ˚C / 120 ˚F
Maximum forward differential pressure
PHD12, DDF1, DDF2 : 0.29 MPa @ 30 ˚C / 42 psi @ 86 ˚F
ABD1
: 0.27 MPa @ 20 ˚C / 40 psi @ 68 ˚F
Maximum Operating Pressure 4
0.29 MPa @ 30 ˚C / 42 psi @ 86 ˚F
PHD12, DDF1 and DDF2 capsules
PHD12 capsules and ABD1 cartridges
Kalrez is a trademark of E. l. du Pont de Nemours and Company
PHD12, DDF1 and DDF2 capsules
Pressure Drop vs. Liquid Flow Rate (Water, 20℃) 5
Disposable filter capsule (DDF)
Liquid Flow Rate (gpm)
0
0.1
0.2
Liquid Flow Rate (gpm)
0
0.5
1
0.5
10
1
5
0
0
0
0.5
1
1.5
15
2
Liquid Flow Rate for PHD12 Capsule (cc/sec)
(Water / 1cP fluid)
DDF1ANXEFNP44
2
2.5
75
10
DDF2ANXEFL64
50
5
25
0
0
0
0.5
1
1.5
ABD1
100
Clean pressure drop (kPa)
2
Clean pressure drop (kPa)
PHD12
15
1.5
125
100
Clean pressure drop (psid)
Clean pressure drop (kPa)
0.4
DDF1ANXEFL44
3
20
5
0.3
125
Clean pressure drop (psid)
25
Filter cartridge
15
75
10
50
5
25
0
0
2
0
Liquid Flow Rate for DDF1/2 Capsule (L/min)
(Water / 1cP fluid)
Clean pressure drop (psid)
Disposable filter capsule (PHD)
2.5
5
7.5
10
Liquid Flow Rate for ABD1 Cartridge (L/min)
(Water / 1cP fluid)
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
Dimensions
Disposable filter capsule (PHD)
64mm
2.5 in
Disposable filter capsule (DDF)
73 mm
2.9 in
73 mm
2.9 in
122 mm
4.8 in
148 mm
5.8 in
212 mm
8.3 in
73 mm
2.9 in
DDF1_NP44
73 mm
2.9 in
DDF1_FL44
73 mm
2.9 in
DDF2_FL64
Part Numbers / Ordering Information
Part Number
Nominal Length
(mm / in)
Configuration
O-Ring Material
or Capsule Connections
PHD12ANXEH11B
73 / 2.9
Disposable Capsule
Kalrez
DDF1ANXENP44
122 / 4.8
Disposable Capsule
1/4” Super Pillar 6 / 1/4” Super Pillar
DDF1ANXEFL44
148 / 5.8
Disposable Capsule
1/4” Flare style / 1/4” Flare style
DDF2ANXEFL64
212 / 8.3
Disposable Capsule
3/8” Flare style / 1/4” Flare style
ABD1ANX3EH1
254 / 10
FEP encapsulated fluoroelastomer
ABD1ANX8EH1
254 / 10
ABD2ANX3EH1
508 / 20
ABD2ANX8EH1
508 / 20
Code 3 cartridge
222 double O-ring / flat end
Code 8 cartridge
222 double O-ring / finned end
Code 3 cartridge
222 double O-ring / flat end
Code 8 cartridge
222 double O-ring / finned end
6
Pillar is a trademark of Nippon Pillar Packing Co., Ltd
FEP encapsulated fluoroelastomer
FEP encapsulated fluoroelastomer
FEP encapsulated fluoroelastomer
Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
+1 800 360 7255
toll free US
+1 516 484 3600
telephone
+1 516 801 9711
fax
microelectronics@pall.com
Nihon Pall Ltd.
6-5-1, Nishishinjuku,
Shinjuku-ku
Tokyo 163-1325 Japan
+81 3 6901 5700
telephone
+81 3 5322 2109
fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.asp.
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please consult your Pall representative or visit www.pall.com to verify that this information remains valid.
Products in this document may be covered by one or more
of the following patent numbers: US5543047; US5690765; US6113784; US7083564; US7318800;
EP0982061; EP0667800; EP1380331; US7338599; US7195122; EP1286748; EP1286746;
US0465258; US0456485; US795467; US7807055
© Copyright 2013, Pall Corporation. Pall,
, Ultipleat, and PhotoKleen are trademarks of Pall Corporation.
® Indicates a Pall trademark registered in the USA.
is a service mark of Pall
Corporation.
MEPNEXEN
December 2013