Meeting Agenda:
15.00
Welc ome
15.05
Introduction & Review of Projects o MEMs: material design and processing for MMAs o Optica l properties of nanoscale arrays o Magnetoelectronic devices o Ultimate Polymer: Carbon nanotube enabled materials
15.45
An outline of CMI’s rationale for a TinyTech KIC
15.55
Conclusions from m eeting and developme nt of action plan o A list of grand vision ideas o A list of potential collaborators o Who should be included from I ndustry / Go vernment o Should CMI hire a KIC Manager to go after funding sources o Next steps
16.25
Closing remarks
16.30
Networking / refreshments
17.00
End of meeting
5 mins Ted Acworth (MIT)
40 mins
Prof W I Milne (CU)
Prof D Boning (MIT)
Prof K A N elson (MIT)
Prof J F Scott (CU)
Prof C A R oss (MIT)
Prof J A C Bland (CU)
Prof A H Windle (CU)
Prof M C Boyce (MIT)
10 mins Ted Acworth
30 mins
All
5 mins Ted Acworth
30mins

1
Page 1
3

MEMS Research:
Materials Design and Processing for MMAs
Cambridge PI’s: Prof. Bill Milne, Prof. Norman Fleck, CU
Engineering Dept.
MIT PI: Prof. Duane Boning, EECS (replaces Prof. Spearing)
Co-investigators: Flewitt, Moore, Seshia, Schmidt, Sutcliffe,
Thompson, Wardle, Williams
• Objective: To establish an intellectual community at Cambridge, focused on the development of MicroElectroMechanical Systems
(MEMS), introducing new materials, processes and design methods.
• Intended Outcomes: Establishment of intellectual community at
Cambridge, linked to MIT, built upon existing strengths at CUED.
Generation of research results, and IP in areas of new materials, processes, material/process/sensor/actuator selection, actuator/sensor optimization, test methods for MEMS/MMA’s
Page 2

• Important activities, collaborations:
– Collaborations
• Mark Spearing has visited CUED several times during this period and has now moved to Southampton University
• Carl Thompson has visited CUED during this period
• Weekly MEMS meetings continuing at CUED and MIT
• Discussions with Richard Syms I.C, Paul Kirby Cranfield, Julian
Gardner Warwick University re interactions
• Hayden Taylor (CU@MIT exchange ’02-03) completed MEng at CU
(’04) with D. Moore, has started Ph.D. at MIT in Fall ‘04
– Several papers published or in preparation with joint authorship between CUED and MIT
– Web Site has been set up www-g.eng.cam.ac.uk/edm
Page 4

• Sutcliffe et al working on CMP.
• Luo, Flewitt, Milne and Chua have continued work on DLC MEMS growth, material development and device design and fabrication. Also the DLC work has been further extended by Luo et al to optimise the Ni/DLC bimorph actuated normally closed microgrippersmodified for Bio applications
• Flewitt and Moore worked on Micro-test system development.
• Tribological behaviour of MEMS materials by K S Faszer and John Williams .
• Chua, Milne et al investigated DLC for SAW devices.
• Fleck , Chua et al worked on microshear testing facilitynew
• Flewitt and Ahsan worked on deployable locks based on a variety of material systems.
• Seshia continued work on MEMS devices specifically, micromechanical resonator oscillators for wireless transceiver and sensor applications, micromechanical biosensors, and inertial sensors
• Published guidelines/protocols for direct wafer bonding (K. Turner Ph.D. May ‘04)
• Boning continued work on DRIE wafer-level and pattern-dependent models
• Wardle joined effort and worked on piezoelectric vibrational energy harvestersnew
Page 5

Luo, Milne, Flewitt, Spearing and Fleck
Pages 14 & 15
• Creation of bimorph structures to create normally closed grippers
• Combination of DLC and electrolytic Ni
• Thermal actuation by resistance heating
• Builds on earlier work on electro-deposition, DLC, micromechanical testing and modeling
• Potential applications for bio-MEMS cell capture

d
3
Polymer d
2 d
1
Ni
DLC
L
DLC/Ni:100/500nm
Polymer:100nm
Stress: 6GPa
120.0
100.0
80.0
60.0
40.0
20.0
0.0
0 1
Bi-layer
Polyimide Tri-layer
Poly. (SU8 Tri-layer)
2 3 4 5 6
Input Voltage (V)
SU8 Tri-layer
Poly. (Bi-layer)
Poly. (Polyimide Tri-layer )
A thin polymer on a bimorph structure does not change the displacement of the device, but acts as a coating layer
7

Page 17
DLC as insulator
(d)
(f)
Cantilever type
Bridge type

Brian Wardle, MIT Aero/Astro
• Objectives
– Power for wireless sensor node applications such as infrastructure & structural health monitoring (SHM), RFID tags, homeland security, etc.
– MEMS fabrication development
– Low-level ambient sources targeted
– Predictive design tools
• Needs
– Pervasive power from pervasive ambient sources
– Wireless sensor’s power trending down, currently in 10-100s of m W range
– Voltage levels on order of Volts (3V std.)

• Developments worth publicizing: Nano/MEMS
M.Phil now up and running.
• Modifications to statement of work and/or funding: essentially unchanged from original proposal.
• Expected financial profile: near constant spend rate to end of project. All staff now in place.
Page 21

• Expected activities, collaborations:
– Continued interchange of personnel, ideas
– Increased interaction with industry as project thrusts yield results (wafer bonding/CMP,
DRIE, materials selection)
– Increased focus on devices in research
• Integration of thermal grippers into practical devices need to discuss further with
Ted Acworth
• Expected milestones/deliverables:
– Publish guidelines/protocols for DRIE (MIT)
– Challenges and/or Issues To Address
• Problem/Concern:
– Continuation of MEMS activity beyond CMI funding (one year to go)
• Plan for resolution:
– CU side actively looking for other funding sources for CU MEMS activities, some EU and EPSRC funding obtained, other sources sought
– Funding for MEMS at CUED is continuing to increase
• How CMI can help
– KIC -Tinytech?
Page 22

CMI-001
P/097
May – Nov 2004

Cambridge PI : Prof. James F. Scott, Earth Science Dept.
MIT PI : Prof. Keith A Nelson, Chemistry Dept.
• Brief Description of Project:
Fabricate micron- or submicron-arrays of voltage-tunable ferroelectric devices consisting of two-dimensional patterns of high refractive index rods
Characterize GHz-THz dielectric responses through
"polaritonics" measurements w/ micron spatial resolution
• Summary of Intended Outcomes:
Delivery and test of a small number of prototype devices
Prototype apparatus for GHz-THz dielectric metrology

•Important activities, collaborations:
• Investigation of Pd-acetate based precursors for electroding
• Continued collaboration with Finlay Morrison (Royal Soc. URF)
• Continued discussions with Company X – exploratory pro bono experiments underway for microfluidics (ink-jet printers)
• Contractual discussions with Company Y – drug delivery systems
(monodisperse inhalers)
• Contractual discussions with Company Z – venture capital company offering an initial £100,000.
• Fabrication of 10-20 micron polaritonics structural elements
• Direct imaging of polariton fields in 10-20 micron structures
• FDTD simulations of polariton propagation in small structures
• Study of candidate materials for smaller polaritonics length scales
• Basis of ~ 50 kV/cm THz electric fields established

THz polaritonic bandgap materials fabricated in FE films by fs laser machining
Can control THz polariton wave propagation, focusing
Will reach 1-5 m m feature sizes
•Milestones achieved: Polariton bandgap movie
• Alternate electrode material (Ru) sourced : DER (2,4-
Dimethylpentadienyl)(ethylcyclopentadienal)ruthenium
• Nanotubes fabricated using both Trento and KTH substrates
•Deliverables completed:
• Nanotube arrays from Trento and KTH substrates
• Thin film polaritonics paper submitted for publication

• Expected activities, collaborations :
• Use of ruthenium for electroding (DER from Tosoh Corp)
• Receive delivery of Rapid Thermal Processor
• Continuation toward smaller length scales, higher THz fields
• Renewed attempt at THz polaritonics in FE nanotubes
• Expected milestones:
• Nanotubes with concentric electrode structure (Pd/SBT/Ru)
• Investigate electrical properties of single electroded nanotube
• Addressable array of electroded nanotubes
• 1-5 micron polaritonics length scales
• 50 kV/cm THz fields
• Expected deliverables:
• Fabrication of single electroded nanotube and evaluate piezoelectric response
• Fabricate a small (4x4, 16 bit) array of addressable nanotubes
• Publications on simulations & THz measurements in small structures

• Modifications to statement of work and/or funding:
• Expected financial profile:
• MIT is out of funds!
• Anything else:
• PDRA Dr Veronika Kugler successfully attained permanent post in UK industry (Carl Zeiss SMT Ltd)
• JFS has given 5 invited talks in the last 6 months:
MAGEL (La Rochelle, July), Eur. Physical Soc
(Prague, Aug), Int. Conf. On Domains (Tsukuba, Aug),
Eur. Conf on Appl of Polar Dielectrics (Liberec, Sept),
NATO Adv Research Workshop (Lvov, Oct).

• Any previous press interest in your project? By whom? What media?
• Cambridge Univ. Research Services expects a press release by March or April.
• Upcoming events, major publications, noteworthy dates in the next six months:
• No publications on Cambridge work due to proprietary/patent reasons.
• Publications on simulations & THz measurements in small structures
• Do you need any help with your PR / communications / event planning?

• Problem/Concern:
• The deposition of Pd electrodes has turned out to be a complex materials science problem. Although Pd-acetate is a confirmed methodology (Steinhart, 2003), the processing does not normally produce an atomically flat, uniform sheet of metallic Pd as the electrode; rather, it yields crystals (see attached figures). Although these do conduct, in our judgment they are not suitable for commercial devices.
Figure. Pd particles formed by thermal decomposition of a Pd-acetate thin film
1.0 μm 0.5 μm

• Plan for resolution:
• Ongoing investigation of incorporation of co-polymer
(e.g. polyethylene glycol) to improve Pd microstructure
• We have already taken delivery of a new Ru precursor chemical [Ruthenium-DER] from Tosoh (Tokyo) which has been shown in an unpublished Samsung-Tokyo collaboration to produce superior electrodes in DRAM trenches, compared with Pd.
• How CMI can help:
• This electroding problem has caused a 3-month delay and associated unbudgeted costs.

Cambridge PI : Prof. J. Anthony C. Bland, Cavendish Lab.
MIT PI : Prof. Caroline A. Ross, Materials Science and
Engineering Department
MIT Co-PI : Dr. Jagadeesh S. Moodera, Francis Bitter Magnet
Laboratory
Brief Description of Project :
To develop the technology of magnetoelectronic devices. This will be achieved by work on two specific devices : an MRAM
(magnetic random access memory) and a spin-diode. To select at least one of these devices for prototyping. To interact with potential manufacturers in the UK to bring a magnetoelectronic device to market.

MRAM prototypes based on
Elliptical Ring cells
F. J. Castaño, C. A. Ross
Top: Made using evaporation: Co/Cu/NiFe ring, Au/Ti metal
Bottom: Made using sputtering: 20nm NiFe ring, Ta/Cu/Ta metal
500 nm
2 um 2 um

20 nm NiFe/10 nm FeMn rings of different widths: note exchange bias

Determination of vortex state circulation in a single ring during one applied field cycle
T.J. Hayward, T.A. Moore, CU
O-V V-O
+
H c1
Two major switching routes
H c2 • Vortex state has same circulation ( + or ) on both downward and upward field sweeps
+
Focused Kerr microscopy
Incident beam
V-O O-V
-
NiFe ring d out d in
= 5 m m
= 3 m m
H c2
Sinusoidal field
-
H c1
Observed transitions:
O-V = onion-vortex, V-O = vortex-onion
-400 -200 0 200 400
Applied field (Oe)

Design for a ring sensor element
Applied field
T.J. Hayward,
J. Llandro
Fixed layer: onion state
Free layer: has vortex state at remanence
Bead
GMR ring stack
• Bead absent: free layer oscillates between onion and remanent vortex state
• Bead present: switching to onion state is suppressed
• Measured as a change in the MR
Varaiation of relative resistance with b for all four possible
Resistance vs. current contact position
External field dist n :
Ring d = 2 m m
Bead d = 2 m m
1.015
Anti - Aligned Onion
Vortex 1
Vortex 2
Aligned Onion
Max separation
M bead
= 3H ext
1.005
Sensor
0
• Signal amplitudes up to ~1 mV
0.2
b
0.4

Spin-injection into Silicon by spin filtering using EuO
EuO allows efficient spin injection
2nm spin-injector spin-detector
Si spin diffusion channel
2 m m x 2 m m x 10 m m,
SOI wafer, photolith. & RIE
Ag or Y EuO Si Spin-injector, detector, contacts by e-beam lithography

Future possibilities for TinyTech KIC
A TinyTech KIC could be focussed towards developing hybrid nanoscale devices - those incorporating electronic, magnetic and/or optical materials, allowing a range of new functionalities. The group might select several examples for collaborative development.
Examples:
Magnetoelectronic memory, or Sensor for biofunctionalized beads, based on magnetic rings; Spin transistor; Optically addressed ferromagnet/semiconductor memory element or processor; CNT-based transistor …

Synthesis
Patterned arrays and vertically aligned CNT coatings
Properties of directly spun CNT fibre
Modeling
Deformation Effects on Electrical Conductivity
Equivalent Orthotropic Model of MWNT
Properties of Vertically Aligned CNT Coatings
Nanoindent and Nanoscratch Behavior
Wetting Behavior
Heat Transfer Behavior
CNT Polymer Nanocomposites
Stable suspension of SWCNTs
Rheology of tube-filled melts and suspensions
Mechanical behavior of thermoplastic composites
M.C. Boyce, R.E. Cohen, J. Robertson, A.H. Windle, K.K. Gleason, G. McKinley, D.M. Parks
M. Hamm, Q. Li, M. Motta, A. Pantano, M. Garg, K. Lau, C. He, B. J. Bico, V. Arnim, Kleinsorge, S
Hofmann, K Teo, M Cantoro

Plasma Enhanced Chemical Vapour Deposition
• Large area, selective growth. Not bulk growth
• Ni catalyst.
• DC plasma
• C
2
H
2
:NH
3
1:3, 60 mbar pressure
• Bias voltage aligns CNTs (600V)
• Selective growth. Nanotubes only grow where there is catalyst (Ni)
• NH
3 etches away unwanted a-C

Patterned Growth
• Patterned catalyst gives selective growth
• Shadow mask or
• Lithography
• Side view

Prior Work on CMI Project: Nanoindentation on
Vertically Aligned Carbon Nanotube (VACNT) Forests
 Produced by PECVD method
 Dimensions can be better controlled
 Applications: field emission devices, hydrophobic coatings, composite materials
8000
6000
4000
2000
0
0 200 400
Penetration (nm)
600
Typical indentation force-penetration curve from nanoindentation tests

Feedstock Feedstock
Ethanol*
Thiophene
Ferrocene
1100 to 1200 ° C
H
2 carrier gas
Wind-up
“Vertical”
Wind-up
“Horizontal”

50 m m
Image analysis
50 m m
Experimental data
Fitted curve
Fibre diameter of 20 to 50 m m
1 m m
0 45 90 135 180
Angle (°)
225 270 315 360

TEX
 g km
100 m m
Force

TEX
N
 m


10
3 g
Density


 m
3 g

10

6






N m
2
Stress

10
9


GPa
The range of diameters along a fibre occurs due to differences in the local packing density of nanotubes and/or instabilities in the gasphase reaction.
1.0
1 s
2
0
0
0
2 4 6 8 1 0 12 14 16 18 20

50 m m
Optical micrographs of carbon nanotube dispersions, imaged in reflected light with crossed polars.
Song, W. Kinloch, I.A. and Windle, A.H. Science , 302, 1277 (2003)

Scanning electron micrograph showing details of orientation around a disclination of strength –1/2.

Synthesis and processing of CNT
(i) “Canape” EU funded 8 M Euros
Cambridge University
+ 14 partners in France, Germany, Belgium, Switzerland and Italy
(ii) DTI Consortium £3 M (Fibre process)
(iii)
(iv)
Boeing
Hexcel
Thomas Swan
Inst. of Occupational Medicine
New Company
“CUFLO” To bridge the University/industrial divide in UK
TinyTech KIC ?

To enhance the competitiveness, productivity and entrepreneurship of the UK economy…
By improving the effectiveness of knowledge exchange between university and industry, educating leaders, creating new ideas and developing programmes for change in universities, industry and government …
Using an enduring partnership of Cambridge and MIT, and an extended network of participants .

CMI : Defining a space for knowledge exchange across research, education and industry
Research Education
KE
Industry