EE 5340 Semiconductor Device Theory Lecture 04 – Spring 2011 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc Review the Following • R. L. Carter’s web page: – www.uta.edu/ronc/ • EE 5340 web page and syllabus. (Refresh all EE 5340 pages when downloading to assure the latest version.) All links at: – www.uta.edu/ronc/5340/syllabus.htm • University and College Ethics Policies – www.uta.edu/studentaffairs/conduct/ • Makeup lecture at noon Friday (1/28) in 108 Nedderman Hall. This will be available on the web. ©rlc L04-28Jan2011 2 First Assignment • Send e-mail to ronc@uta.edu – On the subject line, put “5340 e-mail” – In the body of message include • email address: ______________________ • Your Name*: _______________________ • Last four digits of your Student ID: _____ * Your name as it appears in the UTA Record - no more, no less ©rlc L04-28Jan2011 3 Second Assignment • Submit a signed copy of the document posted at www.uta.edu/ee/COE%20Ethics%20Statement%20Fall%2007.pdf ©rlc L04-28Jan2011 4 Quantum density of states function • 1 dim electron wave #s range for n+1 “atoms” is 2p/L < k < 2p/a where a is “interatomic” distance and L = na is the length of the assembly (k = 2p/l) • Shorter ls, would “oversample” • if n increases by 1, dp is h/L • Extn 3D: E = p2/2m = h2k2/2m so a vol of p-space of 4pp2dp has h3/LxLyLz ©rlc L04-28Jan2011 5 QM density of states (cont.) • So density of states, gc(E) is (Vol in p-sp)/(Vol per state*V) = 4pp2dp/[(h3/LxLyLz)*V] • Noting that p2 = 2mE, this becomes gc(E) = {4p(2mn*)3/2/h3}(E-Ec)1/2 and E - Ec = h2k2/2mn* • Similar for the hole states where Ev - E = h2k2/2mp* ©rlc L04-28Jan2011 6 Fermi-Dirac distribution fctn • The probability of an electron having an energy, E, is given by the F-D distr fF(E) = {1+exp[(E-EF)/kT]}-1 • Note: fF (EF) = 1/2 • EF is the equilibrium energy of the system • The sum of the hole probability and the electron probability is 1 ©rlc L04-28Jan2011 7 Fermi-Dirac DF (continued) • So the probability of a hole having energy E is 1 - fF(E) • At T = 0 K, fF (E) becomes a step function and 0 probability of E > EF • At T >> 0 K, there is a finite probability of E >> EF ©rlc L04-28Jan2011 8 Maxwell-Boltzman Approximation • fF(E) = {1+exp[(E-EF)/kT]}-1 • For E - EF > 3 kT, the exp > 20, so within a 5% error, fF(E) ~ exp[-(E-EF)/kT] • This is the MB distribution function • MB used when E-EF>75 meV (T=300K) • For electrons when Ec - EF > 75 meV and for holes when EF - Ev > 75 meV ©rlc L04-28Jan2011 9 Electron Conc. in the MB approx. • Assuming the MB approx., the equilibrium electron concentration is no Emax gc (E fF (E dE Ec (Ec EF no Nc exp kT ©rlc L04-28Jan2011 10 Electron and Hole Conc in MB approx • Similarly, the equilibrium hole concentration is po = Nv exp[-(EF-Ev)/kT] • So that nopo = NcNv exp[-Eg/kT] • ni2 = nopo, Nc,v = 2{2pm*n,pkT/h2}3/2 • Nc = 2.8E19/cm3, Nv = 1.04E19/cm3 and ni = 1.45E10/cm3 ©rlc L04-28Jan2011 11 Calculating the equilibrium no • The idea is to calculate the equilibrium electron concentration no for the FD distribution, where fF(E) = {1+exp[(E-EF)/kT]}-1 gc(E) = [4p(2mn*)3/2(E-Ec)1/2]/h3 no ©rlc L04-28Jan2011 Emax gc (E fF (E dE Ec 12 Equilibrium concentration for no • Earlier quoted the MB approximation no = Nc exp[-(Ec - EF)/kT],(=Nc exp hF) • The exact solution is no = 2NcF1/2(hF)/p1/2 • Where F1/2(hF) is the Fermi integral of order 1/2, and hF = (EF - Ec)/kT • Error in no, e, is smaller than for the DF: e = 31%, 12%, 5% for -hF = 0, 1, 2 ©rlc L04-28Jan2011 13 Equilibrium concentration for po • Earlier quoted the MB approximation po = Nv exp[-(EF - Ev)/kT],(=Nv exp h’F) • The exact solution is po = 2NvF1/2(h’F)/p1/2 • Note: F1/2(0) = 0.678, (p1/2/2) = 0.886 • Where F1/2(h’F) is the Fermi integral of order 1/2, and h’F = (Ev - EF)/kT • Errors are the same as for po ©rlc L04-28Jan2011 14 Figure 1.10 (a) Fermi-Dirac distribution function describing the probability that an allowed state at energy E is occupied by an electron. (b) The density of allowed states for a semiconductor as a function of energy; note that g(E) is zero in the forbidden gap between Ev and Ec. (c) The product of the distribution function and the density-of-states function. ©rlc L04-28Jan2011 (p. 17 - M&K) 15 Degenerate and nondegenerate cases • Bohr-like doping model assumes no interaction between dopant sites • If adjacent dopant atoms are within 2 Bohr radii, then orbits overlap • This happens when Nd ~ Nc (EF ~ Ec), or when Na ~ Nv (EF ~ Ev) • The degenerate semiconductor is defined by EF ~/> Ec or EF ~/< Ev ©rlc L04-28Jan2011 16 Figure 1.13 Energy-gap narrowing Eg as a function of electron concentration. [A. Neugroschel, S. C. Pao, and F. A. Lindhold, IEEE Trans. Electr. Devices, ED-29, 894 (May 1982).] taken from p. 25 - M&K) ©rlc L04-28Jan2011 17 Donor ionization • The density of elec trapped at donors is nd = Nd/{1+[exp((Ed-EF)/kT)/2]} • Similar to FD DF except for factor of 2 due to degeneracy (4 for holes) • Furthermore nd = Nd - Nd+, also • For a shallow donor, can have Ed-EF >> kT AND Ec-EF >> kT: Typically EF-Ed ~ 2kT ©rlc L04-28Jan2011 18 Donor ionization (continued) • Further, if Ed - EF > 2kT, then nd ~ 2Nd exp[-(Ed-EF)/kT], e < 5% • If the above is true, Ec - EF > 4kT, so no ~ Nc exp[-(Ec-EF)/kT], e < 2% • Consequently the fraction of unionized donors is nd/no = 2Nd exp[(Ec-Ed)/kT]/Nc = 0.4% for Nd(P) = 1e16/cm3 ©rlc L04-28Jan2011 19 Figure 1.9 Electron concentration vs. temperature for two n-type doped semiconductors: (a) Silicon doped with 1.15 X 1016 arsenic atoms cm3[1], (b) Germanium doped with 7.5 X 1015 arsenic atoms cm-3[2]. (p.12 in M&K) ©rlc L04-28Jan2011 20 References *Fundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989. **Semiconductor Physics & Devices, by Donald A. Neamen, 2nd ed., Irwin, Chicago. M&K = Device Electronics for Integrated Circuits, 3rd ed., by Richard S. Muller, Theodore I. Kamins, and Mansun Chan, John Wiley and Sons, New York, 2003. ©rlc L04-28Jan2011 21