Semiconductor Device Modeling and Characterization EE5342, Lecture 1-Spring 2002 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc/ L1 January 15 1 EE 5342, Spring 2002 • http://www.uta.edu /ronc/5342sp02 • Obj: To model and characterize integrated circuit structures and devices using SPICE and SPICE-like descriptions of the devices. L1 January 15 • Prof. R. L. Carter, ronc@uta.edu, www.uta.edu/ronc, 532 Nedderman, oh 11 to noon, T/W 817/273-3466, 817/272-2253 • GTA: TBD • Go to web page to get lecture notes 2 Texts and References • Text-Semiconductor Device Modeling with SPICE, by Antognetti and Massobrio - T. • Ref:Schroder (on reserve in library) S • Mueller&Kamins D • See assignments for specific sections L1 January 15 •Spice References: Goody, Banzhaf, Tuinenga, Herniter, •PSpiceTM download from http://www.orcad.com http://hkn.uta.edu. •Dillon tutorial at http://engineering.uta .edu/evergreen/pspice 3 Grades • Grading Formula: • 4 proj for 15% each, 60% total • 2 tests for 15% each, 30% total • 10% for final (req’d) • Grade = 0.6*Proj_Avg + 0.3*T_Avg + 0.1*F L1 January 15 • • • • • • Grading Scale: A = 90 and above B = 75 to 89 C = 60 to 74 D = 50 to 59 F = 49 and below • T1: 2/19, T2: 4/25 • Final: 800 AM 5/7 4 Project Assignments • Four project assignments will be posted at http://www.uta.edu/ronc/5342sp02/projects • Pavg={P1 + P2 + P3 + P4 + min[20,(Pmax-Pmin)/2]}/4. • A device of the student's choice may be used for one of the projects (by permission) • Format and content will be discussed when the project is assigned and will be included in the grade. L1 January 15 5 Notes 1. This syllabus may be changed by the instructor as needed for good adademic practice. 2. Quizzes & tests: open book (no Xerox copies) OR one handwritten page of notes. Calculator OK. L1 January 15 3. There will be no make-up, or early exams given. Attendance is required for all tests. 4. See Americans with Disabilities Act statement 5. See academic dishonesty statement 6 Notes 5 (con’t.) All work submitted must be original. If derived from another source, a full bibliographical citation must be given. 6. If identical papers are submitted by L1 January 15 different students, the grade earned will be divided among all identical papers. 7. A paper submitted for regrading will be compared to a copy of the original paper. If changed, points will be deducted. 7 • Review of – Semiconductor Quantum Physics – Semiconductor carrier statistics – Semiconductor carrier dynamics L1 January 15 8 Bohr model H atom • Electron (-q) rev. around proton (+q) • Coulomb force, F=q2/4peor2, q=1.6E-19 Coul, eo=8.854E-14 Fd/cm • Quantization L = mvr = nh/2p • En= -(mq4)/[8eo2h2n2] ~ -13.6 eV/n2 • rn= [n2eoh]/[pmq2] ~ 0.05 nm = 1/2 Ao for n=1, ground state L1 January 15 9 Quantum Concepts • • • • Bohr Atom Light Quanta (particle-like waves) Wave-like properties of particles Wave-Particle Duality L1 January 15 10 Energy Quanta for Light 1 Tmax mv 2 h f fo qVstop 2 • Photoelectric Effect: • Tmax is the energy of the electron emitted from a material surface when light of frequency f is incident. • fo, frequency for zero KE, mat’l spec. • h is Planck’s (a universal) constant h = 6.625E-34 J-sec L1 January 15 11 Photon: A particle -like wave • E = hf, the quantum of energy for light. (PE effect & black body rad.) • f = c/l, c = 3E8m/sec, l = wavelength • From Poynting’s theorem (em waves), momentum density = energy density/c • Postulate a Photon “momentum” p = h/l = hk, h = h/2p wavenumber, k = 2p /l L1 January 15 12 Wave-particle Duality • Compton showed Dp = hkinitial - hkfinal, so an photon (wave) is particle-like • DeBroglie hypothesized a particle could be wave-like, l = h/p • Davisson and Germer demonstrated wave-like interference phenomena for electrons to complete the duality model L1 January 15 13 Newtonian Mechanics • Kinetic energy, KE = mv2/2 = p2/2m Conservation of Energy Theorem • Momentum, p = mv Conservation of Momentum Thm • Newton’s second Law F = ma = m dv/dt = m d2x/dt2 L1 January 15 14 Quantum Mechanics • Schrodinger’s wave equation developed to maintain consistence with waveparticle duality and other “quantum” effects • Position, mass, etc. of a particle replaced by a “wave function”, Y(x,t) • Prob. density = |Y(x,t)• Y*(x,t)| L1 January 15 15 Schrodinger Equation • Separation of variables gives Y(x,t) = y(x)• f(t) • The time-independent part of the Schrodinger equation for a single particle with KE = E and PE = V. 2y x 8p2m 2 E V ( x ) y x 0 2 x h L1 January 15 16 Solutions for the Schrodinger Equation • Solutions of the form of y(x) = A exp(jKx) + B exp (-jKx) K = [8p2m(E-V)/h2]1/2 • Subj. to boundary conds. and norm. y(x) is finite, single-valued, conts. dy(x)/dx is finite, s-v, and conts. * y x y x dx 1 L1 January 15 17 Infinite Potential Well • V = 0, 0 < x < a • V --> inf. for x < 0 and x > a • Assume E is finite, so y(x) = 0 outside of well 2 np x y x sin , n = 1,2,3,... a a h 2n 2 h 2k 2 h hk En ,p 2 2 l 2p 8ma 4p L1 January 15 18 Step Potential • • • • V = 0, x < 0 (region 1) V = Vo, x > 0 (region 2) Region 1 has free particle solutions Region 2 has free particle soln. for E > Vo , and evanescent solutions for E < Vo • A reflection coefficient can be def. L1 January 15 19 Finite Potential Barrier • • • • Region 1: x < 0, V = 0 Region 1: 0 < x < a, V = Vo Region 3: x > a, V = 0 Regions 1 and 3 are free particle solutions • Region 2 is evanescent for E < Vo • Reflection and Transmission coeffs. For all E L1 January 15 20 Kronig-Penney Model A simple one-dimensional model of a crystalline solid • V = 0, 0 < x < a, the ionic region • V = Vo, a < x < (a + b) = L, between ions • V(x+nL) = V(x), n = 0, +1, +2, +3, …, representing the symmetry of the assemblage of ions and requiring that y(x+L) = y(x) exp(jkL), Bloch’s Thm L1 January 15 21 K-P Potential Function* L1 January 15 22 K-P Static Wavefunctions • Inside the ions, 0 < x < a y(x) = A exp(jbx) + B exp (-jbx) b = [8p2mE/h]1/2 • Between ions region, a < x < (a + b) = L y(x) = C exp(ax) + D exp (-ax) a = [8p2m(Vo-E)/h2]1/2 L1 January 15 23 K-P Impulse Solution • Limiting case of Vo-> inf. and b -> 0, while a2b = 2P/a is finite • In this way a2b2 = 2Pb/a < 1, giving sinh(ab) ~ ab and cosh(ab) ~ 1 • The solution is expressed by P sin(ba)/(ba) + cos(ba) = cos(ka) • Allowed values of LHS bounded by +1 • k = free electron wave # = 2p/l L1 January 15 24 K-P Solutions* x x P sin(ba)/(ba) + cos(ba) vs. ba L1 January 15 25 K-P E(k) Relationship* L1 January 15 26 References *Fundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989. **Semiconductor Physics & Devices, by Donald A. Neamen, 2nd ed., Irwin, Chicago. L1 January 15 27