Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Remote Desktop Connection
5 IP addresses for the course ELEC5010:
tmp234.ece.ust.hk
tmp235.ece.ust.hk
tmp236.ece.ust.hk
tmp237.ece.ust.hk
tmp238.ece.ust.hk
Login: .\elec5010
Password: 5010user
Two students share one virtual computer, it is important
to log off to release computer for your partner.
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Material Definition
For detailed information
on Material Definition,
please refer to the
Section 2.3 of the
manual “Designer” ! ! !
2.After
opening a
project, you
will have
models here
1.Create a
project first
or open your
unfinished
projects
3. Press this button
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Material Definition
1.Choose MPD
materials database
2.Set the all
parameters of
Silicon_100
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Create Substrate
1.Create a new
process and define
the substrate
For detailed information
on editing process,
please refer to the
Section 2.4 of the
manual “Designer” ! ! !
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2.Define thickness
and material
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Oxide Formation
1.Double click
3.Layer Name
2.Thickness
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Si Formation
Only this Si layer for simulation: Accurate
“Thickness”!!
Si layer for layout: Accurate “Layer Name”!!
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Si Patterning
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Metal Formation
Metal layer for layout: Accurate “Layer Name”!!
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Metal Patterning
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Create Layout
1.After saving the process file,
we will create a new layout and
check the layer names just
defined
For detailed information
on editing layout, please
refer to the Section 2.5
& 3.2.1 of the manual
“Designer”! ! !
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2.Standard
drawing
Edit Your Layout
1.Choose the layer
you will draw
3.Other functions
For detailed information on editing layout, please
refer to the Section 2.5 & 3 of the manual
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“Designer”
! ! and
! Technology
Edit Your Layout
How to draw a curving
beam
The important thing is the
equation
Also the rectangle
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Edit Your Layout
For
Bended
beam:
The beam
and anchor
should be
merged.
How?
Select
beam and
anchor and
then using
“boolean>Or” for
merge.
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Otherwise, solid
model can’t be
built!!
ERROR
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Edit Your Layout
For insert
other cell’s
graphs
and define
Cell.
Otherwise, solid
model can’t be
built!!
ERROR
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Finish Layout
1. Just draw
the structures
of two layers:
SILICON!!
METAL!!
2.You can hide
the layer with
turn off the
light ahead
layer name
3. Save the
two layers
layout and
separate
different parts
in your
structure as
different cells.
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Flat Hierarchy
This is for
the final
output!!
(Don’t care it
in the
simulation)
Before
exporting
the layout,
find your
final
structure
cell and
flatten.
Then….
For detailed information on editing layout, please refer to the
Section 2.5.7 of the manual “Designer” ! ! !
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Gds Out
Chose a file to
output the
layout.
For detailed information on editing layout, please refer to the
Section 2.6.6 of the manual “Designer” ! ! !
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Initial Solid Model
2.Since only
SILICON layer
is simulated,
other can be
hided. (RightClick)
1.Select a top
cell to build the
solid model
For detailed information on solid model, please refer to the
Section 4.5 of the manual “Designer” ! ! !
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Partition
Partition the Si
into several
parts.
(Partition the
beam (moved
parts) from the
anchor (fixed
parts) .
1.Ctrl choose 3
points
2.Add a plane
3.Ctrl select the
plane and layer
which will be
parted
4.Partition
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Partition (After)
After partition,
one Silicon bulk
is cut into many
parts.
After partition,
the plane can
be hided.
Finally, the one
Silicon bulk will
be cut into
many Layer3.
After several
times of
partition, the
beams will be
completely
separated from
the anchor.
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Add Layer to Mesh Model
Select ALL
Silicon parts
and add them
to Mesh Model
For detailed information on solid model, please refer to the
Section 4.7 of the manual “Designer” ! ! !
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Add Layer to Mesh Model
ALL Silicon
parts move into
Mesh Model
For detailed information on Mesh model, please refer to the
Section 4.7 of the manual “Designer” ! ! !
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Meshing Settings
Smaller
element
size
means
more
accurate
simulation
.
Please try
from
larger
size as
saving
simulation
time at
the
beginning.
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Generate Meshing
Select ALL
Silicon
parts and
Generate
Mesh.
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Finish Meshing
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Naming Entities
Name the
top faces
which will
be used as
electrodes
“Potential”
will be
applied on
these
faces.
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Naming Entities
Name all the
bottom faces
which connects
substrate
Anchors
“Fixall” and
“Temperature”
will be applied
on these faces.
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Naming Entities
Name the front faces
or other needed faces
of the actuator,
amplifier or bistable
beam on the side
faces!
“Pressure” or
“Displacement” will be
applied on these faces
For detailed information on Mesh model, please refer to the
Section 4.6 of the manual “Designer” ! ! !
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Solver Setting
After saving
the mesh
model, we will
have it here.
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Solver Setting
Which be talked in the slide
page 40
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Surface Boundary conditions
Example: apply voltage to actuator to analysis the temperature,
displacement, stress and so on.
1. Fixall for anchor
2. Set the temperate of all anchor as room temperature (300K). The
units is “K”.
3. Apply voltage to electrodes. The units is “voltage”.
For detailed information on setting
boundary conditions, please refer to
the Section 3.5.3 of the manual
“analyzer_standard” ! ! !
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Surface Boundary conditions
For other simulations:
1. “Fixall” and “Temperature” are always applied on anchor faces.
2. “Potential” can be applied on electrode faces.
3. “Pressure” or “Displacement” can be applied on side faces
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SBCs for Bistable Beam
For detailed information on Simulation methodology of Bistable Beam, please refer to
the “Tutorial on simiulation of bistable beam” ! ! !
Apply one Displacement to get one
Force
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Displacement-Force Simulation
• For simulation, one can not solve an
arbitrary displacement directly,
according to my experience. Instead,
one need to increase the displacement
bit by bit from zero, and telling
Coventor to start the analysis from
the result of the previous one.
• In this manner, the simulation will not
fail easily, because defining the
displacement resolves the large nonlinearity of buckling.
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One or Multi Point Simulation
1. Correspond the displacement to a variable,
“mechBC1”, based on “MemMech” Solver.
4. Set the
value
3. Set the
Trajectory
6. Run here for
simulating one value
2. Start to
set
Variable
3. Correspond the “mechBC1” to a
Trajectory
5. Run here for simulating a series of values
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Contact Boundary Conditions
Plan: ACT CON
Plan: AMP CON2
Plan: BEAM CON
Plan: AMP CON1
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If you want to use the
actuator to push the
amplifier,
or use the amplifier
to push the beam
you need to define
the Planes of
actuator, amplifier
and beam as contact
planes.
Otherwise, they
actuator will move
across the amplifier,
or the amplifier will
move across the beam
rather than push it.
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Simulation
After simulation, no matter
success or not, you view the
results or debug the errors.
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View Resluts
By click the
displacement, you
can switch to
other parameters.
For detailed information on Visualizer, please refer to the Section 9 of
the manual “analyzer_standard” ! ! !
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3D Result Viewing
For detailed information on Visualizer, please refer to the Section 9 &
9.1 of the manual “analyzer_standard” ! ! !
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Simulation Result of the
Displace-Fore of Bistable Beam
Checking the displacement
deformation using
Geometry Scaling
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Simulation Result of the Displace-Fore
of Bistable Beam
Checking the Force Value
using Table – rxnForces.
Sign of rxnForces changes
from + to – or – to +,
indicating two stable states.
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Last year’s Design
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