Lithography Explored Leslie Chapman June 27, 2007 TEKS Objectives • (A) plan and implement investigative procedures including asking questions, formulating testable hypotheses, and selecting equipment and technology. • (B) identify uses of electromagnetic waves in various technological applications, such as fiber optics, optical scanners, microwaves, and microfabrication. • (C) communicate valid conclusions. Language (SIOP) Objectives Students will: • Discuss their plan in groups. • Write their plan and have it reviewed by instructor prior to starting experiment. • State and justify their conclusions. THE ASSIGNMENT • Design a CD label for your favorite music artist using the UV Lithography technique. Lithography Process Post Exposure Bake Prepare Substrate Apply Photoresist Develop Expose Softbake Background Information • Process through which very small 3-D UV Light features can be Mask produced. (transparency with design) • Involves a Positive series of steps Photoresist that creates (S-1813) Substrate (CD) successive layers of Substrate – process materials. The photoresist is exposed to radiation starts here. Silicon is using Photoresist – a the mask which contains a pattern the preferred Lithography Process • Create a mask. • Start with a substrate • Cover surface with photoresist. • Soft bake • Expose the wafer to energy • Develop the wafer Types of Lithography X-ray UV Photo Changing light source = type of lithography Photo X-ray UV Light Industrial Uses of Lithography • Electronics and Telecommunications – Television, radio and printers – Calculators and watches – Video cameras and computers (microprocessor) – Cell phones and waveguides • Aviation and Aerospace – Airplanes, meterology equipment and Spaceships • Automobile – Cars (microchips trigger inflation of air bag) – Traffic light (signals) • Pharmaceutical – Lab on a chip – Portable blood analyzers (microchipbased sensing devices) Applications of Lithography • Complex MEMS Ratchet • A truly amazing MEMS device. It is a sophisticated Mechanism MEMS Thermal Actuator Incredible MEMS Clutch mechanism. This is actually a complex device that required a working clutch mechanism. Gears are 50 microns across. An early micromotor built in the SUMMiT technology. For size comparison a microscopic dust mite is shown on top. Applications of X-ray Lithography Micro gears Micro motor core Switching mechanism Examples [9] [9] http://www.ca/sandia.gov/liga/tech.html THE ASSIGNMENT • • • • Work in pairs to Design a CD label for your favorite music artist using the UV Lithography technique. Each pair will design two CD labels – – One CD will be the control. The other CD will be varied (photoresist or exposure time). State and justify the impact your variation had on the final product. Constraints – – Design must be drawn in black ink only. Design must be able to fit on a CD. • Create a design • Transfer the design to transparency paper (inkjet or copy machine) • Keep the transparency clean 1. Prepare Substrate • • Clean with isopropanol Bake at 115°C for 60 seconds Post Exposure Bake Prepare Substrate Apply Photoresist Develop Expose Softbake 2. Apply Positive Photoresist • Photoresist is spin coated on to CD • Students will dip CD in S-1813 to get even spread. • Effective for λ 340 – 450 nm Post Exposure Bake Prepare Substrate Apply Photoresist Develop Expose Softbake 3. Softbake • 115°C for 60 seconds • Complete when photoresist is hard to the touch. • Temp. range: 5 – 550°C (41 1022°F) Post Exposure Bake Develop Expose Prepare Substrate Apply Photoresist Softbake 4. Expose • Long wave UV mini lamp (Intensity = 230 μW/cm2) • Exposure time: 25 seconds Post Exposure Bake Prepare Substrate Apply Photoresist Develop Expose Softbake 5. Develop • • • Post Exposure Bake • Prepare Substrate Immerse wafer in solution for 40 – 60 seconds. Agitation is recommended. Quickly remove the wafer from the developer bath and rinse with deionized water bath for 30 seconds (using the wafer holder). Place the wafer on a clean room wipe. Dry the wafer holder. Apply Photoresist Develop Expose Softbake 6. Post Exposure Bake • Bake at 115°C for 60 seconds • • • Set a hotplate to the required temperature. Place the wafer on the hotplate, start timing. When the time is up, remove the wafer. Reminders • Aprons, gloves and safety goggles required at all times. • UV goggles required during exposure. • The more photoresist present, the longer the bake time. Teacher Expectations • • • • Thorough Planning Mask Design Implementation Conclusions explained Points (for Instructor) to Consider • Give time limit on mask design. Students may design on computer or by hand. Intricacy of design may impact exposure quality. • Thickness of photoresist impacts bake time • Exposure time could impact image seen on substrate • Substrate surface must be very clean • Students must wear UV goggles when operating UV lamp Time Frame Three class periods (50 minutes each) 1. Day One – Background Info, Mask Design, Substrate Preparation, 2. Day Two – Wafer Preparation, Apply photoresist, Softbake 3. Day Three – Expose, Develop, State Conclusions THANK YOU • • • • • • Dr. Kim Mr. Creary Dr. Conkey Dr. Srinivasa Mr. Derry Colleagues in the programī