Early Detection Solution
Improved Profitability Across
Global Test Operations
Debbora Ahlgren
VP Sales & Marketing
OptimalTest
26-May-2009
OptimalTest/ETS 2009
P# 1
Process Node (Year)
90nm (2003)
65nm (2006)
45nm (2008)
32nm (2010)
22nm (2012)
Window
Window
of
Of
Opportunity
Opportunity
With the move to 300mmdiameter wafers, the price tag for an
advanced production fab has become
out of reach for all but the
largest IDMs…*
TI
Source: Gartner, 2008
Source: Gartner, 2008
OptimalTest/ETS 2009
P# 2
Source: Broadcom, 2008
Systematic variations are contributing to >60% yield loss at the 65nm as
Compared to <5% at the 350nm node.
OptimalTest/ETS 2009
P# 3
Foundry Services
OptimalTest/ETS 2009
P# 4
Goal is to Optimize Product Cost
Balance of cost/value of
Design, Manufacture, Yield Learning & Test
OptimalTest/ETS 2009
P# 5
• DFT alignment with design TWG
• Socket performance vs. frequency
• Expansion of specialty devices
• Adaptive Test
• SiP & 3D silicon Test
Suggest that the ITRS is cutting short the potential. The real
potential is to work for transparency and interoperability across
the integrated fabless manufacturing model.
OptimalTest/ETS 2009
P# 6
Robust IT Infrastructure
Promotes transparency across distributed value
& supply chain
Provides for the implementation of rules
(through expert rules engine) that transcends
lots, device families and enterprise boundaries
Integrates Yield Learning, Quality and Reliability
functions
NPI
Outlier Detection
Advanced Adaptive Test for Yield, Quality and TTR
OptimalTest/ETS 2009
P# 7
OptimalTest Value Propositions
OptimalTest delivers solutions for optimized test operations through 4 levels of
software capabilities:
1. Real-Time Control
– of Test Cell Execution
Station Controller (OT-Box) application
Test Cell control in real-time: Yield Learning & Reclamation, Test Operations Efficiency (TTR, Test Cell degradation)
Product Quality (outlier detection), and Quality
2. Real-Time Monitoring
– of a fleet of Test Cells for Optimized Efficiency
Control Room application
Real-time fleet monitoring: Yield degradation prevention, Operational Efficiency & Immediate Quality Attention
3. Near-Time Detection
– of Product & Test Operational Issues
Early Detection Solution & OT-Dashboard
Product quality & performance monitoring & fleet monitoring in near-time: Yield degradation prevention & Yield
Reclamation, Operational Efficiency and Quality
4. Off-Line Analysis & simulation
– of Test Operations: Products, Fleet, Processes
Reporting, Analysis & Simulation applications and OT-Dashboard
Product performance analysis & off-line simulation: Yield, Efficiency (TTR), and Quality (Outlier Detection)
OptimalTest/ETS 2009
P# 8
What is the value of Early Detection?
Test results are situation specific
Specific device and specific test cell
“Bad” and “Good” are not absolute measures
Near Real-Time (or “Near-Time”) Post Processing using robust “expert”
rules improves operational efficiency for test
Re-evaluate specific device results vs other devices (historical and across
multiple test cells)
Such Operational Efficiency requires the establishment of a Baseline of
Fleet, Product and Processes
This requires a database and an expert rules engine – OT-Rules
Only Early Detection supports the “Near-Time” evaluation & comparison
of results across an entire fleet of testers
Across multiple enterprises (SATs and distributed test floors)
Across lots from multiple foundries
OptimalTest/ETS 2009
P# 9
OUTLIER MANAGEMENT CAPABILITIES
THROUGH STATE-OF-THE-ART ADAPTIVE TESTING
OptimalTest/ETS 2009
P# 10
Location of Baseline Die
selected according to
various algorithms:
1. Next to E-test structures
(for maximized correlation
between test sockets)
2. Spread-out equally in each of
the 3 ring areas
(for maximized area
coverage)
3. In areas of different yield
signatures
4. In most of the lithography
exposure locations
5. In areas corresponding with
Fab defect sampled areas
OptimalTest/ETS 2009
P# 11
Early Detection Solution
- Implementation
Data logs from any origin & any format are transferred to the OT database at
the end of each Run / Pass / Execution
An OptimalTest Station Controller (OT-Box) connected to any test cell; or
A Proxy (OT-Proxy) on any tester; or
OT-Proxy is a light piece of SW (a “deamon”) installed on a tester that communicates directly to the OT-Database
Any data log format from any family / model of tester
(i.e STDF - heavy or light, comprehensive or summary)
Re-evaluation of the data logs is executed against 2 types of expert rules
Product level rule: Executed whenever new datalog files enter the data base
Cross-Entity rule: Executed on a defined periodic time basis
Once per shift, once per day, etc.
Once an issue is detected based on the defined rules
An eMail is sent to the responsible personnel with a description of the
problem and a link to a specific report (OT-Reports/OT-Dashboard)
illustrating the issue; and
An alert is sent to the responsible personnel; and
A disposition action can be executed
OptimalTest/ETS 2009
P# 12
SAT or Test Site
Design House or IDM
STDF
7C7
GDF
File
Drop
Customer
FTP
Bulk
Insert
OptimalTest
Parsing Server
OptimalTest
Database
Other Formats
Parsing of non-OTDF is more
processor-intensive
OptimalTest/ETS 2009
P# 13
SAT or Test Site
Design House or IDM
OTDF
OptimalTest
Database
(SAT)
File
Drop
Customer FTP
Bulk
Insert
OptimalTest
Parsing Server
OptimalTest
Database
Each OT customer has
their own OT Database
OptimalTest/ETS 2009
P# 14
SAT or Test Site
Design House or IDM
OTDF
OptimalTest
Database
(SAT)
File
Drop
FTP Server
Bulk
Insert
OptimalTest
Parsing Server
OptimalTest
Database
Each OT customer has
their own OT Database
OptimalTest/ETS 2009
P# 15
Product
Rule
Customer Defined Rules
CrossEntity
Rule
(End of
Wafer or Lot)
(CustomerDefined
Period)
eMail Notification
With
attached
report
Rule Feedback
Scheduled Analysis
Proxy
Any Other
Testers
OT-Dashboard
OptimalTest
DB
OT- Dispo
Automatic Disposition
(e.g. hold/release lot)
OptimalTest/ETS 2009
P# 16
Without OT
OT-Proxy
OT-Proxy2
OT-Box
Full control of the test cell – tester, prober/handler
-
-
-

Automated and validated data entry
-
-
-

Datalogs, wafer maps and summary files always
match
-
-
-

Capture of adaptive testing rules impact
-
-


Post process validation of correctness of data
-



Robust file transfer infrastructure to ensure the
data log reaches the database and other systems
-



(Load-Board; Sockets; Probe Cards etc)
OT-Proxy
A small, non-intrusive software component installed only on the tester that
monitors the testing process and streams data to a backend server
OT-Box
A powerful station controller that takes complete control of the tester and
prober/handler and implements OptimalTest’s full capabilities
OTDF
A new, XML based, compact datalog format with extensions for adaptive testing
rule data.
It is generated by the OptimalTest server and used primarily to transfer testing
results to other systems in a “lighter” & efficient manner
OptimalTest/ETS
2009
QCT/OT
Confidential
P# 17
Equipment Outlier Alert – Product exhibiting different
yield on specific tester in a fleet or across enterprises
“Manufacturer A”
M220
SAT1_33
OptimalTest/ETS 2009
P# 18
(A rule alerting for a site yield degradation issue (>5%)
OptimalTest/ETS 2009
P# 19
(A rule alerting for a site degradation issue (>5%)
OptimalTest/ETS 2009
P# 20
Multiple layouts
accessible via tabs
Wide variety of
"widgets" with all
relevant KPI's
Highlight
outliers
OptimalTest/ETS 2009
P# 21
Rule Efficiency
Magnify yield
fluctuations
Outlier
Equipment
Alarms
OptimalTest/ETS 2009
P# 22
1
4
7
2
5
8
3
6
OptimalTest/ETS 2009
Legend
1 – Device A Final Yield
2 ––Device
Device A 1stst Pass Yield
3 – Device A Total Units
4 –Device
– DeviceBBFinal
SC2XYield
1st Pass Yield
st Pass
Units
56 – Device B 1Total
Yield
Rate (Facility 1 – with OT-Boxes -67 ––Device
Device BB Retest
Total Units
crossing
5% threshold)
7isn’t
– Device
B Retest
Rate (Facility 1 – OT-Boxes enabled)
8 – Device
B Final
Yield by Tester (Facility 1 “fleet” is
isn’t
crossing
5% threshold)
8stable)
– Device B Final Yield by Tester (Facility 1 “fleet” is
stable)
P# 23
OptimalTest/ETS 2009
P# 24
Benefits of Early Detection Solution
Results Re-Evaluation
 control, quality & health of all test operations
Identify issues in: Yield, Efficiency, Productivity, Quality & Data-Integrity
Detection of Outlier Equipment
 all test assets (ATE, peripherals, consumables)
Proactive detection of trending and marginal equipment before they become outliers & before equipment failure (Fleet baseline)
Detection of Product & Quality issues
 improved product quality and reduced field returns
Proactive detection of Test Program instabilities & marginalities, Bin switching, Recoverability, Re-Tests, 1st pass yields, QA,
Correlation / Golden-units pass rate, run-rate & performance issues
Detection of Data Integrity issues
 consistent results and reliable decision making
Proactive detection of Wafer Map orientation issues, Holes, STDF vs wafer maps vs Summary files vs shipping maps etc
Detection of Operational Issues
 improved overall operational efficiency (OEE)
Proactive detection of failure to follow operational processes and procedures. Pauses, Set-ups, Re-tests
End-of-Line gate-keeping
 improved overall operational efficiency (OEE)
Proactive verification that material was processed based upon the intended criteria (Flow, Disposition actions, yield, Retest etc)
OT-Post Engine offers:
Device Outlier Detection
PAT, S-PAT, D-PAT, ULPY, NNR and other advanced outlier detection techniques
Bin Re-Classification
Better categorization of devices for device parameters including Speed, Voltage
Parameter “matching” for optimized Multi-Chip-Package or System-in-Package performance
OptimalTest/ETS 2009
P# 25