Master’s of Science in
Applied Physics
Internship in
Semiconductor Industry
Charley Myles, Mark Holtz, and Roger Lichti
Department of Physics
Texas Tech University
Lubbock, Texas 79409-1051
• 24,000 students
• Physics Department: 19
faculty.
• M.S. and Ph.D. programs:
–
–
–
–
–
Solid State1,2
AMO1,2
Biophysics1,2
Physics Education1
Particle Physics1
•
1 Experiment, 2
Theory
Lubbock
Research & Education Initiatives
• Maddox Laboratory for Semiconductor Research
– www.ee.ttu.edu/MaddoxLab
• M.S in Applied Physics. Program in Semiconductor Product
Engineering.
– www.phys.ttu.edu/MSi
– www.ee.ttu.edu/PSPE
• Sensor Technology Center
– Funding from various individual and group grants
– Three-course graduate series in MEMS
– www.ee.ttu.edu/MEMS
Physics
• Stefan Estreicher
– Theory of Defects in Silicon
• Shubhra Gangopadhyay
– Low and High k dielectrics
• Mark Holtz
– Optical Properties
• David Lamp
– Defect Levels
• Roger Lichti
– Muon Spin Rotation
• Charley Myles
– Bandstructure Theory
EE
• Tim Dallas
– Nanofluidics
• Sergey Nikishin
– III-Nitrides
• Henryk Temkin
– Optoelectronics
• Provide excellent education and
training for Texas Tech students in
microelectronics.
• Emphasize fundamental, analytical,
and practical degree work.
Interdisciplinary.
• Produce strong programs, alternative
to traditional M.S. and Ph.D.
programs, which offer advanced
training.
Not competitive with our existing
M.S. and Ph.D.
• Serve as national prototype for
university-industry educational
programs.
First group of
students in 1996.
Year 1
• Prior to internship (two
semesters)
Year 2
– Quantum Mechanics
– Semiconductor Processing
• Electives base (one
– Processing and
semester following
Characterization
internship)
Laboratory
Summer & Fall – Electromagnetic Theory
– Device Physics
– Statistical Mechanics
Internship
– Semiconductor Physics
– Solid State Physics
– Computational Physics
– Advanced Semiconductor
Processing Laboratory
– VLSI Design
– Failure Analysis
– Parametric Testing
– …
• Departmental alumni.
• Discussions with scientists
and engineers in the
microelectronics industry.
• Established track record
for educating physics
students for careers in
microelectronics.
Departmental strengths emphasized!
“STRATEGY FOR IMPROVING LITHOGRAPHY LAYERS”
Duke Phasirakul (1999)
“MOS GATE PATTERNING USING DEEP UV STEP-AND-SCAN LITHOGRAPHY” and “PATTERN
FIDELITY OPTIMIZATION IN 0.35 m OPTICAL LITHOGRAPHY”
Jerome deGuzman (1998)
“INLINE USE OF IN-FAB AMRAY SEM” and
“THE USE OF OPTICAL PROXIMITY CORRECTION (OPC) IN RESOLVING METAL LINE
PULLBACK ISSUES OF SIMICONDUCTOR LITHOGRPHY”
Marvin Partin (1998)
“AIRBORNE CONTAMINATION OF CHEMICALLY AMPLIFIED PHOTORESIST”
Brian Weber (1998)
“INTEGRATAION AND ELECTRICAL TEST”
Yvonne Emil (1998)
“GATE OXIDE CHARACTERIZATION FOR MOS DEVICES”
Ric Justus (1997)
“DEVICE MODLING OF DRAM CAPACITORS WITH TCAD SOFTWARE” and
“INTERFACE EFFECTS AND IONIC CONDITION OF BARIUM TITANATE CAPACITORS”
Dan Janson (1999)
“INTEGRATION AND SPC IN DRAM PRODUCTION”
William A. Turmel (1999)
“FAILURE ANALYSIS OF MICROCONTROLLER INTEGRATED CIRCUITS”
Arjang Fartash (1999)
“DIAGNOSTIC MEASUREMENT BATTERY IN FA”
Paul D. Gamble (2000)
“THE HV5 PROCESS AND PROPERTIES OF POWER BIPOLAR TRANSISTORS”
Chad E. Cox (2000)
“YIELD AND INTEGRATION IN NEXT-GENERATION INTEGRATED CIRCUITS”
Kari Copeland (2001)
“POLYCRYSTALLINE PEEL-BACK IN DUV LITHOGRAPHY”
Jon Vanbuskirk (2001)
“FAILURE ANALYSIS IN AIR-BAG SENSORS”
Nasmul Ahsan (2001)
“CHALLENGES IN RESOLUTION FOR MICROELECTRONICS FAILURE ANALYSIS”
Nick A. Martinez (1999)
“FAILURE ANYLYSIS AND MECHANICS IN INTEGRATED CIRCUITS”
Jianbai Zhu (1999)
“FLIP CHIP FAILURE ANALYSIS”
Chris Carty (1998)
“FAILURE ANALYSIS TECHNIQUE DEVELOPMENTS:LOCALIZED DELAYING AND FOCUSSED ION
BEAM MICRO-MACHINING” and
“INVESTIGATIONS INTO DEEP SILICON TRENCH ETCHING FOR FLIPCHIP PACKAGE FAILURE
ANALYSIS”
Preston Scott (1998)
“PHOTOMETRIC EVALUATION OF THIN FILM OPTICAL CONSTANTS” and
“MEASUREMENT OF COMPLEX REFRACTIVE INDICES”
David Bessire(1997)
“EFFECT OF ARRAY IMPLANT DOSE ON FLASH MEMORY PROGRAMMABILITY”
Richard Lawrence (1997)
“HIGH FREQUENCY MODELING OF BIPOLAR TANSISTORS”
Michel Baker (1998)
“INVESTIGATION OF DEFECTS FROM PLASMA OXIDE ETCHES AND PLASMA PHOTORESIST
ASHERS AND CHARACTERISTIC X-RAY ANALYSIS”
Jeremy O’Dell (1997)
• INFRASTRUCTURE
– National Science
Foundation
– Texas Instruments
– Applied Materials
– Texas Tech University
• STUDENT SUPPORT
– National Science
Foundation
– Texas Tech University
– Texas Instruments
– Applied Materials
– Intel
– AMD
– Motorola
• LINKS WITH EE ...
A “Category 1” Professional M.S.
according to the Nov. 2000 AIP report
“Mastering Physics for Non-Academic
Careers”
by Stephen Norton, Philip Hammer, and
Roman Czujko.
• Make the most of our strong
relationship with EE Department
and Companies:
– Student support
– Course offerings
– Laboratories
• Continue to offer students excellent
career opportunities.
• Attract more excellent students.
• Continued research relationships
with industry.
• Sensor Systems Center started in
1999.
• New curriculum initiatives:
– NSF CRCD on MEMS and
microsensors.
– Ph.D. bridge programs with nonPh.D. granting universities in
Texas … Internship based.
Dr. Mark Holtz
Department of Physics
Texas Tech University
Lubbock, TX 79409-1051
Phone: 806-742-3782
email: Mark.Holtz@ttu.edu
Dr. Kwong Chao
Department of Electrical Engineering
Texas Tech University
Lubbock, TX 79409-3103
Phone: 806-742-3451
email: Kwong Chao@coe.ttu.edu