March2004
CENTER FOR
NANO-SCALE SCIENCE AND
ENGINEERING
University of Kentucky
SafetyManual
453 F Paul Anderson Tower, Lexington, KY 40506
Phone (859) 257-8042 • Fax (859) 257-3092
Table of Contents
General Facility Use
1
Important Phone Numbers
2
CeNSE Wet Cleaning Bench Operating Procedure
2
Furnace Use
2
Non-Standard Procedures
3
Cleanroom Garment Policy
4
Waste Disposal
4
Emergencies
5
Chemicals
6
Compressed Gasses
7
Fire Hazards
7
Electrical Safety
8
Lab Etiquette
8
Agreement to Follow CeNSE Safety Procedures
9
Appendix A: Non-Standard Request Form
10
Appendix B: Sample MSDS
13
Appendix C: Cleanroom Attire
17
i
Center for Nano-scale Science and Engineering
Safety Rules
General Facility Use
Researchers must be trained on each instrument that is used. This training is done with Brian Wajdyk
(bwajdyk@engr.uky.edu, 257-6401).
Sign up is first come first serve. A calendar can be found at every instrument. Each user is required to
sign his/her name, professor’s name and phone number. Instructors wishing to use the facility for course
instruction must schedule at least a week in advance. The director, under special circumstances, may
assign priority to special projects, weighing the needs of student progress.
The log must be filled out for every station (especially the chemical cleaning hood) to have a record of
users and chemical systems.
Brian Wajdyk/Vijay Singh have the authority to immediately suspend privileges of any user who
performs unsafe experiments and/or violates safety regulations. The door key code will be cancelled and
unescorted entrance into facilities will be treated as trespassing and campus police will be notified.
Access will be reinstated only after the majority of core professors vote to do so after agreeing on
appropriate corrective actions such as a thorough safety report or ‘fabrication community’ service. This
process will take several weeks and will interfere with student progress; thus following procedures is
critical. Protest of suspension can be taken directly to Prof. Vijay Singh, who, as director, has final
authority in all matters. Professor Singh has a strong commitment to safety and will not take this
matter lightly.
Faculty member and others wishing to use the CeNSE facilities are responsible for providing the special
accessories needed for their experiments. For example, the CeNSE will not provide process gases, deposition
materials, substrates or non-standard cleaning chemicals.
The user must follow all University of Kentucky safety regulations and must provide MSDS paperwork for all
chemicals and gases brought into the facility. Working alone with chemicals, furnaces and CVD equipment is
forbidden. If a co-worker momentarily steps out of room then the door should remain open to allow prompt
aid in event of mishap.
Users must use appropriate safety wear. If performing non-standard procedure you must provide your own
safety wear. All gas cylinders must be securely fastened!! If researcher is bringing in a new cylinder, they must
provide appropriate safety restraints and consult Mr. Spiggle.
The user is responsible for cleaning the equipment that he/she uses. If you are unsure of the operation of a
piece of equipment, PLEASE ASK FOR HELP.
1
For further information or questions, please contact: Brian Wajdyk, bwajdyk@engr.uky.edu, 257-6401. A
schedule of lab hours for all personnel is posted.
Important Phone Numbers
Brian Wajdyk…………………………… 257-6401
University Police…………………………...257-1616
Electrical and Computer Engr. Office……...257-8042
ON THE UNIVERSITY OF KENTUCKY CAMPUS CALL 911 FOR POLICE, FIRE, OR MEDICAL
EMERGENCIES.
CENSE Wet Cleaning Bench Operating Procedure
Failure to follow procedures can and will result in contamination that will ruin your experiment and ruin
the experiments of everybody after you. Privileges to use the facility will be revoked if procedures are not
followed precisely. Failure to follow correct safety procedures will result in loss of use privileges.
 All equipment use, including the cleaning bench, must be logged.
 The bench and glassware must be cleaned to original state after use.
 No Glassware or chemicals shall be left on the bench after use, period.
Furnace Use
General: The furnace is one of the most important equipment in a fabrication facility as it is used to form
gate oxides and dope materials to be chemically active. The furnace is very easily poisoned by impurities.
Impurities dissolve into the glass and later release to ruin every sample after initial contamination
(students thesis’ become ruined). Your peers and friends demand that all rules are followed. There are 3
critical rules:
1. Never put anything that has not been thoroughly cleaned into the furnace. The impurities will
diffuse into the glass! The only way to know if a tube is ruined is for several students to fail at
their experiment for months and deduce it was a contamination. People who don’t follow
procedures will be rightfully scorned and facility privileges revoked.
2. Never exchange parts of one furnace (i.e. sample holder) to put in another. Impurities (i.e.
dopants from one furnace can ruin the other. Keep all items in their labeled positions.
3. Never touch a furnace with your bare hands. The Na/Ca/etc. will diffuse in the quartz and ruin
the tube.
There are 4 general types of furnaces:
1. Oxidation: This is the cleanest furnace and can only be used to oxidize Si.
2. Phosporus doping: This furnace can only be used to dope selected materials N-type conductors.
2
3. Boron doping: This furnace can only be used to dope selected materials P-type conductors.
4. General annealing: This furnace will be relatively dirty since a large variety of samples will go
through it.
All proposed experiments outside of standard procedure must be approved before using in this tube. This is
necessary to keep the tube functional. Researchers are welcome to provide their own quartz tubes to use in the
furnace for specific needs. New tubes and fittings cost about $2,000. Room 369 has general use furnace
recommended for ‘dirty’ process.
Safety: Dangerously hot quartz looks like cold quartz!! Never grab/touch quartz without knowing
how long it has been out of the furnace or feeling radiant heat from a safe distance. Explosive gasses such
as H2 must be safely diluted. H2 and O2 cannot share the same feed line.
Procedures:
 Perform appropriate RCA/Piranha clean before placing samples in furnace!
 Set furnace to operating temperature.
 Set gas flows to desired conditions.
 Slide sample in with quartz rod ensuring that rod only goes in storage tube or furnace.
 Wear gloves!!
 Don’t mix-up parts!!
 After elapsed time, slide sample to edge of tube with quartz rod.
 Let sample cool for 10 minutes with end cap in place.
 When sample is cool remove plate/sample from furnace and replace end cap.
 Turn off heater.
 It is important that a small amount of gas flow while furnace is cooling, this is because as the
furnace cools, air inside contracts drawing in air with dust. Over a short time this dust will
contaminate the tube.
 Never, never, never touch quartz tube with bare hands (no gloves). The Na from your
hands will contaminate the tube.
Non-standard Procedures
To insure that the facility does not become contaminated, all non-standard procedures must be approved
by Dr. Singh, Chen, Hinds or Mr. Spiggle.
Standard procedures that require no special approval (aside from required training) are:
 RCA1, RCA2, Piranha cleans
 Organic/resist strip with Acetone
 HF etch
 Oxidation, doping, diffusion, and H2/D2 passivation anneals
 Photolithography
 E-beam evaporation of Al, Au, SiO2, Al2O3
 Sputtering with commercially purchased target
 Thermal evaporation of Al, Au, Cu
3
 Liftoff, metal etching
An experiment plan must be written for non-standard experiments. This plan must be approved. Verbal
confirmation with an advisor is not acceptable, experiment plan must be written and on file with Mr.
Spiggle. (This may seem like an inconvenience, but if you are at all a good scientist/engineer you would
write this down anyways. 1 page + MSDS’s is sufficient in most cases). Performing non-standard
procedures without approval will result in suspension of privileges. Items that must be included in
discussion are:
 Materials used
 Materials Safety Data Sheets (MSDS can be conveniently found at www.sigmaaldrich.com)
 Safety hazards and precautions taken
 Equipment to use
 Contamination possibilities, minimization, and cleaning
 Waste disposal
See appendix A for an example of a non-standard procedure request form.
Cleanroom Garment Policy
 Cleanroom garments (suit, shoe covers, hairnet, and gloves) must be worn at all times while inside
cleanroom area.
 Suits will be available for shared use and disposed of by facility manager after useful lifetime.
Please reuse shoe covers that are stored at the bottom of the cabinet. Do not turn ‘inside out’
after use.
 Please reuse your personal hairnet. Please write your name on the hairnet and reuse. For visitors
or 1-time users, dispose of hairnet after use.
 Always wear disposable gloves in the cleanroom facility to minimize contamination.
See Appendix C, Cleanroom Attire.
Waste Disposal
 Use waste containers for specified waste only.
 If performing a non-standard procedure, you must provide your waste containers and label
contents and owner (name, phone number).
 When planning non-standard experiments, (i.e. buying new chemicals) at the same time plan for
waste disposal and safety equipment. Also contact Brian Wajdyk anytime new chemicals are
brought to facility.
 MSDS are required. Fill out non-standard experiment request form.
 Typically non-standard waste will be stored in sealed containers in former fume-hood outside of
cleanroom area as cluttered chemicals/waste pose a serious hazard.
4
Emergencies
Emergencies, accidents and injuries can occur in any setting, at any time, without warning. It is every
individual’s responsibility to be prepared physically and psychologically to handle an emergency.
Preparation is the key to minimizing the effects of emergencies. Know the evacuation routes from any part
of the laboratory. Familiarize yourself with the location and operation of all emergency equipment such as
chemical shower, eyewash, etc. Any person receiving an injury or any nature shall report it without delay to
the CeNSE staff.
The nature of the emergency will determine whether you will notify the CeNSE staff, the police or both.
Medical Emergencies
If you think a person requires immediate medical attention, always call the UK police at 257-1616.
Unconscious Victims: If rescuer is trained in CPR
1. Yell for help and have someone call 257-1616.
2. Establish Airway.
3. Check for Breathing.
4. Check for Circulation.
5. Start Ventilation or CPR if necessary.
Unconscious Victims: If rescuer is not trained in CPR
1. Yell for help and have someone call 257-1616.
Conscious Victims:
1. Yell for help and have someone call 257-1616.
2. Do not move patient or allow the patient to move around.
3. Try to control any heavy bleeding using direct pressure on the wound.
4. Try to keep the patient from going into shock by maintaining body temperature and elevating the
lower extremities if possible.
Hazardous Material Incidents
Material Safety Data Sheets (MSDS) are available for all chemicals found in the laboratory. A sample MSDS
sheet is provided in Appendix B. Any precautions or special procedures to be followed in the event of an
emergency should be followed and relayed to emergency personnel. Small volume spills should be handled
using the appropriate containment material found in the lab following the MSDS procedures.
For large volume Hazardous Material Spills beyond the capability of available containment materials, the
following procedures should be followed.
Spill or Release Inside the Lab:
1. Activate the Fire Alarm.
2. Evacuate the area.
3. Notify the UK Police (257-1616)
4. Time and safety permitting, shut down equipment, close doors, secure area and vital records.
5. Limit activity to protection of lives and evacuation of personnel.
5
Spill or Release Outside the Lab:
1. Notify the UK Police (257-1616).
2. Comply with directives from Emergency Personnel.
3. Evacuate the area.
4. Time and safety permitting, shut down equipment, close doors, secure area and vital records.
Evacuation
1. Proceed to your nearest exit or alternate exit if necessary. Do not stop to remove suit, however booties
may be removed to improve movement. Shut all doors as you leave.
2. If you are unable to immediately evacuate the CeNSE, notify UK Police (257-1616) as to your location.
3. Communicate locations of all fire/medical/hazardous situations and of situations where laboratory
staff or persons requiring special assistance remain on site to emergency personnel (257-1616).
4. Proceed quietly and orderly.
5. Do not use elevators.
6. Do not open door if hot or if smoke is present.
7. Once outside, assemble at a designated area and stay there. CeNSE staff or other university personnel
will need to tally those present.
Chemicals
A wide variety of chemical information exists in the Center. Materials Safety Data Sheets (MSDS) supply all
chemical specifications and some safety information. A sample MSDS sheet is provided in Appendix D. An
MSDS binder can be found in the blue binder on the cleanroom’s outer room bookshelves, and a binder is on
the bookshelf in room 369. If you have any questions concerning a given chemical, consult the MSDS binder
and CeNSE staff before using it. You have the right to know all the hazards and risks of any operation you will
perform in the laboratory. If your concerns cannot be satisfactorily addressed with the available information,
you have the right to refuse to perform any part of an operation that you feel is unsafe.
Prior to working with any chemical, make sure you are properly protected. Rubber gloves and safety goggles
must be worn for any work with acids and other corrosive chemicals. Always work with chemicals at the
exhausted wet bench.
The cleanroom gloves you put on when you enter the lab are to prevent particulate contamination. They are
not sufficient for protection against chemical burns. Use the chemical gloves provided over your cleanroom
gloves to maximize protection.
If immersion or exposure of your gloved hands in caustic or corrosive material is required, you should leakcheck the rubber gloves prior to use. To check for leaks, pressurize each glove with a nitrogen gun and
immerse it in water. If bubbles are observed, notify the CeNSE staff and discard them. Gloves should be
thoroughly rinsed and dried following use.
Chemical Storage
 Do not store the NH4OH or Acetone within 3 feet of the HCl, H2O2, or H2SO4.
6
 In general, acids (HCl, H2SO4) must be kept away from bases (NH4OH), and oxidizers (H2SO4,
H2O2) should be kept away from flammables (acetone).
 Contact Brian Wajdyk anytime new chemicals are brought to facility.
 MSDS are required.
 Chemicals must be labeled with contact information (name/phone).
Handling Chemicals
When measuring chemicals, any excess should be stored in a clean, labeled container for future use. It should
never be poured back into its reagent bottle since this may contaminate the chemical and damage the next
user’s devices.
Chemical Burns
Should you be exposed to chemicals, immediately remove the affected clothing and flush the area with large
volumes of water for at least 15 minutes. The emergency shower and/or eye wash station should be used if
necessary. Notify a staff member of the exposure as soon as possible.
HF burns are especially hazardous since there may not be any immediate discomfort. These burns are
extremely serious and may result in massive tissue damage. Any burning sensation is an indication that damage
has begun. If you are exposed to HF, flush the area well and be sure to scrub under and around your
fingernails. HF Acid Aid is available at the sink outside the rear gowning station. Inhalation of HF has the
potential for serious medical complications and medical assistance should be sought immediately.
First Aid
Minor injuries can be treated with the first aid supplies located in the blue first aid cabinet above the sink
outside the rear gowning station.
Minor Chemical Spills
Absorbent materials, such as spill control pillows, are located in the tub next to the wet bench in the event of
minor chemical spills. A CeNSE staff member should be contacted as soon as possible regarding the spill. The
proper personal protective equipment and MSDS procedures should be observed at all times.
Mixing Chemicals
Never add water to acid. Add acid to water. Use containers appropriate for the material. For example, HF
should never be in a glass container. Fuming containers should always be used at the wet bench for proper
ventilation. Chemical processes should never be left unattended unless absolutely necessary, and then only if
clearly labeled with name, date, time, expected return, and the chemicals involved in the process.
Chemical Disposal
Waste disposal containers are available for all chemicals in the lab. Chemicals should never be disposed of by
washing down the drain. If you are unable to locate the proper container or it is full, contact the CeNSE staff
immediately.
Compressed Gasses
Gas cylinders should not be installed or disconnected by anyone except CeNSE staff. This ensures proper
handling and storage.
7
Nitrogen guns and compressed air are available at various stations in the lab. If not used properly, these tools
can inflate the skin like a balloon and tear it away from the underlying tissue. Care should be taken to avoid
cuts when spraying nitrogen or compressed air.
Fire Hazards
The ignition of flammable gases, solvents or combustible materials may result in laboratory fires. A water bath
should always be used to heat flammable organics. Hot plates should be located so as to minimize exposure to
flammable sources. Avoid water around electrical appliances.
In the event of a fire, pull the nearest fire alarm and follow evacuation procedures.
Electrical Safety
Electrical wiring is to completed by CeNSE staff only. Know the locations of the circuit breakers and electrical
disconnects for the equipment you are using. In the case of electrocution, do not touch the individual. Disable
the power immediately by opening the appropriate circuit breaker or disconnect. Contact CeNSE staff
immediately.
Lab Etiquette
Laboratory etiquette is essential for the safe and efficient operation of the CeNSE. Always observe the proper
gowning and de-gowning procedures. The work area should always be free of unlabeled containers, used
gloves, dirty containers, etc. Any equipment problem should be reported to CeNSE staff. Never operate
equipment for which you have not received training.
8
AGREEMENT TO FOLLOW CENSE SAFETY PROCEDURES
Safety is a major concern to everyone involved in all activities which occur within the Center for
Nano-scale Science and Engineering. For this reason, all users are required to read and understand
the material contained in the CeNSE Safety Manual prior to working in the lab. Students will not be
permitted to enter the laboratory after the initial training and safety tour without a signed copy of this
safety agreement on file in the CeNSE office.
A photocopy of the signed safety agreement should also be retained by the individual.
I acknowledge that I have attended the required safety training sponsored by the Center for
Nano-scale Science and Engineering explaining the potential hazards and proper procedures for
handling the various materials and equipment in the laboratory. I declare that I understand the
potential hazards and the proper procedures for handing the various materials and equipment in the
laboratory. I have read and understood the material contained in the safety manual and I agree to
abide by all safety precautions, procedures, directions, and instructions, which have been
communicated to users of the laboratory through safety training, written material, posted instructions,
and directions in the laboratory from University employees who staff the laboratory. I agree to utilize
the CeNSE during regular working hours when the laboratory is staffed by University employees.
Name (Print)
Signature
Date
9
Appendix A: Non-Standard Request Form
Non-standard procedure request at CeNSE
Name, research lab, phone:
Period of use:
General description:
Materials used (provide MSDS sheets):
Safety Hazards and Precautions:
Equipment to use:
Contamination Hazards, precautions and cleaning:
Waste Disposal:
Approval signature:
10
Appendix B: Sample MSDS
VAN WATERS & ROGERS -- HYDROFLUORIC ACID - HYDROFLUORIC ACID, TECHNICAL
MATERIAL SAFETY DATA SHEET
NSN: 6810002365671
Manufacturer's CAGE: 87664
Part No. Indicator: A
Part Number/Trade Name: HYDROFLUORIC ACID
===========================================================================
General Information
===========================================================================
Item Name: HYDROFLUORIC ACID, TECHNICAL
Company's Name: VAN WATERS AND ROGERS INC
Company's Street: 2600 CAMPUS DRIVE
Company's P. O. Box: 5932
Company's City: SAN MATEO
Company's State: CA
Company's Country: US
Company's Zip Code: 94403-2522
Company's Emerg Ph #: 415-573-8000/800-424-9300(CHEMTREC)
Company's Info Ph #: 408-435-8700
Distributor/Vendor # 1: CHEMICAL COMMODITIES AGENCY, INC.
Distributor/Vendor # 1 Cage: 60777
Record No. For Safety Entry: 005
Tot Safety Entries This Stk#: 006
Status: SE
Date MSDS Prepared: 01JUN93
Safety Data Review Date: 19AUG93
Supply Item Manager: CX
MSDS Preparer's Name: C.A. EISENHARD
MSDS Serial Number: BRKCF
Specification Number: MIL-A-24641A
Hazard Characteristic Code: C1
Unit Of Issue: DR
Unit Of Issue Container Qty: 20 GALLON
Type Of Container: DRUM
Net Unit Weight: 200.0 LBS
===========================================================================
Ingredients/Identity Information
===========================================================================
Proprietary: NO
Ingredient: HYDROGEN FLUORIDE (SARA III)
Ingredient Sequence Number: 01
Percent: 30-70
NIOSH (RTECS) Number: MW7875000
CAS Number: 7664-39-3
OSHA PEL: 3 PPM/6 STEL (F)
ACGIH TLV: C 3 PPM (F); 9293
Other Recommended Limit: NONE SPECIFIED
------------------------------------Proprietary: NO
Ingredient: WATER
Ingredient Sequence Number: 02
Percent: BALANCE
NIOSH (RTECS) Number: ZC0110000
CAS Number: 7732-18-5
OSHA PEL: NOT ESTABLISHED
ACGIH TLV: NOT ESTABLISHED
Other Recommended Limit: NONE RECOMMENDED
===========================================================================
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Physical/Chemical Characteristics
===========================================================================
Appearance And Odor: CLEAR, COLORLESS LIQUID, STRONG IRRITATING ODOR.
Boiling Point: >152F,67C
Melting Point: UNKNOWN
Vapor Pressure (MM Hg/70 F): 14-130MMHG
Vapor Density (Air=1): 1.26
Specific Gravity: >1.12
Decomposition Temperature: UNKNOWN
Evaporation Rate And Ref: NOT APPLICABLE
Solubility In Water: COMPLETE
Percent Volatiles By Volume: 100
Viscosity: UNKNOWN
pH: 1.0
Autoignition Temperature: NONE
===========================================================================
Fire and Explosion Hazard Data
===========================================================================
Flash Point: NONE
Extinguishing Media: USE WATER ON FIRES IN WHICH HYDROFLUORIC ACID IS
INVOLVED.
Special Fire Fighting Proc: WEAR FIRE FIGHTING PROTECTIVE EQUIPMENT AND A
FULL FACED SELF CONTAINED BREATHING APPARATUS. EVACUATE AREA. COOL FIRE
EXPOSED CONTAINERS WITH WATER SPRAY.
Unusual Fire And Expl Hazrds: NONCOMBUSTIBLE BUT DIFFICULT TO CONTAIN AS
IT CORRODES MOST SUBSTANCES EXCEPT LEAD, POLYETHYLENE AND PLATINUM. MAY
GENERATE HYDROGEN IN CONTACT W/ METALS.
===========================================================================
Reactivity Data
===========================================================================
Stability: YES
Cond To Avoid (Stability): NOT APPLICABLE
Materials To Avoid: ALKALIS, OXIDIZING OR REDUCING MATERIALS, CYANIDES,
SULFIDES, GLASS, CONCRETE, METALS, ORGANIC MATTER.
Hazardous Decomp Products: WHEN HEATED TO DECOMPOSITION, EMITS TOXIC
HYDROGEN FLUORIDE FUMES.
Hazardous Poly Occur: NO
Conditions To Avoid (Poly): NOT APPLICABLE
===========================================================================
Health Hazard Data
===========================================================================
LD50-LC50 Mixture: INHL-RAT LC50: 1276 PPM/1 HOUR
Route Of Entry - Inhalation: YES
Route Of Entry - Skin: YES
Route Of Entry - Ingestion: YES
Health Haz Acute And Chronic: ACUTE-EYES/SKIN:CORROSIVE, BURNS, BLINDNESS.
INHALATION:CORROSIVE TO RESPIRATORY TRACT. BREATHING HIGH CONCENTRATIONS
MAY RESULT IN DEATH. INGESTION:HARMFUL/FATAL IF SWALLOWED. SEVERE BURNS OF
INTESTINAL TRACT. CHRONIC-CHEMICAL PNEUMONITIS, BRONCHITIS, TEETH ERSION.
Carcinogenicity - NTP: NO
Carcinogenicity - IARC: NO
Carcinogenicity - OSHA: NO
Explanation Carcinogenicity: HYDROFLUORIC ACID IS NOT LISTED BY IARC, NTP,
OR OSHA AS A CARCINOGEN.
Signs/Symptoms Of Overexp: INFLAMMATION OF THE NOSE, THROAT, UPPER
RESPIRATORY TRACT, IRRITATION, COUGH, CHEST PAIN, NAUSEA, VOMITING,
COLLAPSE. VERY CORROSIVE CAUSES SEVERE BURNS AND DAMAGE TO ALL TISSUES.
Med Cond Aggravated By Exp: PERSONS WITH A HISTORY OF AILMENTS OR WITH A
PRE-EXISTING DISEASE INVOLVING THE EYES, SKIN, OR RESPIRATORY TRACT MAY BE
AT INCREASED RISK FROM EXPOSURE.
Emergency/First Aid Proc: INHALATION:MOVE TO FRESH AIR. IF BREATHING HAS
STOPPED, GIVE ARTIFICIAL RESPIRATION AND OXYGEN IF NEEDED. SKIN: REMOVE
12
IF CONSCIOUS, GIVE 2-3 GLSSED OF WATER/MILK TO DRINK. DO NOT INDUCE
VOMITING. GET MEDICAL ATTENTION
===========================================================================
Precautions for Safe Handling and Use
===========================================================================
Steps If Matl Released/Spill: VENTILATE AREA, WEAR PROTECTIVE EQUIPMENT.
SMALL SPILL:NEUTRALIZE AND FLUSH WITH EXCESS WATER. LARGE SPILL: EVACUATE
AND VENTILATE AREA. IF POSSIBLE, STOP LEAK. DIKE TO RETAIN RUN OFF.
NEUTRALIZE & PICK UP WITH ABSORBENT.
Neutralizing Agent: SODA ASH, OR LIME.
Waste Disposal Method: DISPOSAL SHOULD BE MADE IN ACCORDANCE WITH ALL
APPLICABLE FEDERAL, STATE AND LOCAL LAWS AND REGULATIONS. DISPOSE IN A
RCRA-APPROVED WASTE FACILITY OR SEWER THE NEUTRALIZED SLURRY WITH EXCESS
WATER IF LOCAL ORDINANCES ALLOW.
Precautions-Handling/Storing: PROTECT AGAINST PHYSICAL DAMAGE. STORE IN
WELL-VENTILATED AREA, SEPARATED FROM INCOMPATIBLES. WEAR SPECIAL PROTECTIVE
CLOTHING WHEN HANDLING.
Other Precautions: FOR INDUSTRIAL USE ONLY. SEE CHEMICAL SAFETY DATA SHEET
SD-25 (MANUFACTURING CHEMISTS' ASSOCIATION, INC.)
===========================================================================
Control Measures
===========================================================================
Respiratory Protection: IF VENTILATION DOES NOT MAINTAIN INHALATION
EXPOSURES BELOW PEL(TLV), USE NIOSH APPROVED FULL FACEPIECE CHEMICAL
CARTRIDGE RESPIRATOR OR A SUPPLIED AIR FULL FACEPIECE RESPIRATOR.
Ventilation: LOCAL EXHAUST IS RECOMMENDED TO KEEP EMPLOYEE EXPOSURES BELOW
TLV.
Protective Gloves: NEOPRENE OR PVC GLOVES
Eye Protection: CHEMICAL SAFETY GOGGLES WITH FACE SHIELD
Other Protective Equipment: EYE WASH STATION AND SAFETY SHOWER. IMPERVIOUS
BOOTS, APRON, AND COVERALLS.
Work Hygienic Practices: OBSERVE GOOD PERSONAL HYGIENE PRACTICES AND
RECOMMENDED PROCEDURES. DO NOT WEAR CONTAMINATED CLOTHING OR FOOTWEAR.
Suppl. Safety & Health Data: AVOID ANY EXPOSURE. DO NOT GET ON SKIN OR IN
EYES. DO NOT BREATHE VAPORS OR MISTS.
===========================================================================
Transportation Data
===========================================================================
Trans Data Review Date:
93231
DOT PSN Code: HKP
DOT Proper Shipping Name: HYDROFLUORIC ACID
DOT Class: 8
DOT ID Number: UN1790
DOT Pack Group: II
DOT Label: CORROSIVE, POISON
IMO PSN Code: IFR
IMO Proper Shipping Name: HYDROFLUORIC ACID
IMO Regulations Page Number: 8184
IMO UN Number: 1790
IMO UN Class: 8
IMO Subsidiary Risk Label: TOXIC
IATA PSN Code: NQP
IATA UN ID Number: 1790
IATA Proper Shipping Name: HYDROFLUORIC ACID,
IATA UN Class: 8
IATA Subsidiary Risk Class: 6.1
IATA Label: CORROSIVE & TOXIC
AFI PSN Code: NQP
AFI Prop. Shipping Name: HYDROFLUORIC ACID, SOLUTION
AFI Class: 8
AFI ID Number: UN1790
AFI Pack Group: II
13
AFI Label: 6.1
AFI Special Prov: A6,A7,N5,N34
AFI Basic Pac Ref: 12-5
N.O.S. Shipping Name: 30-70% SOLUTION OF HYDROFLUORIC ACID.
===========================================================================
Disposal Data
===========================================================================
===========================================================================
Label Data
===========================================================================
Label Required: YES
Technical Review Date: 19AUG93
MFR Label Number: NOT APPLICABLE
Label Status: F
Common Name: HYDROFLUORIC ACID
Chronic Hazard: YES
Signal Word: DANGER!
Acute Health Hazard-Severe: X
Contact Hazard-Severe: X
Fire Hazard-None: X
Reactivity Hazard-Moderate: X
SEVERE BURNS/BLINDNESS. INHALATION:CORROSIVE. BREATHING HIGH CONCENTRATIONS
MAY RESULT IN DEATH. INGESTION:HARMFUL/FATAL IF SWALLOWED. CHRONIC-CHEMICAL
PNEUMONITIS, BRONCHITIS, TEETH ERSION. STORE IN WELL-VENTILATED AREA,
SEPARATED FROM INCOMPATIBLES. FIRST AID-INHALATION:MOVE TO FRESH AIR. IF
BREATHING HAS STOPPED, GIVE ARTIFICIAL RESPIRATION AND OXYGEN. SKIN:REMOVE
IMMEDIATELY FLUSH WITH WATER FOR AT LEAST 15 MINUTES. INGESTION:IF
CONSCIOUS, GIVE 2-3 GLSSED OF WATER/MILK TO DRINK. DO NOT INDUCE VOMITING.
GET MEDICAL HELP.
Protect Eye: Y
Protect Skin: Y
Protect Respiratory: Y
Label Name: VAN WATERS AND ROGERS INC
Label Street: 2600 CAMPUS DRIVE
Label P.O. Box: 5932
Label City: SAN MATEO
Label State: CA
Label Zip Code: 94403-2522
Label Country: US
Label Emergency Number: 415-573-8000/800-424-9300(CHEMTREC)
Year Procured: 1993
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Appendix C: Cleanroom Attire
 See the diagram on the next page.
 Outside cleanroom attire/ at all times wear:
o Booties
o Gloves
 Inside cleanroom attire:
o Booties
o Gloves
o Suit
o Safety Goggles
o Hairnet
 Wet Bench attire:
o Apron
o Acid Gloves
 Diffusion Furnace attire:
o Glass Thermal Gloves
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