ECE 434 (Winter 2009): Microsystems Technology
Instructor:
Lectures:
Tutorial:
Grading:
Karim S. Karim, kkarim@uwaterloo.ca
Tue/Thu from 8:30 to 9:20 pm RCH-309
Tue from 7:00 to 7:50 pm RCH-309
30% project (10% simulation results; 15% report; 5% presentation), 20% midterm, 50% final
Yellow Book Course Description:
Physical principles, design, and microfabrication technologies pertinent to input (sensor) and output (actuator)
devices for multimedia applications such as document and video imaging devices, micromirror projection displays,
and micro-electro-mechanical systems.
Course Schedule:
Week
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Lecture
Date
Jan 6
Textbook
Chapters
Senturia, Chap 1,3
Jan 8
Jan 13
Jan 15
Jan 20
Jan 22
Jan 27
Jan 29
Feb 3
Feb 5
Feb 10
Feb 12
Feb 17
Feb 19
Feb 24
Feb 26
Mar 3
Mar 5
Mar 10
Mar 12
Mar 17
Mar 19
Mar 24
Mar 26
Mar 31
Apr 2
Muller, Chap 2
Senturia, Chap 3
Muller, Chap 2
Senturia, Chap 4
Liu, Chap 3
Liu, Chap 4
Liu, Chap 3
Liu, Chap 6
Liu, Chap 7
Sze, Chap 6
Class notes
No class
No class
Class notes
Class notes
Sze, Chap 6
Sze, Chap 7
Sze, Chap 8
Sze, Chap 9
Kasap, Chap 1
Kasap, Chap 8
Grey&Meyer, Chap 11
Grey&Meyer, Chap 11
Topics
Deadlines
Introduction to Microsystems,
Microfabrication
Microfabrication – Cleaning, Oxidation
Microfabrication – Doping, bonding
Group info, timeline
Microfabrication – lithography
Microfabrication –Process development
Review basic mechanical concepts
Mechanical – pressure sensor
Review basic semiconductor concepts
Piezoresistance
Piezoelectricity
Radiation sensing – theory
Optical sensors – photodiodes
Reading week
Reading week
Optical – CCDs
Prelim. Sim. Results
Optical actuators – LED, LCD
High energy radiation detectors
Thermal sensing – theory
Chemical sensing – gas sensors
Biochemical sensing
Magnetic sensing – Hall effect
Magnetic sensing – GMR read/write heads
Noise – characteristics of random noise
Noise – sources and analysis
Course presentations
Final reports due
Course presentations
Final Exam
Projects: The project (in groups of 2, 3 or 4) will consist of a Medici Device and Cadence Circuit Simulation
available through Synopsys on the VLSI computers using silicon 0.18µm CMOS technology of one of the
following: (a) Charge Coupled Device (back illuminated or buried channel) for UV index/ exposure monitoring, (b)
phototransistor (BJT or MOS) for heart rate monitoring (pulse oximetry), (c) piezoresistor for use in a PDA
keyboard or for blood pressure measurement, (d) tri-color CMOS Photogate camera pixel or (e) Thermal sensor
(resistor, diode, FET or BJT) for night vision.
Reference text(s):
1. Microsystem Design, Stephen Senturia, Springer, 2000.
2. Device Electronics for Integrated Circuits 3rd Ed, R. Muller R. Kamins and M. Chan, Wiley, 2002.
3. Foundation of MEMS, Chang Liu, Prentice Hall, 2006.
4. Semiconductor Sensors, S.M. Sze, ed., New York: John Wiley & Sons, Inc., 1991.
5. ECE 434 Course notes provided by instructor
6. Principles of Electronic Materials and Devices 3rd Ed, Safa Kasap, McGrawHill, 2006.
7. Analysis and Design of Analog Integrated Circuits 4th Ed, P. Gray & W. Meyer, Wiley, 2007.