Innovative Vacuum Electronics
PPPS 2001 Minicourse
22-23 June, 2001
Las Vegas
Is “innovative vacuum electronics”
an oxymoron?
• A not-un-common prediction:
“In _X_ years time, all vacuum electronics will
probably be replaced by solid state...except,
perhaps, for a few very high power devices.”
(- colleague, ICOPS 2000, Monterey)
Are we nearing the end-of-life for
innovation in vacuum electronics?
Other experts’ predictions
“I think there is a world market for about five computers.”
- Thomas J. Watson, IBM Chairman, 1943
“It can be taken for granted that…ships, aircraft, locomotives, and even
automobiles will be atomically fueled…atomic batteries will be
commonplace long before 1980.”
- David Sarnoff, R.C.A. Chairman, 1953
“There is no reason for any individual to have a computer in their home.”
- Ken Olsen, Digital Equipment Corp President, 1977
“The Philadelphia ‘76’ers will be quickly defeated by Milwaukee Bucks
in the [2000-01] NBA semifinals”
- J. Booske, May 2001
Vacuum Electronics still has
much to offer!
• Friday afternoon session
– overviews of exciting VE research innovations
and advances at 6 US Universities (US DoD
MURI consortium)
– details in Friday AM posters & CDs
• Saturday morning and afternoon sessions
– micromachining technology tutorials
– VE applications of micromachining
Reminder to registrants
• Make sure we get your mailing address
and email, in case CDs will be mailed
after the shortcourse!
Friday Schedule
1 – 1:10
Welcome
J. Booske
1:10 – 1:40
U California-Davis
N. Luhmann
1:40 – 2:10
U Maryland
V. Granatstein
2:10 – 2:40
Massachussetts Inst R. Temkin
of Technology
2:40 – 3:10
U Michigan
3:10 – 3:30
Break
3:30 – 4:00
Stanford/SLAC
G. Scheitrum
4:00 – 4:30
U. Wisconsin
J. Booske
4:30 – 4:50
Q & A session
4:50 – 5:00
Closing remarks
Y.Y. Lau
J. Booske
Saturday Morning Schedule
8:30 – 10:00
Micromachining tutorial
A. Lal
10:00 – 10:30
Break
10:30 – 11:15
µ machining tutorial cont’d
A. Lal
11:15 – 12:00
Field emitter arrays
C. Spindt
12:00 – 1:30
Lunch break
Saturday Afternoon Schedule
1:30 – 2:15
LIGA tutorial
C. Henderson
2:15 – 3:30
Millimeterwave klystrinos
G. Scheitrum
3:30 – 4:15
THz reflex klystrons
J. Thorpe
4:15 – 5:00
THz traveling wave tubes
J. Booske
5:00
Closing remarks
J. Booske
John H. Booske
John H. Booske received the Ph.D. in nuclear engineering in 1985 from the University of
Michigan, Ann Arbor. From 1985-1989, he was a Research Scientist at the University of
Maryland, leading studies of magnetically-confined hot ion plasmas and high-average-power,
millimeter-wave free electron lasers. In 1990, he joined the faculty of the Department of
Electrical and Computer Engineering at the University of Wisconsin-Madison. His research
activities and interests have included high-power, microwave vacuum electron devices,
electron beam physics, microwave-plasma interactions, microwave-dielectric interactions and
biomedical applications of microwave radiation. Recent contributions in vacuum electronics
include the development of stable, periodic magnetic focusing of sheet electron beams. Current
research interests include fundamental nonlinear and dispersive phenomena in helix traveling
wave tubes and submillimeter-wave traveling wave amplifiers. From 1994-1999, Dr. Booske
was a Thrust Area Leader within the University of Wisconsin’s Center for Plasma-Aided
Manufacturing, investigating and developing a variety of energetic ion plasma surface
modification processes for metal corrosion protection, ULSI semiconductor shallow doping, and
ionized metal vapor deposition. During the past nine years, he has led a research
investigation of linear and nonlinear interactions between microwave radiation and ionic
crystalline ceramics. This included the experimental discovery of a nonlinear mechanism by
which microwave radiation accelerates ionic diffusion in materials. Dr. Booske has won
numerous awards for his teaching and investigation of innovative teaching techniques. He is
currently Co-PI of a Multi-University Research Initiative (MURI) Consortium funded by the U.S.
Department of Defense to pursue basic enabling research for the next generation of
innovations in microwave vacuum electronics.
Ronald M. Gilgenbach
Ronald M. Gilgenbach is a Professor of Nuclear Engineering and Radiological
Sciences Department and in the Applied Physics Program at the University of Michigan. He
received the Ph.D. in electrical engineering from Columbia University in 1978; the B.S. (1972)
and M.S. (1973) degrees were earned at the University of Wisconsin. He gained several years
of industrial experience at Bell Labs. From 1978-1980, he worked as a Contractor at the Naval
Research Laboratory, where he was involved in research and development on the first, longpulse, 35-GHz gyrotron for plasma heating. He performed experiments on the ISX-B tokamak at
Oak Ridge National Laboratory, which represented the first gyrotron electron cyclotron heating
experiments on a tokamak in the US. Dr. Gilgenbach joined the faculty of the University of
Michigan in 1980 and became the Director of the Intense Energy Beam Interaction Laboratory, a
post he still holds. His research at Michigan has concentrated on the physics and applications of
electron beams and microwaves, as well as laser-plasmas, laser diagnostics, and industrial
materials processing. He has had research interactions with scientists at Air Force Phillips Lab,
Sandia National Labs, Northrop-Grumman, General Motors Research Labs, Los Alamos
National Lab, Fermilab, and NRL. He previously served as Secretary and Member of the
Executive Committee of the IEEE Plasma Sciences and Applications Technical Committee. He
is a Fellow of the American Physical Society and received the 1997 Plasma Sciences and
Applications Award from the IEEE PSAC.
Victor L. Granatstein
Victor L. Granatstein received the Ph.D. degree in electrical engineering from Columbia
University, NY in 1963. After a year of postdoctoral work at Columbia, he was a Research
Scientist at Bell Telephone Laboratories from 1964 to 1972. In 1969-1970, he was a Visiting
Senior Lecturer at the Hebrew University of Jerusalem. In 1972, he joined the Naval Research
Laboratory (NRL), Washington, DC, as a Research Physicist, and from 1978 to 1983, he served
as Head of NRL’s High Power Electromagnetic Radiation Branch. In August 1983, he became a
Professor in the Electrical Engineering Department of the University of Maryland, College Park.
From 1988 to 1998, he was Director of the Institute for Plasma Research at the University of
Maryland. In 1994, he spent a semester as a Visiting Professor at the University of Tel Aviv,
Israel. He is presently leading studies of electromagnetic radiation from relativistic electron
beam and advanced concepts in millimeter-wave tubes, especially gyrotron amplifiers. He has
coauthored more than 200 research papers in scientific journals and has coedited three books.
He holds a number of patents on active and passive microwave devices.
Dr. Granatstein is a Fellow of the American Physical Society. He has received a
number of major research awards including the E.O. Hulbert Annual Science Award (1979), the
Superior Civilian Service Award (1980), the Captain Robert Dexter Conrad Award for scientific
achievement (awarded by the Secretary of the Navy, 1981), the IEEE Plasma Science and
Applications Award (1991), and Robert L. Woods Award for Excellence in Electronics
Technology (1998).
Craig Henderson
Craig Henderson is the Technical Manager of the Microsystems Processing Department at
Sandia National Laboratories (Livermore, CA), which he joined in 1991. During his decade at
Sandia, Dr. Henderson has researched engineered polymers for encapsulation of electronic
components, high performance polymer photoresists for advanced microlithography, and, most
recently, microstructure fabrication via lithographically-produced polymer templates. While at
Sandia, he has published over 30 technical papers and has received one patent. He received his
Ph.D. in organic chemistry from the University of Illinois at Urbana-Champaign in 1991, after
receiving his B.S. in chemistry from Duke University.
Amit Lal
Amit Lal is a faculty member in the Electrical and Computer Engineering Department at the
University of Wisconsin Madison. He received his Ph. D. in electrical engineering from the
University of California, Berkeley in 1996, and the B.S. degree from the California Institute of
Technology in 1990.
Amit Lal is the leader of the SonicMEMS group at University of Wisconsin, which focuses on
ultrasonics, micromachining, modeling of piezoelectric systems, and design and analysis of
integrated circuits. He has published papers on ultrasonic sensors and actuators at conferences
in ultrasonics and micromachining. He serves on the Technical Committee on Physical
Acoustics in the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society. He holds
patents on micromachined acoustic sources/receivers, and silicon-based high-intensity
ultrasonic actuators. He is also the recipient of the NSF CAREER award for research on
applications of ultrasonic pulses to MEMS.
Web site:
www.cae.wisc.edu/~sonicmem
Neville C. Luhmann, Jr.
Neville C. Luhmann, Jr, received the Ph.D. degree in physics from the University of Maryland, College
Park, in 1972. He was a Professor in the Electrical Engineering Department of the University of California,
Los Angeles (UCLA), from 1973 to 1993. From 1990 to 1992, he was the Director of the Center for High
Frequency Electronics at UCLA. He has been with the Department of Electrical and Computer
Engineering of the University of California at Davis (UCD) since 1993, and is also a member of the faculty
of the Department of Applied Science at UCD, where he was the Chairman from 1995 to 1998. He was
the Program Director of the Advanced Thermionics Research Initiative (ATRI) at UCLA from 1987 to 1993,
and its successor, ATRI 2000, at UCD from 1993 to 1998. He was the Co-Director of the Joint Services
Electronics Program in Millimeter Wave Electronics at UCLA from 1992 to 1995. He is also the Program
Director for the Multidisciplinary University Research Initiative (MURI 1995) High-Power Microwave
Sources Consortium, and its sister program, MURI 1999, Innovative Microwave Vacuum Electronics
Consortium, both at UCD. In addition, he became Program Director of the National Institutes of
Health/National Cancer Institute Unconventional Innovations in Cancer Detection and Treatment at UCD
1999. He has contributed over 300 publications to the scientific literature. His current research interests
include RF accelerators, Advanced Light Sources, Microwave Tube Design, High-Power Microwave
Sources, Free-Electron Lasers, Plasma Physics, Wave-Plasma Interactions, Ultrashort-Pulse Electronics,
High-Power Millimeter-Wave Sources, Millimeter-Wave Quasi-Optical Grid Arrays, Laser Diagnostics,
Millimeter-Wave Imaging, Gyrotrons, MEMS, Vacuum Microelectronics, Millimeter-Wave Electronics, and
Phased Array Antennas.
Professor Luhmann is a member of the Tau Beta Pi and Sigma Xi Honor Societies, a Fellow of
the American Physical Society, and the Recipient of the Robert L. Woods Department of Defense Award
for Excellence in Vacuum Electronics.
Glenn P. Scheitrum
Glenn P. Scheitrum received the Ph.D. degree in electrical engineering from
Stanford University in 1991. He is currently employed at the Stanford Linear
Accelerator Center, working on millimeter-wave RF source development. From 1978
to 1996 he worked for Litton Industries on a variety of microwave tube projects. His
research interests include microfabrication techniques for millimeter wave tubes,
modeling of RF sources, electron guns, and research on high current density oxide
cathodes.
Capp A. Spindt
Capp A. Spindt was born in San Jose, California. He received the B.S. degree in electrical engineering from the California
State University at San Jose in 1961 and the Ph.D. degree from the Eurotechnical Research University in recognition of his
pioneering contributions to the field of vacuum microelectronics.
He served as an Air Force fighter pilot during the Korean War, where he developed an interest in engineering. In
1959, he joined the staff at SRI International (then the Stanford Research Insititute), Menlo Park, CA, as a Student Engineer,
and became a Research Engineer in the Physical Electronics Laboratory at SRI in 1961. Since that time, he has been engaged
in research on thin-film deposition and machining technology, ultrahigh vacuum processes, microchannel electron multipliers,
high-density information-storage devices, and the development of three-dimensional microfabrication technology and devices
based on that technology, such as cold cathodes, field ionizers, microwave amplifiers, and flat-panel displays. As a part of
these activities, he invented and developed processes for fabricating the gated microfield-emitter array cathode. This has been
the enabling technology that has led to the emergence of a new technical field dedicated to the application of microfabrication
techniques to vacuum devices and a rekindled interest in vacuum devices within the scientific community. This field has
become known as vacuum microelectronics. He served as Guest Editor on vacuum microelectronics for IEEE Transactions on
Electron Devices in 1988 and 1990. In 1994 and 1995, he was a Guest Lecturer for vacuum microelectronics courses at the
University of California. He has authored or co-authored over 100 papers for technical journals and scientific symposia,
including several invited lecutres, and holds 13 US patents. He is currently the Director of the Vacuum Microelectronics
Program, Physical Electronics Laboratory, SRI.
For more information about this technology innovation, see
http://www.esd.sri.com/apsl/vacuum.html.
He was named an SRI Fellow in 1992. He was co-founder and co-chairman of the First IEEE International
Vacuum Microelectronics Conference (IVMC) in Williamsburg, Virginia, June 1988, chairman of the Third IVMC held in
Monterey, California in July 1990, and vice-chairman for the Sixth IVMC in Newport Rhode Island. He is presently serving on
the Steering Committee for the IVMC. In 1989-90 he was a committee member for the IEEE-IEDM, and in 1991 the chairman
of the Vacuum Electronics Subcommittee for the IEEE-IEDM in Washington, DC. In 1998-99, he served as chairman for the
IEEE-ICOPS vacuum microelectronics sessions. He is presently serving on the program committee for the IEEE International
Vacuum Electron Sources Conference for the year 2000. In 1996, he was awarded the Society for Information Display’s Jan
Rajchman Prize “For the invention and development of Field-Emission Flat-Panel Displays using micro-tip structures.” He is a
member of Sigma Xi, the American Vacuum Society, and the Society for Information Display.
Richard J. Temkin
Richard J. Temkin holds the B. A. degree in Physics from Harvard College and >the
Ph. D. degree in Physics from the Massachusetts Institute of Technology. From
1971 to 1974, he was a Research Fellow in the Division of Engineering and Applied
Physics of Harvard University. Since 1974, he has been at MIT, first at the Francis
Bitter National Magnet Laboratory and later at the Plasma Science and Fusion
Center (PSFC). He currently serves as Associate Director of the PSFC and Head of
the Waves and Beams Division of the Center. He is also a Senior Scientist in the
MIT Physics Department. His research interests include novel vacuum electron
devices such as the gyrotron, advanced, high-gradient electron accelerators, quasioptical waveguides and antennas at millimeter wavelengths, plasma heating and
electron spin resonance spectroscopy. He has been the author or co-author of over
200 published journal articles and book chapters and has been the editor of six
books and conference proceedings. Dr. Temkin is a Fellow of the American Physical
Society, the IEEE and The Institute of Physics (London). He has received the
Kenneth J. Button Prize and Medal of The Institute of Physics, London and the
Robert L. Woods Award of the Dept. of Defense for Vacuum Electronics.
Jim Thorpe
Jim Thorpe was born in Derby, England in 1972 and graduated in Electronic Engineering from
the University of Leeds in the United Kingdom in 1995. In 1999 he received a PhD from the
University of Leeds for the research and development of millimetre-wave Non-Linear
Transmission Line Frequency Multipliers utilising Heterojunction Barrier Varactor Diodes. He
then undertook two years of post-doctorial research at the Istituto Elettrotecnico Nazionale
Gallileo Ferraris, Turin, Italy, where he was responsible for the design and realisation of QuasiOptical Heterodyne Detectors utilising Superconductor-Insulator-Superconductor junctions. In
2000 he returned to the University of Leeds, where he is now developing microfabricated
resonant cavities for novel vacuum tube sources with outputs at submillimeter-wave frequencies.
His main research interest is the Electromagnetic Design and Microfabrication of Microelectromechanical Systems for Radio-Frequency applications.