Labs based on
Berkowski, Plunkett, Yu and Moore; “Introduction to Photolithography: Preparation of Microscale
Polymer Silhouettes” (J. Chem. Ed., Vol. 82, No. 9, Sept 2005)
Yang, Ouellet, and Lagally; “Using Inexpensive Jell-O Chips for Hands-On Microfluidics Education”
Anal. Chem. 2010.
Muskin and Ragusa; “3-D Printing” (Center for Nanoscale Chemical-Electrical-Mechanical
Manufacturing Systems; University of Illinois at Urbana-Champaign. https://nanocemms.illinois.edu/materials/3d_printing_full
References
 http://www.ece.gatech.edu/research/labs/vc/theory/photolith.html
"Photolithography." School of Electrical and Computer Engineering at the Georgia Institute of
Technology. Web. 28 July 2010.
<http://www.ece.gatech.edu/research/labs/vc/theory/photolith.html>.
 http://www.metmuseum.org/toah/hd/lith/hd_lith.htm
Ives, Colta. "Lithography in the Nineteenth Century." Heilbrunn Timeline of Art History: The
Metropolitan Museum of Art. Metropolitan Museum of Art, 2004. Web. 28 July 2010.
<http://www.metmuseum.org/toah/hd/lith/hd_lith.htm>.
 http://www.cnf.cornell.edu/cnf_process_photo_resists.html
"Photolithography Resist Processes and Capabilities." CNF - Cornell NanoScale Science &
Technology Facility. Web. 28 July 2010.
<http://www.cnf.cornell.edu/cnf_process_photo_resists.html>.
 http://www.nanowerk.com/news2/newsid=28926.php
“3D printing on the micro- and nanometer scale (w/video).” Nanowek News. Web. 11, July 2013.
 < http://www.nanowerk.com/news2/newsid=28926.php>.
News/Research Articles
 http://www.newscientist.com/article/dn18613-for-smaller-chips-borrow-18thcentury-tricks.html
Barras, Colin. "For Smaller Chips, Borrow 18th-century Tricks." New Scientist. Reed Business
Information Ltd., 2010. Web. 28 July 2010. <http://www.newscientist.com/article/dn18613-forsmaller-chips-borrow-18thcentury-tricks.html>.
 http://www.azonano.com/news.asp?newsID=2959 – lab on a chip breast cancer screening
"Lab-on-a-Chip for Breast Cancer Screening." The A to Z of Nanotechnology. AZoM.com Pty. Ltd,
2010. Web. 28 July 2010. <http://www.azonano.com/news.asp?newsID=2959>.

http://www.nanowerk.com/news/newsid=14125.php – lab on a chip used to measure pH
Seattle’s Hub for Industry-driven
Nanotechnology Education - July 2014
NSF –DUE Award #1204279
"Lab-on-a-chip Measures Effect of PH Change on Biomolecules." Nanowerk. Nanowerk, 2010. Web.
28 July 2010. <http://www.nanowerk.com/news/newsid=14125.php>.
Video

http://www.youtube.com/watch?v=r_RzRAzp3UM – NASA using Lab on Chip to keep space
craft clean
"Real World: Using Lab on a Chip Technology to Identify Microorganisms." YouTube. Web. 28 July
2010. <http://www.youtube.com/watch?v=r_RzRAzp3UM>.

http://www.youtube.com/watch?v=-GQmtITMdas&feature=related – how a computer chip is
made
“From sand to chip - How a CPU is made.” YouTube. Web. 28 July 2010.
<http://www.youtube.com/watch?v=-GQmtITMdas&feature=related>.
 http://www.youtube.com/watch?v=NeIuYLaw9ks&feature=related – art lithography
“Lithography process explained in conjunction with Chuck Close Prints exhibition at the First
Center.” YouTube. Web. 28 July 2010.
<http://www.youtube.com/watch?v=NeIuYLaw9ks&feature=related>.
 http://il.youtube.com/watch?v=eLmecbMmeLM – microfluidics ballet
“Microfluidic Ballet -- by Albert Folch's lab (University of Washington, BioE dept., Seattle).”
YouTube. Web. 28 July 2010. <http://il.youtube.com/watch?v=eLmecbMmeLM>.
 http://www.youtube.com/watch?v=z8iJzpX7PA8
“Microfluidic device with microvalves (multiplexer area) [Folch lab].” YouTube. Web. 28 July 2010.
<http://www.youtube.com/watch?v=z8iJzpX7PA8>.
 http://www.youtube.com/watch?v=UVSDRglikuM&NR=1&feature=fvwp
“Microfluidic device with microvalves [Folch lab].” YouTube. Web. 28 July 2010.
<http://www.youtube.com/watch?v=UVSDRglikuM&NR=1&feature=fvwp>.
 http://www.youtube.com/watch?v=AENnU0vdjPo&feature=related
“A microfluidic device. separation, sorting, mixing.” YouTube. Web. 28 July 2010.
<http://www.youtube.com/watch?v=AENnU0vdjPo&feature=related>.
Seattle’s Hub for Industry-driven
Nanotechnology Education - July 2014
NSF –DUE Award #1204279
Further experiments with Photolithography
1. Repeat with different colored solutions / different masks on the same substrate to create
complex layers of patterns.
2. Do several variations of this experiment, varying:
a. Concentration of monomer (isobornyl acrylate)
b. Concentration of cross-linker (bis-GMA)
c. Concentration of initiator (DMPA)
d. Exposure times
3. Supplemental experiment on polymers (“dry” polymer lab from MSC course)
4. Supplemental experiment on microchips: Graham Cracker Chip for younger students.
5. Supplemental video on Si chip fabrication (Silicon Run video series)
This material is based upon work supported by the National Science Foundation under Grant Number 1204279. Any opinions, findings, and
conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National
Science Foundation.
Seattle’s Hub for Industry-driven
Nanotechnology Education - July 2014
NSF –DUE Award #1204279