12/31/2013 University of Toronto Department of Electrical and Computer Engineering ECE 330 SEMICONDUCTOR PHYSICS Winter 2014 https://portal.utoronto.ca Instructor: Peter Herman p.herman@utoronto.ca http://photonics.light.utoronto.ca/laserphotonics/ Office: GB442 Consulting Hours - immediately after lectures or by appointment Lectures: Tue 2:10 Wed 3:10 Thu 3:10 BA1240 Q&A 3:00 BA1230 (lecture conflict) BA1240 Q&A 4:00 Conference Conflict: 3 lectures during week of Feb 4-6 are cancelled and Rescheduled during tutorial time: 5-6 pm BA 2139 Jan 9, Jan 23, Feb 13 Course Description: Wave and quantum mechanics, the Schrodinger equation, quantum wells and density of states. Quantum statistics, solid-state bonding and crystal structure. Electron waves, dispersion relation inside periodic media, Fermi level and energy bands. Physical understanding of semiconductors at equilibrium, intrinsic and extrinsic semiconductors and excess carriers. Course Reference Materials: Purchase 2 texts • Quantum Physics of atoms, molecules, solids, nuclei, and particles - 75% of course Eisberg, Resnick, 2nd ed., Wiley, 1985. (1) Full Text Version: ISBN 0-471-87373-X (2) Special Edition of Relevant Chapters (B&W) Wiley: ISBN 0470836032 Start in Chapter 2; Chapter 1 is intimidating and discussed later in the course. • Semiconductor Physics and Devices - 25% of course Donald A. Neamen, McGraw Hill, 3rd 2003 ISBN 0-07-232107-5 (useful in ECE335) OTHER: Solid State Electronic Devices, Ben G. Streetman and Sanjay Banerjee, 6th edition, Prentice Hall. (Less physical insight than in Neaman) • Supplementary Lecture Notes: download from BB Portal as posted lecture-by-lecture 12/31/2013 • Website References: http://www.acsu.buffalo.edu/~wie/applet/applet.old for SC physics and devices SUNY, Buffalo offers great graphics http://www.britneyspears.ac/lasers.htm Britney Spears (Essex Univ. Physics Grads) provide a succinct summary of SC physics http://phet.colorado.edu/simulations/index.php?cat=Quantum_Phenomena Good java applets demonstrating Quantum Mechanics concepts: - Fourier-Waves; Electron Diffraction, Quantum wave interference, - Photoelectric effect; Quantum Tunneling, Bound States; - Semiconductors, Band Structure; Double Wells; Video Demo: Double Slit http://www.youtube.com/watch?v=DfPeprQ7oGc See BB Portal for more links Marks: Lab 1 (Simulations) Lab 2 (Simulations) Lab 3 (Simulations) 3.33% 3.33% 3.33% Quizzes Final Exam 40% 50% 100% TOTAL (5) best 4 of 5 (1) Quiz: • schedule posted on course web page, 45 min, starts 6:15pm, bonus marks • returned and taken up in next tutorial time. • closed book; 8.5 x 11, hand-written aid sheet(s) are permitted; no photocopies. # 1: no aid sheet # 2: less than one-side of single aid sheet # 3: less than two-sides of one aid sheet # 4: less than three-sides of two sheets # 5: less than four-sides of two sheets • aid sheets will be checked by TA during tests—do not exceed limits! • no computers or electronic storage devices, no cell phones. Lab à Assignments: • • • • • Computer programs with interpretation of graphical observations posted on course web page hand in ECE 330 Course Box in Sanford Fleming 1st Floor (location to be verified) marked labs are returned and solutions discussed in next tutorial time. Please put your name and student number on front page. see assigned T.A. marker for grading concerns. late labs are not accepted. 12/31/2013 Grading Corrections: • Labs and Quiz: consult first with T.A. marker with clarifications about marking; then the instructor; then …lawyer! • Quiz Policy: If the quiz is written in pencil or erasable pen, or liquid paper (‘whiteout’) is used, the student will have forfeited the right to appeal for re-marking. Grade concerns must be made within one week of receiving the marked quiz. Sickness and Missed Work: • • Quizzes missing one quiz— cannot take advantage of best 4 of 5; no proof of illness is required missing two or more quizzes — zero for missed work unless you complete a Petition with Faculty Office and provide appropriate supporting material for 2nd, 3rd, etc. missed quizzes. Assignments, Exam — zero for missed work unless you petition each missed event. Grade adjustment will be based on your performance in ‘related’ term work. Tutorials: • • • • • • • see schedule posted on course web page BA 2139 on Thursdays at 5:10 to 7pm - held every week for 1 to 2 hr. starting Thu. Jan 9. Tutorials are a key part of the course dealing with the application of the lecture material to various exercises. During each session your will solve problems helped by other students and, if necessary, by the tutorial leader. Being able to solve a particular problem without assistance demonstrates how far you have advanced in assimilating the concepts and teachings of the course. In particular, once you are capable of solving various problems without resorting to the textbook, your can consider that you have achieved the dynamic knowledge of the course, that is, you understand its underlying philosophy. Practice problems will be posted on the course web page about 6 days before the tutorial. Answers and part solutions will be provided during the tutorial and posted on the web page prior to the next quiz Solutions to the virtual laboratories will discussed in the tutorial Quizzes (45min) will be held during the second hour of the tutorial approximately every 2 to 3 weeks. You are encouraged to bring questions and stimulate discussions to improve your learning experience. Participate and make the tutorial work for you! Final Exam: • marked by professor and TA’s. • closed book; two-sided, 8.5 x 11, hand-written aid sheet (2 pages/4 sides), no photocopies. • no computers, no cell phones, or other electronic aids 12/31/2013 Notes on Effective Studying • Effective studying consists of taking lecture notes, active reading of the textbook, tutorial attendance and note taking, and solving various exercises on your own. • If you can, read all the relevant text material before attending the lectures on a given topic. Much of learning involves discovering how new information relates to knowledge you already possess. The more you know about a particular topic, the more likely it is that you will see how some new information fits other information. If you read the relevant text chapters before you attend the lectures on a particular topic, you will learn more from the lectures and you will be able to take better notes. Review your lecture notes soon after each lecture and proceed to read and study the corresponding text sections. • Begin studying your lecture notes by reviewing the lecture outlines. Ask yourself questions about the material; for example, ask yourself to provide definitions, to summarize the purpose, method and results of studies. • Active reading involves several steps. First, read the title, topic and subtopic headings, and the summary at the end of each chapter, in order to get an overall sense of what the chapter is about. • Read the chapter “in chunks”. The size of these chunks should be determined by natural breaks in the text, and by your ability to assimilate the material being read. Make brief notes in the margins of the text as necessary. It is inadvisable to make extensive notes from the textbook. However, it is helpful to make one or two-page summary notes per chapter showing the major headings and key concepts. • Try to relate these summaries to various problems that you attempt to solve. In general, study as if you were going to write an examination the next day. • The development of a compact organized aid sheet is intended to be a critical part of the learning process for this course. • Turn off mindless distractions: email browsers, instagram, facebook, twitter, cell phone and control your own schedule!! • Love the topic—play with your curiosity to pose questions, turn on interest, and develop into passion for the subject to pull you forward! 1/13/2014 ECE 330F - SEMICONDUCTOR PHYSICS - 2014 TUTORIAL SCHEDULE & TEACHING ASSIGNMENTS # DATE 1 2 3 4 5 Jan 9 16 23 30 Feb 6 6 13 20 27 Mar 6 13 20 27 Apr 3 10 7 8 9 10 11 12 13 TUTORIAL Assignment Thursdays 5-7pm BA2139 Due Date 6-7pm (Set #1 Soln) 5-6pm (Set #2 Soln) 6-7pm (Set #3&4 & Quiz 1 Solns) 5-6pm (Set #5 Soln) *6-7pm (Set #6 and Quiz 2 Solns) Assig 1 – Feb10 No Lectures Feb 4-6 6-7pm (Set #7 Soln) No Lectures READING WEEK 5-6pm (Set #8 Soln) Assig 2 – Mar 3 5-7pm (Set #9 and Quiz 3 Solns) 5-7pm (Set #10) 5-6pm (Set #11 Soln) 5-7pm (Set #12 and Quiz 4 Solns) 5-6pm (Set #13 Soln) 5-7pm (Set #14 and Quiz 5 Solns) Assig 3 –Apr 10 COURSE INSTRUCTORS TAs prefer appointments to be arranged by email Name Office Peter Herman GB 442 Instructor Leon Yuan GB 452 TA-tutorials Moez Haque GB 452 TA-tutorials MARKERS Assign 1 Assign 2 Assign 3 Final Exam Moez Leon Leon Prof. Herman Quiz/Lecture TA 5-6pm Lecture 6:15pm Quiz 1 5-6pm Lecture 6:15pm Quiz 2 Late start Leon Moez Leon Moez Leon 5-6pm Lecture Leon 6:15pm Quiz 3 Moez Moez Moez Moez Moez Moez Moez 6:15pm Quiz 4 6:15pm Quiz 5 Email p.herman@utoronto.ca leon.yuan@mail.utoronto.ca moez.haque@mail.utoronto.ca Quiz 1 Quiz 2 Quiz 3 Quiz 4 Quiz 5 Leon Leon Leon Leon Leon ASSIGNMENTS Three Assignments are based on computer models, observations, analysis, and assigned problems, and follow a lab like study of a topical area of the course. #1 Traveling Wavepackets Moez #2 Quantum Wells and Tunneling Leon #3 Haynes-Schockley Experiment Leon University of Toronto – P.R. Herman (Jan 7 2014) ECE 330F – Semiconductor Physics TABLE OF CONTENTS Lect. Week Topic Approximate order of topics 1. Jan 5 2. 3a. 3b. 4. Jan 15 5. 6. 7. Jan 22 8. 9. 10. 11. 12. 13 14a. 14b. 15a. 15b. 16. 17a. 17b 18. 19. 20a. 20b. 21a. Jan 29 Feb 5 Feb 12 Feb 26 Class Notes Introduction, Content, Orientation, and ‘making waves’ updates: UofT BB Portal SC and the Integrated Circuit (Reading Assignment) MATTER WAVES Branches of Physics, Traveling Waves, Differential Operators deBroglie Relations and Planck’s Postulate Wave-Particle Duality: EM Waves vs. Photons Photoelectric Effect – photon energy Compton Effect – photon momentum Dual Nature deBroglie Relations – Electron Particle vs. Electron Wave Debye-Scherrer Diffraction Bragg Reflection Duality Principle: Matter Waves vs. EM Waves Matter Waves Phase and Group Velocity Fourier Concepts: time-frequency vs. spacewavevector Heisenberg Uncertainty Principle Wavepacket Dispersion SCHROEDINGER WAVE EQUATION (SWE) Developing the Wave Theory of Matter; differential operators Schroedinger’s Wave Equation What does Ψ(x,t) tell us? Probability Density, Normalization Correspondence Principle (Expectation Values) Particle position, momentum, and energy. Eg. Particle in Box Time-Independent Schroedinger Wave Equation Wave Properties and Boundary Conditions Types of Solutions in Force-Free regions TIME-INDEPENDENT SWE: 1-D SOLUTIONS Force Free – Zero Potential Energy Step Potential Eigenfunctions E < Vo Reflection / Barrier Penetration Solution for E > Vo Reflection / Transmission Potential Barrier – Tunneling Eg. Resonant Tunnel diode, Field Emission Infinitely Deep Potential Energy Well Parity of Eigenfunctions Finite Square Potential Energy Well Eigenfunctions for Force ≠ 0 Text: Eisberg N-Neamen N-Prologue blackboard slides 3-1(intro),3-6 2-1 2-1, 2-2, 2-3 2-4 2-5 3-1 3-1 3-1 3-2 3-4 -3-3, 3-5 -5-1, 5-2(part) +pg 154 eg.5-11 5-3(part) 5-4 5-4 5-5 5-6 5-7, 6-10 6-1,6-2 6-3 6-3 6-4 6-4 6-5 Fig. 13.2,-6-8 6-8 6-7 Appx H blackboard University of Toronto – 2013 – P. R. Herman 21b. 2 Mixed(non-pure) States Tunneling Lifetime 5-8 -- TIME-INDEPENDENT SWE: 3-D SOLUTIONS 22. 23. 24a. 24b. 25a. 25b. 26. 27a. Mar 5 Mar 12 27b. 28. Force-Free 3-D Potential Well: “Cube” Density of States 1D, 2D 3-D Hydrogen Atom Overview: quantum nos., spin, periodic table QUANTUM STATISTICS (multi-particle systems) Distinguishable and Indistinguishable Particles Fermions and Bosons Boltzmann Distribution (Distinguishable) Fermi-Dirac Distribution – Inhibition Bose-Einstein Distribution – Enhancement Mar 19 Blackbody Radiation slides -britneyspears N3.4.1 -11-2 11-2 11-1 Appx. C 11-2, 11-3 11.4, N3.5.2 11-3,11-4, 11-6 11-8,1-1, 1-2,1-3,1-4 STRUCTURE OF SOLIDS 29. Free Electron Gas – Conductors, Fermi Energy 30. Thermionic emission; Contact potential Types of Solids (Reading Assignment) 11-10, 11-11 13-5 11-12 13-1, 13-2 Crystal Structure – Lattices 1.1 to 1.4,1.7 31. Mar 26 ENERGY BANDS Formation of Energy Bands in Solids 32. 33. 34a. 34b. 34c. 35. Energy-Momentum (E-k) Space – Free Electron Gas (metals) – Bandgap – periodic potential energy – Reduced Brillouin Zone Apr 2 – thermal electrons and holes Effective Mass in conduction and valence bands Electric Current Carriers: electrons and holes Direct and Indirect Bandgaps Apr 9 SEMICONDUCTORS IN EQUILIBRIUM (Intrinsic) Density of States: Conduction and Valence Band Intrinsic Semiconductors – thermally excited carriers 36. Intrinsic Carrier Density and Intrinsic Fermi Levels 37. DOPANTS (Extrinsic Semiconductors) Extrinsic Semiconductors 38. 39. Degenerate Semiconductors, Freeze Out, and Ionization Extrinsic Carrier Density, Compensation, and Fermi Levels 13-3, 3.1.1, 3.2.5 13-5 in part 13-2,13-6 13-9,13-10 3.1.3 3.2.1 3.2.3 3.2.2, 3.2.4 3.3.1 3.4.2 3.5.3, 4.1.1 4.1.2 4.1.3, 4.1.4 4.2.1, 4.2.3 4.3.1, 4.3.2 4.3.4 4.4 to 4.7 University of Toronto – 2013 – P. R. Herman 3 Topics interfacing in ECE335 Electronic Devices ECE330 has partial coverage of topics below 1. 2. 3. CARRIER TRANSPORT Drift Currents - Mobility and Conductivity Carrier Diffusion Drift and Diffusion Current Induced Field, Graded-Impurity Distribution, Einstein Relatn 4. 5. 6. Non-EQUILIBRIUM EXCESS CARRIERS Carrier Generation and Recombination Continuity Equation (Ambipolar); Minority Carriers Eg: carrier decay, reaching steady state, diffusion length Haynes-Shockley Experiment 7. The pn Junction Basic structure Zero Bias Forward and Reverse Bias 8. 9. The pn Junction Diode pn Junction Current C-V relationship, Boundary Conditions, Minority Carriers Ideal pn junction current Summary of physics 5.1 5.2 5.2.2 5.3, 5.5 Lab Notes 6.1 6.2 6.3 6.3.5 7.1 7.2 7.3 8.1 8.1.2-.4 8.1.5 8.1.6