應用物理系副教授
羅光耀
申請升等教授之代表著作及參考著作目錄
代表著作
1.
K.Y. Lo*, 2005, “Study on the Rapid Thermal Annealing Process of the
low-energy Arsenic and Phosphorous ion implanted Silicon by Reflective Second
Harmonic Generation“, Journal of Physics D: Applied Physics, 38, pp.3926-3933.
(SCI, impact factor=1.957)
參考著作
1. K.Y. Lo*, Y.L. Wang and J.D. Jin”, 2002, “The technology for Analyzing the
Conditions of Rapid Thermal Annealing (RTA) by Optical Second Harmonic
Generation”, Thin Solid Films, 420-421, pp.345-349 (SCI, impact factor=1.569)
2. K.Y. Lo*, C.Y. Huang, G.C. Hsu, H.T. Hsu and Andy Y.G. Fuh, 2003, “Study of
the Dye Doped Polymer Stabilized Cholesteric Texture films”, Jpn J. Appl. Phys.,
42, pp.3531-3534. (SCI, impact factor=1.096)
3. K.Y. Lo*, 2006, C.C. Shiah and C.Y. Huang “The actual capacitance function of
the nematic liquid crystal cell”, Japan Journal of Applid Physics, 45, pp.891-895
(SCI, impact factor=1.096)
4. K.Y. Lo*, S.C. Lo, S.Y. Chu, R.C. Chang and C.F. Yu, 2006, “Analysis of the
Growth of RF Sputtered ZnO Thin Films using the Optical Reflective Second
Harmonic Generation”, Journal of Crystal Growth, 290, pp.532-538 (SCI, impact
factor=1.681)
5. K.Y. Lo*, C.Y. Huang, T.H. Chu, C.J. Hsu, C.H. Lin and Andy Y.G. Fuh, 2006,
“Variation of nematic liquid crystal on a silver surface” Journal of Optics A: Pure
and Applied Optics, 8, pp.501-506 (SCI, impact factor=1.295)
6. Y.L.Cheng, Y.L.Wang, C.W. Liu, Y.L.Wu, K.Y. Lo, C.P. Liu and J.K. Wang,
2001,“Characterization and Relaibility of Low Dielectric Constant Fluorosilicate
Glass and silicon Rich Oxide process for Sub-0.15 Micron Device Application”
Thin Solid Films, 2001, V.398-399, pp.533-538 (SCI, impact factor=1.569)
7. J.K. Lan, Y.L. Wang, K.Y. Lo, C.P. Liu, C.W. Liu, Y.L. Wu, J.K. Wang and
C.G.Chau 2001,“Integration of MOCVD Titanium nitride with Collimated and ion
Metal Plasma titanium for 0.18 um Logic Process” Thin Solid Films, V.398-399,
pp.544-548 (SCI, impact factor=1.569)
8. C.Y Huang, K.Y. Lo and M.S. Tsai, 2003, “Bistable transflective cholesteric light
shutters”, Optics Express, 11,pp560-565. (SCI, impact factor=3.764)
9. C.S. Chen, J.T. Lue, C.L. Wu, S. Gwo and K.Y. Lo, 2003, “A study of surface and
interlayer structures of epitaxially grown group-III nitride compound films on Si(111)
substrates by Second Harmonic Generation”, J. Phys.:Condens. Matter., 15,
pp.6537-6548.(SCI, impact factor=2.145)
10. K.W.Chen , Y.L.Wang, C.P. Liu, Kevin Yang, L. Chang, K.Y. Lo, C.W. Liu , 2004,
“Evaluation of Advanced Chemical Mechanical Planarization Techniques for Copper
Damascene Interconnect” Thin Solid Film, 447-448, pp.531-536.(SCI, impact
factor=1.569)]
11. T.C. Wang, T.E. Hsieh, Y.L. Wang, Y.L. Wu, K.Y. Lo, C.W. Liu and K.W. Chen,
2004, “Copper surface protention with a completely enclosed copper structure for a
damascene process”, Thin Solid Films, 447-448, pp.542-548. (SCI, impact
factor=1.569)
12. Y.L. Cheng, Y.L. Wang, J.L. Lan, S.A. Wu, S.C. Chang , K.Y. Lo and M.S. Feng,
2004, “Optimization of Post N2 Treatment and USG Cap to Improve Metal Wring
Delamination in Deep Sub-Micron HDP-FSG IMD Application”, Journal of Vacuum
Science and Technology B, 22, pp.1792-1796. (SCI, impact factor=1.626)
13. R.C. Chang, S.Y. Chu, K.Y. Lo, S.C. Lo and Y.R. Huang, 2005, “Physical and
Structural Properties of RF Magnetron Sputtered ZnO Films” Integrated
Ferroelectrics, 69, pp.43–53. (SCI, impact factor=0.427)
14. C.Y. Huang, C.Y. Hu, H.C. Pan and K.Y. Lo, 2005, “Electrooptical Responses of
Carbon Nanotube-Doped Liquid Crystal Devices”, Japan Journal of Applid
Physics, 44, pp.8077-8081 (SCI, impact factor=1.096).
專利
1. 謝旻甫,孫嘉陽,羅光耀,蔡明祺,黃禹傑, 2004,發明專利
00594083,“方向預判式尋光對位方法”