EEL 5XXX
Introduction to Nanotechnology
Catalog Description: Nanoscale electrical, optical and magnetic device operation. Overview of
new devices enabled by nanotechnology, methods for fabrication and characterization of
nanoscale structures and devices.
Course Objectives:
(1) Understand driving forces towards nanoscale in technology of devices and systems, the
advantages and implications of scaling down devices; Just – Motivation, Social Impact.
(2) Familiarity with the application of advanced techniques needed to develop, characterize
and verify nanoscale devices: materials, fabrication and device operation.
(3) Methods of manufacture nanoscale devices and systems. Just – Standard techniques
taught are not enough to work at nanoscale.
Learning Outcomes: Students will able to describe effects of nanoscale sizes in devices;
describe manufacturing technologies at the nanoscale level, their advantages and disadvantages;
identify opportunities for nanoscaling devices; discuss specific nanoscale devices, their use and
applications.
Course Justification: Nanoscale engineering is a fundamental skill needed for future
generations of technologists to understand the world they will face. This course will review from
a device perspective the current and foreseen advances in this field.
Major Topics:
1.
Introduction to Nanotechnology - Moore's Law, Quantum Electronics
2.
Scaling Laws - Electromagnetics, Electrostatics
3.
Introduction to Physics of the Solid State
4.
Methods of Measuring Properties (Optical, Nanoscale metrology and characterization
(SPM and others), Electron Microscopy (TEM, SEM))
5.
Microelectronics and Micro/Nanofabrication, (Thin Film, Lithography)
7.
Properties of Individual Nanoparticles
8.
Carbon Nanostructures (Carbon based Fullerenes and Nanotubes)
9.
Ensembles of Nanostructured Materials, Self assembly.
10.
Nanostructured Ferromagnetism
11.
Spintronics
12.
Quantum wells, wires and dots
13.
Nanobiological devices
14.
Micro/Nanomachines
15.
Applications
Prerequisites: EEL 3303, EEL 4410, and EGN3396.
Textbook: “Introduction to Nanotechnology,” Charles Poole Jr. Frank Owens, First Edition,
Wiley-Interscience. ISBN: 0-471-07935-9.