Advanced Thin-Film Technologies for Cost Effective

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Project no.
019670
Project acronym
ATHLET
Project title
Advanced Thin Film Technologies for Cost Effective Photovoltaics
Instrument: Integrated Project
Thematic Priority 6.1.ii
Publishable Final Activity Report
Period covered: from 01.01.2006 to 31.12.2009
Start date of project: 01.01.2006
Date of preparation: 15.02.2010
Duration: 48 Month
Project coordinator name: Prof. Dr. M.-Ch. Lux-Steiner
Project coordinator organisation name: Hahn-Meitner-Institut Berlin GmbH
Revision 1
Priority 6.1.ii: FP6-2002-Energy-1
1
ATHLET
PROJECT EXECUTION ............................................................................................... 3
1.1
Objectives ............................................................................................................................................................. 3
1.2
Challenges ............................................................................................................................................................ 3
1.3
Project structure and partners ........................................................................................................................... 4
1.4
Progress within the project duration ................................................................................................................. 5
1.4.1 SPI - High Efficiency Solar Cells...................................................................................................................... 5
1.4.2 SP2 - Thin Film Module Technology ................................................................................................................ 6
1.4.3 SP3 - Chalcopyrite specific heterojunctions and TCOs .................................................................................... 6
1.4.4 SP4 - Thin film silicon large-area modules on glass ......................................................................................... 7
1.4.5 SP5 - Device analysis and modelling ................................................................................................................ 8
1.4.6 SP6 - Sustainability, Training and Mobility ...................................................................................................... 9
1.5
2
General Project Information ............................................................................................................................ 11
DISSEMINATION OF KNOWLEDGE ......................................................................... 12
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1 Project Execution
1.1 Objectives
The main objective of the project is to accelerate the decrease in the cost/efficiency ratio for thin film PV
modules towards 0.5 €/WP. It focuses on technologies based on amorphous, micro- and polycrystalline
silicon as well as on I-III-VI2-chalcopyrite compound semiconductors. The work oriented along the value
chain focuses on large area chalcopyrite modules with improved efficiencies and on the up-scaling of silicon
based tandem solar cells. This is complemented by a range of activities from the demonstration of lab scale
cells with higher efficiencies to the work on module aspects relevant to all thin film solar cells. An important
aspect is the analysis and modelling of materials, processes and devices. Accompanying sustainability
assessment gives advice to the consortium on successful implementation strategies.
1.2 Challenges
Thin film photovoltaics have a higher potential for cost effective production in the economy of scale than the
technologies on the market today. In order to benefit from this potential, production capacities must grow
faster than the established technologies. Main obstacle for a fast growth is the degree of maturity. This
concerns all aspects from the fundamentals to the industrial implementation. Accordingly, this project
addresses a range of issues. The most important scientific and technical objectives are given below:
 to improve front and back contacts in view of long-term stability, conductivity, transparency (TCO), as
well as the related deposition methods (in-line compatible technologies),
 to optimise semiconductors as well as interfaces and specific buffers aiming at stable and highly efficient
solar cells (materials engineering, source materials, deposition techniques/ parameters),
 to optimise encapsulation materials as well as processes based on glass and flexible non-glass materials
(damp/heat stability, costs),
 to develop high band gap alloys (potential of voltage increase, top cells for tandems) and explore costeffective tandem devices (technical feasibility),
 to scale up novel, cost-effective processes (quality, reliability, throughput, cost),
 to set up a new virtual EU laboratory for device analysis and modelling of solar cells, to supply
outstanding highly sophisticated and well-matched analytical methods for materials and devices and to
develop modelling tools for performance optimisation (cross-linking of analyses),
 to identify machinery requirements for production and to enable European manufacturers to improve and
supply machinery for large-area manufacturing. The focus of the process development is on throughput,
yield, quality and cost,
 to identify and solve performance-related problems arising from the rigid glass substrates as well as from
flexible substrates (physical/chemical properties, type of glass, metallic and polymeric foils, costeffectiveness),
 to identify suitable in-line compatible patterning methods for super- and substrate modules, to develop
alternative monolithic series interconnection methods (quality, throughput),
 to identify potentials for the reduction of energy consumption, material usage and waste, to develop
improvement strategies,
 to assess societal benefits and risks from large-scale technology implementations and to elaborate
strategies for a more sustainable energy supply in Europe,
 to provide training and to promote mobility for students and young scientists.
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1.3 Project structure and partners
The topics of the project are organised in six sub-projects. Two of them are mainly driven by industry
partners. Sub-project “Chalcopyrite Specific Heterojunctions” aims on the optimisation of large area CIS
modules in terms of materials and cell efficiencies, whereas suppliers for production equipment are
developing suitable machinery for large are modules based on “micromorph” technology in the sub-project
“Thin Film Silicon Large Area Modules on Glass”.
Four of the sub-projects are mainly driven by research institutions. “High Efficiency Solar Cells” aims on
efficiencies beyond the state-of-the-art for the technologies in the project. Activities comprise also new cell
concepts, i.e. tandem solar cells based on chalcopyrite materials and the use of foil substrates for flexible
solar cells. Vacuum free processes, i.e. electro-deposition for PV materials are developed and evaluated.
The sub-project “Thin Film Module Technology” focuses on module aspects. Topics are isolated substrates,
contact technologies, Encapsulation, serial interconnection and demonstration.
A wide range of optical, electrical and structural analysis techniques are provided to the consortium by the
sub-project “Device Analysis and Modelling”. Device simulations act as interpretation tools for
measurement data. The objective is to get a better understanding of the structural and chemical properties of
the cells and to provide a data base for the project.
The aim of sub-project “Sustainability, Training and Mobility” is to ensure that the work undertaken will
have a positive impact on energy production, quality of live and the environment. Beneath the socioeconomic impact, the training and mobility of the participating scientists are supported.
The consortium is composed of seven industrial partners, ten research institutes and seven partners from the
higher education. The partners reflect the different technologies in the project and they have complementary
expertise.
Helmholtz Zentrum Berlin für Materialien und Energie (HZB) acts as the co-ordinator of the project and
provides its expertise in CIS and in thin film polycrystalline silicon technology. HZB is supported by
scientists from the Freie Universität Berlin. Research on CIS technology is also domain of the Zentrum für
Sonnenenergie- und Wasserstoff-Forschung (ZSW), thin film polycrystalline silicon is in the focus at the
Interuniversity MicroElectronics Center (IMEC). A further technology present in the project is known as the
micromorphous technology – tandem solar cells based on microcrystalline and amorphous silicon. This cell
type is under research at the pioneering Ecole Polytechnique de Lausanne (EPFL), at the Forschungszentrum
Jülich (FZJ) and in part at the Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas
(CIEMAT). Flexible thin film solar cells offer advantages in application as well as in processing. Flexible
cells on basis of CIS are investigated at the Swiss Federal Laboratories for Materials Testing and Research
(EMPA). Work on vacuum free deposition processes, mainly on electro-deposition, is done at the
Photovoltaic Energy Development and Research Institute in Paris (IRDEP).
A range of complementing research partners are contributing to common and different aspects of the various
technologies. Universities of Gent (UGent), Lubljana (ULjub) and Prag (IPP) are performing device analysis
and modelling. Process modelling of PECVD reactors is done at the University of Patras (UPat).
Development of advanced module technology is important for all thin film technologies for deriving a final
product of proven quality. Energy research Centre of the Netherlands is dealing with this aspects.
University of Northumbria (UNN-NPAC) and Institute for Futures Studies and Technology Assessment
(IZT) are accessing the technologies developed in this project in terms of their socio-economic impacts.
The industrial partners are aiming on the production of advanced solar cells and modules and setting up
improved production equipment and facilities. The following partners represent the different technology
paths in the project.
AVANCIS, former Shell Solar and Sulfurcell (SCG) are producers of large area modules based on
compounds of the CIS family. Innovative upcoming products are flexible PV solar cells. They are developed
by Solarion using polymer foils as substrate. Applied Materials (AMAT) and Oerlikon Balzers are both
suppliers of production equipment for coatings. Both companies are developing PECVD systems for the
deposition of thin silicon layers. Schott Solar is known for its solar modules based on silicon wafers and
amorphous silicon. The company provides TCO-glass and selected functional layers for thin film cells and
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modules. Pre-industrial TCOs are also developed and delivered to the project partners by Saint Gobain
Recherce (SGR).
1.4 Progress within the project duration
1.4.1 SPI - High Efficiency Solar Cells
Lighttrapping was found to be most important in silicon based devices but might become a critical issue for
thinner CIGS devices as well. For this reason we studied the light trapping in all ATHLET thin film
technologies by applying the rough interfaces as source for light scattering in identical µc-Si single junction
solar cells. We revealed significant light trapping in plasma-textured polycrystalline silicon, but also severe
optical losses due to seed layer and BSF. Interestingly, light trapping was concluded to be also present in
several CIGS devices just by the intrinsically rough growth of the absorber. This conclusion is of high
importance for further developments of several thin film technologies.
At low growth temperature (<550°C) solar cells on stainless steel foil with or without diffusion barrier
reached efficiencies up to 12%. To improve cell performance further, higher temperatures are needed and
thus a diffusion barrier against Fe diffusion to the absorber is required. With a SiOx diffusion barrier layer
high efficiency ( 15 %) CIGS solar cells on stainless steel substrate were achieved by an in-line coevaporation process. The installation of closed loop control and improved evaporation sources at Solarion led
to an increase in efficiency to currently 13.4 % (confirmed by ISE Freiburg). Due to better homogeneity and
process stability also the overall process yield has been improved significantly. Additionally improved
deposition rates are feasible by new evaporation sources, but further work is needed. An electro-deposited
ZnO:Cl layer performed similarly as the sputtered ZnO:Al layers of Solarion showing the potential of electro
deposition for in-line processing of CIGS cells on foils. The CIGS tandem device development progressed in
terms of top cell transparency of 55% at cell efficiency of 9.1% and simulation tools were developed to
predict the respective tandem cell performance. Additionally, mechanically stacked tandem devices were
prepared using CIGS wide gap material as bottom cell and a-Si as top cell and further experiments are
planned.
Initial peak efficiency was 13.3 % for thick (> 3 µm bottom cell) tandem cells and 12.5% for around 2µm
total absorber thickness at the beginning of the reporting period. During the last year of ATHLET we studied
the interrelation between intermediate reflector and surface morphology of TCO, glass as well as the
intermediate reflector itself on electrical and optical cell performance. Electrical performance could be
improved by smoother surfaces, however, cell current decreased. This interrelation makes device
optimization quite difficult. On the other hand high currents close to 15 mA for transparent a-Si top and 30
mA for µc-Si single junction devices could be achieved which was identified as one major milestone for high
efficiency devices. Silicon deposition process was optimized in order to control plasma conditions and avoid
or intentionally induce short and long term drifts of the process conditions. However, cell efficiency could
not be improved further and best efficiency is still at 13.3 % though at slightly reduced absorber thickness.
Another approach on extremely thin tandem devices reduced the total process time to one half while keeping
the stabilized efficiency nearly constant (9.8 -> 9.6 %).
At the end of the third year we showed a best cell efficiency of 8.9% in the high-temperature route by
combining plasma texturing with heterojunction emitters to improve the current density and the Voc of our
cells. Progress was achieved on cell level by thinning of the seed and back surface field layer to reduce
optical losses and on module level by a new preparation procedure of solar modules which will be applied
for best solar cells in future. Unfortuantely, both approaches have not yet lead to higher efficiency of cells
and modules due to the problems with the plasma texturization reactor so light trapping was not applied. The
best cell efficiency in the high-temperature route at the end of the project is therefore still the 8.9% on
alumina substrates and 6.4% on glass-ceramic (1 cm2, active area).
The best results for solar cell in the intermediate temperature route on glass at the beginning of this reporting
period were the following:  = 3.2%, VOC = 407 mV, JSC = 11.9 mA/cm², FF = 67%. Investigation of light
trapping by plasma texturization were performed, but due to the worse grain structure of silicon on glass as
compared to the high temperature route the texturization led to shunting of the cells and inhomogeneous
absorbers. A significant improvement in Voc was achieved by plasma hydrogenation and rapid thermal
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annealing leading to Voc values of 450 mV in several experiments. However, solar cells with improved
efficiency were not achieved yet. The development of a suitable light trapping will be the major topic for
poly silicon devices in general.
1.4.2 SP2 - Thin Film Module Technology
In the first period of ATHLET, experiments on mechanical terminal contacting were performed using
various contacting options. Then the objective was to select the options most viable for practical use in
factory or at field site. Three good workable options have been identified for climate room testing: the press
connector, the SMT nut connector and the strip connector, all combined with proper junction boxes. Up to
now some significant differences appear in initial contact resistance as well as in contact resistance
degradation rate. Two new methods developed, i.e. using the press connector or the SMT nut connector,
show behavior quite better than observed for the more state-of-the-art strip connector, in particular for initial
resistance. These two are also degrading less, but longer testing time is required for a final judgment and for
discriminating between the two.
The idea of water tolerant encapsulation, originating from x-Si technology was transferred to the use for f-Si.
A particular dimension is given by the flexibility aspect; this necessarily introduces polymer encapsulants,
also at the front side, that are never water tight. The essential issue is a good functionality - cost optimization
by balancing encapsulation quality and PV technology robustness. The next step, the extrapolation for CIS
technology could not be made: it turned out that no flexible CIS technology samples could be made available
within the consortium, and thus deliverable DII.3.25 could not be realized. In order to have a comparison
anyway, an experimental evaluation has been done on rigid f-Si technology provided from the outside-SPII
partner FZJ. In this way a comparison could be made with a more robust technology in stead of with a more
vulnerable one. These activities finalized the work package.
For the development of insulating coatings on metals a detailed analysis was performed about the influence
of the thermal expansion coefficient of the substrate material, the substrate roughness, the influence of hightemperature CIGS deposition and a cleaning process between two SiOx deposition steps on the barrier
properties. As one result it became clear, that the realisation of a perfect insulation barrier with a high barrier
resistance and high breakdown voltage values becomes more and more difficult with increasing substrate
area. Nevertheless, it was possible to realise the up scaling of insulating barriers to > 300 cm2 with a high
barrier resistance and disruptive discharge voltage of > 100 kV/cm. However, occasional shunts could be
found in each of the barriers.
1.4.3 SP3 - Chalcopyrite specific heterojunctions and TCOs
From the different processes under development in SP III to replace the CdS buffer layer in a CIS-type
module, potential candidates for near-future implementation in production lines have been evaluated.
Although a significant progress has been made during the lifetime of ATHLET, different limitations and
open questions impede the direct application of the developed solutions at the end of the project:

A reliable CBD process for the deposition of Zn(S,O) layers has been developed. On Cu(In,Ga)(S,Se)2
absorbers, deposition times are at least comparable to CBD-CdS and the same kind of deposition
equipments can be applied. The highest performance of a Cd-free 30x30 cm² module within ATHLET
has been demonstrated with this technique (13.5% aperture area efficiency). On CuInS2 absorbers, the
process window for optimal device performance (7.4% peak efficiency) is not as wide as with the CdS
standard process. Metastability of the device performance and the necessity to light-soak the modules to
determine the module power are actually seen as the major hints for introduction of the CBD process in
module production.

The difference between CdS-buffered devices and devices with sputtered buffer layer on CuInS2
absorbers can be small but is believed to still be statistically significant. Both (Zn,Mg)O and Zn(O,S)
seem to perform well on cell level and monolithically interconnected module test structures. Results on
30x30 cm² were inferior (5.9% best efficiency) – but encouraging enough considering that experience
was limited to a single batch of modules. Under the assumption that the ideal case is a flat alignment, a
Mg-content of ~13% appears to be ideal. The optimal value for Cu(In,Ga)(S,Se)2 absorbers is slightly
lower, due to the lower band gap of the absorber. In the latter case, the up-scaling was already terminated
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in the third project year due to stagnation of progress. It remains unclear whether the limitation in
efficiency is of principle nature or due to technical problems in up-scaling.

An indium sulphide evaporation process for Cu(In,Ga)(S,Se)2 absorbers was successfully transferred to
a new labline evaporator with load lock and larger evaporation sources. Continuous processing over
several hours could be demonstrated with average cell efficiencies close to 12%, which is an important
requirement for industrial application. The up-scaling to 30x30 cm² was so far handicapped by
equipment limitations. Nevertheless 12.1% best efficiency value and 12% average of the best five
modules were achieved in a batch reactor, which is only slightly below the target values.

For the spray-based techniques, up-scaling of the USP method towards 10x10 cm² has been successful.
The deposition mechanism has been studied and the investigations have been expanded towards ZnS
layers. Some preliminary experiments with a first industrial ILGAR in-line machine (substrate size up to
30x30 cm²) have been performed. On the lab scale, mixed ZnS+In2S3 ILGAR layers led to inferior cell
efficiencies than pure In2S3 or stacked ZnS/In2S3 layers. Results have been compared with buffer layers
deposited by ALCVD processes.
With the new 1% doped Zn:Al target, the quality of the reactively sputtered TCO films could be
substantially improved. It was possible to achieve films with nearly identical performance like the reference
films sputtered from a ceramic target. Applied to solar modules, this resulted in 13.4% or 12.8% best module
efficiency for Cu(In,Ga)(S,Se)2 or Cu(In,Ga)Se2 absorbers respectively. Furthermore, reactive TCO coating
of a few modules with alternative Cd-free buffers was successful leading to efficiencies as high as 11.7 %
with high photocurrents, suffering only from a lower fill factor.
1.4.4 SP4 - Thin film silicon large-area modules on glass
Gen5 size (1.43m²) micromorph modules with initial output power of >150 W have been successfully
fabricated by our industrial partners AMAT and Oerlikon. This corresponds to an aperture area efficiency of
11%; given the low light-induced degradation already observed on small area cells and mini-modules
(10%), a stabilized aperture efficiency of 10% is expected (135 W modules). Note that this ambitious final
milestone was obtained at the cost of a reduction of the target deposition rate from 1 nm/s to 0.5 nm/s.
These results have been obtained on textured etched TCO for AMAT and on LPCVD ZnO for Oerlikon (now
successfully introduced in production lines). New SnO2 based TCOs were developed by SGR in the
framework of this project with some success, but remain significantly less performing than ZnO based
TCOs. The substrate costs remain a very important factor in the overall module costs and will require
substantial efforts. Nevertheless, taking into account all progresses made recently as well as potential
improvements, production cost reduction to approximately 0.5 €/Wp seems feasible in the medium term.
Fig. 1: (left) Gen5 micromorph modules fabricated by AMAT/Schott for indoor/outdoor testing at CREST
(Loughborough, UK) and (right) outdoor testing facility of Oerlikon (Trübbach, CH) with various Gen5 aSi:H and micromorph modules.
Process development on mid-size reactors (>30x30 cm2 by FZJ and EPFL) led to the fabrication of test cells
at deposition rate of 1 nm/s with initial efficiencies of up to 12%. Even though, stable efficiencies are close
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to 10%, the results are far from being sufficient for achieving such efficiency value on full size modules.
Process optimization now benefit fully from the simulation work performed by the University of Patras
which helped formulate design rules for an improved "ideal" plasma source suitable for the uniform high rate
deposition of μc-Si:H thin films. This work was complemented with the implementation of plasma
diagnostics in these reactors which permit a better process control but also to gain valuable knowledge in the
plasma processes. Further optimization of the a-Si:H cell allowed Oerlikon to obtain a World record with a
10% stabilized efficiency cell. This demonstrates that a relatively large room for improvement exists for
thin-film silicon modules.
With some delays with respect to the initial planning, several micromorph modules were fabricated and
characterized, both in indoor and outdoor conditions. Characterization of modules is still in progress and
results will be reported in coming PV conferences and in journals.
1.4.5 SP5 - Device analysis and modelling
The objectives of this sub-project are to provide links between processing parameters and materials
parameters on the one hand (by advanced electrical and optical characterisation), and between material
parameters thus obtained and solar cell characteristics on the other hand (by advanced electrical and optical
modelling). This has lead to an increased insight into the physics of the solar cell devices, to an
understanding of the performance limits of present solar cells and ultimately to strategies to improve the
cells. The analysis and modelling work of SP 5 is offered to cell makers (SP 3 and 4) and cell developers (SP
1) of ATHLET, to help them with characterising and improving their cells through the project. This subproject has dealt with solar cells of the three families (CIGS, a-Si and poly-Si).
The main work carried out, and results obtained are listed here in brief:






Materials (‘ab initio’) modelling: new numerical schemes were developed for a satisfactory
description of the dependence of the band gap Eg and band edge shifts ΔEV of indium based
chalcopyrites on the internal displacement parameter u. The relative stability of the
experimental bandgap in realistic conditions was explained quantitatively through a coupled
process between defect formation and structural relaxation.
Electrical cell modelling: realistic simulation of state-of-the art thin film solar cells was
achieved by including the effects of graded properties (all parameters, including defect
parameters), and by two-dimensional simulation of solar cells (the effects of grains, grain size
and grain boundaries).
Optical analysis and two-dimensional modelling: now also covers periodic texture at interfaces,
diffusing properties at back- or intermediate reflectors, three-dimensional optical effects in solar
cells and structures with ZnO nano-columns.
Numerical experiments (‘virtual engineering’) with the enhanced facilities of electrical and
optical solar cell modelling were applied to all three cell families:
o CIGS cells: influence of standard parameters: doping densities, defect densities and levels,
layer thickness.
o CIGS cells: parameters connected with graded properties, and parameters of
polycrystallinity (grain position, size, shape); optical and electrical simulation study of
tandem CGS/CIGS solar cells
o thin film silicon cells: back reflectors (white paint and photonic structures), intermediate
reflectors, periodic texture structures, 3-Ddesign based on TCO nanocolumns
o poly-Si cells: parameter study of optical behaviour
A final version of database of optical constants (glass, TCO, absorber layers, doped layers, back
reflector structures) is available to Athlet partners at http://pv.fzu.cz/athlet/ (password
protected).
Advanced analysis: HIKE in-depth analysis of near-surface elemental gradients in chalcopyrite
absorbers; X-ray diffraction analysis of poly-Si seed layers on glass, and comparison with
EBSD; scanning tunnelling methods (STM, STS): influence of illumination, of grain
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boundaries; Raman analysis of CIGSSe absorber materials (S/Se ratio) and buffer materials;
SEM/EBIC study on polycrystalline solar cells.
semiconductor
equations
Poisson, continuity of n
and p, current,
recombination,
generation
crystal
structure
materials
modelling
first
principles
quantum
mechanics
…
DFT
GW
…
electronic material
properties
Eg, , NA, ND , Nt , Et,
…
electrical
device
modelling
full
electro-optical
modelling
layer stack, thicknesses,
roughness, …
electrical
optical
structural
physical-chemical
… (WP 19 ) …
optical material
properties
n(), (), (), …
, Jsc, Voc , FF
QE(), C-V, C-f, …
SCAPS
ASPIN
…
device structure
measurement and
characterisation
solar cell properties
optical device
modelling
SunShine
CELL
…
(simplifying
assumptions)
solar cell optics
R(), T(), A()
G(x,) …
optical equations
geometrical optics, waveoptics, …
Schematics of the work in SP5 of ATHLET: the relations between the three types of modelling
performed in WP18 (materials modelling, electrical modelling and optical modelling), and the
relation between WP18 and WP19. Not that this scheme emphasises the modelling work, and
underexposes the characterisation work.
1.4.6 SP6 - Sustainability, Training and Mobility
The advantages of thin film approaches for photovoltaic modules relate to both cost and environmental
impact, as a result of lower material requirements and lower cost manufacturing processes than for the
crystalline silicon approach. Sub-project 6 has supported the technical developments within the Athlet
project by considering both sustainability and environmental impact issues for the processes developed and
by considering the market drivers governing the future market share of thin film photovoltaics. This subproject also addresses training aspects, particularly in regard to researcher exchange and the organisation of a
summer school.
In the early part of the project, WP20 provided an overview of the environmental issues associated with the
processes being investigated in the Athlet project and developed an Environmental Screening Tool for
researchers to gain a rapid insight into both the environmental impacts and health and safety issues for
candidate materials in PV device processing. This was intended to aid their decision making process. In the
final year of the project, an environmental impact assessment has been completed for three selected
processes from the Athlet research portfolio, where the advances reflect different case studies for the
environmental assessment process. This was also in response to a recommendation from the external
assessors for the project. Most environmental impact analyses are carried out for fully developed production
processes, but their use earlier in the development programme can identify the most important process
parameters in regard to environmental impact. This then informs the decisions on research directions and,
potentially, reduces the time between the research laboratory and the manufacturing line.
The analyses were carried out for three processes, one from each of the CIGS and thin film Si research areas
and one that is relevant to both areas. Laboratory scale process parameters were scaled up to production level
and a sensitivity analysis was carried out to determine which parameter was most influential in regard to
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environmental impact factors. A detailed report has been produced and only the summary results will be
considered here. For plasma texturing of thin film silicon absorber layers, developed at IMEC, the most
important parameter is material utilisation since the process uses sulphur hexafluoride which has a very high
global warming potential. For the range of parameters considered, the addition of the texturing step should
result in a reduction of overall environmental impact per unit output provided that the performance
improvement seen in the laboratory is maintained through to production. However, careful control of the
handling of the gas is required to achieve this. The off-line process for TCO deposition, developed by Saint
Gobain Recherche, gives slightly lower impacts than the on-line process, where the assumed yield is the
dominant factor, but the overall impacts of this step are only around 3% of the overall impact of the module
production. In the third case study, the deposition of the indium sulphide buffer layer for CIGS cells gave
slightly higher impacts than the conventional cadmium sulphide buffer layer but this was shown to be related
to the technique used. The analysis did not include assessment of the emission of heavy metals, which is the
main motivation for replacing the cadmium sulphide. However, the analysis shows that the process
parameters should be carefully considered as the indium sulphide deposition is developed further. Again this
step represents only a small proportion of the overall environmental impact of the CIGS module production.
The environmental impact studies in WP20 have developed a methodology for considering these impacts at
the research stage, so the information can be used alongside technical and economic data to determine the
best routes for further development. This has been illustrated with three case studies from advances made in
ATHLET and all objectives of the work package have been achieved.
In WP21, the factors influencing market share of thin film technologies have been investigated in order to
provide an insight into strategic decisions in thin film manufacturing. Following on from the identification of
the key drivers in previous work, two scenarios, “Diversity Rules” and “Size Matters”, have been
constructed to reflect different possible developments of the market. In the former, PV applications are small
and diverse with building integration and rooftop systems dominating. A wide range of product is required.
In the latter scenario, PV systems are large in scale, mainly multi-megawatt installations of large industrial
roofs or ground mounted. The required product is standardised and manufactured in large volume. The
scenarios do not predict what the market will be, but give two different options for what the future market
could look like.
Unlike many other studies developing market scenarios, the work here has considered drivers that might be
expected to influence not only the uptake of photovoltaics but also the market share for thin film products.
Therefore, the two scenarios differ in terms of the nature of the market but not its size. The assessment of the
scenarios considers the implications in terms of the nature of module production and specifically whether the
separation of cell and module production could be beneficial for some market segments. The report includes
a technology assessment that also considers possible bottlenecks in production of some PV module types due
to shortages of certain materials (e.g. indium, gallium, tellurium). Attention to the minimising of material
requirements and recycling issues is recommended and this conclusion agrees with the results of the
environmental impact assessment in WP20, where the material utilisation was a key parameter in regard to
the impacts.
The future market structure is dependent on market development strategies, including not only those aimed
at photovoltaics but also those that address energy delivery (e.g. development of the electricity grid) and
other energy technologies. PV producers can use the scenarios to test the robustness of their company
strategy and technology development plans to market structure to ensure that they are best placed to capture
a significant market share for thin film technologies.
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1.5 General Project Information
Contract no: 019670
Title: Advanced Thin Film Technologies for Cost Effective Photovoltaics - ATHLET
Start Date: January, 2006
Duration: 48 months
Contact point:
Martha Lux-Steiner
Tel: +49-30-8062-2462
Fax: +49-30-8062-3199
lux-steiner@helmholtz-berlin.de
Internet: www.ip-athlet.eu
Partners:
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (D)
Applied Materials GmbH & Co. KG (D)
Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas (ES)
Centre National de la Recherche Scientifique (F)
Energy research Centre of the Netherlands (NL)
Swiss Federal Laboratories for Materials Testing and Research (CH)
Forschungszentrum Jülich GmbH (D)
Interuniversity MicroElectronics Center (B)
Fyzikalni ustav Akademie ved Ceske republiky (CZ)
Institut für Zukunftsstudien und Technologiebewertung gGmbH (D)
SCHOTT Solar GmbH (D)
Universiteit Gent (B)
Sulfurcell Solartechnik GmbH (D)
Saint-Gobain Recherche (F)
AVANCIS GmbH & Co. KG(D)
Solarion AG (D)
Oerlikon Balzers AG (FL)
Ecole Polytechnique Fédérale de Lausanne (CH)
University of Northumbria at Newcastlev(GB)
University of Patras (GR)
Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg (D)
University of Ljubljana, Faculty of Electrical Engineering (SLO)
Freie Universität Berlin (D)
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2 Dissemination of Knowledge
Publications of the first period
[101, 7, 8, 13, 14, 16, 19, 22, 27, 248, 46, 50, 51, 64, 65, 74, 75, 79, 88, 96, 97, 109, 110, 113, 116, 124, 137,
138, 147, 148, 149, 146, 153, 167, 176, 194, 195, 199, 201, 245, 259, 260]
Publications of the second period:
[76, 209, 214, 218, 17, 11, 9, 21, 63, 62, 84, 89, 85, 119, 161, 163, 160, 200, 217, 231, 244, 90, 78, 254, 91,
157, 47, 105, 108, 95, 48, 103, 52, 227, 102, 228, 100, 198, 128, 246, 127, 258, 139, 261, 40, 37, 140, 251,
170, 181, 41, 169, 151, 131, 2, 15, 1, 34, 267, 268, 6, 28, 172, 235, 150, 252, 192, 249, 250, 211]
Publications of the third period:
[210, 213, 215, 219, 223, 121, 10, 92, 118, 162, 202, 238, 130, 57, 43, 36, 26, 25, 243, 111, 106, 107, 99,
158, 49, 239, 242, 83, 104, 82, 180, 141, 38, 135, 55, 174, 175, 24, 263, 270, 67, 66, 81, 177, 33, 236, 230,
193, 125, 126, 179, 73, 207, 225, 29, 54, 255, 171]
Publications of the fourth period:
[183, 3, 5, 4, 12, 18, 20, 23, 31, 32, 30, 35, 39, 42, 44, 45, 53, 56, 59, 58, 60, 68, 71, 233, 69, 70, 72, 77, 80,
86, 87, 114, 112, 117, 115, 120, 122, 123, 129, 132, 133, 134, 142, 136, 143, 144, 145, 152, 155, 154, 156,
159, 164, 165, 166, 168, 173, 178, 182, 186, 187, 185, 184, 188, 189, 190, 191, 61, 196, 197, 203, 204, 206,
208, 205, 212, 216, 222, 221, 220, 226, 224, 229, 232, 234, 237, 240, 241, 247, 94, 93, 98, 253, 257, 256,
262, 264, 265, 266, 269, 271]
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variety ofelectronically active thin films (sillicon, carbon, organics). Thin Solid Films, accepted for
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[246] M. Vanecek and A. Poruba.
Fourier transform photocurrent spectroscopy applied to a broad
variety. Thin Solid Films, 515:7499–7503, July 2007.
[247] M. Vanecek, A. Poruba, Z. Remes, J. Holovsky, A. Purkrt, O. Babchenko, K. Hruska, J. Meier, and U.
Kroll. Five roads towards increased optical absorption and high stable efficiency for thin film silicon
solar cells. In Proceedings of the 24th European Photovoltaic Solar Energy Conference, pages 2286–
2289, Sylvensteinstr. 2, September 2009. WIP-Renewable Energies.
[248] A. č, J. Malmstr¨c.Campa, J. Krˇom, M. Edoff, F. Smole, and M. Topič The potential of textured front
ZnO and flat TCO/metal back contact to improve optical absorption in thin Cu(In,Ga)Se2 solar cells. In
presented at the European Materials Research Society Conference (Symposium O: Thin film
chalcogenide photovoltaic materials), E-MRS, Nice, France, may 29 june 2; Accepted for publication in
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[249] A. Campa, J. Krˇč, F. Smole, and M. Topič. HIT solar cell simulations with ASPIN2. In Proceedings
of NUMOS (Int. Workshop on Numerical Modelling of Thin Film Solar Cells), pages 247–48, Gent,
Belgium, March 2007. Academia Press.
[250] A. Campa, G. Cernivec, S. Schleussner, J. Krč, M. Edoff, and M. Topič. Potential of optical
improvements of the back contact in thin Cu(In,Ga)Se2 solar cells. In Proc. 22nd PVSEC, pages 1863–
66, Milan, Italy, 2007.
[251] G. Cernivec, M. Burgelman, F. Smole, and M. Topič. Investigation of the electronic properties of the
recombination heterointerface in CGS/CIGS monolithic tandem solar cell. In Proceedings of NUMOS
(Int. Workshop on Numerical Modelling of Thin Film Solar Cells, Gent (B), 28-30 March 2007, pages
297 – 309. Academia Press, Gent, March 2007.
[252] G. Cernivec, M. Burgelman, F. Smole, and M. Topič. Investigation of the electronic properties of the
recombination heterointerface in CGS/CIGS monolithic tandem solar cell. In Proceedings of NUMOS
(Int. Workshop on Numerical Modelling of Thin Film Solar Cells), pages 297–309, Gent, Belgium,
March 2007. Academia Press.
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ATHLET
[253] S. Venkatachalam, D. Van Gestel, I. Gordon, G. Beaucarne, and J. Poortmans. Defect study of
polycrystalline-silicon seed layers made by aluminum induced crystallization. Materials Research
Society Symposium Proceedings, 1153:A16–02, 2009.
[254] R. Verma, D. Bremaud, S. Buecheler, S. Seyrling, H. Zogg, and A. N. Tiwari. Physical Vapor
Deposition of In2S3 Buffer on Cu(In,Ga)Se2 Absorber: Optimization of Processing Steps for Improved
Cell Performance. In Proceedings of the 22nd European Photovoltaic Solar Energy Conference. WIP, 9
2007.
[255] R. Verma, S. Bücheler, A. Chirila, S. Seyrling, J. Perrenoud, D. Güttler, D. Bremaud, C. J. Hibberd, H.
Zogg, and A. N. Tiwari. Cu(In,Ga)Se2 Solar Cells with In2S3 Buffer Layers grown by Vacuum
Evaporation and Chemical Spray Methods. In Proc. 23rd PVSEC, 2008.
[256] R. Verma, A. Chirila, D. Güttler, J. Perrenoud, S. Buecheler, S. Seyrling, P. Mandaliev, A.
Weidenkaff, and A. N. Tiwari. Proc. 24th european photovoltaic solar energy conference and exhibition
hamburg, germany. 2009.
[257] R. Verma, A. Chirila, D. Güttler, J. Perrenoud, S. Buecheler, S. Seyrling, P. Mandaliev, A.
Weidenkaff, and A.N. Tiwari. Flexible Cu(In,Ga)Se2 solar cells with In2S3 buffer layer. In Proc. 24th
European Photovoltaic Solar Energy Conference and Exhibition, September 2009.
[258] J. Verschraegen and M. Burgelman. Numerical modeling of intra-band tunneling for heterojunction
solar cells in SCAPS. In J.-F. Guillemoles, T. Nakada, R. Noufi, A. Tiwari, and H.-W. Schock, editors,
E-MRS Symposia Proceedings: Thin Film Chalcogenide Photovoltaic Materials, Amsterdam, 2006. EMRS, Elsevier.
[259] J. Verschraegen and M. Burgelman. Numerical modeling of intra-band tunneling for heterojunction
solar cellsin SCAPS. In J.-F. Guillemoles, T. Nakada, R. Noufi, A. Tiwari, and H.-W. Schock, editors,
E-MRS Symposia Proceedings: Thin Film Chalcogenide Photovoltaic Materials, Amsterdam, 2006. EMRS, Elsevier.
[260] J. Verschraegen, S. Khelifi, M. Burgelman, and A. Belgachi. Numerical modeling of the impurity
photovoltaic effect (IPV) in SCAPS. In J. Poortmans, H. Ossenbrinck, E. Dunlop, and P. Helm, editors,
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D.), pages 396–399, München, 9 2006. WIP.
[261] J. Verschraegen, S. Khelifi, M. Burgelman, and A. Belgachi. Numerical modeling of the impurity
photovoltaic effect (IPV) in SCAPS. In J. Poortmans, H. Ossenbrinck, E. Dunlop, and P. Helm, editors,
Proceedings of the 21st European Photovoltaic Solar Energy Conference (4-8 September 2006,
Dresden, D.), pages 396–399, München, 9 2006. WIP.
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[263] B. Vogler, J. Kerschbaumer, H. Kuhn, and A. Mark et al. TCO 1200 OC Oerlikon production tool for
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[264] K. Wilchelmi, D. Förster, A. Neisser, and R. Schomäcker. Kinetic studies of cds formation for a better
understanding of chemical buffer layer deposition. In Proc. of MRS spring meeting ”Thin Film
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[265] N. Wyrsch, A. Billet, G. Bugnon, M. Despeisse, A. Feltrin, F. Meillaud, G. Parascandolo, and C.
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[266] H. Zachmann, S. Puttnins, F. Daume, A. Rahm, K. Otte, R. Caballero, C. Kaufmann, T. Eisenbarth,
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Spring meeting, volume accepted for publication -available on line 16/12/2007, Strasburg, France,
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[268] X. D. Zhang, F. R. Zhang, E. Amanatides, D. Mataras, and Y. Zhao. Modeling and experiments of
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Dissemination Overview table:
Planned/
actual
Dates
01/2008
01/2008
02/2008
03/2008
03/2008
03/2008
04/2008
04/2008
Type
Conference Thin Solid
Films
ATHLET GA
Conference ETSF
Conference Quantsol
MRS Spring Meeting
Conference Semicon China
PV
Workshop NANOMAT
Conference by the Society
of Vacuum Coaters
Conference E-MRS
Type of audience
Countries
addressed
Size of
audience
Research
All
300
Partner
responsible
/involved
FZJ
Research
Industry / Higher
Education
Research
Research
Industry
European
France
100
20
HZB, FU
CNRS
All
All
All
70
150
>1000
CNRS
IMEC, ULjub
OERLIKON
All
All
100
1000
HZB
OERLIKON
Research
Research /
Industry
Research
All
1000
All
300
All
300
05/2008
05/2008
05/2008
06/ 2008
06/2008
07/2008
09/2008
09/2008
Conference IEEE PVSEC
EMRS Spring Meeting
Conference ICCG
Thin Film Industry Forum
Intersolar America
Conference
International Conference
on
Microelectronics,
Devices and Materials
Conference EUPVSEC
HZB, FU, IRDEP,
AVANCIS, ETHZ,
UGent
IPHT, IMEC
Research
Industry
Research
/
Research
Industry
Industry
Industry
Research
Industry
Research
Industry
/
All
1000
IMEC,
HZB,
ETHZ, AVANCIS
FZJ, SGR
/
All
All
All
>500
>1000
300
OERLIKON
OERLIKON
HZB, FU
/
European
100
ULjub
Research
Industry
/
All
400
HZB, FUB, ETHZ,
FZJ,
UGent,
AVANCIS,
OERLIKON,
UniNE, UPat
09/2008
ATHLET – publishable final activity report page 30 of 32
15/02/2010
Priority 6.1.ii: FP6-2002-Energy-1
Planned/
actual
Dates
09/2008
10/2008
11/2008
11/2008
12/2008
01/2009
01/2009
01/2009
02/2009
03/2009
03/2009
03/2009
04/2009
04/2009
04/2009
05/ 2009
05/2009
06/2009
06/2009
07/2009
07/2009
08/2009
09/2009
Type
Conference PSE 2008
Solar Power Conference
Workshop Thin Film Solar
Cells
Conference talk (A look
inside solar cells, EMPA)
Conference,
Bessy-User
Meeting
PVSEC 18, Kolkata, India
SOLARCON Korea 2009,
Seoul, Korea
Clean Tech Summit, Palm
Springs, USA
PVExpo2009,
Tokyo,
Japan
PV Tech 2009 (Photon),
Munich, Germany
SOLARCON China 2009,
Shanghai, China
Deutsche
Physikalische
Gesellschaft,
Dresden,
Germany
Conference (MRS spring
meeting 2009)
2nd
International
Workshop upon Thin Film
Silicon Solar Cells, Berlin,
Germany
1st Intern. Workshop on the
Staebler-Wronski Effect
SNEC PV Power Expo
2009, Shanghai, China
Intersolar,
Munich,
Germany
Conference
(E-MRS 2009 Spring)
Intersolar,
Munich,
Germany
SMET
USA
(Solar,
Materials, Equipment &
Technology Conference),
San Francisco, USA
Conference
(34th IEEE PVSC)
MIDEM 2009
45th International
Conference on
Microelectronics, Devices
and Materials
Workshop on Advanced
Photovoltaic Devices and
Technologies
Conference
ATHLET
Research
Industry
Industry
Research
Industry
Research
/
All
600
Partner
responsible
/involved
HZB, OERLIKON
/
All
Switzerland
>2000
50
OERLIKON
ETHZ
All
40
ETHZ
Research
Industry
Research/
Industry
/
All
500
HZB
Countries
addressed
Type of audience
Size of
audience
All, Asia
>300
Oerlikon
Industry
All, Asia
>500
Oerlikon
Industry
All
>500
Oerlikon
Industry
All, Asia
>1000
Oerlikon
Industry
All
>500
Oerlikon
Industry
All, Asia
>1000
Oerlikon
Research
Germany
>1000
Oerlikon
Scientific
International
IMEC, HZB, SCG,
EPFL
Research
All
>100
Oerlikon
Research
All
>100
Oerlikon
Industry
All
>1000
Oerlikon
Industry
All
>1000
Oerlikon
Research
international
300
Industry
All
>2000
Industry
All
>500
Research
international
general microelectronics
research
community, but
for the workshop:
the chalcopyrite
PV research
community
Research
all
international
ATHLET – publishable final activity report page 31 of 32
300
HZB,ECN, IMEC,
UGent, Oerlikon
Oerlikon
Oerlikon
HZB, IMEC
200
3000
UGent, ULjub
HZB,
AVANCIS,
15/02/2010
Priority 6.1.ii: FP6-2002-Energy-1
Planned/
actual
Dates
Type
ATHLET
Countries
addressed
Type of audience
Size of
audience
(24. EUPVSEC)
09/2009
09/2009
11/2009
12/2009
2010
2010
2010
Gadest conference, Berlin
Solar Power International
2009, Anaheim, USA
19th PVSC, Jeju, South
Korea
OTTI, TCO Workshop,
Ulm Germany
EMRS 2010 Conference,
Strasbourg
EU PVSEC-25 Conference,
Valencia
Publication in Thin Solid
Films
Research
international
Industry
Research
All
>500
international
Industry
All
Partner
responsible
/involved
SCG, ECN, FZJ,
Oerlikon,
IPP,
EMPA
IMEC
Oerlikon, EPFL
IMEC
>100
Oerlikon
Research
World
>1000
ZSW
Research & PV
Industry
World
>3000
ZSW
Research
ATHLET – publishable final activity report page 32 of 32
ZSW
15/02/2010
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