Tanabe Sugano diagram for Mn doped ZnO Nano Thin Films
grown by SILAR method for Gas Sensing
S.Balamurali 1, R.Chandramohan 2, N.Suryamoorthy 3 ,P.Parameswaran 4 , and
T.Mahalingam5
1. Department of Physics,HINDUSTHAN COLLEGE OF ENGINEERING &
TECHNOLOGY, Coimbatore – 32
1. Department of Physics, Manonmaniam Sundaranar University, Tirunelveli, Tamil
Nadu, India
2. Department of Physics, Sree Sevugan Annamalai College, Devakottai, Tamil Nadu,
India
3. Reactor Operations Division, IGCAR, Kalpakkam, Tamil Nadu, India
4. Department of Material Science, IGCAR, Kalpakkam, Tamil Nadu, India
5. Department of Physics, Karunya University, Coimbatore, Tamil Nadu, India
E-Mail Id: Balamuraliphd82@gmail.com
Mn doped ZnO thin films were prepared by Successive ionic layer adsorption and
reaction method (SILAR). The prepared films were annealed and characterized using Xdiffraction (XRD), Scanning Electron Microscopy (SEM) and UV studies. XRD spectra
revealed that the films are polycrystalline in nature with hexagonal structure with the
preferential orientation along (002). Annealing in air at various temperatures results in
small variations of compositions and the morphology of the films are due to the grains of
different shapes that vary from spherical shape to rod like structure. From the UV spectra
the Tanabe- Sugano diagram were drawn for the various compositions. The Tanabe–
Sugano diagram analysis were compared with spectroscopic data. The studies revealed
that better sensors may be fabricated with these low cost fabricated nano thin films.