IEE 591 DOE/SPC for Semiconductor Processing
Spring 2000
Week
Date
1/18
Lecture Topics


Course overview/review of syllabus/student information
Role of statistics in engineering (1-1 through 1-5)

Data summary and presentation and random variables (rv’s)
(2-1 through 3-2)
Probability, probability density functions of continuous rv’s, and the
normal distribution (3-3 through 3-5)
1
1/25

2

2/1
3


2/8

Probability plots, probability mass functions of discrete rv’s, and the
binomial distribution (3-6 through 3-8)
Poisson and exponential distributions
Correlation and independence, random sampling, and the central limit
theorem (CLT) (3-9, 3-11 and 3-12) Note: skip 3-10
Statistical inference, point estimation, and hypothesis testing, inference
on the mean of a population for the variance known (4-1 through 4--4)
4

2/15

5
6

Inference on the mean of a population for the variance unknown,
inference on the variance of a normal population
Inference on a population proportion, review summary table of inference
procedures for a single sample (4-5 through 4-7)
Inference for a difference in two means with known and unknown
variances, variances of two normal populations, two population
proportions, and review summary table for two-sample inference
procedures, paired t-test (5-1 through 5-7)
Midterm Exam
Analysis of variance (ANOVA) for more than two means (5-8)
2/22
2/29


3/8
Introduction to empirical models and least squares estimation - simple
linear regression (6-1 through 6-2.1)
Multiple linear regression, properties of least squares estimators and
estimation of variance, and hypothesis testing for significance of
regression (6-2.2 through 6-5)
7
8

3/14
Predicting new observations and assessing the adequacy of regression
models (6-6 and 6-7)
Spring break
Week
Date
Lecture Topics
3/21

Introduction of design of experiments (DOE) and the 2k factorial design
(7-1 through 7-4.1)
3/28


Beavis and Butthead videotape
22 and 2k designs for k  3 factors (7-4.2 through 7-5)
4/4


Single replicate of a 2k design (7-6)
Addition of center points to a 2k design (7-7), blocking, fractional
replication of a 2k design (7-8 and blocking material)
4/11
4/18



Response surface methods (7-9)
Midterm Exam
Introduction to statistical process control (SPC)

Control charting, and the X  R control chart (8-1 through 8-5)
Rational subgroups, control charts for individuals (8-6)
9
10
11
12
13
14
4/25
15
5/2

5/9
1

Process capability (8-7)
Attribute control charts (8-8)
Last class May 2
Control chart performance and special topics (8-9)
Final Exam Tuesday, May 9, 4:40-6:30
Students are responsible for reading designated chapter sections (as noted in
parentheses) ahead of applicable lecture - topics/dates are subject to adjustment as
semester progresses.