Nanoscale scratching of platinum thin films using atomic force microscopy with DLC
tips
馬廣仁,Xiaohong Jiang,Guoyun Wu,Zuliang Du,Jun-ichi Shirakashi,Ampere A.
Tseng
Ph.D. Program in Engineering Science
Engineering
ma600229@ms17.hinet.net
Abstract
Atomic force microscopy experiments were conducted to investigate the scratching
characteristics of platinum thin-films for making microscale or nanoscale structures.
The wear behavior of the diamond-like-carbon coated tip used was first studied to
quantify the wear rate for scratching Pt films. The influences of the scratching
parameters on the resulting geometries were then investigated. The scratching
parameters to be considered included the applied tip force, number of scratch cycles,
and scratch speed. All results indicated that the scratched groove size could be well
correlated with and precisely controlled by the applied force and the scratch cycle
number. With the aid of the correlation parameters and the known tip wear rate, the
scratched geometry can be better controlled and fabricated. The associated
scratchability, which is a measure of the easiness of the material to be removed by
scratching, can also be determined.
Keyword：Nanoscale scratching;atomic force;DLC;platinum thin films