Publication List Çetin Çetinkaya August 5, 2013 Publication List Çetin Çetinkaya Professor, ASME Fellow Dept. of Mechanical and Aeronautical Engineering Dept. of Electrical and Computer Engineering Clarkson University, Potsdam, NY 13699-5725 cetin@clarkson.edu Phone: (315) 268-6514 Cell: (315) 276-8051 Publications: Refereed Journal Articles H-index: Articles Published or Accepted/In Press: Fax: (315) 268-6695 12 71 Articles Published or Accepted/In Press 71. Viscoelastic Characterization of Granular Pharmaceutical Compacts, A. Saeedi Vahdat, James D. Stephens, Bruno C. Hancock, Cetin Cetinkaya, the International Journal of Pharmaceutics, Vol. 454, pp. 333– 343, 2013. 70. A Conceptual Framework for the Development of a Course in Nano/Micro-Scale Systems Engineering, Cetin Cetinkaya, Ian I. Suni, S. Andreescu, M. B. Esch, W. Cui, D. J. Jones, S. Jones, G. S. Chojecki, James D. Stephens, and Armin S.Vahdat, In Press for publication in Journal of Nano Education, January 15, 2013. 69. Application of piezoelectric actuation to regularize the chaotic response of an electrostatically actuated micro-beam, S. Azizi, M. Ghazavi, S. E. Khadem, G. Rezazadeh, and C. Cetinkaya, Nonlinear Dynamics, Vol. 73, March 14, 2013. 68. Ultrasonic real-time in-die monitoring of the tablet compaction process—A proof of concept study, J. D. Stephens, B. R. Kowalczyk, B. C. Hancock, G. Kaul, C. Cetinkaya, International Journal of Pharmaceutics, Vol. 442 (1-2), 2013. 67. Wireless Electromagnetic Transmission of Ultrasonic Waveforms for Monitor Drug Tablet Properties, J. D. Stephens, M. V. Lakshmaiah, C. Cetinkaya, International Journal of Pharmaceutics, Vol. 442 (1-2), 2013. 66. Nonlinear Dynamics of Adhesive Micro-spherical Particles on Vibrating Substrates, A. Saeedi, S. Azizi, and C. Cetinkaya, the Journal of Adhesion Science and Technology, November 11, 2012. 65. Doubling of Rocking Resonance Frequency of an Adhesive Microparticle Vibrating on a Surface, A. Saeedi Vahdat, S. Azizi, and C. Cetinkaya, Applied Physics Letters, Vol. 101, No. 10, 2012. 64. Laser Induced Plasma Exposure on Extreme Ultra-Violet Lithography Masks: Damage Analysis, I. Varghese and C. Cetinkaya, the IEEE Transactions on Semiconductor Manufacturing, Vol. 25, No. 4, pp. 630 - 637, 2012. 63. Thermoelastic Damping in a Micro-beam Resonator using Modified Couple Stress Theory, G. Rezazadeh, A. S. Vahdat, S. Tayefeh-rezaei, C. Cetinkaya, Acta Mechanica, Vol. 223, No. 6, 2012. 1 of 16 Çetin Çetinkaya Publication List August 5, 2013 62. Persistent Rocking Motion of Acoustically Excited Microparticles on Flat Surfaces, S. Miraskari, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 26, No. 10-11, 2012. 61. Acoustic Assessment of Mean Grain Size in Pharmaceutical Compacts, C. Smith, J. D. Stephens, B. Hancock, C. Cetinkaya, the International Journal of Pharmaceutics, Vol. 419 (1-2), pp. 137-46, October 31, 2011. 60. Real-Time In-Die Compaction Monitoring of Dry-Coated Tablets, International Journal of Pharmaceutics, J. Liu, J. D. Stephens, B. R. Kowalczyk, C. Cetinkaya, Vol. 444, No. 1-2, 2011. 59. Adhesion Properties of Nanoparticle-Coated Emulsion Aggregation Toner, H. Zhang, W. Ding, K. Law, Cetin Cetinkaya, Powder Technology, Vol. 208, Issue 3, 582-589, 2011. 58. Non-Contact Rolling Bond Stiffness Characterization of Polyvinylpyrrolidone (PVP) Particles, I. Akseli, M. Miraskari, H. Zhang, W. Ding, and C. Cetinkaya, Journal of Adhesion Science and Technology – Special Issue for Pharmaceutical Science, Pharmacology and Related Disciplines (Invited), 25, 4-5, 407-434, 2011. 57. Mechanical and Geometric Property Characterization of Dry-coated Tablets with Contact Ultrasonic Techniques, J. Liu and C. Cetinkaya, the International Journal of Pharmaceutics, 392, 1-2, 148-155, 2010. 56. Effects of Nanoparticle Coverage on the Adhesion Properties of Emulsion Aggregation Toner Particles, H. Zhang, W. Ding, and C. Cetinkaya, the Journal of Imaging Science and Technology, Vol. 54, No. 2, pp.1-7, 2010. 55. Mechanical Property Characterization of Bilayered Tablets using Nondestructive AirCoupled Acoustics, I. Akseli, D. Dey and C. Cetinkaya, 11, 1, 90-102, AAPS PharmSciTech, January 9, 2010. 54. Effects of Surface Additive Nanoparticles on Adhesion of Emulsion Aggregation Toner, X. Tong, W. Ding, and C. Cetinkaya, the Journal of Adhesion Science and Technology, Volume 24, Number 2, 2010. 53. Nondestructive Determination of Anisotropic Mechanical Properties of Pharmaceutical Dosage Forms, I. Akseli, B. Hancock, and C. Cetinkaya, International Journal of Pharmaceutics, 377, 35-44, 2009. 52. Spherical Nanoparticle-Substrate Adhesion Interaction Simulations Utilizing Molecular Dynamics, M.D. Murthy Peri and C. Cetinkaya, the Journal of Adhesion Science and Technology, Vol. 23, No. 13-14, pp. 1723-1738, 2009. 51. Onset of Material Alterations due to Laser Induced Plasma Exposure in Nanofilms Deposited on Photomasks, I. Varghese, D. Zhou, M. D. M. Peri and C. Cetinkaya, IEEE Transactions on Semiconductor Manufacturing, Vol. 22, No. 4, 2009. 50. Ultrasonic Determination of Young’s Moduli of the Coat and Core Materials of a Drug Tablet, I. Akseli, D. Becker, and C. Cetinkaya, the International Journal of Pharmaceutics, Vol. 370, 2009. 2 of 16 Çetin Çetinkaya Publication List August 5, 2013 49. Acoustic Testing and Characterization Techniques for Pharmaceutical Solid Dosage Forms, I. Akseli and C. Cetinkaya, the Journal of Pharmaceutical Innovation, Vol. 3, No. 4216-226, 2008. 48. Rolling Resistance Moment-Based Adhesion Characterization of Microspheres, W. Ding, H. Zhang and C. Cetinkaya, the Journal of Adhesion, Volume: 84, Issue: 12 pp. 996-1006, 2008. 47. Computational modeling of nano-structured glass fibers, A Alavinasab, R Jha, G Ahmadi, C. Cetinkaya and I. Sokolov, Computational Material Science, Volume: 44 Issue: 2 Pages: 622-627, 2008. 46. Real-Time Acoustic Elastic Property Monitoring of Drug Tablet Cores during Compaction, Ilgaz Akseli, Christopher Libordi and C. Cetinkaya, Journal of Pharmaceutical Innovation, Vol. 3, No. 2, 2008. 45. Non-destructive Acoustic Defect Detection in Drug tablets, I. Akseli, G. N. Mani, and C. Cetinkaya, the International Journal of Pharmaceutics, Vol. 360, pp.65–76, 2008. 44. Air-Coupled Non-contact Mechanical Property Determination of Drug Tablets, I. Akseli, C. Cetinkaya, the International Journal of Pharmaceutics, Vol. 359, Issues 1-2, pp. 25-34, 2008. 43. Multi-mode Air-Coupled Excitation of Micromechanical Structures, C. Cetinkaya, L. Ban, G. Subramanian, I. Akseli, IEEE Transactions on Instrumentation and Measurements, Vol. 57, No. 11, pp. 2457-2461, 2008. 42. Drug Tablet Thickness Estimations using Air-coupled Acoustics, I. Akseli, C. Cetinkaya, the International Journal of Pharmaceutics, Vol. 351, No. 1-2, 165-173, 2008. 41. Transient Thermo-Elastic Response of Nanofilms under Radiation Heating from Pulsed Laser Induced Plasma, M. D. Murthy Peri, D. Zhou, I. Varghese and C. Cetinkaya, IEEE Transactions on Semiconductor Manufacturing, Vol. 21, Issue 1, 2008. 40. Adhesion Characterization based on Rolling Resistance of Individual Microspheres on Substrates: Review of Recent Experimental Progress, M. D. Murthy Peri, I. Varghese, C. Cetinkaya, the J. of Adhesion Science and Technology, Vol. 22, 2008. 39. Removal of nanoparticles with laser induced plasma, Varghese, M. D. Murthy Peri, C. Cetinkaya, the J. of Adhesion Science and Technology, Vol. 22, 2008. 38. Rolling Resistance Moment of Microspheres on Surfaces: Contact Measurements, W. Ding, A. Howard, M.D.M. Peri, C. Cetinkaya, Philosophical Magazine, Vol. 87, Issue 36 pp. 5685 – 5696, 2007. 37. Submerged Laser Induced Plasma Amplification of Shockwaves using Shock Tubes, T. Dunbar, I. Varghese, M. D. Murthy Peri, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 21, No. 14, pp. 1425–1437, 2007. 36. Underwater Pressure Amplification of Laser-Induced Plasma Shockwaves for Particle Removal, T. Dunbar, C. Cetinkaya, Applied Physics Letters, Vol.91, No.5, 2007. 3 of 16 Çetin Çetinkaya Publication List August 5, 2013 35. Thermal Loading of Laser Induced Plasma Shockwaves on Thin Films in Nanoparticle Removal, I. Varghese, D. Zhou, M. D. Murthy Peri and C. Cetinkaya, Journal of Applied Physics, 101, 113106, 2007. 34. Air-Coupled Excitation of Rocking Motion of Individual Microspheres on Surfaces, M. D. Murthy Peri and C. Cetinkaya, Applied Physics Letters, 90, 171906, 2007. 33. Air-coupled Acoustic Method for the Testing and Evaluation of Micro-scale Structures, J. Ricci, C. Cetinkaya, Review of Scientific Instruments, Vol. 78, No. 5, 2007. 32. Non-contact Photo-acoustic Defect Detection in Drug Tablets, I. Varghese and Cetin Cetinkaya, Journal of Pharmaceutical Sciences, Vol. 96, No. 8, pp.2125-2133 2007. 31. Selective Removal of 10-40nm range Particles from Silicon Wafers using Laser Induced Plasma Shockwaves, M. D. Murthy Peri, V. K. Devarapalli, C. Cetinkaya, Journal of Adhesion Science and Technology, 21 (3-4): 331-337, 2007. 30. Pressure Amplification of Laser-Induced Plasma Shockwaves with Shock tubes for Nanoparticle Removal, T. Dunbar, B. Maynard, D. A. Thomas, M. D. Murthy Peri, I. Varghese, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 21, No. 1, 67-81, 2007. 29. Nanoparticle Removal Using Laser-Induced Plasma Shockwaves, M. D. Murthy Peri, I. Varghese, Dong Zhou, Arun John, Chen Li, C. Cetinkaya, Particulate Science and Technology, Vol. 25, No. 1, 91-106, 2007. 28. Acoustic Monitoring of Non-uniformly Eroded PVD Targets, L. Ban, A. Ziarani and C. Cetinkaya, IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No. 4, 2006. 27. Molecular-level Mechanisms of Nanoparticle Detachment in Laser-induced Plasma Shockwaves, Dong Zhou and C. Cetinkaya, Applied Physics Letters, 88, 173109, 2006. 26. Frequency Domain Thickness Measurement Approach for Microscale Multilayered Structures, Chen Li, C. Cetinkaya, IEEE Transactions on Instrumentation and Measurement, Vol. 55, No. 1, 2006. 25. Particle Removal with Liquid-film-enhanced Laser-Induced Plasma, V. K. Devarapalli, M. D. M. Peri, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 20, No. 2-3, pp. 133-244, 2006. 24. Nanoparticle Detachment using Shockwaves, Dong Zhou, A. T. John Kadaksham, M. D. M. Peri, I. Varghese, C. Cetinkaya, Journal of Nanoengineering and Nanosystems, Vol. 219, No. 3, pp. 91-102, 2005. (Best Paper Award by Editorial Board) 23. Rotational Motion of Microsphere Packs on Acoustically Excited Surfaces, M. D. M. Peri and C. Cetinkaya, Applied Physics Letters, Vol. 86, 184103, 2005. 22. Non-contact Microsphere-Surface Adhesion Measurement via Acoustic Base Excitations, M. D. M. Peri and C. Cetinkaya, Journal of Colloid and Interface Science, Vol. 288, pp. 432443, 2005. 21. Rolling Resistance Moment of Micro-spheres on Surfaces, M. D. Murthy Peri and C. Cetinkaya, Philosophical Magazine A, Vol. 85, No. 13, pp. 1347-1357, 2005. 4 of 16 Çetin Çetinkaya Publication List August 5, 2013 20. Non-contact Nanoparticle Removal with Laser Induced Plasma Pulses, C. Cetinkaya, M.D.M. Peri, Nanotechnology, 15, pp. 435–440, 2004. 19. Post-Chemical Mechanical Polishing Cleaning of Silicon Wafers with Laser-Induced Plasma, V. K. Deverapalli, Y. Li, and C. Cetinkaya, Journal of Adhesion Science and Technology, 18, 7, pp. 779-794, 2004. 18. Non-Contact Removal of 60nm Latex Particles from Silicon Wafers with Laser Induced Plasma, I. Varghese and C. Cetinkaya, Journal of Adhesion Science and Technology, 18, 7, pp. 795-806, 2004. 17. Young's Modulus for Laminated Machine Structures with Particular Reference to Switched Reluctance Motor Vibrations, Z. Tang, P. Pillay, A.M. Omekanda, C. Li, C. Cetinkaya, IEEE Transactions on Industry Applications, 40, 3, pp. 748-754, 2004. 16. Efficiency Studies of Particle Removal with Pulsed-Laser Induced Plasma, T. Hooper, C. Cetinkaya, Volume 17, No. 6, pp. 751-902, 2003, Journal of Adhesion Science and Technology, 2003. 15. Nanoparticle Removal from Trenches and Pinholes with Pulsed-Laser Induced Plasma and Shock Waves, R. Vanderwood and C. Cetinkaya, Journal of Adhesion Science and Technology, Volume 17, No. 1, pp. 129-147, 2003. 14. Potential Laser Induced Damage in Nanoparticle Removal With Pulsed Lasers, J. Lin and C. Cetinkaya, Volume 17, No. 1, pp. 91-113, Journal of Adhesion Science and Technology, 2003. 13. Nanoparticle Removal with a Pulsed Laser: Thermoelastic Transient Surface Acceleration Simulations for Analyzing Edge Effects, C. Cetinkaya, J. Lin, R. Vanderwood and Chen Li, Journal of Adhesion Science and Technology, Vol. 16, No. 14, pp. 1-25, 2002. 12. Nanoparticle Removal From Substrates With Pulsed-Laser Generated Plasma and Shock Waves, C. Cetinkaya, R. Vanderwood, and M. Rowell, Journal of Adhesion Science and Technology, Vol. 16, No. 9, pp. 1201-1214, 2002. 11. An Efficiency Study of Transient Wave Generation in a Thermoelastic Layer with a Pulsed Laser, C. Cetinkaya, Ji Wu and Chen Li, Journal of Nondestructive Evaluation, Vol. 20, No. 2, pp. 49-60, 2001. 10. Propagation and Localization of Longitudinal Thermoelastic Waves in Layered Structures, C. Cetinkaya and Chen Li, ASME Journal for Vibration and Acoustics, Vol. 122, No. 3, pp. 263-271, 2000. 9. Laser-Based Transient Surface Acceleration for Thermoelastic Layers, C. Cetinkaya, Cunli Wu, and Chen Li, Journal of Sound and Vibration, Vol. 231, No. 1, pp. 195-217, 2000. 8. Localization of Longitudinal Waves in Bi-periodic Elastic Structures with Disorder, C. Cetinkaya, Journal of Sound and Vibration, Vol. 221, No. 1, pp. 49-66, 1999. 7. Near-Field Transient Axisymmetric Stress Wave Propagation in Layered Structures, C. Cetinkaya, J. Brown, A. A. F. Mohammed and A. F. Vakakis, International Journal for Numerical Methods in Engineering, Vol. 40, pp. 1639-1665, 1997. 5 of 16 Çetin Çetinkaya Publication List August 5, 2013 6. Transient Axisymmetric Stress Wave Propagation in Weakly Coupled Layered Structures, C. Cetinkaya and A. F. Vakakis, Journal of Sound and Vibration, Vol. 194, No. 3, pp. 389416, 1996. 5. Dispersion of Stress Waves in One-Dimensional Semi-Infinite, Weakly Coupled Layered Structures, A. F. Vakakis, and C. Cetinkaya, International Journal of Solids and Structures, Vol. 33. No. 28, pp. 4195-4213, 1996. 4. Axisymmetric Waves in Weakly Coupled Layered Media of Infinite Extent, C. Cetinkaya, A. F. Vakakis, and M. El-Raheb, Journal of Sound and Vibration, Vol. 182, No. 2, pp. 283302, 1995. 3. Analytical Evaluation of Periodic Responses of a Forced Oscillator, A. F. Vakakis and C. Cetinkaya, Nonlinear Dynamics, Vol. 7, pp. 37-51, 1995. 2. Free and Forced Dynamics of a Class of Periodic Elastic Systems, A. F. Vakakis, M. ElRaheb, and C. Cetinkaya, Journal of Sound and Vibration, Vol. 172, No. 1, pp. 23-46, 1994. 1. Mode Localization in a Class of Multi-Degree Nonlinear Systems with Cyclic Symmetry, A. F. Vakakis, C. Cetinkaya, SIAM Journal of Applied Mathematics, Vol. 53, No. 1, pp. 265282, 1993. Publications: Papers in Conference Proceedings In-Die Ultrasonic And Off-Line Air-Coupled Monitoring And Characterization Techniques For Drug Tablets, J. D. Stephens, B. R. Kowalczyk, B. C. Hancock, G. Kaul, I. Akseli, And C. Cetinkaya, QNDE 2011, Burlington, Vermont, July 17-22, 2011. Goodarz Ahmadi and Cetin Cetinkaya, AC 2010-9: Course Development Experience on Particle Transport, Deposition and Removal and Engineering of Nano/Micro-Scale Systems, ASEE, 2010 Annual Conference and Exposition (Best Paper Award - Honorable Mention), June 20-23, 2010, Louisville, Kentucky. Goodarz Ahmadi and Cetin Cetinkaya, Sequence of Courses on Particle Transport, Deposition and Removal and Engineering of Nano/Micro-Scale Systems, Proceedings of ASME 2010 3rd Joint US-European Fluids Engineering Summer Meeting and 8th International Conference on Nanochannels, Microchannels, and Minichannels, FEDSM2010ICNMM2010, August 1-5, 2010, Montreal, Canada K.Y. Law, G. Kmiecik-Lawrynowicz, W. Ding, C. Cetinkaya, “Adhesion and adhesion distribution in a model toner system”, The Society for Imaging Science and Technology NIP 25 International Conference on Digital Printing Technologies, Sept. 20-24 (2009). Electrical Energy Harvesting From a Non- Linear Aeroelastic Two-dimensional Flapping Device, C. Hoover, P. Marzocca and C. Cetinkaya, AIAA-2008-2307, 49th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, Schaumburg, IL, April 7-10, 2008. Particle Transport, Deposition and Removal- From Research to Curriculum Development, Goodarz Ahmadi, Suresh Dhaniyala, John McLaughlin, Cetin Cetinkaya, Stephen, DohenyFarina, and Fa-Gung Fan, 2008 ASEE Annual Conference & Exposition, Pittsburgh, PA, June 22-25, 2008. 6 of 16 Çetin Çetinkaya Publication List August 5, 2013 Non-Contact Mechanical Testing and Characterization of Micro-scale Structures, IMECE2006-13939, Jian Chen, Ganesh Subramanian, Justin Ricci, Liang Ban, C. Cetinkaya ASME, IMECE, Chicago November 5-10, 2006. Nanoparticle Removal Using Laser Induced Plasma Shockwaves, IMECE2006-13941, Ivin Varghese, M.D. Murthy Peri, Dong Zhou, Arun John, Thomas J. Dunbar and Cetin Cetinkaya, ASME, IMECE, Chicago November 5-10, 2006. Non-Contact Acoustic Techniques for Drug Tablet Monitoring, IMECE2006-13940, Ilgaz Akseli, C. F. Libordi, C. Cetinkaya ASME, IMECE, Chicago November 5-10, 2006. Nanoparticle Removal from EUV Photomasks using Laser Induced Plasma Shockwaves, John Kadaksham, Dong Zhou, M. D. Murthy Peri, Ivin Varghese, Florence Eschbach, Cetin Cetinkaya, SPIE Photomask Japan, Photomask and Next-Generation Lithography Mask Technology XIII, Paper No. 6283-83, 18–20 April 2006, Kanagawa, Japan. A CRCD Course for Particle Transport, Deposition and Removal, G. Ahmadi, D.J. Schmidt, K. Nazridoust, J. McLaughlin, C. Cetinkaya, S. Dhaniyala, J. Taylor, S Doheny-Farina, and Fa-Gung Fan, 24th Annual Conference of the American Association for Aerosol Research, AAAR 2005, Austin, TX, October 17-21, 2005. An On-Line Course for Particle Transport, Deposition and Removal, G. Ahmadi, D.J. Schmidt, K. Nazridoust, J. McLaughlin, S. Dhaniyala, C. Cetinkaya, J. Taylor, S DohenyFarina, X. Liu, and Fa-Gung Fan, ASME Fluid Engineering Summer Conference, Houston, TX, June 19-23, 2005, paper FEDSM2005-77069. Particle Transport, Deposition and Removal-A CRCD Project, G. Ahmadi, D. Schmidt, J. McLaughlin, C. Cetinkaya, S. Doheny-Farina, J. Taylor, S. Dhaniyala, and F-G. Fan, National Science Foundation (NSF) Engineering and Computing Education Grantee Meeting, February 16-18, 2005. An Interactive Web-Based Course-Sequence for Particle Transport: A Combined Research and Curriculum Development Project, G. Ahmadi, D.J. Schmidt, J. McLaughlin, C. Cetinkaya, S. Doheny-Farina, J. Taylor, S. Dhaniyala, and F-G. Fan, 23rd Annual Conference of the American Association for Aerosol Research, AAAR 2004, Atlanta, GA (October 4-8, 2004). CRCD-A Web-Based Course Sequence for Particle Transport, A Combined Research and Curriculum Development Project, G. Ahmadi, D. Schmidt, J. McLaughlin, C. Cetinkaya, S. Doheny-Farina, J. Taylor, S. Dhaniyala, and F-G. Fan, Instructional Technology Conference, Teaching and Learning in Online Era, Associate Colleges of St. Lawrence Valley, Potsdam, NY (March 6, 2004). Measurement of Young’s Modulus for Switched Reluctance Motor Vibration Determination, Z. Tang, P. Pillay, A. Omekanda, C. Li, and C. Cetinkaya, IEEE International Electric Machines and Drives Conference, June 1-4, 2003, Madison, Wisconsin. Effects of Material Properties on Switched Reluctance Motor Vibration Determination, Zhangjun Tang, P. Pillay, A. M. Omekanda, Chen Li, C. Cetinkaya, IEEE IAS (Industry Application Society) 38th Annual Meeting, Oct. 12-16, 2003, Salt Lake City, UT. 7 of 16 Çetin Çetinkaya Publication List August 5, 2013 Nanoparticle Removal from Substrates with Pulsed-laser Induced Plasma, C. Cetinkaya, Richard Vanderwood and Mathew Rowell, the Eighth International Symposium On Particles On Surfaces: Detection, Adhesion And Removal, June 24-26, 2002. Opto-Acoustic Effects of Optical Penetration of Laser Beam into Thin Films and Substrates, C. Li, C. Cetinkaya, and J. Lin, ASME, the International Mechanical Engineering Congress and Exposition (IMECE), NDE Challenges of the 21st Century: Theory to Practice, Vol. 21, p. 71-78, Nov. 11-16, 2001. Laser Based Transient Surface Acceleration of Thermoelastic Layers, the Seventh International Symposium on Particles on Surfaces: Detection, Adhesion and Removal, C. Cetinkaya, Chen Li and Cunli Wu, Newark, NJ, June 19-21, 2000. Quantitative Study of Transient Laser Thermoelastic Wave Generation in Layered Structures, Ji Wu, C. Cetinkaya, and C. Li, Review of Progress in Quantitative NDE, Ames, Iowa, July 16-21, 2000. An efficiency Study of Laser-induced Thermoelastic Wave Generation in Layers, Wu, Ji; Cetinkaya, Cetin; Li, Chen, American Society of Mechanical Engineers, Applied Mechanics Division, AMD, Vol. 240, pp. 49-58, 2000. Localization of Longitudinal Thermoelastic Waves in Layered Structures, C. Cetinkaya and C. Li, Review of Progress in Quantitative NDE, Montreal, Canada, July 25-30, 1999. Transient Surface Acceleration of Thermoelastic Layers with Laser, C. Cetinkaya, C. Wu, and C. Li, ASME, the 1998 International Mechanical Engineering Congress and Exposition (IMECE), Session AM-10B, Nashville, Tennessee, Nov. 15-20, 1999. Localization of Longitudinal Thermoelastic Waves in Layered Structures, C. Cetinkaya, C. Li, Y. Liu and J. Welch, ASME, the 1998 International Mechanical Engineering Congress and Exposition (IMECE), Session NDE-2, Nashville, Tennessee, November 15-20, 1999. Localization of Thermoelastic Waves in Layered Structures for Laser-based Nondestructive Testing, C. Cetinkaya, C. Wu, and C. Li, ASME, the 1998 International Mechanical Engineering Congress and Exposition (IMECE), Session DE-10B, Anaheim, California, November 15-20, 1998. Stress Wave Localization in Layered Structures with Disorder, C. Cetinkaya and C. Li, Fifth International Conference on Composites Engineering, ICCE/5, Las Vegas, Nevada, July 5-11, 1998. Computer Algebra Application Packages for Mechanical Engineers, C. Cetinkaya, G. Keady, A. Triulzo, the Second Asian Technology Conference in Mathematics, June 19-22, 1997. Computations of Transient Axisymmetric Waves in a Layered Medium, C. Cetinkaya, J. Brown, A.A.F. Mohammed, and A. F. Vakakis, Fourth International Congress on Sound and Vibration, St. Petersburg, Russia, June 24-27, 1996. Computation of Transient Wave Transmission in a Layered Composite, C. Cetinkaya, A.F. Vakakis, 3rd International Conference on Composites Engineering, New Orleans, Louisiana, July 21-26, 1996. 8 of 16 Çetin Çetinkaya Publication List August 5, 2013 Symbolic Computing in Stress Wave Propagation in Layered Structures, C. Cetinkaya and A. F. Vakakis, International Conference on Advances in Scientific Computing and Modeling, Charleston, Illinois, October 12-14, 1995. Analytical Study of Dispersion of Stress Waves in Weakly Coupled Layered Systems, A. F. Vakakis and C. Cetinkaya, 15th Bi-Annual Conference on Mechanical Vibrations and Noise, Boston, Massachusetts, September 17-21, 1995. Engineering Applications of Symbolic Computing, C. Cetinkaya, 10th International Conference on Mathematical and Computer Modeling and Scientific Computing, Boston, Massachusetts, July 5-8, 1995. Engineering Applications of Computer Algebra Systems: Mathematica Approach, C. Cetinkaya, IMACS Conference on Applications of Computer Algebra, Albuquerque, New Mexico, May 16-20, 1995. Dynamics of a Layered Elastic System, A. F. Vakakis, M. El-Raheb, and C. Cetinkaya, 34th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, LaJolla, California, April 19-21, 1993. Energy Localization in a Layered System with Defects, A. F. Vakakis, C. Cetinkaya, and M. El-Raheb, SIAM Annual Meeting, Philadelphia, Pennsylvania, July 12-16, 1993. On Stability Analysis of Linear Stochastic and Time-Varying Deterministic Systems, C. Cetinkaya, International Symposium on Symbolic and Algebraic Computation, Berkeley, California, July 27-29, 1992. Publications: Poster Presentations Armin S. Vahdat, Saber Azizi, and Çetin Çetinkaya, Nonlinear Dynamics of Adhesive Microparticles on Vibrating Surfaces, 17th International, Symposium on ChemicalMechanical Planarization, August 12 -15, 2012, Crowne Plaza Resort & Golf Club, Lake Placid, NY, USA. Contact/Non-contact Acoustic Techniques for Mechanical Property Characterization and Testing of Solid Dosage Forms, I. Akseli, C. Liborti, J. Liu, J. D. Stephens, C. Smith, M. Moon, A. V. Saeedi, M. Miraskari, IFPAC Annual Meeting, January 17-21, 2011. Baltimore, Maryland. S. Mohammad Miraskari, C. Cetinkaya, Non-contact Particle Adhesion Characterization, 16th International Symposium on Chemical Mechanical Planarization, August 7-10, 2011, Lake Placid, New York. C. Cetinkaya, I. Suni, W. Ding, F. Hua, NUE: Overcoming the Geographic/Infrastructure Disadvantage of a Remote Small Research/Teaching Institution in Nano/micro-scale Engineering Education (EEC-0836640). Engineering Education NSF Awardees Conf., Jan.. 31-Feb. 2, 2010, Reston, Virginia. C. Cetinkaya, I. Suni, W. Ding, F. Hua, NUE: Overcoming the Geographic/Infrastructure Disadvantage of a Remote Small Research/Teaching Institution in Nano/micro-scale Engineering Education (EEC-0836640). Engineering Education NSF Awardees Conf., Feb. 1-3, 2009, Reston, Virginia 9 of 16 Çetin Çetinkaya Publication List August 5, 2013 Adhesion Characterization of Nano-Particle Coated Toner Particles, Huan Zhang, Weiqiang Ding, Cetin Cetinkaya, CAMP Annual Technical Meeting, Canandaigua Inn on the Lake, Canandaigua, New York, May 13 – 15, 2009. Acoustic Techniques for Drug Tablet Characterization and Quality Monitoring, Ilgaz Akseli Cetin Cetinkaya, CAMP Annual Technical Meeting, Canandaigua Inn on the Lake, Canandaigua, New York, May 13 – 15, 2009. Contact Ultrasonic Methods for Mechanical Property Characterization and Testing of MultiLayer Tablets, Jingfei Liu, Ilgaz Akseli, Cetin Cetinkaya, CAMP Annual Technical Meeting, Canandaigua Inn on the Lake, Canandaigua, New York, May 13 – 15, 2009. Non-Contact Techniques for Adhesion Characterization of Toner and Pharmaceutical Particles, Xiarong Tong, Ilgaz Akseli, Cetin Cetinkaya, CAMP Annual Technical Meeting, Canandaigua Inn on the Lake, Canandaigua, New York, May 13 – 15, 2009. Non-Contact Rolling Bond Stiffness of Toner Particles, Mohammad Miraskari, Cetin Cetinkaya, CAMP Annual Meeting, Potsdam, NY, Oct. 14, 15, 16, 2009. Adhesion Characterization of Advanced Toner Particles, Huan Zhang, Weiqiang Ding, Cetin Cetinkaya, CAMP Annual Meeting, Potsdam, NY, Oct. 14, 15, 16, 2009. T. Dunbar, M.D. Murthy Peri, Ivin Varghese and Cetinkaya, Application of Laser Induced Plasma (LIP) Pressure Utilizing Shock Tubes for sub-45 nm Particle Removal, 12th International Symposium on Chemical Mechanical Planarization, August 12-15, 2007, Lake Placid, New York. Measurement of Transient Thermal Responses of Nanofilms under Radiative Heating from Pulsed Laser Induced Plasma, M.D. Murthy Peri, Ivin Varghese, Dong Zhou, and Cetin Cetinkaya, ICHMT Fifth International Symposium on Radiative Transfer, 17- 22 June 2007, Bodrum, Turkey. Nano-particle Removal using Laser-Induced Plasma Shockwaves, M.D.M. Peri, I. Varghese, D. Zhou, Arun John, T.J. Dunbar, B. Maynard, D.A. Thomas, C. Cetinkaya, 11th International Symposium on CMP, August 13-15, 2006, Lake Placid, NY. Design, Fabrication and Characterization of a Rotational Oscillator for Chemical Sensing, Cetin Cetinkaya, Justin Ricci, Ganesh Subramanian, Jian Chen, 2006 Cornell NanoScale Facility Annual Meeting, September 21, 2006, Ithaca, NY. Challenges in Nanoparticle Removal from the EUV Photomask, D. Zhou, C. Cetinkaya, F. Eschbach, SEMATECH 4th International EUV Lithography (EUVL) Symposium, 7-10 November, 2005, San Diego, CA. Motion/Adhesion/Removal of Micro/Nano-Particles on Surfaces, Control and System Integration of Micro and Nano-Scale Systems - Workshop, the National Science Foundation workshop, Edited by Benjamin Shapiro, March 29–30, 2004, Arlington, VA. 10 of 16 Çetin Çetinkaya Publication List August 5, 2013 Viscoelastic Motion and Detachment of Micro/Nano Particles, C. Cetinkaya, Nanoscale Mechanical Engineering Workshop, National Science Foundation, June 15-16, 2003, Arlington, VA. Thickness Measurement and Characterization Method for Thin Polymer Coatings, C. Li, C. Cetinkaya, CAMP Technical Meeting, May 13-15, 2002, Saratoga Springs, NY. Dry Laser Cleaning Methods for Nano-Particle Removal, R. Vanderwood, T. Hooper, C. Cetinkaya, CAMP Technical Meeting, May 13-15, 2002, Saratoga Springs, NY. Numerical Studies on Nanoparticle Removal with Pulsed Lasers, J. Lin, C. Cetinkaya, CAMP Technical Meeting, May 13-15, 2002, Saratoga Springs, NY. Computational Simulations for Damage-Free Post-CAMP Nanoparticle Removal with Pulsed Lasers, J. Lin, C. Cetinkaya, Clarkson University New York State Center for Advanced Materials Processing, the 7th International Symposium on Chemical-Mechanical Polishing, Aug 11-14, 2002, Lake Placid, NY. Dry Surface Cleaning with Lasers, C. Wu, C. Li, C. Cetinkaya, CAMP Technical Meeting May 23-25, 2000, Lake Placid, NY. Characterization of Multi-Layered Coatings and Films, C. Li, C. Cetinkaya, CAMP Technical Meeting, May 14-16, 2001, Saratoga Springs, NY. Stripping Thin Films from Substrates with a Pulsed Laser, J. Lin, C. Cetinkaya, CAMP Technical Meeting, May 14-16, 2001, Saratoga Springs, NY. Publications: Editing – Conference Proceedings and Special Journal Issues Nano/Micro-Scale Adhesion, Guest Editor, Journal of Adhesion Science and Technology, (13 peer-reviewed articles), Number 5-6, 2008. NDE Challenges of the 21st Century: Theory to Practice, Cetinkaya, C., ed. (Clarkson University) Source: American Society of Mechanical Engineers (Publication) NDE, Vol. 21, NDE Challenges of the 21st Century: Theory to Practice 2001, 2001, 149p. ISBN: 0791835839. Proceeding of the ASME Nondestructive Evaluation Engineering Division – 2002, Cetinkaya, C.; Dzenis, Y.A.; Joshi, S. eds., American Society of Mechanical Engineers (Publication) NDE, Vol. 23, Proceedings of the ASME Nondestructive Evaluation Engineering Division 2002, 134p., ISBN: 03477733608. Publications: Book Chapter(s) Non-contact mechanical characterization and testing of drug tablets, C. Cetinkaya, I. Akseli, G. N. Mani, C. F. Libordi, I. Varghese, Advanced Ultrasonic Methods for Material and Structure Inspection, edited by T. Kundu, Hermes Science and Lavoisier Co., ISBN: 190520969X, April 2007. Laser Cleaning for Removal of Nano/Micro-Scale Particles and Film Contamination, Developments on Surface Contamination and Cleaning, I. Varghese, MD Peri, C. Cetinkaya, Edited by Rajiv Kohli and K.L. Mittal, Elsevier, ISBN 13: 978-1-4377-7885-4, pp. 63-122, 2011. 11 of 16 Çetin Çetinkaya Publication List August 5, 2013 Publications: Book Reviews/Magazine Articles/ Review Letters C. Cetinkaya, Book Review, Optimal Protection from Impact, Shock, and Vibration (by D.V. Balandin et al.), ASME Applied Mechanics Review, Vol. 54(5), 2001. C. Cetinkaya, Book Review, Elastic Waves in Solids II: Generation, Acousto-optic Interaction, Applications (by D. Royer and E. Dieulesaint), ASME Applied Mechanics Review, Vol. 54(2), 2001. C. Cetinkaya, Book Review, Mechanical Shock (by C. Lalanne), ASME Applied Mechanics Review, 56, B67, 2003. R. Vanderwood, C. Cetinkaya, J. Lin, Laser Cleaning Methods for Sub-micrometer Particle Removal, Advancing Applications in Contamination Control Magazine, Vol. 5, No. 6, June 2002. Varghese, L. Ban, M. D.M. Peri, C. Li, G. Subramanian and C. Cetinkaya, Non-Contact Techniques for Drug Tablet Monitoring, Pharmaceutical Processing, October 2005. Non-Contact Drug Tablet Monitoring, Control Engineering, Varghese, L. Ban, M. D.M. Peri, C. Li, G. Subramanian and C. Cetinkaya, Vol. 53, No. 2, February 2006. Presentations: Conference and Symposium Presentations (without Proceedings) Non-contact Nanoparticle Removal with Laser Induced Plasma Pulses, 2004 Surface Preparation and Cleaning Conference, International SEMATECH, May 6-7, 2004, Austin, Texas. Nanoparticle Detachment using Shockwaves, J. Kadaksham, D. Zhou, M. D. M. Peri, I. Varghese, F. Eschbach, and C. Cetinkaya, 2006 Surface Preparation and Cleaning Conference, SEMATECH, May 4-5, 2004, Austin, Texas. Non-contact Microsphere-Surface Adhesion Measurement via Acoustic Base Excitations, 2005 Surface Preparation and Cleaning Conference, International SEMATECH, April 19-20, 2005, Austin, Texas. SEMATECH Mask Cleaning Workshop, (Presentation) Nanoparticle Removal using LaserInduced Plasma Shockwaves, October 3, 2005, Monterey, California. Shock Tube-Enhanced LIP Shockwaves for sub-50 nm Particle Removal, T. Dunbar, M. D. M. Peri, I. Varghese, B. Maynard, D. A. Thomas, C. Cetinkaya, CAMP Technical Meeting, April 25, 2007, Canandaigua, NY. T. Dunbar, Ivin Varghese, M.D. Murthy Peri and Cetinkaya, Shock Tube-Enhanced Laser Induced Plasma Shockwaves for sub-50nm Nanoparticle Removal, SEMATECH SPC Conference, April 25-26, 2007, Austin, Texas. C. Cetinkaya, PAT and QbD Applications: a Review and their Industrial Impact, ISPE Seminar Series on PAT and QbD, Oct. 23, 2009, Istanbul, Turkey. C. Cetinkaya, Non-destructive Mechanical Properties of Drug Tablets: Current Methods and Technologies, ISPE Seminar Series on PAT and QbD, Oct. 23, 2009, Istanbul, Turkey. 12 of 16 Çetin Çetinkaya Publication List August 5, 2013 C. Cetinkaya, Real-time/In-die Monitoring of Tablet Compaction, Compaction Simulator Forum 2012, November 12-13, 2012, 22Cambridge, Massachusetts Presentations: Invited Seminars and Presentations GE Plastics, Laser-Based Continuous Online Quality Control in Multilayered Sheet Plastics Production, October 5, 1998, Pittsfield, Massachusetts. J. Wiley & Sons, Interactive Engineering Handbook Design, December 17, 1998, New York, New York. GE Corporate Research & Development, e-Handbook Development, November 5, 1999, Schenectady, New York. University of Akron, Thermoelastic Wave Generation in Layered Structures and its Practical Applications, April 7, 2000, Akron, Ohio. Tennessee Technology University, Quantitative Study of Laser Thermoelastic Wave Generation in Layers, May 4, 2000, Cookeville, Tennessee. Kodak, Removal of Nanoparticles and Thin Films by Pulsed Lasers, January 9, 2001, Rochester, New York. National Research Council of Canada, Laser Ultrasonic Research Activities at Center for Advanced Materials Processing, May 23, 2001, IMI/CNRC-NRC, Boucherville, Québec, Canada. New York State Energy Research and Development Authority (NYSERDA), Real-Time PVD Sputtering Target Monitoring in Semiconductor Manufacturing: The Next Generation Sputtering Targets, February 25, 2002, Albany, New York. DeFelsko Corp., Thickness Measurement Methods for Multi-Layered Polymeric Coatings, April 17, 2002, Ogdensburg, New York. Praxair/MRC, Sputtering Target End-of-life Monitoring with Ultrasound, January 3, 2003, Orangeburg, New York. Virginia Polytechnic Institute and State University, Motion and Removal of Nano/Micro Particles on Surfaces, April 30, 2003, Blacksburg, Virginia. Wyeth Pharmaceuticals, Acoustic Monitoring of Drug Tablet Integrity, February 5, 2004, Pearl River, New York. Northeastern University, Removal of Nano-Particles from Surfaces with Pulsed Lasers, April 2, 2004, Boston, Massachusetts. SEMATECH-North, EUV Mask Cleaning Challenge: Removal of Nano-Particles from Surfaces with Pulsed Lasers, March 17, 2004, Albany, New York. Consortium for the Advancement of Manufacturing in Pharmaceuticals (CAMP), Drug Tablet Monitoring with Non-contact Techniques for PAT Applications, Technical Review Meeting June 14, 2004, Pearl River, New York. 13 of 16 Çetin Çetinkaya Publication List August 5, 2013 Consortium for the Advancement of Manufacturing in Pharmaceuticals (CAMP), Acoustic Sensors for Drug Tablet Monitoring and Evaluation: PAT Applications, Annual Meeting, February 2-3, 2005, Gaithersburg, Maryland. SUNY University at Albany College of Nanoscale Science and Engineering, Motion of Micro-spheres on Dry Surfaces, February 18, 2005, Albany, New York. Novartis Pharmaceuticals Corp., Acoustic Techniques for Drug Tablet Monitoring and Evaluation, July 11, 2005, East Hanover, New Jersey. SUNY University at Albany College of Nanoscale Science and Engineering, Motion Nanoparticle Removal using Laser-Induced Plasma Shockwaves, August 4, 2005, Albany, New York. TOBB_ETU, Nanoparticle Removal using Laser-Induced Plasma Shockwaves, September 16, 2005, Ankara, Turkey. Non-contact Microsphere-Surface Adhesion Measurement via Acoustic Base Excitations, Cetin Cetinkaya and M.D. Murthy Peri, 2005 Surface Preparation and Cleaning Conference, SEMATECH, April 19-20, 2005, Austin, Texas. TOBB_ETU,Non-contact Quality Monitoring of Drug Tablets, July 26, 2006, Ankara, Turkey. 2007 NNIN Annual Meeting, Clarkson University ME 591 Nano/Micro-Scale Systems Engineering: Course Development Experience Leveraging CNF/NNIN Fabrication Facilities, May 9-11, 2007, Ann Arbor, Michigan. Northeastern University, Acoustics and Vibration of Mechanical Systems: mm- to nm-Scales, January 30, 2007, Boston, Massachusetts. University of Missouri at Rolla, Acoustics and Vibration of Mechanical Systems: mm- to nmScales, April 17, 2007, Rolla, Missouri. Abbott Laboratories, Mechanical Characterization, Testing and Defect Monitoring of Drug Tablets: A Review of Current Methods and Emerging Approaches, August 17, 2007, Abbott Park, Illinois. Mechanics in Nano/Micro-scale Structures/Systems: A Review of Activities, National Nanotechnology Research Center, Bilkent University, Ankara, Turkey, July 9, 2007. Xerox Wilson Research Center, Recent Progress on Particle Adhesion: Contact and Noncontact Adhesion Studies, W. Ding and C. Cetinkaya, July 26, 2007, Webster, New York. Endicott Interconnect Technologies, Inc., Nanoparticle Removal utilizing Laser Induced Plasma Shockwaves, C. Cetinkaya, I. Varghese and M. D. M. Peri, January 4, 2008, Endicott, New York. TSEC (the Solar Energy Consortium) and FALA Technologies on-Contact/Non-destructive Testing/Evaluation: Photo-acoustic and Air-coupled Technologies, May 29, 2008, Kingston, NY 12401. 14 of 16 Çetin Çetinkaya Publication List August 5, 2013 GE Global Research, Aircoupled and Thermoelastic Testing/Characterization and Simulations of Micro-scale Systems, June 11, 2008, Niskayuna, New York. GE Global Research, Adhesion Testing/Characterization of Micro-scale Switches, Jan. 5, 2009, Niskayuna, New York. Mechanical Characterization, Testing and Defect Monitoring of Drug Tablets: a Review of Current Methods and Emerging Approaches, INTERPHEX, March 18, 2009, New York, NY. Workshop on Nano/micro-scale Systems Engineering, July 27-30, 2009, Institute of Materials Science and Nanotechnology, Bilkent University, Ankara, Turkey. Mechanical Characterization, Testing and Defect Monitoring of Drug Tablets, August 28, 2009, Purdue University, West Lafayette, Indiana. Acoustic Methods for Mechanical Characterization, Testing and Defect Monitoring of Drug Tablets, April 22, 2010, Rutgers University, New Jersey. Non-Contact Adhesion Characterization of Micro-Particles, Sept. 24, 2010, Cornel University, Ithaca, New York. Ultrasonic Process Monitoring: Testing and Defect Monitoring of Drug Tablets, Technology Day with Blue Highway, Potsdam, NY, April 14, 2010 Non-Contact Adhesion Characterization of Single Polyvinylpyrrolidone (PVP) Particles, Çetin Çetinkaya, I. Akseli, M. Miraskari, H. Zhang, and W. Ding, International Symposium on Surface Science Aspects of Pharmaceutical Technology, Danbury, CT, April 19-20, 2010. Acoustic Methods for Materials Characterization, Brookhaven National Laboratory, Long Island, New York, May 23, 2011. Monitoring and Characterization of Mechanical Properties of Compacts, Pfizer Global Research & Development, Groton, CT, November 7, 2011. Point-wise Non-Contact Adhesion Characterization of Toner Micro-Particles, Xerox, Webster, New York, November 28, 2011 Mechanical Characterization, Testing and Defect Monitoring of Drug Tablets: Review of Current PAT Methods and Emerging Techniques, AAPS-GMDG 2012 Spring Meeting, U.S. Pharmacopeia, Rockville, Maryland, April 10, 2012. Mechanical Properties Characterization, Testing and Monitoring of Drug Tablets, Dept. of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, March 29, 2012. Mechanics of Drug Delivery at Various Length-Scales for Engineering Better Medicines: Overview of Current Works and Future Directions, Department of Mechanical Engineering Francis College of Engineering, University of Massachusetts Lowell, April 30, 2012 Mechanical Properties Characterization, Testing and Monitoring of Drugs Tablets, Department of Biopharmaceutical Sciences, College of Pharmacy, University of Illinois at Chicago, Chicago, IL, March 28, 2012. 15 of 16 Çetin Çetinkaya Publication List August 5, 2013 Dynamics of Microspherical Adhesive Particles on Vibrating Substrates, Mechanical and Industrial Engineering, University of Illinois at Chicago, October 2, 2012. Integration of Far- and Near-Field Data for Accuracy Enhancement in Seismic Imaging in Oil & Gas Exploration, General Electric, Global Research Center, Niskayuna, New York, August 13, 2012. Perspectives and Observations on Engineering Education and Research, Department of Mechanical Engineering, College of Engineering, University of Akron ASEC 223/224, November 5, 2012, Akron, OH. Nonlinear Dynamics of Adhesive Micro-Particles on Vibrating Substrates: Graphene Adhesion Characterization, Materials Science and Eng., Drexel University University, December 6, 2012. Philadelphia, PA Invited Workshops National Science Foundation Workshop on Nanoscale Mechanical Engineering, June 15-16, 2003, Arlington, Virginia. National Science Foundation workshop on Control and System Integration of Micro- and Nano-scale Systems, March 29-30, 2004, Arlington, Virginia. SEMATECH Mask Cleaning Workshop, Non-contact Nanoparticle Removal with Laser Induced Plasma Pulses, September 13, 2004, Monterey, California. SEMATECH Mask Cleaning Workshop, Non-contact Nanoparticle Removal, October 3, 2005, Monterey, California. 16 of 16