Tender Documentation
Vacuum Pumping Station for Plasma Cleaner
Annex no. 1
Technical Specification
for a small-scale public contract
„Vacuum Pumping Station for Plasma Cleaner“
The Vacuum Pumping Station for Plasma Cleaner model 1020 of Fischione Instruments forms
subject matter of the public contract
The Vacuum Pumping Station for Plasma Cleaner model 1020 shall ensure long-term conservation of
finally cleaned samples in Plasma Cleaner for Transmission Electron Microscope (TEM) and shall
ensure conservation of the maximum quality of prepared samples, which shall impact to gained
scientific results. Holders for transfer and conservation of samples, which are determined for
observation by a transmission electron microscope, are to be a part of the Vacuum Pumping Station.
The Plasma Cleanser device was purchased as of the price of ca 1,5 mio. CZK from the funds of the
institutional support and it is essential facility serving for final cleaning of samples and achievment of
very high expansion (aprox. 1 – 5 million times) on transmission electron microscope HR TEM JEOL
JEM-2100F purchased from investment funds of the CEITEC project. The Plasma Cleanser serve for
final cleaning of samples by argon plasma in vacuum. Contamination of sample (pollution) shall
occure not only within common in-room condition but also within observation in transmission
electron microscope. The layer of contamination develops within observation (ilumination of the
sample by electron beam) also within high pressure in vaccum (pressure < 10-5 Pa) which shall
prevent from detailed observaton of the material structure. This effect is particularly substantial
within high enlargements or within STEM mode. The Vaccum Pumping Station for Plasma Cleaner is
the necessary accesory for repeated observation and for conservation of samples for further analysis
in order to keep non-contaminated (non-polluted) surface layer, when the sample do not leave
“clean” environment, and in order to reach the maximum quality of observation and scientific results
on material samples.
The containers for transfer and conservation of such samples determined to be observed by
transmission electron microscope shall be a part of the vaccum pumping station. This containers are
necessary for a case of samples of some micrometres cross-sections, typically 10 x 5 μm and
thickness of lower than 100 nm, which are not possible to be transfer or conserve by any other ways
without contamination of sample. Also one vacuum storage container with holders is to be a part of
supply, which shall serve for conservation of miniature samples created in other microscope, e.g. in
scanning electron microscope by focused ion beam. This vacuum storage container shall serve for
transfer of samples for cleaning and subsequent observation in transmission electron microscope.
The vaccum pumping station will be located close-fitting to purchased Plasma Cleaner in a same
place with the transmision electron microscope HR TEM JEOL JEM-2100F in a room J5 of the Institute
of Physics of Materials AV CR, v.v.i., Žižkova 22, Brno.
Minimum technical parametres:
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compatibility and possibility of connection with the Plasma Cleaner model 1020 of Fischione
Instruments;
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Tender Documentation
Vacuum Pumping Station for Plasma Cleaner
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all and any components necessary for connection with the Plasma Cleaner model 1020 of
Fischione Instruments;
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container for conservation and transfer of samples and sample holders used within the
transmision electron microscope HR TEM JEOL JEM-2100F, in vacuum;
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capacity of the vacuum pumping station shall be at least 5 containers simultaneously
conserving cleaned samples in vacuum;
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possibility of location of vacuum pumping station on the upper surface of the Plasma Cleaner
model 1020 of Fischione Instruments.
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