Supporting Information Electrically Conductive Anti-reflecting Nanostructure for Chalcogenide Thin-Film Solar Cells. Ji-Hyeon Park, Tae Il Lee, Sung-Hwan Hwang, Kyeong-Ju Moon and Jae-Min Myoung* Department of Materials Science and Engineering, Yonsei University, Seoul, Korea E-mail: jmmyoung@yonsei.ac.kr Figure S1. X-ray diffraction spectrum of the GZO seed layer and its 45° tilted cross sectional SEM image. 1 2 μm 8 mM Figure S2. 45° tilted cross sectional SEM image of Al-doped ZnO NRs grown under 8 mM of Al(NO3)3 · 9H2O. Figure S3. Growth rate of ZnO NRs with different concentrations of Al(NO3)3 · 9H2O from 0 to 6 mM at a fixed 28.5 mM of Zn(NO3)2 · 6H2O. 2 Figure S4. (a) A bright field and (b) HRTEM images of a piece of Al-doped ZnO NR grown at 6 mM of Al(NO3)3 · 9H2O. 3 Figure S5. Raw and deconvoluted XPS spectra of O 1s from ZnO NRs grown under the different concentration of Al(NO3)3 · 9H2O (a) 0 mM, (b) 2 mM, (c) 4 mM, and (d) 6 mM. OI is related to the loosely bound oxygen on the surface of the ZnO NRs belonging to specific species, e.g., -CO, -OH. O-II is related to O2- in the oxygen deficient regions with in the matrix of ZnO. O-III represents the XPS spectrum corresponding to Zn-O in the wurtzite structure. O-IV represents the XPS spectrum corresponding to Al-O in the wurtzite structure. 4 (a) (c) (b) (d) (e) (f) (g) (h) Figure S6. Zn 3d core level peak of ZnO NRs without 5 nm Ag layer with different concentrations of Al(NO3)3 · 9H2O (a),(c),(e), and (g). The energy of the valance band edge was determined by linear fitting. Zn 3d core level at the Ag/ZnO NRs interface, (b),(d),(f), and (h) with different concentrations of Al(NO3)3 · 9H2O. 5