ORGANISATION EUROPÉENNE POUR LA RECHERCHE NUCLÉAIRE CERNEUROPEAN ORGANIZATION FOR NUCLEAR RESEARCH EDMS No.: 1263634 CERN/NA62 Project Document Ref.: 1263634 IT/3651/PH/NA62 The CERN/NA62 Project Invitation to Tender Technical Specification Bump-bonded Si Pixel Assemblies for the CERN/NA62 Abstract This technical specification concerns the supply of bump-bonded Si pixel assemblies for the detector known as GigaTracKer (GTK) to be used in the experiment NA62 at CERN. Deliveries are foreseen over two years from placement of the contract. March 2013 EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 i IT/3651/PH/NA62 Table of Contents 1. 1.1 1.2 2. 2.1 2.2 2.3 3. 3.1 3.1.1 3.1.2 3.1.3 3.1.4 3.2 3.3 4. 4.1 4.2 4.3 4.4 4.4.1 4.4.2 4.5 5. INTRODUCTION ........................................................................................................................... 1 Introduction to CERN ....................................................................................................................... 1 Introduction to the NA62 Experiment and the GTK Detector .......................................................... 2 SPECIFICATION OF THE SUPPLY ........................................................................................... 3 Deliverables Included in the Supply ................................................................................................. 3 Items and Services Supplied by CERN ............................................................................................. 4 Options .............................................................................................................................................. 4 TECHNICAL REQUIREMENTS ................................................................................................. 5 Description of the Assembly Components ........................................................................................ 5 Sensor Specifications......................................................................................................................... 5 Read-out Chip Specifications ............................................................................................................ 8 Dummy components for the Pre-series............................................................................................ 11 Bump-bonded Assemblies ................................................................................................................ 11 Requirements for the Assembly Process ......................................................................................... 12 Safety Requirements 13 PERFORMANCE OF THE CONTRACT .................................................................................. 13 Delivery Schedule ........................................................................................................................... 13 Contract Follow-Up and Progress Monitoring ................................................................................ 14 Documentation Handling, Quality Control and Quality Assurance ................................................ 14 Tests to be carried out at the Contractors Premises ......................................................................... 14 Pre-series ........................................................................................................................................ 14 Production-series ............................................................................................................................ 15 Packing and Shipping ...................................................................................................................... 15 CERN CONTACT PERSONS ..................................................................................................... 15 EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 1. INTRODUCTION 1.1 Introduction to CERN 1 IT/3651/PH/NA62 CERN, the European Organization for Nuclear Research, is an intergovernmental organization with 20 Member States1. Its seat is in Geneva but its premises are located on both sides of the French-Swiss border (http://cern.ch/fplinks/map.html). CERN’s mission is to enable international collaboration in the field of high-energy particle physics research and to this end it designs, builds and operates particle accelerators and the associated experimental areas. At present more than 10 000 scientific users from research institutes all over the world are using CERN’s installations for their experiments. The accelerator complex at CERN is a succession of machines with increasingly higher energies. Each machine injects the beam into the next one, which takes over to bring the beam to an even higher energy, and so on. The flagship of this complex is the Large Hadron Collider (LHC) as presented below: Further information is available on the CERN website: http://cern.ch 1 The CERN Member States are currently Austria, Belgium, Bulgaria, the Czech Republic, Denmark, Finland, France, Germany, Greece, Hungary, Israel*, Italy, the Netherlands, Norway, Poland, Portugal, Romania**, the Republic of Serbia*, the Slovak Republic, Spain, Sweden, Switzerland and the United Kingdom. * Associate Member State in the pre-stage to Membership ** Candidate for accession 2 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 1.2 Introduction to the NA62 Experiment and the GTK Detector The NA62 experiment is performed at the CERN Super Proton Synchrotron (SPS) accelerator. The aim of NA62 is to investigate extremely rare kaon decays on a time scale of a few years to accumulate sufficient statistics. The web sites http://cern.web.cern.ch and http://na62.web.cern.ch/NA62 can be consulted for more information on CERN and NA62. A schematic layout of the experiment is shown in Fig. 1. LAV: Large Angle Photon Veto SAV Small Angle g Veto Vacuum Tank CHOD Charged Hodoscope CHANTI Charged Particle Veto Target CEDAR Beam Pipe Gigatracker RICH Decay Region: 65 m LKr MUV Straw Tracker Total Length: 270 m Figure 1. Schematic layout of the NA62 experiment. The GTK (Gigatracker) Detector is a core part of the NA62 experiment and consists of three silicon pixel detector stations (GTK1, 2 and 3) mounted along the beam-line inside a vacuum tank in a high radiation environment. The location of the Gigatracker detector inside the experiment is shown by a red ellipse, and its expanded view can be found in Fig. 2. The GTK stations will provide information on the particle trajectories and momentum, and also allow for precise time tagging of each passing particle with a precision better than 200 ps per station. Approximately 20 full-detector assemblies, compliant with the specifications, will be required for the 3 year running time of the experiment. Figure 2. Arrangement of the three GTK stations, represented by red rectangles, along the beamline. The blue triangles represent bending magnets, used to deflect the beam for momentum and angle measurement. Each station is made of one hybrid silicon pixel detector consisting of one silicon sensor flip-chip bonded to 2 x 5 front-end chips, as schematically shown in Fig. 3. The total size of the silicon sensor is approximately 29 mm x 63 mm with a pixel cell size of 300 µm x 300 µm (enlarged pixels of 400 µm x 300 µm are used in the neighbouring region between adjacent chips, as described EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 3 IT/3651/PH/NA62 below in more detail). The module design for each station will include also a support structure, the connection to the cooling system as well as electrical and optical connections. The GTK stations will be operated in vacuum and in a relatively high radiation environment; current estimates expect up to 2 x 1014 1 MeV neq cm-2 per year. Therefore, it is foreseen to regularly exchange the GTK stations to avoid performance degradation due to radiation damage. The beam intensity distribution on one GTK assembly is shown in Fig. 3, where the highly nonuniform particle rate across the sensor is clearly visible. Figure 3. Beam intensity distribution (in MHz/mm2) on a GTK station. One of the 10 read-out chips of the hybrid bump-bonded assembly is schematically shown. The expected running time of the experiment is approximately 100 days per year. Currently an overall operation time for the NA62 experiment of 3 years is foreseen. Whilst in a Lab, the temperature of the detector assembly can be as high as 70 0C, once installed in the experimental area the cooling system has been designed to cool down the detector assembly at a temperature of -20 0C. Hereafter the full–area sensor bump-bonded to 10 read-out chip is called full-detector assembly, while the smaller sensor bump-bonded to a single chip is called single-chip assembly. 2. SPECIFICATION OF THE SUPPLY The successful bidder (hereinafter referred to as the “Contractor”) shall deliver the items (hereinafter referred to, in whole or in part, as the “Supply”) as defined in this technical specification. The Supply shall originate from CERN Member States. Hereinafter the other party of the contract will be referred as CERN (on behalf of the NA62 experiment) 2.1 Deliverables Included in the Supply The Supply comprises two phases: 1) Pre-series: delivery of thinned and bump bonded assemblies made of dummy components. The purpose of the pre-series is for the Contractor to develop the required expertise for the chip thinning and bump bonding. 2) Production-series: delivery of final assemblies (full-detectors and single-chip assemblies thinned and bump-bonded). 4 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 The detailed list of batches to be delivered is shown in Table 1. Each delivered batch shall include a full performance protocol as detailed in section 4.4. The production-series of final assemblies can only start after CERN has accepted the successful completion of the pre-series. CERN reserves the right to cancel the production-series, thinned to 100 m, if the quality of the Pre-series does not comply with the technical specification. Table 1 Summary of batches to be supplied by the Contractor. Process step 1 Pre-series 2 Production series Item to be supplied 6 Full-detector assemblies consisting of dummy components with chips thinned to 100 m 15 Single-chip assemblies with chips thinned to 100 m 6 Full-detector assemblies with chips thinned to 100 m 15 Single-chip assemblies with chips thinned to 100 m 6 Full-detector assemblies with chips thinned to 100 m Besides the deliverables mentioned above, the Contractor shall be in charge of: Procurement of all masks and tools as required for the Pre- and Production series. Procurement of dummy components (dummy sensors and dummy chips) for the Pre-series. Dicing of the sensors wafers. Dicing and thinning of the read-out chip wafers. Delivery to CERN with proper packaging and full risk insurance of all materials during transportation to CERN. 2.2 Items and Services Supplied by CERN CERN will supply the following items: Final sensors for the production series: a set of 12 to 15 four-inch high resistivity 200 µm thick wafers on which several components have been structured. Each wafer contains one final size sensor of dimensions 29.3 mm x 63.1 mm and three sensors matching a single chip. For information: other structures are also present in the wafers, they are not relevant for this delivery. Final read-out chips for the production series: a set of 5 to 7 wafers with read-out chips. The wafers are 200 mm diameter with a native thickness of about 750 µm. Each wafer contains approximately 60 read-out chips. For information: other structures are also present in the wafers, they are not relevant for this delivery. 2.3 Options The conditions of this tender should apply also to further purchases of similar type of assemblies in batches as specified in Table 2 in the two years after the completion of the delivery of this supply. Table 2 Optional batches that CERN may purchase with the same conditions. 15 Single-chip assembly with chips thinned to 100 m 6 Full-detector assembly with chips thinned to 100 m 15 Single-chip assembly with chips thinned to 200 m EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 5 IT/3651/PH/NA62 6 Full-detector assembly with chips thinned to 200 m If the supplied assemblies comply with the technical specification, the total amount of full-detector assemblies thinned to 100 m,that CERN expects to order, is of the order of 50. 3. FOR THE OPTIONAL PURCHASES CERN WILL SUPPLY ADDITIONAL SENSORS AND READ-OUT CHIP WAFERS.TECHNICAL REQUIREMENTS The supply concerns the construction of bump-bonded silicon pixel assemblies comprising the following steps: thinning of read-out chips, dicing of sensors and read-out chips, and bump bonding of sensors and read-out chips. A pre-series, based on dummy components, is necessary to validate the full process. The technical specifications of the full-detector assembly and the single-chip assembly and their components are described in the following sub-sections. 3.1 Description of the Assembly Components The two components of the bump-bonded assembly are the sensor and the read-out chip. In this sub-section are specified: a) the sensors, b) the read-out chip, c) the dummy components for the Pre-series, and d) the final result, which is the bump-bonded assembly of the Production-series. 3.1.1 Sensor Specifications In order to achieve the required timing precision it is necessary to operate the GTK sensors at high over-depletion. Thus the sensor is expected to be biased with a voltage up to 700 V. In order to maintain good current-voltage characteristics also at high bias voltage it is necessary to ensure careful handling procedures and an excellent dicing quality during processing. 3.1.1.1 Sensor Wafers The sensors are delivered as 4” high resistivity float-zone wafers (<100> or <111>). The wafer thickness is (200±10) μm and the bow, after processing and measured on the sensor surface, is less than 30 μm. The wafer back side is metalized to allow wire bonding contacts for applying reverse bias to the sensor. A schematic drawing of the wafer layout is shown in Fig.4. The sensor wafer layout contains one final size sensor of dimensions 29.3 mm x 63.1 mm (called “full-sensor” that will be bump-bonded to the 10 read-out chips to form a full-detector assembly), and three sensors to be bump-bonded to a single read-out chip to form a single-chip assembly. Furthermore a number of pixelated and diode test structures (not shown in the drawing) are also present in the sensor wafer. A multi-guard ring structure is implemented around every sensor (full-detector and single-chip) in order to ensure stable operation at relatively high voltage, therefore the distance between the last active pixel edge and the sensor scribe line is about 1.2 mm. 6 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 Figure 4. Schematic drawing of the 4'' sensor wafer layout. It contains one full-detector assembly and three singlechip sensors. Other pixelated and diode test structures are also present but not shown here. The full layout of the sensor wafer will be provided from CERN to the Contractor. Table 3 summarizes the sensor structures and their dimensions. Table 3 Characteristics of the main sensor elements on a wafer. Number 1 3 Structure Full sensor: o 18000 pixels (90 × 200 matrix) o 27.0 × 60.8 mm2 active area o 29.3 × 63.1 mm2 effective size on wafer Single-chip sensor: o 1800 pixels (45 × 40 matrix) 3 types (A,B,C): one piece for each type Type A: 300 µm × 300 m pixels Type B: enlarged pixels in lateral columns (300 m × 400 m) Type C: as B but completely opened in the back side o 13.5 × 12.0 (12.2 for B and C) mm2 active area o 15.8 × 14.3 (14.5 for B and C) mm2 effective size on wafer 3.1.1.2 Pixel Layout The sensors are composed of 300 m × 300 m pixel cells (Fig. 5), except for the inter-chip regions, which incorporate 400 m × 300 m pixel cells (Fig. 6). Each pixel cell contains one bump pad to connect it with the corresponding cell in the read-out chip. In addition the guard ring of each sensor needs to be connected to the corresponding pads on the read-out chip using bump bonds. The bump-bonding pads (see Figures 5 and 6) have octagonal shape (26 m with 20 m opening in the passivation) and the bump pad centre is located at 50 m from the pixel edges for the 300 m × 300 m pixel cells. The distance from the edge is 150 m for enlarged pixels (300 m × 400 m cells) The bump-bonding pads are arranged in a mirrored scheme on neighbouring columns (Fig. 7). 7 EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 300 300 50 50 20 Figure 5. Standard 300 µm x 300 µm pixel cell (quoted dimensions are in µm). 300 400 20 50 150 Figure 6. Elongated 300 µm x 400 µm pixel cell (quoted dimensions are in µm). The full-detector assembly will accommodate 10 front-end chips arranged in 2 rows of 5 chips. The pixel columns at the edges of the readout chips are connected to cells in the sensor with enlarged dimensions. This allows maintaining a fully sensitive area over the full sensor size. A schematic drawing of the implemented geometry is shown in Fig. 7 and 8. 8 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 60.8 mm 27.0 mm 13.5 mm 13.5 mm 500 mm 100 mm 300 mm 500 mm 500 mm 300 mm 500 mm 300 mm 12.1 mm 12.2 mm 36.5 mm Figure 7. Schematic layout of the full-detector assembly. Enlarged pixel cells (400 µm x 300 µm) are put in the border region between neighboring read-out chips. Overall dimensions are in mm. Figure 8. Pixel matrix arrangement in the border region between 4 neighboring read-out chips (corresponds to the region indicated by the blue ellipse in Fig. 7). The elongated pixels column are clearly visible close to the vertical orange dotted line. Distances between the center of the bump-bonding pads are quoted. 3.1.2 Read-out Chip Specifications The read-out chip will be produced in a commercial 0.13 µm CMOS process. The chips will be available on 200 mm wafers with native thickness of about 750 µm. Each chip will contain a matrix of 40 x 45 pixels of 300 µm x 300 µm and wire bonding pads on one of the short edges. The total EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 9 IT/3651/PH/NA62 size of the front-end chip will be 12.030 mm x 20.400 mm. The full-detector assembly will consist of one silicon sensor (29.3 mm x 63.1 mm) and two rows of 5 read-out chips bump bonded to the sensor. Figure 9 shows a schematic drawing of the read-out chip for the Gigatracker (called “TDCpix”). The target thickness of the final front-end chips for the GTK stations is 100 µm.At one short edge of the chip, wire bonding pads allows for connecting the chip. The bonding pads are arranged in two rows staggered with respect to each other. The wire bonding pad dimensions are 62 µm x ~200 µm in the bottom row and 62 µm x ~100 µm in the second row. The bump pad connections are identical with the ones described in section 3.1.1.2. The GDS file of the top metal and passivation layers will be provided by CERN to the Contractor. 10 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 12.03012030 mm µm Full chip: Column 0 Pixel matrix: 12000 µm Pixel = column * 45 + row Pixel group = column * 9+ group group 0 contains pixel 0 Total: 20.400 mm Pixel matrix: 13500 µm Full chip: 20400 µm double column analog 0 double column analog 19 row 0 TDC 19 TL rx: 70 µm TDC 0 Test pads 215x500=9 pads EoColumn bias 1800 µm hitArbiter & DLL, SM, fine registers & Coarse units, pixel group FIFOs, column FIFO qchip 0 3000x500 qchip 1 3000x500 qchip 2 3000x500 qchip 3 3000x500 qchip & qconfig 3 3000x500 dll_clk_fanout 119000 x 72 calfan_out 11900 x 72 config 11900 x 292 PLL & 4 x Serializer & clk divider 8400 x 500 Bgdig&temp BGana 1400x300 IO row 12000 x 400 (158 pads) 1500x300 IO row Figure 9. Schematic drawing of the basic blocks (with overall dimensions: 12.030 x 20.400 mm 2) of the TDCpix readout chip. EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 11 IT/3651/PH/NA62 3.1.2.1 Chip Thinning Material budget constraints necessitate a thinning of the read-out chips to 100 µm. One essential requirement for completing the Pre-series will be the Contractors capability to successfully perform the read-out chip thinning. 3.1.3 Dummy components for the Pre-series The dummy components should present all the mechanical and dimensional characteristics of the sensor and the read-out chip to demonstrate successful handling, thinning and bump bonding. 3.1.3.1 Dummy Sensor Specifications The dummy sensors shall be diced from a 200 m silicon wafer. The dummy sensors shall have: the same dimensions as the final sensors (29.3 x 63.1 mm), the same pixel matrix as described in sub-section 3.1.1.2, bump-bonding pads with the same geometry as described in sub-section 3.1.1.2. 3.1.3.2 Dummy Read-Out Chip The dummy read-out chip should be thinned to 100 m from a silicon wafer having an original thickness of 200 m or more. The dummy read-out chips shall have: Identical bump bonding pads then the ones described for the dummy sensors. The same dimensions as the final sensors (12.030 mm x 20.400 mm) including the little extra length sticking out from the dummy sensor. The Contractor shall propose and implement a pattern of daisy-chain connections among predefined bump pattern to check the bump-bonding yield. On the structure a set of pads located on the periphery of the dummy read-out chip should be envisaged to allow the wire bonding. The connection and the pads scheme shall be sent to CERN beforehand for approval. 3.1.4 Bump-bonded Assemblies We refer to two types of bump-bonded assemblies: a) single-chip assembly as sketched in Fig. 10a); b) full-detector assembly as sketched in Fig. 10-b) 12 IT/3651/PH/NA62 a) EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 b) Figure 10. Schematic drawing of a single-chip assembly (a) and a full-detector assembly (b). The sensor is polarized to 700 V with the ground voltage applied on the detector surface facing the chip and the high level voltage (namely 700 V) on the back of the sensor. Due to leakage at the edges of the sensor, a high level voltage (up to 700 V) can be present at the borders of the detector surface facing the chips. This could cause a discharge on the chips followed by the destruction of the chips themselves. This effect should be circumvented by protecting the surface of the detector facing the chips. 3.2 Requirements for the Assembly Process These requirements are common to both assembly types, single-chip and full-detector: Bump bonding of silicon sensors to front-end chips with a pixel size of 300 µm x 300 µm and a bump pad of octagonal shape of 10 µm apothem (opening in the passivation). The arrangement of the bump pads should follow the scheme presented in Figure 7 and 8. The standoff height between chip and sensor after bump connection should be approximately 10-15 µm. The handling and processing of the sensors should ensure that the leakage current characteristics allow a high voltage operation, without current breakdown and a total leakage current of less than approximately 8 nA/cm2 at 20 °C and at the operating voltage of 700 V. The planarity of the external chip surface over the area corresponding to the sensor should deviate from flatness by less than 30µm. The wire bonding pads on the short edge of the read-out chips have to be fully accessible and wire-bondable after assembly and delivery. In order to comply with the physics requirements the yield of working pixels per final GTK assembly should exceed 99%. When polarized with the operating voltage (700 V) the assembly should withstand the voltage without discharge or breakdown. EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 3.3 13 IT/3651/PH/NA62 The assemblies must meet the requirements with an ambient temperature swinging between 70 °C and -20 °C. Safety Requirements The supply shall comply with CERN safety rules available at http://cern.ch/safety-rules. In particular, the supply shall comply with the following CERN standards/codes, namely: CERN safety code C1 : 'ELECTRICAL SAFETY CODE' CERN safety instruction IS 23 : Criteria and Standard Test Methods for the Selection of Electric Cables and Wires with Respect to Fire Safety and Radiation Resistance (2005) CERN safety instruction IS 24 : Regulations applicable to electrical installations (1990) CERN safety instruction IS 41 : The use of plastic and other non-metallic materials at CERN with respect to fire safety and radiation resistance (2005) 4. PERFORMANCE OF THE CONTRACT The following shall be accomplished: 1) Pre-series: successful fabrication of assemblies made with dummy components demonstrating that the contractor has acquired the expertise and the technical skills for the chip thinning and the bump bonding. This process will be ended with the delivery of the pre-series and their corresponding test protocols followed by a written acceptance from CERN. 2) Production-series: successful fabrication and delivery of final assemblies followed by CERN approval based on the quality of the delivered assemblies and the test protocols. Note: Step 2 can only start after CERN has approved in writing the successful assembly of the dummy modules. 4.1 Delivery Schedule Once the Contractor is notified of the award of the contract, he shall deliver the supply according to the following delivery schedule: 1) Pre-series: to be accomplished in less than 26 weeks from the date at which the order has been placed 2) Production-series: 6 full-detector-assemblies and 15 single-chip-assemblies shall be delivered to CERN within 13 weeks after the acceptance of the Pre-series The remaining fraction of the order in a subsequent period of 13 weeks CERN and its representatives shall have free access during normal working hours to the manufacturing or assembly sites, including any Subcontractor’s premises, during the contract period. The place of manufacture may only be changed after written acceptance by CERN. The Contractor shall supply, within one month from the start of the contract, a written programme detailing the development and production schedules. The programme shall include preliminary dates for inspections and tests. 14 IT/3651/PH/NA62 4.2 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 Contract Follow-Up and Progress Monitoring The Contractor shall assign a technical responsible for the execution of the contract and its followup throughout the duration of the contract. The Contractor shall send a written progress report to CERN every 2 weeks until the completion of the contract and at the delivery of the Pre-series. This report shall include all the necessary information, and in particular the actual progresses in comparison to scheduled progress. 4.3 Documentation Handling, Quality Control and Quality Assurance The Contractor shall plan, establish, implement and adhere to a documented quality assurance program that fulfils all the requirements described in this technical specification. In addition to the requirements of section 3, the Contractor may propose any internationally recognised design standard, subject to prior written acceptance by CERN. The Contractor shall state his intended method of design including applicable codes as part of his bid. CERN reserves the right to veto the use of certain codes or norms if it is considered that their application will not fulfil this technical specification. The Contractor shall plan, establish, implement and adhere to a documented quality assurance program that fulfils all the requirements described in this technical specification. 4.4 Tests to be carried out at the Contractors Premises CERN reserves the right to be present, or to be represented by an organization of its choice, to witness any tests carried out at the Contractor's or his Subcontractors' premises. The Contractor shall give at least 5 working days notice of the proposed date of any such tests. 4.4.1 Pre-series CERN considers the development as accomplished when 6 full-detector assemblies are accepted according to the validations and verifications hereafter specified. For each of the 6 full-detector assemblies (dummies), the Contractor shall perform and document the following quality control steps: a) dimensional verifications of the dummy components before bump bonding (size, thickness, flatness) b) the X-ray pictures showing the quality of the bonds; c) planarity measurements of the external chip surface over the area corresponding to the sensor, or in other terms the area where the bump-bonds are, showing a deviation from flatness smaller than 30µm; d) verification of the electrical continuity for 99% of the bump bonds (using daisy-chain connections) e) at least 100 temperature cycles in a climatic chamber swinging from 70 °C to -20 °C with a temperature gradient in the range of 3-5 °C /min to prove that the assemblies keep the required planarity and bump-bonds continuity; f) thickness verification (100µm) of the front-end chip with a Scanning Electron Microscope; g) wire bond pads clean and undamaged. 15 EDMS No.: 0000072124 CERN/NA62 Project Document Ref.: 0000072124 4.4.2 IT/3651/PH/NA62 Production-series The validation of the production items includes the following assessments, which are derived from the technical specification in section 3.2 a) the X-ray pictures showing the quality of the bonds; b) planarity measurements of the external chip surface over the area corresponding to the sensor, or in other terms the area where the bump-bonds are, showing a deviation from flatness smaller than 30µm; c) no discharges and breakdowns after 24 hours under with the full bias voltage (700 V) between sensor and chips and the leakage current remains within the requirements (8 nA/cm2 at 20 °C); d) at least 100 temperature cycles in a climatic chamber swinging from 70 °C to -20 °C with a temperature gradient in the range of 3-5 °C /min to prove that the assemblies keep the required planarity and bump-bonds continuity; e) thickness verification (100µm) of the front-end chip with a Scanning Electron Microscope; f) wire bond pads clean and undamaged. 4.5 Packing and Shipping The Contractor shall comply with professional and CERN’s regulations in matter of packing and shipping, etc. The Contractor is responsible for the packing and, where included, the transport to CERN. He shall ensure that the equipment is delivered to CERN without damage and any possible deterioration in performance due to transport conditions. Due to the relative fragility of the material and devices, a proper packing and delivery procedure must be planned to ensure adequate protection against damage and loss during handling and transportation. The assemblies should be packed in suitable antistatic protection boxes, properly labelled with the required unique information, and clearly marked as fragile. All the material must be handled in a sufficiently clean environment in order to preserve all its characteristics, and to proceed to the following phases of the assembly of the GTK stations. The batches for both the Pre-series and for all the production series are to be delivered to CERN. The transport will be by a courier service to be agreed by CERN. The Contractor shall carry out all the customs and other formalities for the importation of the material. CERN will provide the Contractor any documentation reasonably needed to allow him to carry out the above obligations 5. CERN CONTACT PERSONS Persons to be contacted for technical matters: Name/Department/Group Mr. Flavio Marchetto Tel-Fax Tel: +39 011 6707318 Cell.: +39 3397622916 Fax: +00390116699579 Email Flavio.Marchetto@cern.ch 16 EDMS No.: 0000072124 /NA62 Project Document Ref.: 0000072124 IT/3651/PH/NA62 In case of absence: Mrs. Roberta Arcidiacono Tel: +41 22 767 8098 Roberta.Arcidiacono@cern.ch +41 76487 0931 Fax: +41 22 767 8920 Persons to be contacted for commercial matters: Name/Department/Group Mr. Laslo Abel Tel-Fax Tel: +41 22 767 9561 Fax: +41 22 766 9911 Tel: +41 22 767 6335 Fax: +41 22 766 9912 Email Laslo.Abel@cern.ch In case of absence: Mr. Dante Gregorio Dante.Gregorio@cern.ch